X-Ray FLUORESCENCE NON-DESSTRUCTIVE & NON-CONTAC COATING THICKNESS TESTER EX-3000 Ex WIN Ver.1.00 INSTRUCTION MANUAL ELEC FINE INSTRUMENTS CO., LTD 2-31-5 CHUO, NAKANO-KU, TOKYO, JAPAN PHONE : (03) 3365-4411 FAX : (03) 3371-1287 1
Table of Contents INTRODUCTION 1 1 1.1 Principle of X Fluorescence Coating Thickness Tester 1-1 1.2 Model EX-3000 FEATURES 1-2 1.3 EX-3000 ( ExWin )menu item list 1-4 1.4 Instruments start-up 1 6 1.5 Overall operation method 1 6 1.6 Instruments ( system ) end 1-7 FILE 2-1 2.1 Outline of calibration curve file. Measurement file 2-1 2.2 Calibration curve file ( make, change, delete, copy ) 2-2 2.2.1 Selection of calibration curve file 2-2 2.2.2 Make Calibration curve file 2-3 2.2.3 Change calibration curve file 2-6 2.2.4 Delete calibration curve file 2-6 2.2.5 Copy calibration curve file 2-6 2.3 Measurement file ( make, change, delete, copy ) 2-7 2.3.1 Selection of measurement file 2-7 2.3.2 Make manual measurement file 2-9 2.3.3 Make auto measurement file. Random point auto measurement file 2 12 2.3.3.1 Auto measurement and Random point auto measurement 2 12 2.3.3.2 Conditions of Calibration curve 2-13 2.3.3.3 Coordinates entry method 2 14 2.3.3.4 Setting of basic Coordinates for position and rotation correction 2 15 2.3.3.5 Setting of measurement position ( auto measurement ) 2 16 2.3.3.6 Setting of measurement position ( random point auto measurement ) 2 18 2.3.4 Change measurement file 2 19 2.3.5 Delete measurement file 2 19 2.3.6 Copy measurement file 2-19 2.4 Input of password 2-20 3. CALIBRATION CORRECTION 3 1 3.1 Standard calibration 3-2 3.2 Base correction 3-4 3.3 Coating correction 3-5 3.4 2.3.4. points correction 3-5 3.5 X spectrum calibration 3-6 3.6 Regular calibration 3-6 2
4. MEASUREMENT 4 1 4.1 Outline of coating thickness measurement 4-1 4.2 Measurement mode start 4-2 4.3 Indication of measurement mode 4-3 4.4 Simple measurement 4-6 4.5 Measurement mode end 4-6 4.6 Statistics process 4-7 4.6.1 Statistics process selection 4-7 4.6.2 Statistics volume 4 9 4.6.3 Measurement data 4-10 4.6.4 Histogram 4 10 4.6.5 Profile 4 11 4.6.6. 3-dimensional profile 4 11 4.6.7 -R control chart 4 12 4.7 Spectrum measurement 4-13 4.8 Between 2 points distance measurement 4-14 4.9 Transmission method of measurement results 4 15 5. TABLE 5-1 5.1 Move to random point 5-1 5.2 Move to specified point 5-1 5.3 Move to the origin 5-1 5.4 Table position entry 5-2 6. INDICATION 6-1 6.1 Latest spectrum 6-1 6.2 Indication of regular calibration status 6-1 6.3 Other items 6-1 7. MAINTENANCE 7-1 7.1 Indication of calibration curve data 7-1 7.2 Life of X tube 7-1 7.3 Self check 7-1 7.4 Fe55 count check 7-1 7.5 Ag count check 7-1 7.6 Auto table constant 7-1 7.7 Special setting 7-2 3
01. INTRODUCTION 1.1 X. X, (, ) X. X X. X., X.. X. (Excitation method : X ), (Absorption method : ). ( See Fig. 1-1 ). (Excitation method) : X. ( See Fig. 1-2 ) (Absorption method) :. ( ) X. X (differentiation)., X.. X X X. 1-1 X X ( ) X ( ). 1-2 X 1 1 4
1.2 EX-3000 EX 3000 X 1-1 EX-3000 X. X,, X. X..,,, vapor deposition., EX-3000 X 0.05mm (Option)... X ( )...,. EX-3000 ExWin 98.. *. *.,. : 100 files : 500 files (,, ) * *,. 1-2 5
1.3 EX-3000(ExWin),. (.),. File (F) (M) (A) (F) (C) VS (T) (P) ExWin (X) (M) (M) ( A) (F) ( )(H) ( )(G) (T) (S) (X) 2 (D) (O) (Calibration)(C) (C) X (X) (R) (S) (J) (P) (H) (M) 1-4 6
( ) (V) (N) (R) (tool) (M) (P) X (X) (Collimator) (C) (F) (tool bar) (T) (bar) (S) (A) (C) X Life of X tube (X) (D) Fe55 (F) Ag (A) Auto stage constant (S) (P) Help (H) Help (H) (Version) (A) 1-5 7
