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1 列 1 2 李 1,3 2 1,4 1 立 2 3 立 4 立利立列利力 (Negative Dielectrophorestic force, N-DEP Force) 行利流 SU-8 利不流流 (U937, 15-20µm) 度 ITO 利 PDMS 料利利雷立 ITO PDMS 行參數率 (5 Vpp, 1KHz) 粒度力例力量 : SU-8 力雷 1. (Dielectrophoresis) 理 H.A. Pohl 1951 年 [1,2] 論粒流流年來粒 10µm 利力數都 [3,4] [5] 離利狀不 [6,7] 論利力理 [8] U937 離利力行 [9] 療都不類異來離量來年來力理離量類力量力力立立不力更粒量 2. 力理力理 [10,11] 粒力量 ε 1 E () r 0 力 F = R CM E R (1) 3 2 2πε1 Re[ ( ω) ( )] 便力 (Dielectrophoresis Force) N6-1

2 3 2 FDEP = 2πε1R Re[ CM( ω) E ( R)] ε 1 數 R 粒 CM ( ω) Clausius-Mossotti factor, 率數 E 2 ( R) * * ε 2 ε1 * 度 CM factor=, ε * * 2 數 ε 2 + 2ε1 * 粒數, ε = ε j ( σ ω), ε = 數 σ = 度 CM factor 粒度粒數 CM factor 力 (Positive-DEP) 力 (Negative-DEP) ε * 2 ε * 1 粒度度 CM factor 力粒度 ε * 2 ε * 1 粒度度 CM factor 力粒度力粒度力度粒離 (lift-off) 金 (metal-etching) 金金良率 Piranha Piranha 硫 (H 2 SO 4 :H 2 O 2 =4:1) 例 120 粒便異冷便行立 20µm 度 SU-8 流 SU-8 不 SU 利 Å Å 金流 : 利 (Spin Coater) (S1818) 90 3 狀利 S1818 (MF351:D.I. Water=1:4) 利金金 [ 1] SU-8 利雷類漏粒說 2.2 流利 PDMS 流 (Micro-Flow Chamber) PDMS (SYLGARD 184 Silicone Elastomer Kit, Dow Corning) 例 1:10 利 PDMS (Vacuum Pump) PDMS 100µm PDMS 便流 2.3 ITO on Glass Sheet Resistance=5( Ω ) 利 ITO on Glass 利粒 FeCL 3 +HCL ITO 流立兩 inlet outlet 便立 2.4 流 PDMS glass [12] 利 O 2 plasma 理 PDMS ITO on glass ITO 裸露 PDMS [13] ITO FeCl 3 +HCl 兩 [ 1] 利 AFM 量 N6-2

3 度 [ 2] 1 FeCl 3 +HCl ITO 度度率利 S1818 FeCl 3 +HCl 來 ITO 便 ITO [ 3] 流 [ 4] 4. 雷 3.1 雷理雷 (Excimer Laser) 雷理雷 (Laser Cavity) 不量度雷料若雷量料量便量料料離料冷精雷料量料不料 3.2 雷 Exitech-Limited PS-2000 Kr-F 雷 [ 5] 248nm KrF 雷 (Full-Width-Half-Magnitude, FWHM) 30ns 量 350mJ, 率 100Hz 3.3 雷便更粒雷不 SU-8 便力便不力粒參數量便更精料不雷量度量不 SU-8 料不雷量度 SU-8 行雷數度量不雷量度雷 SU-8 2 度 [ 6] 200 mj cm 度 0.1µm 路 10x10 10µm 洞路 5µm 便類漏輪廓 [ 7] 利 SEM [ 8,9] 5. 粒 5.1 數 (Function Generator) 倫 (Aglient) 33220A 數率 1µHz 20MHz GPIB 令行率 10m V pp 10V pp 行不率力 5.2 (Oscilloscope) Tektronix TDS-210 率 50S/s 1 GS/s 2500 率令料 5.3 (Syringe Pump) KDS Kds 210 兩流量 0.001µl/h 流量量 3ml 流量 7.36ml/min 流量流量率臨力率臨率 RS-232 令流量不流量臨率 5.4 DV OPTIMA 立 SONY DV 力粒不流量粒 N6-3

4 5.5 Personal Computer DV 利粒 Labview 7.0 數便不率不流量粒力 [ 10] 6. 論 6.1 粒利粒力粒 DEP [ 11] 粒 ( 26 µ m ) DEP 力流率 1~2kHz Vpp 1V 10V [ 12] 粒流利粒度粒裡來若流不力不力 6.2 ( 15 µ m ) PBS ( 度 S/m) 行粒參數 (Vpp=5V, 率 =1KHz) 度 S/m 便 Vpp=5V 率 =1KHz [ 13] S/m S/m 便 2 不 DEP 力 7. 參 1. Herbert A. Pohl, The motion and Precipitation of Suspensoids in Divergent Electric Fields, Journal of Applied Physics, Vol. 22, No.7, July Herbert A. Pohl, Some Effects of Nonuniform Fields on Dielectrics, Journal of Applied Physics, p , Vol.29, J. Voldman, R.A. Braff, M. Toner, M.L. Gray, and M.A. Schmidt, Holding Forces of Single-Particle Dielectrophoretic Traps, Biophysical Journal, Volume 80, p , Jan Adam Rosenthal, Joel Voldman, Dielectrophoretic Taps for Single-Particle Patterning, Biophysical Journal, Volume 88, p , March D.S. Gray, J.L. Tan, Joel Voldman, Christopher S. Chen, Dielectrophoretic registration of living cells to a microelectrode array, Biosensors and Bioelectronics, Vol. 19, p Steffen Archer,Tong-Tong Li, A. Tudor Evans, Stephen T. Britland, and Hywel Morgan, Cell Ractions to Dielectrophoretic Manipulation, Biochemical and Biophysical Research Communications 257, , N.G. Green and H. Morgan, Dielectrophoretic separation of nano-particles, J. Phys. D:Appl. Phys. 30, Haibo Li, Rashid Bashir, Dielectrophoretic separation and manipulation of live and heart-treated cells of Listeria and on microfabricatied devices with interdigitated electrodes, Sensors and actuators B 86, p , Y. Huang, S. Joo, M. Duhon, M. Heller, B. Wallace, X. Xu, Dielectrophoretic Cell Separation and Gene Expression Profiling on Microelectronic Chip Arrays, Anal. Chem. Vol. 74, p , Thomas B. Jones Electromechanics of Particles, New York: Cambridge University Press, Thomas B. Jones Basic Theory of Dielectrophresis and Electroration, IEEE Engineering in Medicine and Biology Magazine Byung-Ho Jo, Linda M. VanLerberghe, Kathleen M. Motsegood, and David J. Beebe, Three-Dimensional Micro-Channel Fabrication in Polydimethylsioxane (PDMS) Elastomer, Journal of Micromechanical systems, Vol. 9, No.1, March Jin-Ho Kim, Kwang-Ho Na, C.J.Kang, D. Jeon, Yong-Sang Kim, A disposable thermopneumatic actuated microvalve stacked with PDMS layers and ITO-coated glass, Microelectronic Engineering 73 74, , N6-4

5 1 不度 ITO 5 雷 C FeCl 3 +HCl ITO AFM 6 雷量度雷量 3 1 度 µ 7 雷輪廓 2. 雷 4 流 8 SEM (1) N6-5

6 9 SEM (2) 粒 12.1 DEP 12.2 DEP CFD-RC 粒 DEP DEP 13.2 DEP 12.1 度 DI water 8x10-4 S/m PBS S/m 不 PBS 0.195S/m 2 度 N6-6

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