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1 연구논문 Korean Journal of Optics and Photonics, Volume 21, Number 4, August 2010 DOI: /KJOP 복소공액홀로그램을이용한디지털홀로그래피연구 신상훈 1 ㆍ김두철 2 ㆍ유영훈 2 1 AP & Tec 우 AP & Tec, 서울강남구수서동 2 제주대학교물리학과우 제주시아라 1 동 1 번지 (2010 년 5 월 4 일받음, 2010 년 7 월 5 일수정본받음, 2010 년 7 월 27 일게재확정 ) 디지털홀로그래피에서재생상을재생할때복소공액홀로그램을도입하여위상왜곡과잡음이제거된재생영상을얻는방법에대하여연구하였다. 일반적으로디지털홀로그램은시료의위상정보외에위상정보에겹쳐져있어잡음으로작용하는허상, DC 항뿐만아니라측정시스템의위상왜곡현상도모두포함되어기록된다. 기록된홀로그램에서시료의위상정보만을분리하여이를재생하면질좋은위상재생상을얻을수있다. 본연구에서는복소공액홀로그램을이용하면 off-axis 및 in-line 홀로그래피에서위상왜곡과측정시스템이가지고있는잡음을제거할수있음을실험적으로확인하였다. Study on Digital Holography with Conjugated Hologram Sanghoon Shin 1, Doocheol Kim 2, and Younghun Yu 2 1 AP & Tec, Suseo-dong, Gangnam-gu, Seoul , Korea 2 Department of Physics, Cheju National University, Jeju , Korea (Received May 4, 2010; Revised manuscript July 5, 2010; Accepted July 27, 2010) In this paper we have applied phase conjugated holographyto DHM (digital holography microscopy) to remove phase aberration and noise. Generally,digital holographyincludes the phase information of the object, phase aberration terms introduced by the measurement system and noise terms (DC term and twin images). These aberrations and noise terms decrease the quality of the reconstructed phase image. We could obtain a conjugated hologram which includes only phase information of object. Experimentally we show that distortion of image and aberration of phase in a measurement system are removed using the conjugation hologram. Keywords: Holography, Digital holography, Image reconstruction OCIS codes: ( ) Holography; ( ) Computer holography; ( ) Image reconstruction techniques I. 서론 디지털홀로그램기술은기존의홀로그램기술 ( 홀로그램건판을사용하여사진촬영과같은방식의물체광과참조광제공에의한 3차원영상을재생하는방법 ) 로부터출발하여 CCD(Charge Coupled Device) 와같은동영상기록장치를이용하여실시간으로측정대상체의홀로그램데이터를획득하고, 수치적 3차원영상재생의방법으로측정대상체의 3 차원데이터를획득하는방법이다. 이러한방법은약 30 여년전개념적방법론이제안되어, CCD의발전과컴퓨터연 산속도의발전으로수치적 3차원영상재생의방법이발전하여현재실용적용도에적용하기위한다수의연구들이세계적으로활발히진행되고있다 [1-6]. 이와같이측정대상체의 3차원데이터는홀로그램방법으로기록함으로써 1회촬영으로측정대상체의 3차원데이터를획득하고, 수치적재생으로측정대상체의 3차원데이터를재구성하여표시할수있으므로 3차원데이터획득, 처리, 표시면에있어서앞서개발되어온첨단현미경들에비하여비교할수없을정도의성능향상을기대할수있다 [7-10]. 디지털홀로그래피에서상을재생할때일반적으로참조광 yyhyoung@cheju.ac.kr Color versions of one or more of the figures in this paper are available online. 146