1.4 (start up) 1). (unit).(model EX-3000) 2). PC,. 3). ExWin. (., (. 1-3).) 4). ExWin, (unit) X. X 30.. 1-3 (.) 1.5.. help file which is available at general book stores. PC. (Click) ; (cursor).,. OK. (Double click) ;. (Drag) ;,,. 1-6 8
., ExWin, File, ExWin End. (Input of set up value),. Back Space key. Delete key. Tab key,. (operation) ;,,.,, ;.. ; OK Cancel,, X. ;,.. 1.6 ( ) 1) File ExWin end, ExWin.. 1-4 ExWin end 2) X. 3) Yes ; ExWin ( ). 4) PC. 5) (unit) 1 7 9
02. 2.1. (Calibration curve file),,,. (Calibration curve file),,,,,. :.. (Coating and Base)., X (intensity of X ),.. (Measurement file),,.. Measurement file,,.,,,.. :. (Measurement file name).. (lot) (Data saving, setting of lot control Yes/No).. (position) Note),. 2 1 10
2.2 (,,, )(make, change, delete, copy).,,.,.. 100. 2.2.1 (Selection) Calibration curve data,. File. (. 2-1). 2-1,. Selection of calibration curve file, (. 2-2)., (. 2-6).. 2 2 11
2.2.2.. 2-2.. P (only for Ni-P, Ni-B coating ). 1-... 2 63. 2- ( Fig. 2-3 ).., (enter).,.,.,.. (substance).. (Input of free name),. 2 6., OK. 2, Type of coating 2. 2. 2-3 12
Fig. 2-1 Coating setting 3-, (input of base name).,.,. 4- (collimater) X... 2-4. 2-5 5- X, X. X,., X. X,, X.,, X. 6-.. um ( = m ) mil MI ( = micro-inch ) g/ oz/ft2 mg/c 7- (Indication style) ( ).. Free.,..,.. 2-4 13
8- Calibration time. (entry column).. (1 999 seconds). 9- Calculation method. X. (metal, etc. ). X 10- Filter,, X (overlapping),. X.. X (fluorescence X emitting from specific ). : Co (Cobalt) Ni (nickel). Co (Copper (Cu)) X, (Ni / Cu-base or Ni / Brass-base).. Ni (Zinc (Zn)) X, (Cu / Zn-base or Cu / Brass-base).... 11- Energy range,.,. 38 290.. (, ),. Energy range auto setting, Energy range auto set,.,,, (free name material).,., Standard calibration.. 3.1(3.1.Standard calibration page).,. 2 5 14
. 2-6 Calibration curve file entry (already entered) 2.2.3 Selection of calibration curve file. Calibration curve data (Fig. 2-6)., OK Standard calibration. Making calibration curve file..,,,,.. Measurement file in use. (Require re-calibration) :,,,,, (the calibration curve file entry)., X, (correction)., OK, Standard calibration.,,, (correction). 2.2.4 Selection of calibration curve file (. 2-1). Calibration curve data (. 2-6 ) X. OK. 2.2.5 Selection of calibration curve file (. 2-1)..,,.?, OK. 2 6 15
2.3 (,,, ),,. (unit). Measurement file,,,.,,,, (Auto table type s measurement position program). 300, 100...,,. 2.2 Calibration curve file. 2.3.1, (type),,,.. File Manual measurement file File Auto measurement file File Random point auto measurement file, 2-7: (.2-7 Selection of Manual measurement file)., 2-8: (.2-8 Selection of Auto measurement file). 2-8 4. 2-7 ( Fig. 2-7 Selection of manual measurement file) 2-7 16
2-8 (Fig. 2-8 Selection of Auto measurement file), Selection of measurement file a selecting measurement line.,. ( 2-9 ; ).,,,. 2-8 17
2.3.2 (Make manual measurement file),.( 2-9) 2-9 ( )(Fig.2-9 Manual measurement file ( General )) 2-10 ( )(Fig. 2-10 Manual measurement file (Calibration curve))., :General :Calibration curve. 2 (page). ( ),. 2 9 18
1- (File name).,. 2 63.. 2-,. X (coating saturation) X, (enter the indication of measurement result and data saving.) 2. * (Do not save data) :, : Measurement result is over,. 2, 3,,. * (Max. value of specified style) :, (style). ( Indication style of 2.2.2 Make calibration curve file ) (2.2.2. 7-). >In case of free, indicating as 999.99 3-, Selection of calibration curve file.,. Selection of calibration curve file,. Yes.,. 4- (Measurement time),. 1 999 seconds. 5- P Ni-P Ni-B, P B. 6- (Alloy ratio), (auxiliary component)(element and ingredient specified in the second). (element and ingredient specified at first). 7- (Measurement method), (. 2.2.2. Make calibration curve file, ) * Excitation method : X.. * (Absorption method) :, (atomic number). X., X. X. 2-10 19
