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1 PRIME JOIN SYSEM UP WED IINGS UP MEA SEA IINGS SUPER CEAN SEAMESS SAINESS SEE UBES

2 Weld ittings and Metal Seal ittings made of PRIME super clean stainless steel, have made possible the realization of a new generation ultra clean, ultra precision piping system. uni-primet 크린피팅은일본다이또사의 PRIME 고청정스테인리스스틸로생산되어최상의청정도및진공도를실현할수있는배관라인을구성할수있습니다. Page 5 BW Micro Elbow BW Micro ee BW Micro Reducing Union BW Micro Reducing ee Page 6 BW Micro Reducing Elbow BW Micor 45 Elbow BW Micro ribow BW Micro Cross Page 7 BW Short Elbow BW Short Reducing Elbow BW Short ee BW Short Reducing ee Page 8 BW ong Reducing Elbow BW ong Reducing ee BW ong Reducing Union Page 9 BW Short Reducing Union BW Short Cross BW ong Elbow BW ong ee Page 12 BW ong Gland-S BW ong Gland- BW Short Gland-S 2

3 BW Short Gland- BW Micro Gland-S BW Micro Gland- Cap Plug Page 13 emale Nut Male Nut Gasket Retainer Page 14 Double emale Union Double emale Reducing Union Close Coupling Double Male Union Page 15 Double Male Reducing Union Bulkhead Union Union Elbow Union ee Page 16 HR BW GAND HR BW BODY Reducing Adapter Page 17 S-ype Cylinder Connector Page 18 3

4 Part Namber of Weld ittings uni-primet R Weld ittings are ordered by part number as shown below. ➊ Material Designations ( 재질 ) UP : PRIME US : SUS316 UN : NICKE (Gasket only) ➋ ube O D Designations( 튜브외경 ) 4 : 1/4 (6.35mm) 6 : 3/8 (9.53mm) 8 : 1/2 (12.70mm) 12 : 3/4 (19.05mm) ➌ Product Specification Code M : Micro ype S : Short ype H: ong ype ➍ Welding Section Dimension Code ( 용접부위치수 ) (B Dimensions in Parts Chart)( 재원의 B 참조 ) 04 : 6.35mm 06 : 10.00mm 12 : 19.00mm UP 6 M O C - U ➎ Basic Configuration Code ( 제품종류 ) 3 : ee 4 : Cross 6 : Union 5 : 45 Elbow 9 : Elbow 91 : ribow ➑ Material Code ( 재질 ) U : PRIME- VIM / VAR ( 빔바 ) ➏ ube O.D. Designations for Differemt Size his indicates oniy products with differing sizes. ( 본제품은이경제품에한함 ) 4 : 1/4 (6.35mm) 6 : 3/8 (9.53mm) 8 : 1/2 (12.70mm) ❼ Code Indicating Internal Surface Polishing evel ( 내면조도 ) C : PJ Polishing + Electro Polishing + Precision Washing Rmax. 0.7 μm C1 : Ultra Precision PJ Polishing + Electro Polishing +Precision Washing Rmax. 0.4 μm BA : Precision Machining + Pure Water Washing Rmax. 2.5 μm 4

5 ube Butt Weld ittings (BW) Micro Elbow Part No. A B E Body Cube 1/8 UP2M /4 UP4M /8 UP6M /2 UP8M Micro ee Part No. A B E Body Cube 1/8 UP2M /4 UP4M /8 UP6M /2 UP8M Micro Reducing Union 1 Part No. A B E E1 1/4 1/8 UP4M /8 1/4 UP6M /2 1/4 UP8M /2 3/8 UP8M Micro Reducing ee 1 Part No. A B E E1 Body Cube 1/4 1/2 UP4M /8 1/4 UP6M /2 1/4 UP8M /2 3/8 UP8M

