41(6)-09(김창일).fm

Size: px
Start display at page:

Download "41(6)-09(김창일).fm"

Transcription

1 269 Ar v Na 0.5 K 0.5 NbO 3 t ½ t,, ½ w,, ½ w»œw Surface Reaction of Na 0.5 K 0.5 NbO 3 Thin Films in Inductively Coupled Ar Plasma w t œwz J. Kor. Inst. Surf. Eng. Vol. 41, No. 6, < > Dong-Pyo Kim, Doo-Seung Um, Gwan-Ha Kim, Jong-Chang Woo, Chang-Il Kim School of Electrical and Electronics Engineering, Chung-Ang University (Received December 3, 2008; revised December 19, 2008; accepted December 30, 2008) Abstract Ttq q it r Hg E HhI HEH tu ruxy g q r yqp u 67x 7x 5 u p i uˆqx i xqp xg yg C g r p tg tq iiygppu u 67x # u 7x 5 xg yg ig qp g y ui hqtgˆu r tq HEH q it g q Ttq yg uy y q it g q r HEH g '#! yyu g 67x iiy7x $ iiy5 " iiy & W C7P q Pg q q g p " W hug q Ttq HEH q it g q t g y ui hqtgˆu g tqhug q u i qg q Ttqg gx u r tq g ig qi g rxpsr h tg pq u qp g p q itqp HEH ruxy gxx qp q g yq u g u qp q it yqitg u y Ttq y hghxq qg r tq yg uy y q it g q ig hq pqru qp g g i i q iq r itqyuigx g p t uigx q it g t g Keywords: NKN, ICP, Etch, XPS 1. { (nonvolatile ferroelectric random access memory: FRAM), j q w š 1). ¾ w (Na 0.5 K 0.5 )NbO 3 (NKN) û w w p ƒ p ƒ š 2-4). NKN FRAM (Sr,Bi)TiO 3 (Pb,Zr)TiO 3 ƒ w ƒÿ š. NKN š FRAM w» w CD yƒ, w ql ƒ ƒ w ƒ œ v. ¾ NKN ƒ w Corresponding author. w š w. x š Cl 2 Ar v w 77.8 nmmin ƒ š, Cl 2 :Ar» yw 8(16 sccm):2(4 sccm) 5). NKN ƒ» w { y ƒ y w. ƒ w w y ƒ š» Cl 2 Ar v ƒw š, ƒ, œ y w NKN ƒ y w. Ar v NKN XPS (xray photoelectron spectroscopy) w w. 2. x NKN ƒ x v š

2 270 ½ t w t œwz 41 (2008) Table 1. Plasma etch process parameters Parameters Units Ragnges S h g qtqy Q 7 " 7x g q iiy q W & P iq q q g g q iiy! 6ug q W # x 5] w MOD (100) Si»q. ICP ƒ e Ar yw» w NKN ƒ x ww. ƒ w BCl x O y { x w» y ƒœ w» 6). ICP ƒ e v x w MHz RF 3.5l g š, g 24 mm Ì quartz sq w v ƒ x š ƒ w œ. v ƒ w z, w l quartz¾, 14 cm. w»q w» w MHz ƒ RF w. ƒ x t 1 ùkù œ w. Cl 2 Ar» yw 8(16 sccm):2(4 sccm) š w. NKN ƒ KLA Tencor α-step 500 w d w. ƒ f ³ w» w v t, w ƒ z NKN t XPS ww. ƒ v» w, v t narrow scan ww, Na, K, Nb O core binding energy peak intensity y w. XPS x w ICP ƒ œ w w z 24». XPS ESCALAB 220-IXL w. XPS X-ray Mg(Kα) ev ƒ š. t yw yw w k w» w 20 ev 40 ev narrow scan ww. 3. m Ar v NKN ƒ p w» w NKN ƒ SiO 2 w ƒ k ƒ, œ yw ƒ x w w. 1 ƒ NKN ƒ SiO 2 w ƒ k ùküš 1 sccm 3. Cl 2 Ar yw»» sccm¾ ƒw. ICP dc ƒƒ 800 W 400 W š w. š œ 1 Pa š w. 1 ùkù, 1 sccm ƒw NKN ƒ 95.3 nmmin ƒw. š ƒ ƒ 2 sccm ƒw NKN w, 3 sccm ƒw NKN ƒ 64.2 nmmin. BClO w x w t l z w. 1 sccm ƒw NKN t l z w, Na, K Nb yw ƒw». š v ü w š + Ar + +, B t w t jš w { ƒ rl w» ƒ ƒ ƒw 7-9). SiO 2 w NKN ƒ k p NKN ƒ w š. KCl NaCl û { š w, NKN ƒ ƒ { ƒ KClO Fig. 1. The NKN etch rate and selectivity to SiO 2 as function of flow rate in Cl 2 Ar mixing chemistry.

3 ½ t w t œwz 41 (2008) Fig. 2. The NKN etch rate and DC bias voltage as function of DC bias power. NaClO y y x ƒ w š. KClO 3 NaClO 3 ƒƒ 368 C o 248 o C š, KCl NaCl 771 C o 1465 C û š w o.» ùkü, û»» mw ƒ { dw 10). 1 sccm Cl 2 Ar v ƒw NKN ƒ ƒ w, B +, + ƒ w { ƒ z» š ƒ w. 2 DC y w NKN ƒ DC y ùküš.» yw (1 scmm) (16 sccm)ar(4 sccm) š w š, ICP œ ƒƒ 800 W 1Pa. 2 ù kù, DC 100 W 500 W ƒw DC 25 V 350 V ƒwš. NKN ƒ 8.9 nmmin nmmin ƒ w. DC ƒ w ƒw š, NKN t ƒ ƒw NKN ƒ ƒ ƒ w. Cl 2 - v w NKN ƒ œ yw ƒ ƒ w ùkü. 3 œ y w NKN Fig. 3. The NKN etch rate and selectivity to SiO 2 as function of process pressure. ƒ SiO 2 w ƒ k ùk üš. 3 ùkù, œ 0.2 Pa 0.5 Pa ƒw NKN ƒ 100 nmmin nmmin ƒw š, œ 3 Pa ƒw NKN ƒ 77 nmmin w. ƒ., œ 0.2 Pa 0.5 Pa ƒ w B +, + v ƒ ƒw ƒ ƒ ƒw., œ 1Pa 3Pa ƒw NKN ƒ ƒ w, œ ƒ w ion w w Cl Cl 2 e ƒ w t l { ƒ x». 2 w ƒ yw ƒ w wš. v ƒ œ ƒ p œ v ü ƒ t w x ƒ { w w. NKN ƒ œ ƒ NbCl x (x=3~5), KCl NaCl ƒƒ 205 o C, 771 C o 1465 o C. KCl NaCl k w t l w w. 1~3 NKN ƒ x NKN ƒ f w ƒ wš, yw ƒ ùk üš.