8-, : Do not save data, Save data.,. 9- (lot control) Necessary, (Lot number). (lot control), Save measurement data. (lot number) 0.. 10- Upper and lower limit.,.. 2-11 Upper and lower limit,, /., OK. /, / 0. 11- Standard., Cpk. /., / 0., OK.. (, 2.3.3.5 Setting of measurement position. ) 2 11 20
2.3.3. 2.3.3.1. ---- ---- ---- --- --- ---- ---- ----.., 4. 3, 0, 3 (the number of division). 4 10. X 6..., 300. >One section s division number can be set from 0 to 99.. 1 5..,, &. 15.,. (specifying only, & ), No.1. (the number of division).,, &,,. 1.,, &.,, &. (measurement position),.,.,... 2 12 300 21
2.3.3.2, : 4 (can be specified)., 2 4. Calibration curve (page).. (Coordinates entry)..., 2.3.2 (Make manual Measurement file).. 2 12 ( general ) General, Calibration curve oordinates entry. (Coordinates entry method). 2 13 22
2.3.3.3 (Coordinates entry method) Genenral Calibration curve Coordinates entry, Method of coordiates entry. 2-13. & position & rotation correction repeat of pattern. Fig. 2-13 Method of coordinates entry ( Auto measurement ). 1). : * Auto table ;. (coordinates). *.Input of numeric value with keyboard ;. 2). mm mil. 3) Position and rotation correction enter Not enter.. 4) Repeat of pattern the repeat of pattern setting No setting.. Next. 2 14 23
2.3.3.4 / 2-13 setting. /. 2-14 / /.., Next. 2 15 24
2.3.3.5 ( ) 2-15. Fig. 2-15 Entry of measurement position ( auto measurement ) 1) X, Y, Z. (has been specified),. Enter..,. 2) Division number.. please set how many measurement points from the coordinates of last to this lines to be tested on a straight line. 0 99., 0(zero). 3),. general. No.1 4. No.1. 4) 1) 3). 5), NEXT. repeat of pattern, repeat position set. repeat of pattern, the coordinates entry.. 2-16 25
6) repeat of pattern Repeat position set,. (Set up method) 1) 4).,, 3)., NEXT.,. 7) Trace measurement position (. 2-16)., OK... 2-16 Trace measurement position 2-17 26
2.3.3.6. ( ) (. 2-17). Fig. 2-17 ( ) 1) X, Y, Z. (has been specified),. Enter.,.,. 2),. 2.3.3.2 Conditions of calibration curve. (1~4).(specifying)., No.1. 3) 1) 2). 4) (measurement point set) NEXT.,. 5) (. 2-16 ),, O K,,. 2 18 27
2,3,4 Select measurement file. (.. 2-7, etc. ) measurement file. (. 2-9, etc.) 2.3.2 Make manual file..,,, OK. general,, Coordinate entry., Next,, End. 2.3.5. Delete measurement file Select measurement file window (.. 2-7 ), Measurement file ( 2 ) X. OK. Copy Delete Print. 2-18 ( ) 2.3.6 Select measurement file (. 2-7,etc.). (Copy). Select measurement file.,. If you make a copy, this data will be lost, OK?, so please click OK. 2 19 28
2.4..,,,,. Fig. 2-19 Input of password File Input password. 2-19.,, OK. OK. 2 20 29
03. & ( CALIBRATION & CORRECTION) X. Calibration. Calibration X X spectrum calibration Regular calibration ON/OFF 3-1, Calibration, (standard calibration or correction).,.. 3 1 Selection of Calibration & Correction ( for Single layer ),, ( 3-1) &.,, Calibration, ( 3-2) Selection of calibration curve..,. ( 3-1). Fig. 3 2 Selection of calibration curve 3 1 30