6 ube Butt Weld ittings (BW) Micro Reducing Elbow 1 Part No. A B E E1 Body Cube 1/4 1/8 UP4M /8 1/4 UP6M /2 1/4 UP8M /2 3/8 UP8M Micro 45 Elbow Part No. B E Body Cube 1/4 UP4M /8 UP6M /2 UP8M Micro ribow Part No. A B E Body Cube 1/4 UP4M /8 UP6M /2 UP8M Micro Cross Part No. A B E Body Cube 1/8 UP2M /4 UP4M /8 UP6M /2 UP8M

7 Short Elbow Part No. B E Wrench lat 1/4 UP4S /8 UP6S /2 UP8S Short Reducing Elbow 1 Part No. B E E1 Wrench lat 3/8 1/4 UP6S /2 1/4 UP8S /2 3/8 UP8S Short ee Part No. A B E Body Cube 1/4 UP4S /8 UP6S /2 UP8S Short Reducing ee 1 Part No. A B E E1 Wrench lat 3/8 1/4 UP6S /2 1/4 UP8S /2 3/8 UP8S

8 ube Butt Weld ittings (BW) ong Reducing Elbow 1 Part No. B t E t1 E1 Wrench lat 3/8 1/4 UP6H ( 7.35) 1.00 ( 4.35) /2 1/4 UP8H (10.22) 1.00 ( 4.35) /2 3/8 UP8H (10.22) 1.00 ( 7.53) /4 1/2 UP12H (16.57) 1.24 (10.22) /4 3/8 UP12H (16.57) 1.00 ( 7.53) /4 1/4 UP12H (16.57) 1.00 ( 4.35) ong Reducing ee 1 Part No. A B E E1 Wrench lat 3/8 1/4 UP6H /2 1/4 UP8H /2 3/8 UP8H /4 1/4 UP12H /4 3/8 UP12H /4 1/2 UP12H /4 UP16H /8 UP16H /2 UP16H /4 UP16H ong Reducing Union 1 Part No. A B E E1 3/8 1/4 UP6H /2 1/4 UP8H /2 3/8 UP8H /4 1/4 UP12H /4 3/8 UP12H /4 1/2 UP12H /4 UP16H /8 UP16H /2 UP16H /4 UP16H

9 Short Reducing Union 1 Part No. A B E E1 1/4 1/8 UP4S /8 1/4 UP6S /2 1/4 UP8S /2 3/8 UP8S Short Cross Part No. A B E Wrench lat 1/4 UP4S /8 UP6S /2 UP8S ong Elbow Part No. B E Wrench lat 1/4 UP4H /8 UP6H /2 UP8H /4 UP12H UP16H ong ee Part No. A B E Wrench lat 1/4 UP4H /8 UP6H /2 UP8H /4 UP12H UP16H

10 Basic Composition of Metal Seal ittings Basic Composition of uni-primet R Metal Seal ittings uni-primet R Metal Seal ittings are made up of five basic components as shown below (uni-primet R 메탈씰피팅은아래의다섯가지기본제품으로구성됩니다.) emale Nut ong Gland-S Gasket ong Gland- Male Nut Assembly Example of uni-primet R Mettal Seal ittings Example of General Combination Welding Section Dimensions (1nch) emale Nut ong Gland - S Gasket ong Gland - Male Nut 1/4-1/4 USN04 UPG04S UNG04 UPG04 USMN04 1/4-3/8 UPG08-06 UPG08-04S 1/4 - l/2 UPG08 3/8 - l/4 UPG /8-3/8 UPG08-06S UPG08-06 USN08 UNG08 3/8 - l/2 UPG08 USMN08 1/2 - l/4 UPG /2-3/8 UPG08 UPG /2-1/2 UPG08 Note : here are two types of basic dimensions for each part, 04 and 08. Please note that it is not possible to assemble parts with different basic dimension codes. 표상의예시는 1/4 와 1/2 에대한기본구성입니다. 튜브외경사이즈가다른제품은기본구성으로조립불가능합니다. 10