4 272 ½ t w t œwz 41 (2008) Fig. 4. XPS narrow scan analysis of NKN surface before and after etching in Ar plasma. (a) Na 1s, (b) K 2p, (c) Nb 3d. NKN Ar v ü ƒ t w» w ƒ z NKN t XPS mw w vj» y w. 4 ƒ NKN Ar v ƒ NKN t (a) Na 1s, (b) K 2p (c) Nb 3d XPS narrow ùküš. XPS narrow rp XPS Curve fitting v Fitt w deconvolutionw. 4(a) ùkù, Na 1s narrow rp ev w 1 vjƒ, ƒ NKN Na-O w w 11). ù, Ar ƒ NKN t peak»ƒ wš, š. peak, 1071 ev 1072 ev w peak ƒƒ Na-O Na 2 O w w š, ev ùkù peak Na-Cl w w. NKN ƒ y w NKN ƒ f ewš, Na=O w w w Á š, Na Cl wš y w. sww v ƒ NKN t Na-Cl w NaCl 1465 C» o. 4(b) K 2P XPS narrow ql ù küš. 4(b) ƒ NKN t peakƒ, peak ƒƒ K 2p 32 -O(292.3 ev) K 2p 12 -O w(295.2 ev). NKN Cl 2 Ar v z, K(Nb)-O peak» w š, peak ev ev û w peak ƒƒ K 2p 32 -Cl w K 2p 12 -Cl w š, ev ev w peak ƒƒ K 2p 32 -Cl-O w K 2p 12 -Cl-O w. ƒ œ z

5 ½ t w t œwz 41 (2008) K-Cl K-Cl-O w K-O peak š w, NKN K Ar v rl w K-O w š, t KCl KClO xk { ƒ x wš, ƒ rl w. 4(c) Nb 3d narrow rp ùkü š. ƒ NKN t l peak ƒƒ ev ev, ƒƒ Nb 3d 52 -O Nb 3d 32 -O w w. NKN Ar v z, peak» j w š, Peak ev ev w Peak Nbƒ Cl w w Nb 3d 52 -Cl Nb 3d 32. Nb-Cl Nb-O w ƒ w š w Nb-O w w. Cl 2 Ar v ƒƒ NKN ƒ w e w NKN t l O peak z» Nb-Cl w ƒ w š ƒ. NbCl { ƒ š, û k x w NKN t l š q. 4. NKN ƒ p š w» w ICP v l œ» yw, DC y j NKN ƒ y, k y XPS mw t x ww. NKN ƒ ƒ ƒ w ƒ p y w. DC ƒ w NKN ƒ ƒ x ƒw p. w ƒ f rl w ƒ z ƒ e w yw z w». NKN t XPS Na Kƒ Cl ww { y x w y w š, w Nb- Cl y y { ƒ x w y w. ƒ Cl 2 Ar v ƒw NKN ƒ ƒ B +, + ƒ flux ƒ t l Oƒ BClO x w Na, K, Nb e ƒw» š. y rl w ù, y w w yw jš, w { ƒ rl w w w w. š x 1. X. Wang, U. Helmersson, S. Olafsson, S. Rudner, L. Wernlund, S. Gevorgian, Appl. Phys. Lett. 73 (1998) C.-R. Cho, J.-H. Koh, A. Grishin, S. Abadei, S. Gevorgian, Appl. Phys. Lett., 76 (2000) A. Shibuya, J. H Koh, A. Grishin, V. Kugler, D. Music, U. Helmersson, M. Okuyama, Mat. Res. Soc. Symp. Proc., 688 (2002) C C. R Cho, I. Katardjiev, M. Grishin, A. Grishin, Appl. Phy. Lett., 80 (2002) C. M. Kang, G. H. Kim, K. T. Kim, C. I. Kim, Ferroelectrics, 357 (2007) S. J. Yun, A. Efremov, M. S. Kim, D. W. Kim, J. W. Lim, Y. H. Kim, C. H. Chung, D. J. Park, K. H. Kwon, 82 (2008) E. Meeks, P. Ho, A. Ting, R. J. Buss, J. Vac. Sci. Technol. A, 16 (1998) H. S. Kim, G. Y. Yeom, J. W. Lee, T. I. Kim, J. Vac. Sci. Technol. A, 17 (1999) M. S. Kim, N. K. Min, S. J. Yun, H. W. Lee, A. Efremov, K. H. Kwon, Microele. Eng., 84 (2008) D. R. Lide, Handbook of Chemistry and Physics 79 CRC Press, 4-74, J. Chastain, Handbook of X-ray Photoelectron Spectroscopy, Perkin Elmer, 1992.