3.1.., X (quantity; count number).... (1.2.3, )...,,,. 3-1 :,. Coating Type Standard Calibration Method Required Standard Single layer 2 layers Linear 2 points calibration Base Standard coating 3 points calibration (without saturation) Base Standard coating ( 2 points ) 3 points calibration ( with saturation ) Base Standard coating coating 4 points calibration Base Standard coating ( 2 points ) coating Multi points calibration ( 10 points ) Base Standard coating ( Max. 10 points ) coating Short calibration ( 6 points ) Long calibration ( 9 points ) Base 1-layer coating 2-layer coating 1- layer Standard coating/base 2-layerStandard coating/base 2-layer Standard coating/1-layer coating Base 1-layer coating 2-layer coating 1-layer Standard coating /Base (2 points ), 2-layer standard coating/base (2 points) 2- layer Standard coating / 1-layer coating (2 points ) 3 layers Alloy Short calibration ( 10 points ) Short calibration ( 7 points ) Long calibration-1 ( 9 points ) Long calibration-2 ( 11points ) Base 1-layer coating, 2-layer coating, 3-layer coating 1-layer Standard coating /Base, 2-layer Standard coating/1-layer coating 2-layer Standard coating/base, 3-layer Standard coating/1-layer coating 3-layer Standard coating / Base 3-layer Standard coating/2-layer coating Base coating of No.1 material No.2 material coating Alloy coating No.1 material coating No.2material Standard coating Alloy Standard Coating Base No.1 material coating No.2 material coating Alloy coating (ratio 2 points), No.1 material Standard coating No.2 material Standard coating Alloy Standard Coating( ratio 2 points) Base No.1 material coating No.2 material coating Alloy coating (2points), No.1 material Standard coating(2pts) No.2material Standard coating (2pts), Alloy Standard Coating(2points ) :, 2, 3, ( ) (point). 3,. ( )., X, ( ).,.,. Table 3-1 Calibration method 3 2 31
( Operation method ), ( 3-3) 3-3 ( for single layer numeric ). 3-4 ( 4 points calibration ),, 0(zero).. Electro-less Nickel(Ni-P) P-density. Ni-P, Ni-B P B density., EX-3000 P, B,, P ratio.,. Setting end (S). 3-3 32
Fig. 3-5 Measurement of standard for calibration ( 4 points calibration) (( 3-5) ) Measurement (F2). F.2.. (unit),, Selection of standard calibration Full auto calibration.,,,,.,. 3. 2. (Base correction) /,,. (base)., Stainless Steel (Ag/SS), Ag/Fe. Ag Stainless Steel. SS Brass,,, (base correction).,.,,. ( ) ( 3-1),, Base Correction. (Base), Enter. Fig. 3-6 Base correction 3 4 33
3.3,,.. (infinity coating) F.1.,.,.., Coating Correction. 3.4 2.3.4 points correction. ( Operation method ) ( 3-1) Coating correction.,.., Enter. 3.4 2. 3. 4 points correction X.,. *, 2.,. * 2, 3, 3 4.,. ( Operation method ), 2, 3, 4. ( 3-1),,. Setting end.. Enter. Fig. 3-7 2 points correction 3 5 34
3.5 X. (out of position),,. X, ON 3.6 (Regular calibration).. ( ) ;. Calibration X X spectrum calibration. 3-10 X spectrum calibration 3.6.,.. 3-11 ON. 3-12 OFF, : Calibration Regular calibration ON /OFF. OFF, 3-11, ON, 3-12. Yes, OFF ON, ON OFF. 3-6 35
04. MEASUREMENT 4.1,. (,.) 2.2. 2.3.,,,,.,,.,,. 1) Manual measurement,. 2) Auto measurement,,. 3).,. 4) (Semi auto measurement).,..,, F.2...,. 5) Simple measurement.,.,..,,. 4 1 36
4.2 Measurement mode start, : 1) Measurement. Measurement.. 4-1 Measurement menu 2) Measurement,..,. 4-2.,,, 4.. 4-2 3).,.. (. 4-4 ) 4) -,.., 2.3.2. Make manual measurement file.,. 5) (lot control), ( 4-3). (a lot number), Yes, No.. 4-3 Confirmation of lot number 6) Measurement.. 4 2 37
4.3,. ;. 4-4 Measurement Simple statistics.. Measurement.. Measurement part monitor Measurement Simple Spectrum Simple statistics. 4-4 4 3 38
4-5.. 4-5 Indication of measurement,. ( 4-6)... 4-6 Measurement mode icon.. Cancel the measurement result of just before obtained. Change a measurement condition ( ). Execute calibration correction. Indicating a window for statistics process.,,.,. execute.,. 2, 3 2, 3... ( ),.,.. F2, 4 4 39
(. 4-7). 4-7 :.,.,.. 5, 10, 20, 30, 4, 50 100,... Left side tip. 2, 3,.,....,.,.,. 2.,. 4 5 40