11 Part Number of Metal Seal ittings uni-primet R Metal Seal ittings are ordered by part number as shown below. ➊ Material Code( 재질 ) UP : PRIME US : SUS316 UN : NICKE (Gasket only) ➋ Basic Configuration Code( 제품종류 ) N : emale Nut G : Micro Gland MN : Male Nut DMU : Double Male Union G : Gasket BHU : Bulkhead Union CP : Cap DU : Double emale Union PG : Plug RA : Reducing Adapter G : ong Gland UE : Union Elbow SG : Short Gland U : Union ee CC : Close Coupling ➌ Basic Dimension Code 04 : 1/4 (6.35mm) 08 : 3/8 (9.53mm) 1/2 (12.70mm) UP G S C - U ➍ ube OD Designations for Different Size his indicates only products with differing sizes ( 본제품은이경제품에한함 ) 04 : 1/4 (6.35mm) 06 : 3/8 (9.53mm) ➐ Material Code U : PRIME- VIM / VAR( 빔바 ) ➎ Code Indicating Nut Matched to the Gland Designation only glands. S : Glands suited to emale Nuts : Glands suited to Male Nuts ➏ Code Indicating Internal Surface Polishing evel( 내면조도 ) C : PJ Polishing + Electro Polishing + Precisionwashing Rmax. 0.7 μm C1 : Ultra Precision PJ Polishing + Electro Polishing + Precision Washing Rmax. 0.4 μm BA : Precision Machining + Pure Water Washing Rmax. 2.5 μm 11

12 Metal Seal ittings GAND BW ong Gland-S Part No. A B E 1/4 1/8 UPG04-02S /4 UPG04S /2 1/4 UPG08-04S /2 3/8 UPG08-06S /2 UPG08S /4 UPG12S Part No. A B E 1 2 1/4 1/8 UPG04-02S BW ong Gland- Part No. A B E 1/4 UPG /4 PUG /8 UPG /2 UPG /4 UPG UPG BW Short Gland-S Part No. A B E 1/4 UPSG04S /2 1/4 UPSG08-04S /2 3/8 UPSG08-06S /2 UPSG08S

13 BW Short Gland- Part No. A B E 1/4 UPSG /2 1/4 UPSG /2 3/8 UPSG /2 UPSG BW Micro Gland-S Part No. A B E 1/4 UPMG04S /2 1/4 UPMG08-04S /2 3/8 UPMG08-06S /2 UPMG08S BW Micro Gland- Cap Part No. A B E 1/4 UPMG /2 1/4 UPMG /2 3/8 UPMG /2 UPMG Part No. A B Hex lat 1/4 UPCP /16-18UN 3/8 1/2 UPCP /8-14UN 3/4 UPCP /4-18UN 1 UPCP /2-20UN-2B M Plug Part No. A Hex lat 1/4 UPPG /16-18UN 3/8 1/2 UPPG /8-14UN 3/4 UPPG /4-18UN 1 UPPG /2-20UN-2A M 13

14 Metal Seal ittings NU / GASKE emale Nut Part No. A Hex lat x M 1/8 USN /16-24UN 1/4 USN /16-18UN 3/8 1/2 USN /8-14UN 3/4 USN /4-18UN 1 USN /2-20UN-2B (HR ype) Part No. A Hex lat 3/8 1/4 USN04HR /16-18UN x M Male Nut Part No. A Hex lat 1/8 USMN /16-24UN 1/4 USMN /16-18UN 3/8 1/2 USMN /8-14UN 3/4 USMN /4-18UN 1 USMN /2-20UN-2A (HR ype) Part No. A Hex lat E M 1/4 USMN04HR /16-18UN E M Gasket/Gasket Retainer Assembly Part No. A E x 1/4 UNG /8 1/2 UNG Part No. A E x 1/4 UNG04R /8 1/2 UNG08R Materials : Nickel -UNG Sus - SNG 14