2 연구논문 복소공액홀로그램을이용한디지털홀로그래피연구 신상훈ㆍ김두철외 147 은평면파이고, 물체광은구면파로가정하고상을재생한다. 그러나참조광이완벽한평면파가되기는매우어렵다. 이러한이유로재생상에위상왜곡과잡음이생긴다. 이러한문제를해결하기위하여최근 off-axis 디지털홀로그래피에서수치적렌즈 (NPL: numerical parametric lens) [11,12], 복소공액홀로그램 [13] 등이제안되었다. 본연구에서는 off-axis 디지털홀로그래피와 in-line 디지털홀로그래피에복소공액홀로그램을도입하여왜곡현상의감소에대하여연구하였다. II. 이론적배경 디지털홀로그래피현미경에서홀로그램데이터는 CCD로입력되는물체광 (O) 과참조광 (R) 의간섭에의하여주어진다. 그림 1과같은 off-axis 투과형디지털홀로그래피에대하여고려하자. CCD에형성되는 2차원홀로그램의빛세기는 (1) 식과같다. (1) 은참조광과물체광의공액복소수이이며, 참조광과물체광의각도는 이다. =0이면 in-line 홀로그래피이고, 0이면 off-axis 홀로그램이다. 식 (1) 에서 은영차회절광이고 (DC 항 ), 은물체광끼리의간섭에의한항이며, 세번째와네번째항은실상과허상이다. 영상재생면에서의전기장은 Kirchoff-Fresnel 적분에의해주어지면, 디지털홀로그래피에서홀로그램을저장하는장치로 CCD를사용한다. CCD의사양은픽셀수 픽셀크기 ( ) 와센서크기 ( ) 로주어진다. CCD의 (, ) 픽셀에저장되는간섭세기정보는식 (2) 와같다. 식 (2) 와같이참조광과물체광에의한홀로그램데이터는수치적영상재생에이용된다. 수치적재생파동은참조광 (R) 과홀로그램데이터 ( ) 를이용하여식 (3) 과같이표현된다. (3) 식 (3) 은수식적계산이기때문에 R값을완전한평면파로가정하고계산하거나, 실험상에서 R값을측정하여계산에사용한다. 프레넬 (Fresnel) 공식과 CCD의픽셀개수가, 픽셀간격이, 를이용하면영상이맺히는지점에서의파동분포는식 (4) 와같다 [13]. (4) 여기서 는사용된빛의파장이고 b는 CCD에서영상이재생되는곳까지의거리, 이다. 식 (4) 에서 는수치적렌즈로, 는홀로그램면에서의수치적렌즈, 는필터된홀로그램이다. 일반적으로 을일반적으로사용된다. 즉참조광 (R) 을완벽한평면파로가정하가나, 실험적으로측정하여사용한다. 그러나실제에서는참조광이완벽한평면파가될수없고, 또한실험적으로측정하여사용하는경우는매번이작업을하는것이매우불편하다. 이를해결하기위하복소공액홀로그램이제안되었다. 복소공액홀로그램을위하여식 (5) 와같이참조광 (R), 물체광 (O), 시료없는물체광 (O o) 을정의하자 [13]. (5) (2) 식 (5) 에서 는빛파수이고, 는참조광과물체광의위상왜곡, 는시료의위상정보이다. 복소공액홀로그램의목표는 와같은위상왜곡이제거된홀로그램을얻는것이다. 식 (5) 를이용하여식 (1) 의허상을표현하면식 (6) 과같다. (6) 식 (6) 에서 는시료의위상정보 ( ) 와왜곡정보 ( ) 를모두포함하고있으나, 는위상왜곡정보만을포함하고있다. 실험적으로 는시료없인얻은홀로그램이다. 그 FIG. 1. Digital holography. a; distance between object and hologram, b; distance between CCD and reconstructed image plan. 러므로식 (4) 에서수치렌즈 를왜곡정보를상쇄할수있게식 (7) 과같이정의할수있다.

3 148 한국광학회지제 21 권제 4 호, 2010 년 8 월 (7) 식 (7) 을이용하여식 (4) 의 를바꾸어쓰면식 (8) 과같이왜곡이제거된홀로그램을얻을수있다. (8) 식 (8) 은복소공액홀로그램으로위상왜곡이모두제거되었고, 또한실상과 DC 항이모두제거된홀로그램이다. III. 실험결과 그림 2는투과형디지털홀로그래피현미경의개략도이다. 기본적인구성은마흐젠더간섭계와같다. 사용한광원은 10 mw He-Ne 레이저이고, 시료를투과한영상을확대하기위하여현미경대물렌즈 ML1 ( Mitutoyo M PLAN APO 50X, NA=0.55) 을사용하였다. 필터 N1과 N2는간섭문양의명암대비가최대인홀로그램을얻기위하여사용하였다. 렌즈 L1과 ML2 그리고핀홀 P1은 TEM 00 모드의참조광빛을얻기위하여사용하였으며홀로그램을저장하기위하여 CCD (KODAK Megaplus II) 를사용하였고, CCD의픽셀크기는 7.4 μm 7.4 μm이고픽셀개수는 이다. off-axis 실험을하는경우는물체광과참조광의각도가 1 가되게하였고, in-line 실험시는물체광과참조광의각도가 0 가되게하였다. 그림 3은 off-axis 디지털홀로그래피에서복소공액홀로그램을실험적으로얻는과정을나타낸것이다. 시료는 USAF 의그룹 6중주기가 13.9 마이크로미터인문양을사용하였다. 그림 3(a) 는 off-axis 홀로그래피로얻은홀로그램으로, 여기에는식 (1) 과같이허상, 실상, DC 항이모두포함되어있다. 그림 3(b) 는그림 3 (a) 를푸리에변환한것이다. 그리고그림 3(c) 는그림 3(b) 중허상부분만남기고, 즉그림 3(b) 의사각형부분만남기고나머지는모두 0 으로처리한것으로, 이렇게해서필터된홀로그램 ( ) 을구할수있다. 그리고그림 3(d) 는시료없이얻은홀로그램을위상재생한것이고 ( ), 그림 3(e) 는그림 3(c),(d) 를이용하여얻은복소공액홀로그램이다 ( ). 그림 3(f) 는복소공액홀로그램을재생한위상이미지이다. 그림 3과같이복소공액홀로그램을이용하면 DC 항, 실상및위상왜곡이제거된이미지를얻을수있다. 그림 4는 off-axis 홀로그래피에서복소공액홀로그램을이용한것과일반홀로그램을이용해서얻은재생상이다. 