4.4 Simple measurement..,,..,, Measurement Simple measurement.. Fig.. 4-8.. 2.3.2. Make manual measurement file.,,, (lot control)., OK.,., ( )... measurement (F2), F.2.,. 4.5. Measurement mode end, x. 4 6 41
4.6 Statistics process Statistics process window is indicating the mean, standard deviation, calculation of statistics volume for index number of process capacity etc., histogram, profile, x-r control list. 4.6.1. Statistics process selection. 1),.. 2). ;..,.(. 4-9 ). Fig.4-9 (statistics volume), Open the file., No.2. 4 7 42
( ).,, ; Save the Measurement data.,,.,.,.. 4-10 [1] Select the file for statistics.,. [2]., measurement data delete. [3] [4].. 4-8 43
4.6.2 Statistics volume ( 4-9) Statistics volume. Statistics volume, (mean),,. Divide into groups,, x-r. divide into groups method : All the data Divide into groups for all the data saved and presently specified in measurement file. Partial data,.. Data at regular spaces Specify the data of started and space, and then select each data at regular spaces. The mean values of each regular data,. The mean values for each lot number. Doing lot control... x-r, 4~6, the divide into groups method.,. 4 9 44
4.6.3 Measurement data. divide into groups method,.,,,, Change Delete. Text output,,,.. Fig. 4-11 Statistics process ( measurement data ) 4.6.4. Histogram:.,..,.. 4-12 Statistics process ( histogram ) 4 10 45
4.6.5 Profile,.,.,,,. Fig. 4-13 Statistics process ( profile ) 4.6.6 3 : 3. 3,,,..4-14 Statistics process ( three dimensional profile) 4 11 46
4.6.7 x-r control chart x-r. x-r (the mean value). (R=Max. - Min. values). x-r, : divide into groups method the mean value from each regular data the mean value from each lot the mean value of each measurement date.. 4-15 Statistics process ( -R control chart ) 4 12 47
4.7 Spectrum measurement X. * Measurement Spectrum measurement, * ( 4-16) 4 ;,,, X.. *. OK, ( 4-17).. 4-16 Spectrum (parameter) (.. 4-17) Spectrum measurement : Enlarge ;.,. count. MCA... 4-18 Icons for spectrum measurement 4-13 48
.,,,. ( 4-16),,.,. 4.,,. 4.8 2 Btween 2 points distance measurement,., Z., X-Y. 1) Measurement 2 Distance between 2 points., ( 4-19). 2),. Enter. 3). Enter... 4-19 Distance between 2 points 4-14 49
4.9 Transmission method of measurement results, RS-232C DDE. RS-232C ( 4-20) DDE ( 4-21).. 4-20 Transmission method of measurement results (RS-232C output). 4-21 Transmission method of measurement results (DDE output) 4-15 50
05. TABLE original point. 5.1 Move to random point.. Table Move to random point from the menu of main window. ( 5-1).... 5-1 Move to random point 5.2 Move to specified point.. ( 5-2). so please enter coordinates of point to be moved, OK Application.. OK,,. Application,.. 5-2 Move to specified point 5.3 Move to the origin (X, Y, Z) = (0, 0, 0),,. 5 1 51
5.4 Table position entry. 5., Table Position entry, ( 5-3).. 5-3 Stage/table position entry Table position entry Set up, ( 5-4).. OK. Move the table, ( 5-3) Move,.. 5-4 Position entry (Movement) 5-2 52
06.. Indication, ( 6-1). 6.1 Latest spectrum,. indiication functions.,. Fig. 6-1 Indication menu 6.1 Indication of regular calibration status X,., 222. 6.2 Other items 2, 7..,. 1) Table movement tool.. 2) X, Y, Z.. 3) X X 4). 0.5 0.5, OFF. 5) ( ) 6).. 7),. 6-1 53
07. MAINTENANCE.,,,.,,. 7.1 Indication of calibration curve data..,.,. 7.2 X, X., X. 7.3,, /. 7.4 Fe55 Fe55, 7.5 Ag. 7.6 Auto table constant. * :.. * : ( X, Y, Z ) = 0, 0, 0. Center point correction,,, OK 7 1 54
7.7 Special setting, X,. * Open the door :,,,. [ Move table] ;,.,.,,,. [Not move table];,,. [Not return table];,.,,. * Regular calibration:, (check) On Off. On,, ON. ON, X.,.,,., ON,,, 7-2 55