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현재 강
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1 金類連領金立量金易勞利不度廉度理金行金例行立理立類金類理 1. 金力不度不不切零 1~2 行 95% 量益行金零不易量力立量 Machine Vision 理例 1980 年 D.Marr[1] 理論 1983 年 Yasuhiko Hara[2] 利路路 1985 年 [3] 數 1986 年 J.Canny[4] 2001 年陸不輪廓精度 [5]~[10] IC Scaman[11] 路路量量 Arye Shapir[12] [Wafer] 立類 Shunji [13] LSI Wafer 1996 年 Madhra[14] 立 PCB Nagaswami[15] 0.5µm and 0.35µm 邏路契 [16][17] 神理論立類路量零 1984 年 Jansson[18] 度 1992 年 Wu[19] 行 1993 年 Fernandez[20] Aluminum Casting on_line 1994 年 [21] 類神狀 1997 年 [22] 數理狀量量量 1999 年 Marino[23] 金 2000 年 Villekyrki[24] 利 Sub-pixel

2 精度狀零量降理金立 2. PLC 連 PLC 2. 料度 3. 料行良料料行零力度行 6. 料 PLC 料 7. 料料料兩 (60fps)/(780x580 pixels)ieee 1394 CMOS FOculus 了不度便行良利利 IEEE 1394 不更 2. Telecentric 降度 3. LED (Illumination) 輪廓更降率率理見 1 (Front Lighting) (Side Lighting) 兩類不類不 LED 量都金例 2(a) 度金例度不易 2(b) 度濾

3 2(c) 來洞易濾行行 4 流 1 兩不 3 參數 2 (a) (b) (c) 2.3 流 3 料列 ROI, Region of Inspection TTL 不良不良行類料

4 4 流 3. 金了更識類兩類類參類立兩類 (1) 參 (Reference Matching)(2)(Design-Rule Based Methods)(3)(Hybrid Methods) 金參零金來行類料 3.1 金金料列精金見類 [26] 金來類類類 1. 裂零力不裂 5(a) 2. 洞粒零力離粒離 5(b) 3. 料 5(c) 4. 不不不若度 5(d) a b c d 5 類 (a) 裂 (b) 洞 (c)(d) 3.2 流 IC PCB (Golden image) 行金兩不來行 (1) 金狀利不易精 (2) 利易利不行狀利念流 6 洞裂理離參了度流理不來易類

不類度 6 流 3.3.1 理理料立輪廓兩離輪廓料利臨 [27] 行理立離金例不 7 27 55 44 28 利 8 數利兩數來輪廓行料錄 3.

5 不類度 6 流理理料立輪廓兩離輪廓料利臨 [27] 行理立離金例不利 8 數利兩數來輪廓行料錄 3.3 類類 (Auto defect classification, ADC) IC PCB 類不不不類類數 AOI 不類類不度立來降度來說度率兩讀類類類類 7 不 (a)27 (b)55 (c)44 類來類度度度度

6 類 1 1 類類洞裂度度度 (a) 率 1. 洞離理 4 洞洞利離來 8 (a)(b) 洞理洞 (a) (b) (b) 3. 料來不度來類易都類裂裂來識 9(a) 浪 Y 9(b) 行浪 Y 10 度 8 洞 (a) (b) 2. 裂理 (a)(b) 洞理 2 裂兩裂裂裂連裂利度度裂 9 (a)(b) 良

7 離 (Pixels) 數 12 離精留不料理理 11 度不利來料留不離利列 12 3 利離兩留 8 13 兩連度 11 理 13 論 D. Marr and E. Hildreth, Theory of Edge Detection, Proceeding Roy. Soc., London, pp , Yasuhiko Hara, Nobuyuki Akigama, and Koichi Karasaki, Automatic Inspection System for Printed Circuit Boards, IEEE Transactions on Pattern Analysis and Machine Intelligence, Vol. PAMI-5, No.6, pp , Nov., Nakagawa Yasuo, Yasuhiko Hara and Hashimoto Masayuki, Automatic Visual Inspection Using Digital Image Processing, Hitachi Review, Vol.34, No.1, pp , J. Canny, A Computational Approach to Edge

