EP-B-P211.eps

PFA/PFW Series PFA Series PFW Series PF00 Series Alphabet Index 8

A COM B COM DCV GND F.G. R.S. HOLD COM BANK BANK COUNT PRESET FUNC. AC00~0VCOM OUTOUTOUTOUTOUTS.STOP RD SD SG RS-C PFA/PFW Series, N M/C MULTI COUNTER:CEU (P.) UP LEFT RIGHT M/C DOWN MODE SEL. SET M/C Alphabet Index 87

6 PFA Series PFA Series PFW Series PF00 Series 76 % (PFA/PFW) CONNECTOR 0mm 0mm PF00 6mm PFA00/PFW00 CH CH copy copy copy CH CH 86

PFA Series PFA7 0 0 7 M 0 0L/min 0 0L/min 000L/min 000L/min 000L/min 0 0 0 0 /8 / /8 / 0 N F Rc NPT G L/min 0 00 00 00 PFA7070 PFA77 PFA7 7 67 (P.) N M m NPN PNP X79 P.0 M ) ) PFA70 PFA70 PFA7 PFA7 PFA7 0.0.L/min 0.0.L/min 0L/min 0.L/min 0.L/pulse..L/min..L/min 0L/min 0.L/min 0. L/pulse 0L/min 0L/min 000L/min L/min L/pulse 00L/min 00L/min 000L/min L/min L/pulse L/min, CFM 0 - L/min, CFM 0 - L, ft 0-00 ±F.S. ±F.S. ±F.S. ±F.S.(, ), ±F.S.(00, ) 0mA 60mA 0g 90g /8, / /8 digit Segment LED -0kPa0.MPa -0kPa0.7MPa.0MPa 0999999L L/min L/min 000L/min L/min L/pulse NPN80mA, V80mA0V, PNP80mA,.V80mA), NPN PNP ONOUTOUT s (digits) DCV±0 IP6-8 ) AC000V, 0MΩ(DC00V 000Vp-pμsns 7 CE 88 70mA /

PFA Series PFA 0 0 C 0 0L/min 0 0L/min 000L/min 000L/min 000L/min 0 0 0 0 /8 / /8 / 0 (L/min) 0 00 00 N F 00 Rc NPT G PFA00 PFA PFA (P. ) N (P. ) C M e-con (~V) (~0mA) PFA00 PFA00/00 PFA00 PFA0 PFA0 PFA PFA PFA 0L/min 0L/min 000L/min 000L/min 000L/min 0kPa0.MPa 0kPa0.7MPa.0MPa 00 ±F.S. ±F.S.(PFA), ±F.S.(PFA) ±F.S.(, ) ±F.S.(00, ) kωpfa V) ±F.S., 00kΩkΩ) 0mA) ±F.S., 00Ω(DCV), 600Ω(DCV) 00g DCV±0 00mA IP6 00, 8 ) AC000V 0MΩ(DC00V ) 000Vp-pμsns /8, / /8 / 0g 0mA Alphabet Index 89

PFA Series PFA 0 0 A M 0L/min 0 0L/min 000L/min 000L/min 000L/min PFA0 PFA0 PFA PFA PFA 0 A NPN PNP M SI L/min L PFA000 PFA0 ) ) ) PFA00/0 0.0.L/min..L/min 0.0.L/min..L/min 0.L/min 0.L/min 0L/min 0L/min L/min PFA0/ 00L/min 00L/min L/min L/min L/min L/min ( 0ms) ) 0.L/pulse 0.L/pulse L/pulse L/pulse L/pulse, ) ) ) ) L/min, CFM 0 - L, ft 0-0999999L ±F.S. ±F.S. L/min, CFM 0 - () 0mA ±F.S.(, ) ±F.S.(00, ) g 60mA 6) NPN (PFA00, PFA0) PNP (PFA0, PFA) : 80mA : V ( 80mA) : 0V : 80mA :.V ( 80mA) NPN PNP ) digit, 7segment LED ON OUT OUT DCV±0 s : (0), 7) : (digits) IP0 00, -8 ) AC000V, 0MΩ(DC00V) 000Vp-p μs ns ) ) ( SI(L/min L) ) 0 C, 0.kPa 0 C, 0.kPa, 6% RH(ANR) ) OFF ) PFA 6) 7) digit P_, P_ n_, n_ 7digit ( OUT n_, n_, P_, P_, ) 8) CE 90