12.077~081(A12_이종국).fm

12.077~081(A12_이종국).fm J. of Advanced Engineering and Technology Vol. 1, No. 1 (2008) pp. 77-81 y w» e wx Á w œw Fabrication of Ceramic Batch Composition for Porcelain by Using Recycled Waste Ceramic Powder Hyun Guen Han, and

More information

19(1) 02.fm

19(1) 02.fm Korean J. Crystallography Vol. 19, No. 1, pp.7~13, 2008 Ÿ (ICISS) w š t w (2): t w y w œw Surface Structure Analysis of Solids by Impact Collision Ion Scattering Spectroscopy (2): Atomic Structure of Semiconductor

More information

<30332DB9E8B0E6BCAE2E666D>

<30332DB9E8B0E6BCAE2E666D> kœw» y w k p y w k» z wš ye z w mdkqvqrg üœ» y» Ÿ w kœwgeqgpikpggtkpiy glj GEQVGEJPQNQI[ œw w k w yz š y j œ w m w y ˆ mw y» kœ w k û ³ y ƒ ƒ» ƒ w œw w w y ƒƒ» k z w» %NGCP 9CVGT #EV wšw y ù» œ w w w t

More information

10(3)-09.fm

10(3)-09.fm w y wz 10«3y 253~258 (2010.12.) Journal of Korean Society of Urban Environment ³ w Á» Á Á y w y œw (2010 11 22, 2010 12 9 k) Study on Determine of Detention Pond in Small Developed Area In-Soo Chang ½

More information

10.063~070(B04_윤성식).fm

10.063~070(B04_윤성식).fm J. of Advanced Engineering and Technology Vol. 1, No. 1 (2008) pp. 63-70 Mg-3%Al-1%Zn w ƒœ» y Á x*á **Á Á w œw *w s l I ûer ** t Effect of Thermomechanical Treatment on Microstructure and Mechanical Properties

More information

14.fm

14.fm Journal of the Korean Ceramic Society Vol. 44, No. 2, pp. 93~97, 2007. Preparation of High Purity Si Powder by SHS Chang Yun Shin, Hyun Hong Min, Ki Seok Yun, and Chang Whan Won Engineering Research Center

More information

04-46(1)-06(조현태).fm

04-46(1)-06(조현태).fm w œwz, 46«1y 2009 Textile Science and Engineering Vol. 46, No. 1, 2009 ù 2'6 wx xk Á «w œ w» Áq œw k 1PG $CVJ1PG 5VGR &[GKPI H 0[NP2'6 5RNKV 6[RG /KETHKDGT *[GP 6CG %J CPF%JWN-YP2CTM &GRCTVOGPV H 1TICPKE

More information

14.531~539(08-037).fm

14.531~539(08-037).fm G Journal of the Korea Concrete Institute Vol. 20, No. 4, pp. 531~539, August, 2008 š x y w m š gj p { sƒ z 1) * 1) w w Evaluation of Flexural Strength for Normal and High Strength Concrete with Hooked

More information

16(5)-03(56).fm

16(5)-03(56).fm Journal of Korean Powder Metallurgy Institute DOI: 10.4150/KPMI.2009.16.5.316 ƒ w Fe œ w Cu wy SPS (I) I. ƒ wy y Á xá½ Á½ *Á½{ a w œw, a w» gœ Production of Fe Amorphous Powders by Gas-atomization Process

More information

50(1)-09.fm

50(1)-09.fm 2006, Vol. 50, No. 1 Printed in the Republic of Korea 언빨래가마르는현상에대한중등학교화학전공교사들의인식조사 ½x Á» Á½ # Á x* w w yw y š w w # w w (2005. 5. 11 ) A Research of Secondary School Chemistry Major Teachers Perceptions

More information

304.fm

304.fm Journal of the Korean Housing Association Vol. 20, No. 3, 2009 yw s w - û - A Study on the Planning of Improved-Hanok - Focused on Jeon-Nam Province - y* ** z*** **** Kang, Man-Ho Lee, Woo-Won Jeong, Hun

More information

10(3)-12.fm

10(3)-12.fm w y wz 10«3y 273~280 (2010.12.) Journal of Korean Society of Urban Environment p yá xá½k w y œw (2010 9 15, 2010 12 2 k) Analysis of Characteristics of Delivered Nonpoint Source Pollution at Forested Watershed

More information

93.fm

93.fm Journal of the Korean Ceramic Society Vol. 45, No. 10, pp. 625~630, 2008. Effect of Storage Conditions on the Setting Properties of Brushite Bone Cement Containing Granular β-tricalcium Phosphate Sun-Ae

More information

< DC1A4C3A5B5BFC7E22E666D>

< DC1A4C3A5B5BFC7E22E666D> ¼ (Jeong, Jung Chae)*, ý (Kim, Yoon Soo), (Shin, Woo Young), Þ Ñ (Park, Jong Man) ò ý ƒ Ð (Korea Evaluation Institute of Industrial Technology) (Shin, Jae-Heyg) Š æ (Ministry of Knowledge Economy) 1. :

More information

DBPIA-NURIMEDIA

DBPIA-NURIMEDIA Printed in the Republic of Korea "/"-:5*$"- 4$*&/$& 5&$)/0-0(: Vol. 18, No. 5, 436-443, 2005,1"$ w Q) t p z Á 1w w œw 2 w œ yw Effects of surface properties and solution ph on the pollutants removal of

More information

untitled

untitled [ ] œwz, 21«6y(2008) J. of the Korean Society for Heat Treatment, Vol. 21, No. 6, (2008) pp. 300~306 š y w p x*, **Á **Áy y* * ** w œ w œw, w» gœ Solid State Diffusion Brazing of the Aluminum Alloy Castings

More information

43(5)-1.fm

43(5)-1.fm w œwz, 43«5y 2006 Textile Science and Engineering Vol. 43, No. 5, 2006 용융블렌드를이용한 PLA/PEG 블록공중합체의제조 Á w œw k Preparation of PLA/PEG Block Copolymer via Melt Blend %JGQN 5QQ ;QQP CPF &QPI 5WP,K 8q g yq r