15 EMAE UNION Double emale Union Part No. A E Hex lat 1/4 UPDU /16-18UN 3/8 1/2 UPDU /8-14UN M Double emale Reducing Union Part No. A B E Hex lat 3/8 1/2 1/4 UPDU /8-14 UN 9/16-18UN M1 M2 COUPING Close Coupling Part No. A E 1 Hex lat 2 Hex lat 1/4 UPCC /16-18UN 9/16-18UN 3/8 1/2 1/4 UPCC /8-14UN 9/16-18UN 1/2 UPCC /8-14UN 7/8-14UN M1 M2 UNION Double Male Union Part No. A E Hex lat 1/4 UPDMU /16-18UN 3/8 1/2 UPDMU /8-14UN M 15

16 Metal Seal ittings UNION Double Male Reducing Union Part No. A E Hex lat 3/8 1/2 1/4 UPDMU /8-14UN 9/16-18UN M1 M2 Bulkhead Union Part No. A B E Hex lat 1/4 UPBHU /16-18UN 3/8 1/2 UPBHU /8-14UN 3/4 UPBHU /4-18UN 1 UPBHU /2-20UN-2A M Union Elbow Part No. E Body Cube 1/4 UPUE /16-18UN 3/8 1/2 UPUE /8-14UN M Union ee Part No. A E Body Cube 1/4 UPU /16-18UN 3/8 1/2 UPU /8-14UN M 16

17 HR YPE GAND / BODY HR BW Gland Part No. A B E E1 3/8 1/4 UPGHG04-06B HR BW Body Part No. A B E E1 Hex lat 3/8 1/4 UPGHB04-06B ADAPER Reducing Adapter Part No. A B E Hex lat M1 3/8 1/2 1/4 UPRA /8-14UN 17

18 S-ype Cylinder Connector S-ype Cylinder Connector ype A ype B ype C No. CGA & JIS Number ype UPDwg. No. Male & emale Nut Std. Hex lat Internal Gasket H1 H2 Surface inish Material 1 CGA296 A N601B UNS-2A-RH-EX H27 H24 0.4SEP... 2 CGA320 B N603B NGO-RH-IN H24 H30 0.4SEP PCE(R) 3 CGA326 C N604B NGO-RH-IN H24 H30 0.4SEP... 4 CGA330 B N605B NGO-H-IN H24 H30 0.4SEP PCE(R) 5 CGA350 C N608B NGO-H-IN H24 H30 0.4SEP... 6 CGA510 A N609B NGO-H-EX H30 H24 0.4SEP... 7 CGA540 C N610B NGO-RH-IN H27 H30 0.4SEP... 8 CGA580 A N611B NGO-RH-EX H32 H27 0.4SEP... 9 CGA590 A N612B NGO-H-EX H32 H27 0.4SEP CGA660 B N613B NGO-RH-IN H29 H32 0.4SEP PCE(R) 11 CGA670 B N614B NGO-H-IN H29 H32 0.4SEP PCE(R) 12 CGA678 B N616B NGO-H-IN H29 H32 0.4SEP PCE 13 CGA679 B N617B NGO-H-IN H29 H32 0.4SEP PCE 14 JIS21-14-R B N621B JIS21-14-OR H24 H30 0.4SEP PCE(R) 15 JIS B N622B JIS21-14-O H24 H30 0.4SEP PCE(R) 16 JIS22-14-R B N623B JIS22-14-OR H24 H30 0.4SEP PCE(R) 17 JIS B N624B JIS22-14-O H24 H30 0.4SEP PCE(R) 18 JIS23-14-R B N627B JIS23-14-OR H26 H30 0.4SEP PCE(R) 19 JIS26-14-R B N625B JIS26-14-OR H29 H32 0.4SEP PCE(R) 20 JIS B N626B JIS26-14-O H29 H32 0.4SEP PCE(R) 18

19 NU emale Nut Part No. A Hex B C U0830R NGO-RH-IN U NGO-H-IN U0908R NGO-RH-IN U1035R NGO-RH-IN U NGO-H-IN USJ21R JIS21-14-OR Part No. A Hex B C UJS JIS21-14-O UJS22R JIS22-14-OR UJS JIS22-14-O UJS23R JIS23-14-OR UJS26R JIS26-14-OR UJS JIS26-14-O Male Nut Part No. A Hex B C UM0960R NGO-RH-EX UM NGO-H-EX UM0803R UNS-2A-RH-EX UM NGO-RH-IN S-ype GAND / BEARING S-ype Gland A Bearing Part No. A B C D UG06S UG08S Part No. A B C UBR UBR S-ype Gland B Part No. A B C D UG01S UG02S UG03S Part No. A B C D UG07S UG10S UG11S S-ype Gland C Part No. A B C D UG04S UG05S UG09S