PFA Series ( m) PFA0 0 M NPN PNP 0 M SI (P.) (P.) A B C () + PFAV ) ) ) (: 0ms) ), ) ) ) ) ) ) ) ( ) PFA0-- 0.0.L/min 0.0.L/min 0.L/min 0.L/pulse L/min, CFM 0 - L, ft 0 - PFA0--..L/min..L/min 0.L/min 0.L/pulse PFA00/0 PFA-- 0L/min 0L/min L/min L/pulse PFA-- 00L/min 00L/min L/min L/pulse L/min, CFM 0 - L, ft 0-0999999L, 0999999ft 0-0999999L, 0999999ft 0 - DCV±0) ma) [] 0mA 0mA) DCV : 800kΩ) : 80mA NPN (PFA00) : V ( 80mA) : 0V : 80mA PNP (PFA0) : V ( 80mA) NPN PNP ) () : (0) : (digits) s ±F.S. ±F.S. ±F.S.(00, ) : digit, 7segment () : digit, 7segment () ON OUT : IP6, IP0 00, 060 ) 8RH ) 00Vp-p μs ns : 8P: P(e-con) PBT, PET, CR 60g ) ) ( -M SI(L/min L)OFF ) 0 C, 0.kPa 0 C, 0.kPa, 6% RH(ANR) ) Vcc 0V ) ) 6) CE PFA-- L/min L/min L/min L/pulse 9 Alphabet Index

PFA Series PFA70,0 PFA70,0 PFA7,.0.0 0 (kpa) 0.8 0.6 0. (kpa)..0..0 (kpa) 8 6 0. 0. 0. 7. 0 0 0 0 0 0 0 0 0 0 7 00 (L/min) (L/min) (L/min) PFA7, PFA7, 0 0 0 (kpa) 0 (kpa) 0 0 0 0 0 0 00 0 00 (L/min) 0 0 00 0 00 0 00 0 00 0 00 (L/min) PFA70 70 PFA0 0 PFA7 7 7 PFA q w e r w t q w e r t w y e ADC NBR SUS PBT PBT ADC NBR PBT SUS PBT PBT 9

PFA Series PFA7070 zx v 98 8 60 67 8 7 6.6 FLOW SWITCH OUT FOR AIR OUT UP SET DOWN OUT OUT PFA7--7(-M) DC ~V ø. 0 0 (.) OUT OUT PFA7--67(-M) DC ~V ø. PFA777 6 88 6.6 FLOW SWITCH U P SET OUT OUT FOR AIR DOWN ø. 0 0 (.) 0 DC(+) OUT DC( ) OUT 7 Alphabet Index 9

zx, PFA00 PFA 8. 60 98 0 0 ø. B.6 8 ø. 76. 6 0 0 0 B.6 PFA/ B 6 7 A B 6 7 A 8 8 6 8 7 (PFA0/) DC NC ~V (PFA0/) DC ~V 6 8 7 PFA- PFA--) PFA--) DC ~V (PFA0/) 6 8 7 (mm) (mm) DC(+) NC DC( ) OUT (6.) A ø. (6.) A 9 PFA Series

PFA Series PFA-A 0.8 0. 0. SMC FLOW SWITCH RESET SET UNIT.8 A zx, PFA NC PFA0-A 8 7 6 OUT OUT DC~V 9. 6. 7. (=.6) 8 M 6 +0. 0 6 +0. 0 PFA NC PFA-A c 8 7 6 OUT OUT DC~V 6 7 8 A ) R. 6 7 8 DCV )A.mm DC0mA 6 7 8 0 [L/min] PFA0-- PFA0-- PFA-- PFA-- PFA-- 0 0 0 0 0 00 00 00.. 0.7. 07 PFA0-- PFA0-- PFA-- 0 PFA-- 0 PFA-- 0 0 0 00 00 00.. 0.7. 07 9 Alphabet Index

PFA Series PFA000 0. (7.) 0 6. L/min L OUT SMC FLOW CH 6.8 SET 7 9. (). 7. +0. -0. 6. R 96 0.8mm

PFA Series r e w q PIN q w e r DC N.C. DC IN~V q w e r t y u i PIN q DC () w DC () e CH_OUT r N.C. t CH_OUT y CH_OUT u CH_OUT i N.C. No. 8 N.C. 7 CH_OUT 6 CH_OUT CH_OUT N.C. CH_OUT DC(-) DC(+) 000 8 0.mm 0.mm 0.9mm,,,,,,,.8mm PFA00 PFA0 NC NC NC NC DC() CH_OUT CH_OUT DC() DCV NC NC CH_OUT NC CH_OUT NC DC() CH_OUT CH_OUT CH_OUT CH_OUT DC() DCV Alphabet Index 97