그림 4 (a)-(d) 는그림3과같이 USAF의그룹 6중주기가 13.9 마이크로미터인문양을시료로이용한것이고그림 4의 (e)(f) FIG. 2. Schematic diagram of transmission digital holography microscope. M1,M2 : mirrors, N1,N2; Neutral density filters, ML1, ML2; micro lenses, L1; lens, P1; Pin hole, BS1,BS2; Beam Splitters. (a) (b) (c) (d) (a) (b) (c) (e) (f) (g) (d) (e) (f) FIG. 3. Complex conjugate hologram and reconstructed image. (a) hologram( ), (b) hologram in spatial frequencies, (c) filtered hologram( ), (d) reconstructed phase image without object( ), (e) complex conjugated hologram( ), (f) reconstructed phase image with complex conjugated hologram. FIG. 4. Reconstructed image in off-axis digital holography. (a) reconstructed contrast image with hologram, (b) reconstructed contrast image with complex conjugated hologram, (c)reconstructed phase image with hologram, (d)reconstructed phase image with complex conjugated hologram, (e) reconstructed phase image with TFT hologram, (f)reconstructed phase image with TFT complex conjugated hologram, (g) photography of TFT.

4 연구논문 복소공액홀로그램을이용한디지털홀로그래피연구 신상훈ㆍ김두철외 149 는그림4의 (g) 와같은 TFT(Thin Film Transistor) 를시료로이용한결과이다. 그림 4의결과는시료를조금기우려서실험한결과이다. 그림 4에서보듯이명암재생상인경우에 ( 그림 4 (a),(b)) 일반홀로그램과복소공액홀로그램의재생상이동일한것을볼수있다. 명암재생상은위상정보를가지고있지않기때문에시료가약간기울어져있어도재생상에는영향을주지않는다. 그러나그림 4(c) 와 (d) 는위상재생상이다. 그림 4(c) 는일반홀로그램으로재생한위상재생상으로시료가기울어져있어즉, 위상왜곡을포함하고있어명확한위상재생상을얻을수없으나, 그림 4(d) 는복소공액홀로그램을이용한경우로위상왜곡이제거되어명확한위상재생상을얻을수있다. 그림 4 (e),(f) 의결과는 TFT 시료에서얻은위상재생상결과인데, 그림 4 (c),(d) 와동일한결과를보여주고있다. 즉그림 4(e) 의경우시료가기울어져있어위상왜곡이생겨노이지와같이작용하여정확한위상이미지를얻을수없으나그림 4(f) 는위상왜곡이제거되어위상재생상을얻을수있다. 그림 4 (g) 는 TFT의 2차원영상이다. 그림 4(f) 와 (g) 를비교해보면대체적으로같은영상을보여주고있음을알수있다. 그림 4(f) 에서보이는줄무늬는시료가빛진행방향에대해완벽하게수직으로되어있지않기때문에, 즉빛진행방향에대해조금기울어져있기때문에생긴위상차결과이다. 그림 5는 in-line 홀로그래피의결과이다. in-line홀로그래피의경우에는 off-axis 홀로그래피와는달리필터된홀로그램을구하는것이보다어렵다. off-axis의경우에는그림 3(b) 와같이공간주파수상에서허상, 실상, DC항이분리가됨으로필터된홀로그램을쉽게얻을수있으나, in-line 홀로그래피에서는허상, 실상, DC항이겹쳐져있어분리가쉽지않다. 필터된홀로그램을얻기위해본연구에서는허상실 상을구분하기위하여 4등분분할방법 [14] 과 DC 항을제거하기위해평균제거법 [15] 을이용하였다. 그림 5의시료는프리즘시트이다. in-line의경우는시료를기울이지않고참조광의효과만을조사하였다. 그림 5의 (a)(b) 는각각시료가있는경우 () 와시료가없는경우 ( ) 의홀로그램이다. 그림 5 (c) 는그림 5(a) 를이용하여얻은위상재생상이고, (d) 는복소공액홀로그램을이용하여얻은위상재생상이다. 그림 5(c) 와 (d) 의원부분을보면복소공액홀로그램을이용한경우가잡음이적은것을볼수있다. 즉복소공액홀로그램을이용하면 DC 잡음도줄일수있음을알수있다. 그림4와그림 5의결과로부터복소공액홀로그램을이용하면위상왜곡과 DC 항잡음을모두줄일수있어보다질좋은영상을재생할수있음을알수있다. 이는디지털홀로그램의장점을잘보여주는결과이다. 즉디지털홀로그램의장점은수치적재생인데, 이수치적재생과정에서광학계나측정시스템의잡음을수치적으로잘제거할수있음을보여주고있다. IV. 결 디지털홀로그래피에서상을재생할때일반적으로참조광은평면파이고, 물체광은구면파로가정하고상을재생한다. 그러나참조광이완벽한평면파가되기는매우어렵고, 홀로그램측정시여러위상왜곡현상으로재생상에위상왜곡과잡음이생긴다. 본연구에서는복소공액홀로그램을도입하여 off-axis 홀로그래피와 in-line 홀로그래피에서재생상의왜곡을감소시킬수있음을실험적으로확인하였다. 이러한결과는디지털홀로그래피에서노이즈를효과적으로줄여명확한위상재생상을얻는데유리하며, 홀로그래피를이용한 3차원측정에유용하게이용될수있다. 론 감사의글 이논문은산업자원부차세대신기술개발사업지원으로수행되었습니다. References (a) (c) FIG. 5. Reconstructed image with hologram and complex conjugated hologram in in-line digital holography. (a) hologram, (b) hologram without object, (c) reconstructed phase image with hologram, (d)reconstructed phase image with complex conjugated hologram. (b) (d) 1. J. W. Goodman and R. W. Lawrence, Digital image formation from electronically detected holograms, Appl. Phys. Lett. 11, (1967). 