Microsoft Word - TP1

Size: px

Start display at page:

Download "Microsoft Word - TP1"

정희 두
5 years ago
Views:

1 ======================================================================================================================== EXCO 지하 1F Lobby 일시 : 2월 25일 ( 목 ) 09:00-13:00 세션명 : [TP1] Poster Session Ⅰ ======================================================================================================================== D. Thin Film Technology 분과 TP1-1 TP1-2 TP1-3 TP1-4 TP1-5 TP1-6 TP1-7 Application of Micro Corona-Kelvin Technique to Non-contact Monitoring of Advanced ONO Type Flash Device 저자 : Jae Hyun Kim, Seong Jun Heo, Chang Hwan Lee, Koon Ho Bae, Hyung Won Yoo, and Chul Hong Kim 소속 : Hynix Semiconductor Inc. 잉크젯프린팅을이용한 OTFT 인버터저자 : 김민규, 강찬모, 이창희소속 : 서울대학교전기컴퓨터공학부, 반도체공동연구소 (ISRC) Enhanced Tunneling Efficiency of VARIOT type (ZrO 2 ) x (SiO 2 ) 1 - x /SiO 2 Stacks for Flash Memory Devices 저자 : 강해윤, 허민영, 손현철소속 : 연세대학교신소재공학과 Rapid Atomic Layer Deposition of Various High-k Dielectric Films Using Nitrous Oxide Plasma and Metal-Organic Precursors 저자 : Seok-Jun Won 1,2, Yu Jin Choi 1, Sungin Suh 1, and Hyeong Joon Kim 1 소속 : 1 Department of Materials Science and Engineering and Inter-University, 2 Advanced Process Development Team, System-LSI division, Samsung Electronics Co. Ltd. Electrical and Chemical Properties of Lanthanum Silicate Films Deposited Using La[N(SiMe 3 ) 2 ] 3 and H 2 O in Atomic Layer Deposition with Liquid Delivery System 저자 : Yu Jin Choi, Seok-Jun Won, Hyung-Suk Jung, Sungin Suh, and Hyeong Joon Kim 소속 : Department of Materials Science and Engineering and Inter-University Study on Particle Formation and Decomposition Characteristics of Co Precursors Decomposed by the Thermal and Plasma Treatments 저자 : 서경천 1,2, 나정길 1,3, 윤주영 1, 신재수 2, 김태성 3, 강상우 1 소속 : 1 한국표준과학연구원진공센터, 2 대전대학교신소재공학과, 3 성균관대학교기계공학과 Comparison of Electrical Properties of MIM Capacitors with Multi-layer High-k Dielectrics 저자 : 박상욱, 권혁민, 한인식, 박병석, 복정득, 이희덕소속 : 충남대학교전자전파정보통신

2 TP1-8 TP1-9 TP1-10 Ferroelectric Properties of Pt/Pb(Zr, Ti)O 3 /Al 2 O 3 /ZnO/Pt Stack Capacitors for Nonvolatile Memory Applications 저자 : Min Hyuk Park, Hyun Ju Lee, and Cheol Seong Hwang 소속 : Department of Material Science and Engineering and Inter-university Thickness Dependency of MAHONOS Structure TBE-CTF Memory 저자 : Se-Man Oh and Won-Ju Cho 소속 : Department of Electronic Materials Engineering, Kwangwoon University Atomic Layer Deposition of (GeTe 2 ) x (Sb 2 Te 3 ) y Films Using Novel Precursors 저자 : Taeyong Eom 1, Seol Choi 1, Byung Joon Choi 1, Sangho Rha 1, Woongkyu Lee 1, Cheol Seong Hwang 1, and Moo Seong Kim 2 소속 : 1 Department of Materials Science and Engineering and Inter-university 2 Air Products and Chemicals Korea inc., TP1-11 TP1-12 TP1-13 TP1-14 Initial ALD on Hydroxylized Si (001) Surface with TMA: A First Principles Study 저자 : Dae-Hee Kim 1, Dae-Hyun Kim 1, Yong-Chan Jeong 1, Hwa-Il Seo 2, and Yeong-Cheol Kim 1 소속 : 1 Department of Materials Engineering, Korea University of Technology and Education, 2 School of Information Technology, Korea University of Technology and Education Structural Study of HfO 2 /TiO 2 Stacked Films Grown by Atomic Layer Deposition 저자 : Minha Seo, Seong Keun Kim, and Cheol Seong Hwang 소속 : Department of Materials Science and Engineering and Inter-university Chemical Mechanical Polishing of GST Film with Different Types of Abrasives 저자 : 신동희 1, 정민군 2, 이충현 2, 박형순 3, 임대순 1,2 소속 : 1 고려대학교나노반도체공학과, 2 고려대학교신소재공학과, 3 하이닉스반도체선행공정팀 Asymmetric Effect of Thermal Annealing on Unipolar and Bipolar Resistance Switching of ALD ZrO 2 Films 저자 : 김종기, 나희도, 유정호, 고대홍, 손현철소속 : 연세대학교신소재공학과 TP1-15 Inductive Coupled Plasma Dry Etching of ZnO Thin Film Using a Diluted CF 4 Gas 저자 : Doyoung Kim 1, Inchan Hwang 2, Jongyeog Son 2, and Hyungjun Kim 1 소속 : 1 School of Electrical and Electronic Engineering, Yonsei University, 2 Materials Science and Engineering, Pohang University of Science and Technology TP1-16 Silicon-rich Silicon Nitride Film Floating-gate Nonvolatile Memory Device with SiO 2 /SiNx Stacked Tunneling Barrier 저자 : Eunkyeom Kim 1, Seungman An 2, Taekyung Yim 2, Won-Ju Cho 3, and Kyoungwan Park 1,2 소속 : 1 Department of Nano Engineering, University of Seoul, 2 Department of