PFA Series 0 0000L/min 06 006000L/min 600000L/min PFA7 0 0 / N F 000 Rc NPT G H (L/min) 8 6000 000 9 68 69 PFA70H PFA706H PFA7H N M (P.) M m NPN(V) NPN(0mA) PNP(V) PNP(0mA) NPN PNP X79 P.0 M L/min L, m, m 0 ) ) ) ) 6) (Rc, NPT, G PFA70H PFA706H PFA7H 0000L/min 006000L/min 600000L/min L/min 0L/min L/min, CFM L, m, m 0, ft, ft 0, ft 0 6 0..MPa.MPa 0kPa) 09,999,999,999L ±.F.S.(0.7MPa, 0 ) ±.0F.S.(0.7MPa, 0 ) ±.F.S.(0..MPa, ) ±.0F.S.(00, ) NPN PNP NPN PNP 80mA, 0V, V 80mA,.V 00L/pulse, 0.0ft /pulse ON0msec/pulse V, 00kΩkΩ) 0mA, 0Ω sec, DCV±0 0mA IP6 00 ) AC000V 0MΩ(DC00V 000Vp-pμns.kg).kg).0kg) / 0, 0.kPa0, 0.kPa, 6RH SI(L/min L, m, m 0 ) OFFEEPROM EEPROM00( 00007.9 ±F.S. 6 98

PFA Series PFA70H 0 PFA706H 0 PFA7H 0 (kpa) 0 (kpa) 0 (kpa) 0 0 0 600 00 800 00 000 (L/min) 0 00 00 00 600 800 6000 (L/min) 0 600 00 800 700 9600 000 (L/min) q w e y r t 6 Alphabet Index 99

PFA70H706H7H OUT OUT 0msec 0V PFA70H--8 PFA70H--68 PFA706H--8 PFA706H--68 PFA7H--8 PFA7H--68 0 00 600 PFA70H PFA706H PFA7H A 6 7 B 60 80 0 C 0 D 9 0 F 6 7 H 6 6 6 I M 0.8 M6 M6 J 8 9 9 E 67 79 89 G Rc, NPT, G Rc /, NPT /, G / Rc, NPT, G 000 6000 000 [L/min] [L/min] PFA70H--9 PFA70H--69 PFA706H--9 PFA706H--69 PFA7H--9 PFA7H--69 0 00 600 000 6000 000 [L/min] [L/min] PFA7H-- (-M) PFA7H-- (-M) 8 9 68 69 PFA7H-- (-M) 8 9 PFA7H-- (-M) 68 69 0msec 0V 0msec D E C F 60 A B 0 H G DOWN MODE SET U P IJ OUT DCV ON OFF 0msec OUT DCV ON OFF 0msec z v 0 ma [L/min] DC0mA DCV [L/min] V 0msec (.) 00 PFA Series

PFA7 Series Order Made. :00 () -X79 PFA7 0 H 0 8 M X79 0 06 0000L/min 606000L/min 0000L/min M SI ) L/min L, m, m 0 0 0 / Rc (L/min) 000 6000 000 PFA70H PFA706H PFA7H (P.) M m N 8 NPN(V) NPN PNP PFA70H PFA706H PFA7H 0000L/min 606000L/min 0000L/min 00L/min 0600L/min 8000L/min 00L/min 0600L/min 000L/min PFA7HP.00 Alphabet Index 0

PFW Series PFW7 0 0 7 M 0 0 0 0.L/min 6L/min 0L/min 000L/min 0 0 06 0 /8 / / 6 N F (L/min) 0 00 Rc NPT G PFW70PFW70 PFW70PFW70 PFW70PFW7 PFW7 7 67 (P.) N M m NPN PNP M SI L/min L ( 0ms) ) () ) (Rc, NPT, G) ) ) ) PFW70 PFW70 PFW70 PFW7 0..L/min.77.0L/min.L/min 70L/min 0..L/min.77.0L/min.L/min 70L/min 0.L/min 6L/min 0L/min 000L/min 0.0L/min 0.L/min 0.L/min L/min 0.0L/pulse 0.L/pulse 0.L/pulse L/pulse 00 ±F.S. ±F.S. ±F.S. ±F.S. ±F.S.(00, ) 70mA 80mA 60g 0g 700g 0g /8 /8, / /, / /, digit 7segment LED L/min, gal(us)/min L, gal(us) 0MPa.MPa 0999999L 00, -8 ) NPN80mA, V 80mA), : 0V, PNP80mA, :.V ( 80mA) NPN PNP () ON OUT OUT : s : 0) 6)(digits) DCV±0 IP6 00 AC000V, 0MΩDC00V 000Vp-p μs ns )PFW7, ±% F.S. ) ( SI(L/min L) 6 : (Hdigits P_, P_ n_, n_ 7digits OUT, n_,n_,, P_,P_,)7CE 0