20 S-ype Cylinder Connector Parts ist ( 구성부품표 ) No. Connector ype Parts Nut Bearing Gland Gasket Plug 1 UCGA296 UM0803R X UG08S X UPG296 2 UCGA320 U0830R UBR01 UG01S UG01A UPG320 3 UCGA326 U0830R UBR01 UG04S X UPG326 4 UCGA330 U0830 UBR01 UG01S UG01A UPG330 5 UCGA350 U0830 UBR01 UG05S X UPG350 6 UCGA510 UM0880 X UG06S X UPG510 7 UCGA540 U0908R UBR02 UG09S X UPG540 8 UCGA580 UM0690R X UG06S X UPG580 9 UCGA590 UM0690 X UG06S X UPG UCGA660 U1035R UBR02 UG03S UG03A UPG UCGA670 U1035 UBR02 UG03S UG03A UPG UCGA678 U1035 UBR02 UG07S UG01B UPG UCGA679 U1035 UBR02 UG10S UG05B UPG UJIS21-14-R UJS21R UBR01 UG11S UG02A UPG21R 15 UJIS UJS21 UBR01 UG11S UG02A UPG21 16 UJIS22-14-R UJS22R UBR01 UG02S UG02A UPG22R 17 UJIS UJS22 UBR01 UG02S UG02A UPG22 18 UJIS23-14-R UJS23R UBR01 UG02S UG02A UPG23R 19 UJIS26-14-R UJS26R UBR02 UG02S UG03A UPG26R 20 UJIS UJS26 UBR02 UG02S UG03A UPG26 Remarks 20

21 PUG emale Plug Part No. A Hex B UPG UPG UPG UPG Male Plug Part No. A Hex B UPG UPG UPG UPG UPG UPG UPG UPG Part No. A Hex B UPG UPG21R UPG UPG22R UPG UPG23R UPG26R UPG GASKE Gasket with SUS Ring Gasket Part No. A B C UG01A UG02A UG03A Part No. A B C UG01B UG05B

22 echnical Information 1 uni-primet R Weld ittings & Metal Seal ittings 22

23 uni-primet R ubes 23

echnical Information 2 ightening Up uni-primet R Metal Seal ittings ( 메탈씰피팅조립법 ) Caution Notes for Installing PJ Metal Seal itting 메탈씰피팅조립시주의사항 1.

When tightening up, please confirm that there are no Insert the gasket into the female nut side and confirm that it is 1 2 scratches or foreign matter on the seal section or gasket set in the proper

In order to maintain cleanliness and to prevent damage to the seal section, please open the package and remove the nut immediately prior to installation. 3.

If you try to tighten up by force parts not properly aligned or pipes of unsuitable length, this can damage the sealing performance. 3 ighten up by hand until all the parts are in contact.

eak esk Port를사용할수있도록 Seal부위와 Gasket이정확한위치에있는지확인한후부품이맞닿을때까지손으로조여줍니다. 4 or the final tightening up process, use two spanners or other tools.