3 Nano Science and Technology, University of Seoul, 3 Department of Electronic Materials Engineering, Kwangwoon University TP1-17 TP1-18 The Effect of the Plasma Pretreatment on Cu Thin Film Growth using the Cu(dmamb) 2 Precursor 저자 : 최종문 1, 이도한 1, 진성언 1, 변동진 1,2, 정택모 3, 김창균 3, 김백만 4 소속 : 1 고려대학교신소재공학과, 2 고려대학교나노반도체공학과, 3 한국화학연구원, 4 하이닉스반도체 Initial Oxidation of GaAs (001)-β2(2 4) Surface: A First Principles Study 저자 : Dae-Hyun Kim 1, Dae-Hee Kim 1, Yong-Chan Jeong 1, Hwa-Il Seo 2, and Yeong-Cheol Kim 1 소속 : 1 Department of Materials Engineering, Korea University of Technology and Education, 2 School of Information Technology, Korea University of Technology and Education F. CMOS Device & Process Technology 분과 TP1-19 TP1-20 TP1-21 TP1-22 Memory Characteristics of Strained-silicon-on-insulator (ssoi) Capacitorless 1T-DRAM Cells Depending on Thermal Annealing Conditions 저자 : M. S. Kim and W. J. Cho 소속 : Department of Electronic Materials Engineering, Kwangwoon University Impact of Arsenic Deactivation Enhanced Diffusion on Reverse Short-Channel Effect of Deep Submicron PMOS Devices 저자 : 신은종, 김현진, 김태우소속 : 동부하이텍반도체사업부공정개발 2 팀 Cost-Effective 0.18um Analog CMOS Process for Power Management Applications 저자 : Y. K. Choi, I. Y. Park, K. M. Park, H. C. Lim, J. H. Moon, C. J. Yoon, N. J. Kim, and K. D. Yoo 소속 : Dongbu HiTek Electrical Characteristics of NiSi/Si Junction Using Sb Interlayer 저자 : 전명심, 박영삼, 현영훈, 장문규소속 : 한국전자통신연구원차세대 I-MEMS 팀 J. Nano-Science & Technology 분과 TP1-23 Low-frequency Noise Characteristics in Multilayer Graphene Transistors 저자 : 1 Jung-Kyu Lee, 1 In-Tak Cho, 2 Dae-Young Jeon, 2 Sunae Seo, 3 Hyuck-In Kwon, and 4 Jong-Ho Lee 소속 : 1 School of Electrical Engineering and Computer Science, Kyungpook National University, 2 Samsung Advanced Institute of Technology, 3 Department of Electronic Engineering, Daegu University, 4 School of Electrical Engineering and Computer Science and Inter-university