More information

4.fm

4.fm Journal of the Korean Ceramic Society Vol. 46, No. 1, pp. 30~34, 2009. Optimization of Glass Wafer Dicing Process using Sand Blast Won Seo, Young-mo Koo*, Jae-Woong Ko**, and Gusung Kim Department of Electronic

More information

49(6)-06.fm

49(6)-06.fm Journal of the Korean Chemical Society 2005, Vol. 49, No. 6 Printed in the Republic of Korea 중학교과학교과서불꽃반응실험에서선스펙트럼관찰의문제점분석및개선연구 ½ Á Á * w w yw (2005. 10. 4 ) An Analysis and Improvement of the Line Spectrum

More information

fm

fm [ ] w wz DOI: 10.3740/MRSK.2009.19.12.692 Kor. J. Mater. Res. Vol. 19, No. 12 (2009) y INCONEL 718w Gas Tungsten Arc Welding» p sƒ ½»y Á *Á *Á y** ( ) d lj p wœq, *w wœ» q **( ) d lj p t Mechanical Properties

More information

9(3)-4(p ).fm

9(3)-4(p ).fm w wz J. Kor. Soc. Cloth. Ind. 9«3y, 2007 Vol. 9, No. 3, pp.319-326(2007) w xk x p w q w Analysis of Foot Characteristics According to the Classification of Foot Types of Junior High School Girls Ji-Young

More information

69-1(p.1-27).fm

69-1(p.1-27).fm 99 A 380 B 787 : wœ z w * w w wœ» A380 B787 wœ» w. wœ» ww r. w wœ» p j y w r» w. I. II. z III. A380 B787 IV. A380 V. wœ» : x VI. z VII. I. A380 B787»ƒ z wœ w, w w p j w w ƒ r. t wœ w ƒ w w wœ» š œm wš,

More information

11(5)-12(09-10)p fm

11(5)-12(09-10)p fm w wz J. Kor. Soc. Cloth. Ind. 11«5y, 2009 Vol. 11, No. 5, pp.799-807(2009) w w * k ƒm w pg p w, ƒm w q w A Qualitative Research on Pursuing Image and Appearance Management Behavior of Brides Eun-Joo Bae

More information

( )-44.fm

( )-44.fm Journal of the Korean Ceramic Society Vol 47, No, pp 6~67, 010 DOI:104191/KCERS010476 The Properties and Uniformity Change of Amorphous SiC:H Film Deposited using Remote PECVD System with Various Deposition

More information

18211.fm

18211.fm J. of the Korean Sensors Society Vol. 18, No. 2 (2009) pp. 168 172 p k ù p p l xá xá ³ Á *Á w * Fabrication of the CNT-FET biosensors with a double-gate structure Byunghyun Cho, Byounghyun Lim, Jang-Kyoo

More information

10(3)-02.fm

10(3)-02.fm w y wz 10«3y 203~211 (2010.12.) Journal of Korean Society of Urban Environment w ù p yá k«áyw *Á xá½k w y œw Á* y w (2010 9 15, 2010 12 2 k) Characterization of Nonpoint Source Pollutant Loads from the

More information

416.fm

416.fm Journal of the Korean Housing Association Vol. 20, No. 4, 2009 œ qp œ y An Analysis of Change on the Apartment Unit Plans and the Interior Spaces Related to Women * Choi, ByungSook ** Park, JungA "CTUSBDU

More information

16(5)-04(61).fm

16(5)-04(61).fm Journal of Korean Powder Metallurgy Institute DOI: 10.4150/KPMI.2009.16.5.326 ƒ w Fe œ w Cu wy SPS (II) II. w SPS p ½ *Á½ Á½{ a Á½ š b w œw, a w» gœ, b y œ Production of Fe Amorphous Powders by Gas-Atomization

More information

50(4)-10.fm

50(4)-10.fm 2006, Vol. 50, No. 4 Printed in the Republic of Korea 칼코겐이도핑된망간산화물의저온합성연구 k Á z Á, *Áy, * y w ù w yw x ù l w» ww (2006. 7. 13 ) Chimie Douce Synthesis of Chalcogen-Doped Manganese Oxides Seung Tae Lim,GDae

More information

10(1)-08.fm

10(1)-08.fm w y wz 10«( 1y) 47~52, 2007 J. of the Korean Society for Environmental Analysis œ w t y ½ xá Á x Á½ Á x* Ÿ œ, * w œw Optimization of Coagulation In The Conventional Water Treatment Plant Jun-Hyun Kim,

More information

07.051~058(345).fm

07.051~058(345).fm w wz 8«3y 2008 6 pp. 51 ~ 58 m qp yp š w k sƒ Evaluation of Dynamic Modulus based on Aged Asphalt Binder y*á **Á***Á**** Lee, Kwan-HoÁCho, Kyung-RaeÁLee, Byung-SikÁSong, Yong-Seon Abstract Development

More information

82-01.fm

82-01.fm w y wz 8«( 2y) 57~61, 2005 J. of the Korean Society for Environmental Analysis p w w Á Á w w» y l Analysis of Influence Factors and Corrosion Characteristics of Water-pipe in Potable Water System Jae Seong

More information

64.fm

64.fm Journal of the Korean Ceramic Society Vol. 44, No. 7, pp. 375~380, 2007. Tribological Properties of Carbon Layers Produced by High Temperature Chlorination in Comparison with DLC Coating Hyun-Ju Choi,

More information

14(4) 09.fm

14(4) 09.fm J. Korean. Soc. Living. Environ. Sys. Vol. 14, No. 4, pp 343~350(2007) w y y w z 14 «4 y 2007 yw» l s p»xá ³ *w w w œw, **w w w The Property of Pressure Distribution of Hybrid Underfloor Air Distribution