PFW Series PFW 0 0 C 0 0 06 0 /8 / / 0 0 0 6 0.L/min 6L/min 0L/min 000L/min N F (L/min) 0 00 Rc NPT G PFW0PFW0 PFW0PFW0 PFW0PFW PFW (P.) N (P.) C (e-con) M m (V) (0mA) PFW00 PFW00/00 PFW00 PFW0 PFW0 PFW0 PFW 0.L/min 6L/min 0L/min 000L/min 0MPa.MPa ) 00 ±F.S. 00 ±F.S. ) ) () ) (Rc, NPT, G ±F.S. ±F.S.(, ), ±F.S.(00, ) N PFW : 0mA, 0V) V ±F.S., 00kΩkΩ) 0mA ±F.S., 00Ω(DCV), 600Ω(DCV) DCV±0 0mA IP6 : 0 ~ 0 C, : ~ 8 C () AC000V, 0MΩ (DC00V ) 000Vp-p μs ns ±F.S.(PFW) ±F.S.(PFW) 0g 70g 60g,00g /8 /8, / /, / /, )PFW/ ( ()0g CE Alphabet Index 0

PFW Series PFW 0 0 A M 0 0.L/min 6L/min 0L/min 000L/mim 0 PFW0 PFW0 PFW0 PFW NPN PNP A M SI L/min L ) 0..L/min PFW00/0.77.0L/min.L/min PFW0/ 70L/min ) 0..L/min.77.0L/min.L/min 70L/min ) 0.0L/min 0.L/min 0.L/min L/min (: 0ms) ) 0.0L/pulse 0.L/pulse 0.L/pulse L/pulse ) ) ) ) () L/min, gal(us)/min L, gal(us) 0999999L ±F.S. ±F.S. ±F.S.(00, ), ±F.S.(, ) 0mA g ±F.S. ±F.S. 60mA ) NPN(PFW00, PFW0) PNP(PFW0, PFW) 80mA V 80mA) 0V 80mA.V 80mA) NPN PNP () IP0 00, -8 ) AC000V, 0MΩ(DC00V 000Vp-p μs ns digit, 7segment LED ON OUT : OUT : DCV±0 s : (0) 6) : (digits) ) ) ( SI(L/min L) ) ) PFW ) 6) : (H) digits P_, P_ n_, n_ 7digits ( OUT n_, n_, P_, P_, 7) CE 0

PFW Series / (m) PFW0 0 M NPN PNP SI L L M (P.) C (P.) A B () + PFWV) ) ) ) (: 0ms) ) ) ) ) ) ) ) ) ( ) PFW0/0T-- 0..0L/min 0..0L/min 0.0L/min 0.0L/pulse PFW00/0 PFW0/0T-- PFW0/0T--.77.0L/min.77.0L/min 0.L/min 0.L/pulse..0L/min..0L/min 0.L/min 0.L/pulse L/min, gal (US)/min L, gal (US) 0999999L, 0999999gal(US) DCV±0) ma () ] 0mA, 0mA ) DCV: 800kΩ) : 80mA NPN (PFW00) V 80mA) 0V : 80mA PNP (PFW0) V 80mA) NPN PNP () () : (0) : (digits) s ±F.S. ±F.S. ±F.S.(00, ) digit 7segment () digit 7segment () ON OUT : IP6, IP0 00, 060 ) 8RH ) 00Vpp μs ns : 8P, : P (e-con) PBT, PET, CR 60g ) ) ( -M )SI(L/min L]OFF ) Vcc0V ) ) ) CE PFW-- 70L/min 70L/min L/min L/pulse 0 Alphabet Index