24 echnical Information 2 ightening Up uni-primet R Metal Seal ittings ( 메탈씰피팅조립법 ) Caution Notes for Installing PJ Metal Seal itting 메탈씰피팅조립시주의사항 1. When retightening, please be sure to replace the gasket with a new one. When tightening up, please confirm that there are no Insert the gasket into the female nut side and confirm that it is 1 2 scratches or foreign matter on the seal section or gasket set in the proper position. When inserting the gasket, be careful not to damage the seal section. 체결시 Seal부위와 Gasket상에흠집이나이물질이없어야합니다. Gasket을 emale Nut에정확히집어넣고이때 Gasket에손상이가지않도록주의합니다. 2. In order to maintain cleanliness and to prevent damage to the seal section, please open the package and remove the nut immediately prior to installation. 3. When installing, ensure that the welded tube and the parts of the uni-primet R metal seal fitting are aligned properly. If you try to tighten up by force parts not properly aligned or pipes of unsuitable length, this can damage the sealing performance. 3 ighten up by hand until all the parts are in contact. At that time, confirm that the seal section and gasket are set in the correction positions. Confirmation can easily be carried out using the leak test port. eak esk Port를사용할수있도록 Seal부위와 Gasket이정확한위치에있는지확인한후부품이맞닿을때까지손으로조여줍니다. 4 or the final tightening up process, use two spanners or other tools. Secure the male nut and the body side and tighten up by rotating the female nut from 45 to 60 degrees. At this time, please be careful, as if parts other than the female nut start to rotate, this can damage the seal section and it may result in insufficient sealing performance. 스패너를사용하여 Metal Seal itting 의 Body 와 Male Nut 를고정시키고 emale Nut 를 45~60 정도돌려줍니다. 이때, emale Nut 를제외한다른부품이회전시 Seal 부위에손상을일으켜누설이발생할수있으니주의하여주시기바랍니다. 4. he internal surface of the female nut is silver plated to prevent scuffing when tightening up. If the silver plating is removed by chemical polishing or vacuum brazing processes, there is a danger of problems arising in the tightening up process, so please exercise caution. 1. 재조립시는반드시 Gasket 을새것으로교환하여야합니다. 2. Seal 부위의청정도유지와손상을방지하기위하여조립바로전에포장을개봉하여야합니다. 3. 피팅과튜브는일직선으로위치하여야하며, 일직선이아닌상태에서무리한힘에의한조립은누설의원인이될수있습니다. 4. emale Nut 의내면은조립시손상방지를위하여은도금처리되어있으며, 만약은도금이화학적부식이나다른요인에의하여벗겨지면누설의원인이될수있습니다. 5 inally, once again confirm that the seal section and the gasket are in the proper positions. his completes the tightening up process. Seal 부위와 Gasket 이정확한위치에있는지다시한번확인합니다. Pressure / emperature imits for Use of uni-primet R Weld itting) & Metal Seal ittings ( 온도에따른 uni-primet R Weld itting & Metal Seal ittings 의최대허용압력 ) he dimensions of the uni-primet R Weld itting and uni-primet R Metal Seal ittings are matched to the tube size of seamless stainless steel pipes sold in japan. he theoretical maximum service pressure limits for various External Diameler Internal Diameter (mm) Metal hickness (mm) temperatures are as shown in the charts on the below. he basic for the calculation of these values in Article 14, Clause 1, Number 1 of the Special Equipment Inspection Regulation of the High Pressure Gas Control aw of Japan Maximum Service Pressure by emperature MG(kg/ cm2 G) 0 ~ / / / / /

echnical Information 3 eatures of uni-primet R Weld itting and Metal Seal ittings (uni-primet R 의특징 ) We provided the BW (ube Butt Weld) type of configuration for the welding section on Metal Seal

End of welding section: A special polishing method is used to give a smooth surface and there is no beveling of the internal and external walls.