8 Detection, IEEE Transactions on Pattern Analysis and Machine Intelligence, Vol. PAMI-8, No.6, pp , L. Shen, D. Shen and F. Qi, Edge Detection on Real Time Using LOG Filter, International Symposium on Speech, Image Processing and Neural Networks, pp.37-40, Hong Kong, April, C. Hsin, Edge Extraction Based on A Statistical Decision Theory, The Second Symposium on Computer and Communication Technology, pp , Y. Zou, W. T. M. Dunsmuir, Edge Detection Using Generalized Root Signals of 2-D Median Filtering, Proceedings of International Conference on Image Processing, Santa Barbara, CA., pp ,oct., J.H. Elder and S.W. Zucker, Local Scale Control for Edge Detection and Blur Estimation," IEEE Transactions on Pattern Analysis and Machine Intelligence, Vol.20, pp , P. Paplinski, Directional Filtering in Edge Detection, IEEE Transactions On Image Processing, Vol.7, No.4, pp , C. H. Hsin, H. T. Chang and W. S. Chen, A Nonlinear Edge and Line Detection Scheme Based on Gaussian Derivatives, Computer Vision Graph and Image Processing Conference, Aug., Michael E. Scaman and Laertis Economikos, Computer Vision for Inspection of Complex Metal Patterns on Multichip Modules (MCMD-D), IEEE Transactions on Computer, Packaging, and Manufacturing Technology-Part B, Vol.18, No.4, Arye Shapiro, Automatic Classification of Wafer Defects: Status and Industry Needs, IEEE/CPMT Internal Electronics Manufacturing Technology Symposium, pp , Shunji Maeda, Hitoshi Kubota and Hiroshi makihira, Automated Visual Inspection for LSI Wafer Multilayer Patterns by Cascade Pattern Matching Algorithm, Systems and Computers in Japan, Vol.21, No.12, Madhar Moganti and Fikret Ercal, Automatic PCB Inspection Algorithms: A Survey, Computer Vision and Image Understanding, Vol.63, No.2, pp , V.R. Nagaswami and S. Grimeault, Application of Segmented Auto Threshold for 0.5µm and 0.35µm Logic Interconnect Layers, IEEE/SEMI Advanced Semiconductor Manufacturing Conference, pp , 契易神理論類, 論,pp , 契易路量 2000 PCB 論 pp , D. Jansson, J. M. Bourke, High Speed Surface Roughness Measurement, Journal of Engineering for Industry, Vol.106, pp.34-39, C. M. Wu and Y. C. Chen, Statistical Feature Matrix for Texture Analysis, CVGIP, Vol.54, NO.5, C. Fernandez, C. Platero, P. Compoy and R. Aracil, Vision System for On-Line Surface Inspection in Aluminum Casting Process, Proceeding of IECON 93, Vol.3, pp , C. Fernandez, S. Fernandez, P. Campoy and R. Aracil, On-line Texture Analysis for Flat Products Inspection Neural Nets Implementation, Proceeding of IECON 94, pp , ,,, 數, 論論 pp , P. Marino, M. A. Dominguez and M. Alonso, Machine-Vision Based Detection For Sheet Metal Industries, Proceeding IEEE International Conference Computer Vision and Pattern Recognition,

9 Ville Kyrki and Heikki kälviäinen, High Precision 2-D Geometrical Inspection, Proceeding IEEE International Conference Computer Vision and Pattern Recognition, pp , 劉,, 論, 龍, 金, 論, Otsu, N., "A Threshold Selection Method from Gray-Level Histograms", IEEE Transactions on Systems, Man, and Cybernetics, Vol. SMC-9, NO.1, pp.62-66,1979

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