More information

fm

fm w sw x w w w x y w w sw J[FTQRJ[VG w 5CVQƒw e UWDOGTIGF J[FTQRJ[VG šw z w w w w ù p w s w r w z w w kw p ³ w š w z w š w w kw mƒ w š w s w q 8CNNKUPGTKC FGPUGUGTTWNCVC½ ½ Õ 6[RJC NCZKOCPPK -KO CPF %JQK

More information

3.fm

3.fm Journal of the Korean Ceramic Society Vol. 44, No. 1, pp. 12~17, 2007. A Study on the Preparation of Bone Ash and Celadon Bone Body Using Pig Bone Jae-Jin Jeong, Sang-Hee Lee, Yong-Seok Lee,* and Byung-Ha

More information

07.045~051(D04_신상욱).fm

07.045~051(D04_신상욱).fm J. of Advanced Engineering and Technology Vol. 1, No. 1 (2008) pp. 45-51 f m s p» w Á xá zá Ÿ Á w m œw Image Retrieval Based on Gray Scale Histogram Refinement and Horizontal Edge Features Sang-Uk Shin,

More information

( )-123.fm

( )-123.fm Journal of the Korean Ceramic Society Vol. 48, No. 1, pp. 63~68, 2011. DOI:10.4191/KCERS.2011.48.1.063 Effects of Substituting B 2 O 3 for P 2 O 5 on the Structure and Properties of SnO-P 2 O 5 Glass Systems

More information

15.101~109(174-하천방재).fm

15.101~109(174-하천방재).fm w wz 8«4y 2008 8 pp. 101 ~ 109 w» m -,, - A Study on Warnning Criteria Investigation of Automated Rainfall Warning System -Focused on Realationship of Water Level, Discharge and Precipitation - Á Á Á Ahn,

More information

31(3B)-07(7055).fm

31(3B)-07(7055).fm ª Œª Œ 31ƒ 3B Á 2011 5œ pp. 265 ~ 276 ª w w s³ The Correlation Between the Moving Average of Precipitation and Groundwater Level in Korea Á½û» Yang, Jeong-SeokÁKim, Nam-Ki Abstract Precipitation data and

More information

16(1)-3(국문)(p.40-45).fm

16(1)-3(국문)(p.40-45).fm w wz 16«1y Kor. J. Clin. Pharm., Vol. 16, No. 1. 2006 x w$btf3fqpsu'psn û w m w Department of Statistics, Chonnam National University Eunsik Park College of Natural Sciences, Chonnam National University

More information

( )-83.fm

( )-83.fm Journal of the Korean Ceramic Society Vol. 8, No. 1, pp. 0~5, 011. DOI:10.191/KCERS.011.8.1.00 Solidification of Heavy Metal Ions Using Magnesia-phosphate Cement HunG Choi, Hyun Ju Kang, Myung Shin Song,

More information

untitled

untitled ª Œª Œ 27ƒ 2B Á 2007 3œ pp. 193 ~ 199 ª ƒ w d w ƒ sƒ Methodology of Drought Assessment Using National Groundwater Monitoring Network Data «x Á½ Kwon, Hyung JoongÁKim, Seong Joon Abstract The objective

More information

w w l v e p ƒ ü x mw sƒw. ü w v e p p ƒ w ƒ w š (½kz, 2005; ½xy, 2007). ù w l w gv ¾ y w ww.» w v e p p ƒ(½kz, 2008a; ½kz, 2008b) gv w x w x, w mw gv

w w l v e p ƒ ü x mw sƒw. ü w v e p p ƒ w ƒ w š (½kz, 2005; ½xy, 2007). ù w l w gv ¾ y w ww.» w v e p p ƒ(½kz, 2008a; ½kz, 2008b) gv w x w x, w mw gv ª Œª Œ 30ƒ 5A Á 2010 9œ pp. 475 ~ 484 gj p ª v e p p PSC ƒ gv : II. x w Precast Concrete Copings for Precast Segmental PSC Bridge Columns : II. Experiments and Analyses ½kzÁ½ Á zá x Kim, Tae-HoonÁKim,

More information

16(5)-06(58).fm

16(5)-06(58).fm Journal of Korean Powder Metallurgy Institute DOI: 10.4150/KPMI.2009.16.5.336 y-y w Sm-Fe w ƒ w zá *Á w»» The Effect of Excess Samarium Oxide on the PreparationG of Sm-Fe Alloy Powder by Reduction-diffusion

More information

29(4)-07(김봉채).fm

29(4)-07(김봉채).fm Vol. 29(4):311-316 Ocean and Polar Research December 2007 Note»» w q w d ½ * Á½ ûá y w w w y (425-600)» w 29y Measurement of Low-Frequency Ocean Noise by a Self-Recording Hydrophone Bong-Chae Kim *, Byoung-Nam

More information

38(6)-01.fm

38(6)-01.fm y, 38«, 6y, 699-705, 2005 Econ. Environ. Geol., 38(6), 699-705, 2005 t sÿ y xk 1 Á s 2Á z 1 Á½ 1 Á e 3 1 w y w,» w, 2w y w, 3š w y w Chemical Speciation of Heavy Metals in Geologic Environments on the

More information

16(2)-7(p ).fm

16(2)-7(p ).fm w wz 16«2y Kor. J. Clin. Pharm., Vol. 16, No. 2. 2006 ü t xy y w tœ ½ BÁ x BC B y w w w C y w w w Current Status and Expectations of Orphan Drugs in Korea -In point of supplying medicines for the rare

More information

10(3)-10.fm

10(3)-10.fm w y wz 10«3y 259~264 (2010.12.) Journal of Korean Society of Urban Environment w gj p p y Á Á½k * w m œw Á* w y œw (2010 9 28, 2010 10 12 k) Characteristics of Antiwashout Underwater Concrete for Reduction

More information

12(3) 10.fm

12(3) 10.fm KIGAS Vol. 12, No. 3, September, 2008 (Journal of the Korean Institute of Gas) ü LP ƒ š Database w š Á Á½z w ywœw (2008 6 10, 2008 8 12 (1 ), 2008 9 5 (2 ), 2008 9 5 k) Constructing a Database Structure