2. M. A. Kronrod, N. S. Merzlyakov, and L. P. Yaroslavski, Reconstruction of hologram with a computer, Sov. Phys. Tech. 17, (1972). 3. G. K. Wernicke, O. Kruschke, N. Demoli, and H. Gruber, Investigation of micro-opto-electro-mechanical components with a holographic microscopic interferometer, Proc. SPIE 3396, (1998). 4. L. Xu, X. Peng, J. Miao, and K. Asundi, Studies of digital microscopic with application to microstructure testing, Appl.

5 150 한국광학회지제 21 권제 4 호, 2010 년 8 월 Opt. 40, (2001). 5. H. Cho, D. Kim, Y. Yu, W. Jung, and S. Shin, 3-dimensional measurement using digital holographic microscope and phase unwrapping, Hankook Kwanghak Hoeji (Korean J. Opt. Photon.) 17, (2006). 6. S. Kim, H. Lee, and J. Son, Recording of larger object by using two confocal lenses in digital holography, Hankook Kwanghak Hoeji (Korean J. Opt. Photon.) 14, (2003). 7. U. Schnars, Direct phase determination in hologram interferometry with use of digitally recorded holograms, J. Opt. Soc. Am. A11, (1994). 8. C. Wagneer, S. Seebacher, W. Osten, and W. Juptner, Digital recording and numerical reconstruction of lensless Fourier holograms in optical metrology, Appl. Opt. 38, (1999). 9. Y. Takaki and H. Ohzu, Fast numerical reconstruction technique for high resolution hybrid holographic microscopy, Appl. Opt. 38, (1999). 10. L. Xu, J. Miao, and A. Asundi, Properties of digital holography based on in-line configuration, Opt. Eng. 39, (1999). 11. T. Colomb, E. Cuche, F. Charrière, J. Kühn, N. Aspert, F. Montfort, P. Marquet, and C. Depeursinge, Automatic procedure for aberration compensation in digital holographic microscopy and applications to specimen shape compensation, Appl. Opt. 45, (2006). 12. E. Cuche, P. Marquet, C. Depeursinge, Simultaneous amplitude and quantitative phase-contrast microscopy by numerical reconstruction of Fresnel off-axis holograms, Appl. Opt. 38, (1999). 13. T. Colomb, J. Kühn, F. Charrière, and C. Depeursinge, Total aberrations compensation in digital holographic microscopy with a reference conjugated hologram, Opt. Exp. 14, (2006). 14. H. Cho, W. Jang, J. Shon, D. Kim, S. Shin, and Y. Yu, Twin-image elimination in an in-line digital holographic microscope, J. Korean Phys. Soc. 52, (2008). 15. H. Cho, J. Woo, D. Kim, S. Shin, and Y. Yu, DC suppression in in-line digital holographic microscopes on the basis of an intensity-averaging method using variable pixel numbers, Opt. & Laser Technology 41, (2009).

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