25 echnical Information 3 eatures of uni-primet R Weld itting and Metal Seal ittings (uni-primet R 의특징 ) We provided the BW (ube Butt Weld) type of configuration for the welding section on Metal Seal ittings. BW YPE : his is the optimal configuration for butt welding using an automatic IG welding machine, used in recent years for ultra high purity piping. End of welding section: A special polishing method is used to give a smooth surface and there is no beveling of the internal and external walls. Internal and External Diameter olerance: hanks to precision machining and thorough quality control, we provide products with extremely stable accuracy in terms of metal thickness and roundness. 모든제품의용접부위에 BW(ube Butt Weld) 방식을적용하였고, BW 방식은고청정배관에사용되는 IG 용접기를사용한용접에최상의조건을제공합니다. 정확한용접부위를위하여특수한연마방식을사용하여모든피팅의용접부위를가공하여, 용접시내외면에비드가발생하지않습니다. 최신의정밀생산기술및엄격한품질관리를통하여내외경을최소공차범위내에서정확하게생산됩니다. BW : ong Gland Welding Point Handling of uni-primet R Weld ittings and Metal Seal itting (uni-primet R 의취급상주의사항 ) High purity nitrogen gas is filled into the packaging of the PJ Metal Seal ittings & PJ WED IINGS, and the product is triple layer packed in antistatic polyster sheet. In order to maintain the cleanliness state, please observe the following points. (1) Please effect storage and movement with the product still in the triple layer packaging. (2) When taking products into a clean room, please remove the particles adhering to the outermost package amd take it into the clean room. (3) Please effect storage and movement with the product still in the inner two package layers, Remove the second package layer before use. (4) Please do not remove the innermost package until directly prior to welding work. BW : ong Elbow Welding Point 모든 uni-primet R 제품은정전기방지용 PE 재질로포장되어있으며, 안쪽포장은고순도질소가스로충진되어있습니다. 청정도를유지하기위하여다음과같이취급하여주시기바랍니다. (1) 납품한포장상태로보관하여주십시요. (2) 외포장에붙어있을수있는이물질을제거한후제품을크린룸으로운반하여주십시요. (3) 사용전외포장을제거하여주십시요. (4) 고순도질소로충진된내포장은사용직전에개봉하여주십시요. 25

Super Clean and Ultra Precision Super Clean & Ultra Precision Seamless BA/EP ubes for Semiconductor & Display In advanced technology areas such as semiconductor equipment and ultra high vacuum

26 Super Clean and Ultra Precision Super Clean & Ultra Precision Seamless BA/EP ubes for Semiconductor & Display In advanced technology areas such as semiconductor equipment and ultra high vacuum equipment, high quailty and a high degree of cleanliness are extremelyimportant requirements for the parts of manufacturing equipment. SUPER CEAN SEAMESS EP UBES are manufactured using PRIME, a material in which the impurities have been reduced to the absoulte minimum and nonmetallic inclusions and gas components have been reduced to the minimum possible. his tube meets the requirements for ultra high purity gas supply lines such as internal smoothness, cleanlines, improved corrosion resistance and reduced gas and particle emission from the metal. hus, the tubes make a major contribution to improving performance of the semiconductor manufacturing equipment process. 최신의생산기술및촤상의품질이요구되는반도체및디스플레이산업에서는제조설비및장비에사용되는부품에대한완벽한진공및청정도가가장중요한요소로인식되고있습니다. uni-primet R EP ube 는가스및비금속성성분의유입을방지하기위해일본다이또사의 VIM/VAR 로생산되어내면조도및청정도, 튜브의가스및입자의방출을최소화하여고순도가스가사용되는반도체및디스플레이생산설비및장비의성능에최적의조건을제공합니다. Guaranteed evels of Chemical Components in (uni-primet R 소재의화학조성 ) Chemical Components : Wt% C Si Mn P S Cu Ni Cr Mo Al N* O* H* PRIME Guaranteed evels in Manufacturing Stage PRIME Actual evels in Manufactured Product PRIME - VIM/VAR Guaranteed evels in Manufacturing Stage ~ ~ ~ ~ ~ ~ Japanese Standard JIS G3459 SUS316P ~ ~ ~ 3.00 USA Standard ASM A269 P ~ ~ ~ 3.00 Comparison of Cleanliness of uni-primet R and General SUS316 Steel (uni-primet R 소재와일반 316 의청정도비교 ) Guaranteed evel of Internal Roughness (uni-primet R 의내면조도 ) External 3.18mm OD : Rmax 0.5 μm Ave. Diameter 12.70mm OD : Rmax 0.7 μm Ave. 26

ubes for High-ech Applications Internal Roughness Statistics ( 내면조도 ) Electro-

x1000 Weldability (uni-primet 소재와일반 316 의용접성비교 ) Std.316 (1.6%Mn) uni-primet (0.

