Gelest Commercializes Diiodosilane to Meet Global Demand for Next-Generation Semiconductors

Size: px

Start display at page:

Download "Gelest Commercializes Diiodosilane to Meet Global Demand for Next-Generation Semiconductors"

종준 인
5 years ago
Views:

1 Client: Gelest Media contact: Mike Rubin For Immediate Release GELEST, INC. COMMERCIALIZES DIIODOSILANE TO MEET GLOBAL DEMAND FOR NEXT-GENERATION SEMICONDUCTORS MORRISVILLE, Pa. (June 26, 2018) Gelest, Inc. announced today it has commercialized diiodosilane to meet the global demand of the semiconductor industry for next-generation semiconductor chips. Gelest s dedicated diiodosilane plant in Morrisville, Pa., is fully operational and can produce commercial quantities of diiodosilane with purity in excess of 99.9%. Diiodosilane is a key chemical precursor used by semiconductor companies worldwide in the development and scale-up of next-generation semiconductor chips that require high throughput, highly conformal silicon nitride thin films. Diiodosilane is typically deposited by plasma-enhanced atomic layer deposition (PEALD) to create the silicon nitride thin film. Gelest sees a significant increase in demand for high purity diiodosilane driven by development and production of semiconductor chips requiring silicon nitride thin films at low thermal budgets. Diiodosilane is a critical material that enables further miniaturization of semiconductor chips, said Dr. Jeffrey T. DePinto, Business Manager Silanes & Metal Organics. Our expertise in high purity silicon precursors for the semiconductor industry has allowed us Page 1 of 2

2 to optimize the synthesis and scale-up of diiodosilane with the highest possible purity and lowest cost. Furthermore, Gelest has been developing iodosilane precursors for silicon nitride thin films for many years. The company has been granted a key patent, Silicon-based Films Formed From Iodosilane Precursors and Method of Making the Same, that claims a method for depositing silicon nitride thin films using iodosilane precursors. About Gelest Gelest, Inc., headquartered in Morrisville, Pennsylvania, has been a leading manufacturer and independent producer of specialty materials for the semiconductor industry for more than 25 years. Gelest is recognized worldwide as an innovator, manufacturer and supplier of commercial and research quantities of organosilicon compounds, metal-organic compounds and silicones. The company serves advanced technology markets through a materials science-driven approach. It provides focused technical development and application support for semiconductors, medical materials, pharmaceutical synthesis, diagnostics and separation science, and specialty polymeric materials: Gelest Enabling Your Technology. # # # Gelest, Inc. Enabling your Technology Manufacturers of Silanes, Silicones & Metal-Organics 11 E. Steel Road, Morrisville, Pennsylvania Tel: Fax: Page 2 of 2

3 고객 : Gelest 미디어담당연락처 : 마이크루빈 (Mike Rubin) mike.rubin@hapmarketing.com 즉시배포용자료 Gelest, INC. 는차세대반도체용글로벌수요충족을위한디요오도실란의상업화에성공 모리스빌, 펜실바니아주 (2018 년 6 월 26 일 ) 오늘 Gelest, Inc. 는차세대반도체칩 제조를위한반도체업계의글로벌수요충족을위해디요오도실란을상업화하였다고 발표하였다. 펜실바니아주모리스빌에위치한 Gelest 의디요오도실란전용공장은완전 가동상태이며 99.9% 이상순도의디요오도실란을상업적물량으로생산할수있다. 디요오도실란은고생산성과고점착성의실리콘나이트라이드박막이요구되는차세대반도체칩의개발과증산을위해전세계반도체회사가사용하는아주중요한화학적전구물질이다. 디요오도실란은일반적으로실리콘나이트라이드박막형성을위해플라즈마강화원자층증착 (PEALD) 방식으로증착된다. Gelest 는낮은열처리량의실리콘나이트라이드박막이요구되는반도체칩의개발및생산을위해필요한고순도디요오도실란에대한현저한수요증가를예견하고있다. Silane & Metal Organics 담당사업매니저인 Dr. Jeffrey T. DePinto 는 " 디요오도실란은반도체칩을더욱소형화할수있도록하는아주중요한소재입니다 " 라고말하였다. " 반도체업계에서사용되는고순도실리콘전구물질에대한저희의전문기술을통해 페이지 1 중 2

4 저희는가능한최고순도와가장낮은비용으로디요오도실란의합성과생산확대를 최적화할수있었습니다." 또한, Gelest 는수년간실리콘나이트라이드박막용요오도실란전구물질을개발해왔다. 이회사는요오도실란전구물질을사용한실리콘나이트라이드증착방법을포함하는 "Silicon-based Films Formed From Iodosilane Precursors and Method of Making the Same" 이라는주요특허권도보유하고있다. Gelest 회사소개 펜실바니아주모리스빌에본사를둔 Gelest, Inc. 는지난 25 년이상동안반도체업계용특수재료의선도적독립제조사이다. 전세계적으로 Gelest 는유기규소화합물, 금속유기화합물및실리콘에대한혁신적인회사이며이들물질을상업적및연구개발물량으로생산하고제공하는회사로서인정을받고있다. 이회사는재료과학을주요기반으로첨단기술시장의요구에부응하고있다. 이회사는또한반도체, 의료재료, 의약품합성, 진단및분리과학그리고특수중합체재료분야에대한집중기술개발및응용지원서비스를제공하고있다. Gelest Enabling Your Technology. # # # 귀사의기술을실현하는 Gelest, Inc. 실란및금속 - 유기물제조사 11 E. Steel Road, Morrisville, Pennsylvania 전화번호 : 팩스 : 페이지 2 중 2

5 Gelest Mike Rubin GELEST, INC Gelest, Inc. Gelest 99.9% (PEALD) Gelest Jeffrey T. DePinto 1 2

6 Gelest Gelest Gelest, Inc. 25 Gelest Gelest # # # Gelest, Inc. 11 E. Steel Road, Morrisville, Pennsylvania

Output file

Output file 240 241 242 243 244 245 246 247 248 249 250 251 252 253 254 255 256 257 An Application for Calculation and Visualization of Narrative Relevance of Films Using Keyword Tags Choi Jin-Won (KAIST) Film making