More information

50(5)-07.fm

50(5)-07.fm Printed in the Republic of Korea w 3w yû x w w w Á x* w w w yw (2006. 3. 14 ) A research of the Difference in Teaching Styles and Understanding of 9 th Grade Students About Lead-iodide Precipitation Reaction

More information

82-02.fm

82-02.fm w y wz 8«( 2y) 00~00, 2005 J. of the Korean Society for Environmental Analysis Calix[6]arene w k š w *Á x Á Á«ƒm w yw, *w w yw Cesium Ion Selective Solid Contact Electrodes Based on Calix[6]arene Won-sik

More information

11(1)-15.fm

11(1)-15.fm w y wz 11«1y 73~80 (2011.8.) Journal of Korean Society of Urban Environment SWMM 을이용한도시지역비점오염부하저류시설용량산정 Áw«Á *Áy **Á½ yá½ Á x w w Á* û w y œw Á** w y lœw (2011 6 13, 2011 6 27 k) Determine Capacity of

More information

[ ]-13.fm

[ ]-13.fm J. of the Korean Sensors Society Vol. 19, No. 2 (2010) pp. 155 159 0.96( p ½ Á Á Dielectric and piezoelectric properties of 0.96( lead-free ceramics Mi-Ro Kim, Seok-Jin Yoon, and Ji-Won Choi Abstract 0.96(

More information

26(3D)-17.fm

26(3D)-17.fm 26ƒ 3D Á 2006 5œ pp. ~ ª y w qp yw k d Predictive Equation of Dynamic Modulus for Hot Mix Asphalt with Granite Aggregates yá½x Á Lee, Kwan-HoÁKim, Hyun-OÁJang, Min-Seok Abstract The presented work provided

More information

04-42(1)-09(김동원).fm

04-42(1)-09(김동원).fm 21 w t œwz J. Kor. Inst. Surf. Eng. Vol. 42, No. 1, 2009. < > PET»q SiO 2 rd ITO» Ÿw p a, ½ a, ³ a, a, y b a» w œw, b ( ) w p A Study on Adhesion and Electro-optical Properties of ITO Films Deposited on

More information

17.393~400(11-033).fm

17.393~400(11-033).fm Journal of the Korea Concrete Institute Vol. 23, No. 3, pp. 393~400, June, 2011 GGGGG DOI 10.4334/JKCI.2011.23.3.393 x RC { sƒ y y 1) *Á½ 1) Á 2) 1) y w œw 2) w œw Bond Strength Evaluation of RC Beams

More information

415.fm

415.fm Journal of the Korean Housing Association Vol. 20, No. 4, 2009 xw z œ p w A Study on the Spatial Characteristics of the Concept of Non-sedentary in Contemporary Multi-housing Planning ½ * Kim, Mi-Kyoung

More information

95.fm

95.fm Journal of the Korean Ceramic Society Vol. 44, No. 10, pp. 580~584, 2007. Properties of Chemical Vapor Deposited ZrC coating layer for TRISO Coated Fuel Particle Jun Gyu Kim, E-Sul Kum, Doo Jin Choi, Young

More information

<30312DC0CCC7E2B9FC2E666D>

<30312DC0CCC7E2B9FC2E666D> 균류의다양성과역할 이향범 û w œw 머리말 k w š ³ q š yw < Ð >» w ww k w w v š q w Á Á w tyw š 2QKPVKPI CPF *[FG ú ƒ x %QPXGPVKQP QP $KQNQIKECN &KXGTUKV[ %$&» w w ««wš y w» š x ƒ w œ ƒ» ƒ œsw w ³ wš ù š y š ƒ t š ƒ wš»ƒ

More information

17(1)-06.fm

17(1)-06.fm Krean J. Crystallgraphy Vl., N. 1, pp.14~18, 006 LP-MOCVD w ZnO ù Ÿw p Á yá * w w» w» l Structural and Optical Prperties f ZnO Nanwires Synthesized by LP-MOCVD Prcess Yung-Jin Chi, Jae-Hwan Park and Jae-Gwan

More information

17(1)-08(06).fm

17(1)-08(06).fm Journal of Korean Powder Metallurgy Institute DOI: 10.4150/KPMI.2010.17.1.052 š p x œ w Al jy p sƒ xá a Á Á½x * swœ w œw, a x HYSCO» Microstructure and Mechanical Behavior of Ultrafine Grained Bulk Al

More information

84-01.fm

84-01.fm w y wz 8«( 4y) 00~00, 2005 J. of the Korean Society for Environmental Analysis HPLC f y e t p»wá½»x w y w»y Detection Characteristics of a HPLC Method on Carbonyl-DNPH Derivatives in Relation with Column

More information

143.fm

143.fm Journal of the Korean Ceramic Society Vol. 43, No. 1, pp. 859~864, 006. FE Analysis of Alumina Green Body Density for Pressure Compaction Process Jong-In Im and Young-Jin Yook Simulation Center for Fine

More information

50(6)-09.fm

50(6)-09.fm Journal of the Korean Chemical Society 6, Vol. 5, No. 6 Printed in the Republic of Korea w Polyacrylamide y ½ û * w yw (6. 9. 1 Thixotropic Properties of Polyacrylamide Hydrogels with Various Synthetic

More information

( )-101.fm

( )-101.fm Journal of the Korean Ceramic Society Vol. 47, No. 6, pp. 503~508, 2010. DOI:10.4191/KCERS.2010.47.6.503 The High Density Sintering of Green-emitting -SiAlON:Eu Ceramic Plate Phosphor Young-Jo Park, Sung-Hoon

More information

01.01~08(유왕진).fm

01.01~08(유왕진).fm JOURNAL OF KOREA SOCIETY OF PACKAGING SCIENCE & TECHNOLOGY. Vol. 14, No. 1 1~8 (2008) s w Á w» w Comparative Study on the Changes and Prospects of Flexible Food Packaging Design Kyung Soo Noh and Wang