05%Mn) Quality Assurance System (uni-primet 품질관리체계 ) uni-primet UBES are subjected to

irst Material ests Analysis of Chemical Constituents Analysis of Nonmetallic

irst and Second Product ests Internal Roughness Measurement ests Inspection of

hird Product ests Internal Roughness Measurement est Inspection of Appearance and

27 ubes for High-ech Applications Internal Roughness Statistics ( 내면조도 ) Electro- Polishing (BA 와 EP 튜브비교 ) BA ube Surface x300 BA ube Surface x1000 EP ube x300 EP ube x1000 Weldability (uni-primet 소재와일반 316 의용접성비교 ) Std.316 (1.6%Mn) uni-primet (0.3%Mn) uni-primet -VIM/VAR (0.05%Mn) Quality Assurance System (uni-primet 품질관리체계 ) uni-primet UBES are subjected to the quality tests listed below. 1. irst Material ests Analysis of Chemical Constituents Analysis of Nonmetallic Inclusions Mechanical Property est Ultrasonic low Detection Examination Inspection of Appearance and Dimensions 2. Second Material ests Internal Quality est Permeability est Handness est 3. irst and Second Product ests Internal Roughness Measurement ests Inspection of Appearance and Dimensions 4. hird Product ests Internal Roughness Measurement est Inspection of Appearance and Dimensions Moisture Measurement est Oiliness Measurement est 5. ourth Product ests he following tests are implemented at the request of customers ESCA : Electron Spectroscopy for Chemical Analysis. AES : Auger Electron Spectroscopy Corrosion est Internal Surface Pitting Measurement Elusion Ion Measurement Micro/Macro ests Particle Measurement est 27

28 Standard Specification/BA ubes Outside Diameter Wall hickness olerance Part No. mm mm O.D.(mm/inch) W.. 04BA (1/4) 1.00 ±0.07/± BA (3/8) BA (1/2) BA (1/2) 1.24 ±0.10/±0.004 ±10% 10BA (5/8) 1.24 Roughness Rmax 3.0 μm (Ra 12 ) 12BA (3/4) BA (3/4) BA (1) 1.65 ±0.12/±0.005 Rmax 4.0 μm (Ra 16 ) Basic length per unit is 4 meter Other Size ubes are also available upon request. 한본당길이는 4 미터입니다. 상기표에기재되어있지않은규격의튜브도공급가능합니다. Standard Specification/uni-primet EP ubes Part No. Outside Diameter Wall hickness ength Roundness mm olerance mm olerance mm olerance 02EP EP (1/8) 6.35(1/4) ±0.05 ±0.05 2,000 4,000 06EP (3/8) EP (1/2) EP (1/2) 1.24 Basic length per unit is 4 meter Other Size ubes are also available upon request. 한본당길이는 4 미터입니다. 상기표에기재되어있지않은규격의튜브도공급 1.00 ±0.05 4,000 ±0.05 ±10% ±0.05 ±10% 4,000 4,000 12EP (3/4) ±10% 4,000 12EP (3/4) ±10% 4,000 16EP (1) ± ±10% 4, /1000 본사및공장인천광역시남동구고잔동 704 번지남동공단 133 블럭 1 롯트 E : (032) ( 대 ) AX:(032) unilok@unilok.com 서울직매장서울특별시구로구구로동 구로기계공구상가 D 호 E : (02) ( 대 ) AX:(02) Head Office and actory 133 Block-1ot, Namdong Industrial Complex. 704, Gojan-Dong, Namdong-Gu, Incheon, KOREA. E : AX : unilok@unilok.com Seoul Office D , Guro ools Center , Guro-Dong, Guro-Gu, Seoul, KOREA. E : AX :

Stainless steel (Kor-Lok)

Stainless steel (Kor-Lok) www.korlok.com Stainless Steel Seamless Tubes AP/BA/EP Fine Stainless Steel Seamless AP Tubes for Instrumentation & High Tech Application Features (특징) Made of high quality raw materials Strict control