4 TP1-24 TP1-25 TP1-26 TP1-27 TP1-28 TP1-29 TP1-30 TP1-31 Fabrication of Al Thin Films with Water-mediated Nano Transfer Printing for Thin Film Transistors 저자 : Jeong M. Dang, Eun B. Kwak, and Myung M. Sung 소속 : Department of Chemistry, Hanyang University Selective Gas Sensors Made of a Multiple ZnO Nanorods via a Simple Solution Process 저자 : Junghwan Huh 1, Jonghyurk Park 2, Hyeyoung Kim 1, and Gyu Tae Kim 1 소속 : 1 School of Electrical Engineering, Korea University, 2 Electronics and Telecommunications Research Institute ZnO Nanowire Field-effect Transistors with Pt Nanocrystals Fabricated on Plastic Substrates for a Non-volatile Memory Application 저자 : Myeongwon Lee 1, Sungsu Kim 1, Sang-Hyun Oh 3, Suk-Goo Kim 3 and Sangsig Kim 1,2 소속 : 1 Department of Electrical Engineering, Korea University, 2 Nano Semiconductor Engineering, Korea University, 3 Research and Development Division, Hynix Semiconductor Inc. Effective Reduction of Leakage Currents in Single-walled Carbon Nanotube Network Thin-film Transistors 저자 : Junhyuk Lee 1, Min-Ho Jeong 2, Eun-Suk Choi 2, Kunhak Lee 2, Chaehyun Lim 1, and Seung-Beck Lee 1,2 소속 : 1 Department of Nanoscale Semiconductor Engineering, Hanyang University, 2 Department of Electronic Engineering and Institute of Nano Science and Technology, Hanyang University The Investigation of Electrical Hysteresis in ZnO Devices 저자 : Hyunjin Ji 1, Jaewan Choi 1, Insung Hwang 2, Jongheon Lee 2, Siegmar Roth 1, Gyu-Tae Kim 1 소속 : 1 School of Electrical Engineering, Korea University, 2 Department of Material Science, Korea University Growth Behaviors of Silica Nanowires using Heteroleptic Precursor and Water Vapor 저자 : Sanghyun Park, Jaeyeong Heo, and Hyeong Joon Kim 소속 : Department of Materials Science and Engineering, Seoul National University 불규칙하게분포된 Ag 나노입자를이용한무반사 ITO SWS 나노구조제작저자 : 박경철, 최은실, 송영민, 이용탁소속 : 광주과학기술원정보통신공학과 Microfluidic System 을이용한 Electrochemical Cell Lysis 저자 : 장유철 1, 주기성 1, Kamrul Islam 1, 이현호 2, 김용상 1,3 소속 : 1 명지대학교나노공학과, 2 명지대학교화학공학과, 3 명지대학교전기공학과 M. RF Design 분과 TP1-32 Design of High Security HF-band Passive RFID Tag IC

5 저자 : Duong Huynh Thai Vo, Hung Quoc Huynh, Quoc Tai Duong, Sang-Hoon Hong, and Jong-Wook Lee 소속 : School of Electronics and Information, Kyung Hee University TP1-33 De-embedding Accuracy for Interconnection Variation 저자 : Jaeho Lee, Jaehong Lee, Byung Gook Park, Jong Duk Lee, and Hyungcheol Shin 소속 : Inter-university Semiconductor Research Center and School of Electrical Engineering, Seoul National University P. Device for Energy (Solar Cell, Power Device 등 ) 분과 TP1-34 TP1-35 Effect of LiF Interlayer and Thickness Variation of the Conjugated Polymer/Fullerene Photoactive Layers on Organic Solar Cell Devices 저자 : Seungju Kim and Sangouk Ryu 소속 : Electronic Engineering, Dankook University Transparent Conductive Indium Zinc Tin Oxide Thin Films for Organic Solar Cell Applications 저자 : Hong Chan Ma 1, Jeong-Joo Kim 2, and Hee Young Lee 1 소속 : 1 School of Materials Science and Engineering, Yeungnam University, 2 School of Materials Science and Engineering, Kyungpook National University

???춍??숏

???춍??숏 Suseong gu Council Daegu Metropolitan City www.suseongcouncil.daegu.kr Contents SUSEONG GU COUNCIL DAEGU METROPOLITAN CITY 10 www.suseongcouncil.daegu.kr 11 SUSEONG GU COUNCIL DAEGU METROPOLITAN CITY