More information

8(3)-15(p ).fm

8(3)-15(p ).fm w wz J. Kor. Soc. Cloth. Ind. 8«3y, 2006 Vol. 8, No. 3, pp.357-362(2006) w p k sƒ ½ Á Á w w w A Study on the Mechanical and Hand Properties of the Lining Fabrics Myung-Ok Kim, Mi-Kyung Uh and Myung-Ja

More information

15.fm

15.fm Journal of the Korean Ceramic Society Vol. 44, No. 2, pp. 98~102, 2007. Effect of Recycling Time on Stability of Colloidal Silica Slurry and Removal Rate in Silicon Wafer Polishing Eun-Suck Choi and So-Ik

More information

fm

fm [ ] w wz Kor. J. Mater. Res. Vol. 17, No. 3 (2007) Sn-3.0 Ag-0.5 Cu/OSP 무연솔더접합계면의접합강도변화에따른전자부품열충격싸이클최적화 y Á½{ *Á Á½Ÿ * t sƒ l *w wœ w wœ œw Thermal Shock Cycles Optimization of Sn-3.0 Ag-0.5 Cu/OSP Solder

More information

83-07.fm

83-07.fm w y wz 8«( 3y) 137~142, 2005 J. of the Korean Society for Environmental Analysis sw n w Polychlorinated Biphenyls»y Áwx Á yá w w yw Analysis of Polychlorinated Biphenyls from Pohang and Gangseo, Busan

More information

한 fm

한 fm Journal of the Korean Magnetics Society, Volume 19, Number 6, December 2009 DOI: 10.4283/JKMS.2009.19.6.203 BaTi 0.5 Co 0.5 Fe 11 O 19 Mx r p Ka- q p ½ Á½ w, œw, w», 12, 361-763 (2009 8 4, 2009 9 10, 2009

More information

( )-77.fm

( )-77.fm Journal of the Korean Ceramic Society Vol. 47, No. 5, pp. 407~411, 2010. DOI:10.4191/KCERS.2010.47.5.407 Physical Properties of ALC with Various Fineness of Quartzite Yong Sik Chu, Ui Jong Jung, Hun Song,

More information

( )65(이성민).fm

( )65(이성민).fm Journal of the Korean Ceramic Society Vol. 46, No. 5, pp.g 456~461, 2009. DOI:10.4191/KCERS.2009.46.5.456 Erosion Behavior of YAG Ceramics under Fluorine Plasma and their XPS Analysis Kyeong-Beom Kim,

More information

18(3)-10(33).fm

18(3)-10(33).fm Journal of Korean Powder Metallurgy Institute Vol 18 No 3 011 DOI: 10150/KPMI01118383 e x 5Mg(OH) MgSO 3H O x w MgO NH OH w a báv y aá½xk aá½ aá½ cá½ bá½ a * aw» l bš w œw ck Effect of MgO and NH OH on

More information

( )-103.fm

( )-103.fm Jurnal f the Krean Ceramic Sciety Vl. 46, N. 6, pp. 643~647, 2009. DOI:10.4191/KCERS.2009.46.6.643 Densificatin Behavir f C/C Cmpsite Derived frm Cal Tar Pitch with Small Amunt f Idine Additin Kwang Yun

More information

87.fm

87.fm Journal of the Korean Ceramic Society Vol. 44, No. 9, pp. 489~495, 2007. Physical Properties of Ultrafine Ash Blended Cement Dong-Woo Yoo, Seung-Ho Byun, and Jong-Taek Song Department of New Materials

More information

42(2)-05(정재인).fm

42(2)-05(정재인).fm 86 w t œwz J. Kor. Inst. Surf. Eng. Vol. 42, No. 2, 2009. < > NdFeB 영구자석에의 Al/Al 2 다층막코팅및부식특성 정재인, 양지훈 sw w y Preparation of Al/Al 2 Multilayer Coatings on NdFeB Permanent Magnet and their Corrosion Characteristics

More information

82.fm

82.fm Journal of the Korean Ceramic Society Vol. 44, No. 9, pp. 524~528, 2007. Determination of Critical Chloride Content of Ordinary Portland Cement Concrete by Linear Polarization Technique Hong-Sam Kim, Hai-Moon

More information

歯변요한.PDF

歯변요한.PDF Wet etching of magnetic thin films 2003 2 ( ) Wet etching of magnetic thin films 2003 2 20032 Wet etching of magnetic thin films by Submitted to the faculty of in partial fulfillment of the requirements

More information

26(2)-04(손정국).fm

26(2)-04(손정국).fm Ñ s k w 1Á y 2 Á û 1 Á½ z 1 Á½ 1* 1 ³ w yw, 2 w» (*E-mail: jimankim@skku.edu) 1. m ƒ w»» w 4»» y š. w 4»» l, l, l w» w» k. w»» { ƒ j. x š x w ƒwš k (Direct Methanol Fuel Cell: DMFC)[1]ƒ wù ƒ w š. DMFC

More information

605.fm

605.fm Journal of the Korean Housing Association Vol. 19, No. 6, 2008 y k y p w sƒ Care-giver s Needs and Evaluation on the Actual Condition of the Playgrounds in Child Care Facilities y* Choi, Mock-Wha x **

More information

18103.fm

18103.fm J. of the Korean Sensors Society Vol. 18, No. 1 (009) pp. 8 3 VO w PCM yá Á Á Ÿ Built-in protection circuit module by using VO temperature sensors K. H. Song, J. B. Choi, M. W. Son, and K. S. Yoo Abstract

More information

14(2) 02.fm

14(2) 02.fm J. Korean. Soc. Living. Environ. Sys. Vol. 14, No. 2, pp 117~125(2007) w y y w z sm Ÿ š w œ l ³Á½ * w, **w w w Impact of Photosensor Sensitivity on the Control Performance of a Daylight Dimming System

