혜택 CoO( 소유비용 ) 절감, 50% 빠른예열소요시간, 전력소모가적은에너지효율성 간편한통합, 광범위한풀스케일, 플랜지및인터페이스, 2개의설정지점을갖춘표준 간단한하나의푸시버튼또는원격신호제로명령, 제로오프셋조정가능 빠른서비스및유지보수를위한진단포트 2년보증, 최신히팅개념및게이지보호기능을통한제품수명연장 까다로운플라스마분야에서도뛰어난신호안정성과반복성을기반으로장기적인재보정필요없음 준수및표준 : CE, EN, UL, SEMI, RoHS 1
주문정보 2
정확성 (1) % of reading 0.15 0.15 0.15 온도영향 제로 percent FS/ C 0.0025 0.0025 0.005 온도영향 스팬 % of reading / C 0.01 0.01 0.01 최대압력 kpa (absolute) 400 260 130 해상도 percent FS 0.003 0.003 0.003 최저측정값 percent FS 0.01 0.01 0.01 권장최저측정값 percent FS 0.05 0.05 0.05 최저권장제어압력 percent FS 0.5 0.5 0.5 온도 작동 ( 주변 ) C +10 +40 +10 +40 +10 +40 플랜지에서베이크아웃 C 110 110 110 보관 C 20 +65 20 +65 20 +65 공급전압 전력소모량 ±15 V (±5%) ±15 V (±5%) ±15 V (±5%) 히팅하는동안 W 12 12 12 작동온도 W 8 8 8 출력신호 ( 아날로그 ) V (dc) 0 +10 0 +10 0 +10 응답시간 (2) ms 30 30 130 / 30 (³) 보호수준 IP 40 IP 40 IP 40 표준 CE 준수 EN 61000 6 2/-6-3, EN 61010 & RoHS ETL 인증 UL 61010 1, CSA 22.2 No.61010 1 EN 61000 6 2/-6-3, EN 61010 & RoHS UL 61010 1, CSA 22.2 No.61010 1 EN 61000 6 2/-6-3, EN 61010 & RoHS UL 61010 1, CSA 22.2 No.61010 1 SEMI 준수 SEMI S2 SEMI S2 SEMI S2 전기연결 D-sub, 15 pole, male D-sub, 15 pole, male D-sub, 15 pole, male 개수 2 (SP1,SP2) 2 (SP1,SP2) 2 (SP1,SP2) 릴레이접점 V (dc) 30 30 30 릴레이접점 A (dc) 0.5 0.5 0.5 3
히스테리시스 percent FS 1 1 1 진단포트 프로토콜 RS232-C RS232-C RS232-C 읽기 pressure, status, ID pressure, status, ID pressure, status, ID 설정 진공에노출된재료 내부용적 Aluminum oxide ceramic (AI₂O₃), stainless steel (AISI 316L (⁴)) Aluminum oxide ceramic (AI₂O₃), stainless steel (AISI 316L (⁴)) Aluminum oxide ceramic (AI₂O₃), stainless steel (AISI 316L (⁴)) 내부볼륨 1/2" 튜브 cm³ (in.³) 4.2 (0.26) 4.2 (0.26) 4.2 (0.26) 내부볼륨 DN 16 ISO KF cm³ (in.³) 4.2 (0.26) 4.2 (0.26) 4.2 (0.26) 내부볼륨 DN 16 CF-R cm³ (in.³) 4.2 (0.26) 4.2 (0.26) 4.2 (0.26) 내부볼륨 8 VCR cm³ (in.³) 4.2 (0.26) 4.2 (0.26) 4.2 (0.26) 무게 무게 1/2" 튜브 g 837 837 837 무게 DN 16 ISO KF g 852 852 852 무게 DN 16 CF-R g 875 875 875 무게 8 VCR g 897 897 897 프로토콜 protocol specialized for 통신표준 ETG.5003 Part 1 "Semiconductor Device Profile" ETG.5003 Part 2080 "Specific Device Profile: Vacuum Pressure Gauge" 노드주소 물리적레이어 Explicit Device Identification 100BASE-Tx (IEEE 802.3) protocol specialized for ETG.5003 Part 1 "Semiconductor Device Profile" ETG.5003 Part 2080 "Specific Device Profile: Vacuum Pressure Gauge" Explicit Device Identification 100BASE-Tx (IEEE 802.3) protocol specialized for ETG.5003 Part 1 "Semiconductor Device Profile" ETG.5003 Part 2080 "Specific Device Profile: Vacuum Pressure Gauge" Explicit Device Identification 100BASE-Tx (IEEE 802.3) 디지털기능읽기 pressure, status, ID pressure, status, ID pressure, status, ID 4