More information

20(1) fm

20(1) fm Krean J. Crystallgraphy Vl. 20, N. 1, pp.1~8, 2009 Ÿ (ICISS) w š t w (3): t w y w œw Surface Structure Analysis f Slids by Impact Cllisin In Scattering Spectrscpy (3): Surface Structure f Ceramics Yen

More information

DBPIA-NURIMEDIA

DBPIA-NURIMEDIA Printed in the Republic of Korea "/"-:5*$"- 4$*&/$& 5&$)/0-0(: Vol. 23, No. 5, 505-510, 2010 kš wk wy»yw ¼ w w yw Electrochemical determination of hydrogen peroxide using carbon paste biosensor bound with

More information

( )-113.fm

( )-113.fm Journal of the Korean Ceramic Society Vol. 46, No. 6, pp. 657~661, 009. DOI:10.4191/KCERS.009.46.6.657 Rheological Properties of Cement Pastes Blended Finex-Slag Powder Keun Jae Lee, Seung Ho Byun, and

More information

51(2)-06.fm

51(2)-06.fm Journal of the Korean Chemical Society 2007, Vol. 51, No. 2 Printed in the Republic of Korea f p ƒ š w er elk yw ½ Á y*» l, w w ywœw (2006. 12. 5 ) Separation of Caffeine and Catechin Compounds from Green

More information

57.fm

57.fm Journal of the Korean Ceramic Society Vol. 45, No. 6, pp. 336~344, 2008. Rheological Properties of Cement Paste Blended Blast Furnace Slag or Fly Ash Powder Jong Taek Song, Hyo Sang Park, Seung Ho Byun,

More information

fm

fm w y wz 9«( 1y) 34~40, 2006 J. f the Krean Sciety fr Envirnmental Analysis V/ w y Áy yá váy * w» ( )», *» w y œw Simultaneus Remval f Dixin and Nitrgen Oxide n V/ Catalyst Jun-Yub Lee, Sung-H Hng, Sung-Pill

More information

한 fm

한 fm Journal of the Korean Magnetics Society, Volume 20, Number 1, February 2010 DOI: 10.4283/JKMS.2010.20.1.18 Vector Network Analyzer w Py œ yáw Á½ yá * w w w, û x 253, 402-751 (2009 19, 2009 12 16, 2009

More information

16(5)-02(57).fm

16(5)-02(57).fm Jurnal f Krean Pwder Metallurg Institute Vl. 16, N. 5, 2009 DI: 10.4150/KPMI.2009.16.5.310 /ekœ w TiC/C w w ¼ *Áw a w œ w œw, a Snthesis f TiC/C Cmpsite Pwder b the Carbthermal Reductin Prcess Gil-Geun

More information

(163번 이희수).fm

(163번 이희수).fm Journal of the Korean Ceramic Society Vol. 48, No. 4, pp. 323~327, 2011. DOI:10.4191/KCERS.2011.48.4.323 Electrical Properties and Temperature Stability of Dysprosium and Erbium Co-doped Barium Titanate

More information

<312D303128C1B6BAB4BFC1292E666D>

<312D303128C1B6BAB4BFC1292E666D> k Ÿy y y + ûz m Ì ˆw k Ÿ ø ky w y y» wk Ÿ v w k w w ƒ Ÿ ew k Ÿy yø k Ÿ ý k z» w ƒ w Ÿ y k y w x mw w w ³Ÿ wšy v mw y w r œw yÿ ý w z»ÿ Ÿ»» Ÿ ¾ Ÿ 6TCXGN 9GGMN[ ýw k Ÿ Ÿ ƒ š wš y w k Ÿ ƒ m ³ w w y y y 'EQVQWTKUO

More information

51(4)-13.fm

51(4)-13.fm Journal of the Korean Chemical Society 2007, Vol. 51, No. 4 Printed in the Republic of Korea w x - w y *Á š w w w yw (2007. 3. 28 ) Case Study on Verbal Interactions of Teacher-Small Group StudentsG in

More information

50(1)-02.fm

50(1)-02.fm Printed in the Republic of Korea 글로우방전을이용한고효율공기정화용화학반응기의특성관찰에관한연구 ½»y*, Á y, Á û w œ»» l û w yw û w y œw (2005. 3. 22 ) Study on High Degree of Efficiency Chemical Reactor for Air Purification Using the

More information

(154번 김사라은경).fm

(154번 김사라은경).fm Jurnal f the Krean Ceramic Sciety Vl. 48, N. 4, pp. 316~322, 2011. DOI:10.4191/KCERS.2011.48.4.316 The Effect f Vacuum Annealing f Tin Oxide Thin Films Obtained by RF Sputtering Sun-Phil Kim, Yungrae Kim*,

More information

8(2)-4(p ).fm

8(2)-4(p ).fm w wz J. Kor. Soc. Cloth. Ind. 8«2y, 2006 Vol. 8, No. 2, pp.177-182(2006) x w e w 1) Á Ÿ 1) Á»û 2) 1) ƒm w q w 2) w w w The Effect of Media on Taking Plastic Surgery Chong-Hee Yun 1), Su-Kwang Sung 1) and

More information

fm

fm Journal of the Korean Ceramic Society Vol. 46, No. 2, pp. 219~22, 2009. Capacitance Aging Behavior of Acceptor-Doped BaTiO uer DC Electrical Field Dong Woo Hahn a Young Ho Han Department of Materials Engineering,

More information

27(5A)-07(5806).fm

27(5A)-07(5806).fm ª Œª Œ 27ƒ 5A Á 2007 9œ pp. 753 ~ 758 gj pœw gj p { x A New Test Method for Pure Isotropic Flexural Tensile Strength of Concretes Ÿ Á y Á x Zi, GoangseupÁOh, HongseobÁChoi, Jinhyek Abstract Proposed is

More information