디지털기능설정 사서함 (CoE) 프로세스데이터 커넥터 케이블 adjust, reset, SDO requests, responses and information Fixed PDO mapping and configurable PDO mapping RJ45, 8-pin (socket), IN and OUT shielded Ethernet CAT5e or higher adjust, reset, SDO requests, responses and information Fixed PDO mapping and configurable PDO mapping RJ45, 8-pin (socket), IN and OUT shielded Ethernet CAT5e or higher adjust, reset, SDO requests, responses and information Fixed PDO mapping and configurable PDO mapping RJ45, 8-pin (socket), IN and OUT shielded Ethernet CAT5e or higher 케이블길이 m (ft.) 100 (330) 100 (330) 100 (330) 디바이스넷 프로토콜 DeviceNet, group 2 slave only MAC ID address 00-63 by DeviceNet, group 2 slave only address 00-63 by DeviceNet, group 2 slave only address 00-63 by 디지털기능읽기 pressure, status, ID pressure, status, ID pressure, status, ID 디지털기능설정 사양 DeviceNet "Vacuum Gauge Device Profile" (ODVA) DeviceNet "Vacuum Gauge Device Profile" (ODVA) DeviceNet "Vacuum Gauge Device Profile" (ODVA) 장치유형 ''VG'' vacuum gauge ''VG'' vacuum gauge ''VG'' vacuum gauge I/O 슬레이브메시징 polling only polling only polling only D-sub 커넥터에서게이지공급전압 마이크로스타일커넥터에서디바이스넷트랜시버공급전압 ±15 V / 12 W 24 V nom / <2 W (11 25 V) ±15 V / 12 W 24 V nom / <2 W (11 25 V) ±15 V / 12 W 24 V nom / <2 W (11 25 V) 디바이스넷커넥터 microstyle, 5 pin, male microstyle, 5 pin, male microstyle, 5 pin, male CDG 커넥터 ( 아날로그출력, 공급전압 CDG, ) 디바이스넷 데이터속도 kbaud 125, 250, 500 by D-sub, 15 pin, male D-sub, 15 pin, male D-sub, 15 pin, male 125, 250, 500 by 125, 250, 500 by 5
디바이스넷 케이블길이 125kbps m (ft.) 500 (1650) 500 (1650) 500 (1650) 케이블길이 250kbps m (ft.) 250 (825) 250 (825) 250 (825) 케이블길이 500kbps m (ft.) 100 (330) 100 (330) 100 (330) Profibus DP 전송속도 kbaud 9.6 / 19.2 / 93.75 / 187.5 / 500 Profibus DP 9.6 / 19.2 / 93.75 / 187.5 / 500 9.6 / 19.2 / 93.75 / 187.5 / 500 전송속도 Mbaud 1.5 / 12 1.5 / 12 1.5 / 12 Profibus DP 주소 address 00-125 by address 00-125 by address 00-125 by 디지털기능읽기 pressure, status, ID pressure, status, ID pressure, status, ID 디지털기능설정 Profibus DP 커넥터 D-sub, 9 pin, female D-sub, 9 pin, female D-sub, 9 pin, female CDG 커넥터 ( 아날로그출력, 공급전압, ) D-sub, 15 pin, male D-sub, 15 pin, male D-sub, 15 pin, male (1) 2 시간작동후온도영향없이 25 C 주변작동온도에서비선형성, 이력현상, 반복성. (2) 10 90% FS 증가 ; (3) 압력제어유형의경우에만 (4) 18% Cr, 10% Ni, 3% Mo, 69% Fe 6
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