PFW Series PFW70,0 0.00 PFW70,0 0.0 PFW70,0 0.07 0.0 0.0 0.06 (MPa) 0.00 0.0 0.00 0.00 (MPa) 0.0 0.0 0.0 (MPa) 0.0 0.0 0.0 0.0 0.0 0 0..0..0. (L/min).0..0 0 6 8 0 6 (L/min) 0 0 0 (L/min) 0 0 PFW7, 0.0 0.00 0.0 (MPa) 0.00 0.0 0.00 0.00 0 0 0 0 0 0 60 70 80 90 00 0 (L/min) q w e w r SUS NBR PPS PPS 06

z v 0 60 60 OUT FOR WATER FLOW SWITCH ø. 0 0 0 DOWN U P S E T OUT.6 7 67 6 PFW7070 PFW70 DOWN UP SET OUT OUT FOR WATER FLOW SWITCH L 60 0 0 7 8 67.6 ø. 6 PFW70 PFW70 L 00 06 PFW7--7(-M)NPN PFW7--67(-M)PNP OUT DC~V DC~V OUT OUT OUT DC(+) OUT DC( ) OUT 7 (.) (.) 7 ø. 07 PFW Series Alphabet Index

PFW Series PFW7 8 80 79 70 9 FLOW SWITCH U P 70 8 6 SET OUT OUT DOWN ø. 6 88 6 60 (.) 08

zx, PFW00-(N)- PFW0-(N)- 8. 60 L 0 0 6 B.6 A ø. (6.) ø. PFW0 PFW0 L 00 06 0 60 8. 60 0 ø. 0 0.6 B A (6.) PFW/ B 6 7 A B 6 7 A 6 6 8 7 (PFW0/) DC~V DC~V DC~V NC (PFW0/) 6 8 7 PFW- (PFW0/) 6 8 7 DC(+) NC DC( ) OUT PFW--) PFW--) 09 PFW Series Alphabet Index

PFW-(N)- ø. 80 8 6 6 8 70 (6.) A B B 77 87 A 6 7 DCV 0 [V] [L/min] PFW0-- PFW0-- PFW0-- PFW-- 0. 0 6 0 00 0. 0 6 0 00 [L/min] [L/min] DC0mA 0 0 [ma] [L/min] PFW0-- PFW0-- PFW0-- PFW-- [L/min] [L/min] 0 PFW Series

PFW Series PFW-A zx, 0.8 0 SMC FLOW SWITCH RESET SET UNIT.8. 0. A PFW NC PFW0-A 8 7 6 OUT OUT DC~V 7. (=.6) 8 M 9. 6. 6 7 8 A PFW NC PFW-A 8 7 6 OUT OUT DC~V 6 +0. 0 6 +0. 0 A ) 6 7 8 6 7 8 R. )A.mm R. Alphabet Index

PFW Series PFW000 0. (7.) 0 6. L/min L OUT SMC FLOW CH 6.8 SET ) 7 9. (). 7. +0. -0. 6. R 0.8mm

PFW Series r e w q PIN q w e r DC N.C. DC IN~V (8P) q w e r t y u i PIN q DC () w DC () e CH_OUT r N.C. t CH_OUT y CH_OUT u CH_OUT i N.C. No. 8 N.C. 7 CH_OUT 6 CH_OUT CH_OUT N.C. CH_OUT DC(-) DC(+) 000 8 0.mm 0.mm 0.9mm,,,,,,,.8mm PFW00 PFW0 NC NC NC NC DC() NC CH_OUT DCV CH_OUT NC CH_OUT NC CH_OUT NC DC() DC() CH_OUT CH_OUT CH_OUT CH_OUT DC() DCV Alphabet Index

PFW Series PFW7 0 T 0 7 0 0 0 0.L/min 6L/min 0L/min N F Rc NPT G 0 0 06 T 0~90 /8 / / (L/min) 0 6 PFW70TPFW70T PFW70TPFW70T PFW70T 7 67 (P.) N NPN PNP M L L (: 0ms) ) () ) (Rc, NPT, G) ) ) ) PFW70T PFW70T PFW70T, 00 0..L/min.77.0L/min.L/min 0..L/min.77.0L/min.L/min 0.L/min 6L/min 0L/min 0.0L/min 0.L/min 0.L/min 0.0L/pulse 0.L/pulse 0.L/pulse 090 () ±F.S. ±F.S. ±F.S.(090, ) 70mA 70g /8 /8, / /, / digit, 7segment LED L/min, gal(us)/min L, gal(us) 0MPa.MPa 0999999L NPN : 80mA, V( 80mA), : 0V, PNP : 80mA,.V( 80mA) NPN PNP () ON OUT : OUT : s : (0), 6) : digits DCV±0 IP6 00, -8 ) AC000V, 0MΩ(DC00V 000Vp-p μs ns )±F.S.(00, ), ±F.S.(, )) ( SI(L/min L) OFF 6 : (H digitp_, P_ n_, n_ 7digit OUT, n_,n_,, P_,P_,) 7CE

PFW Series PFW 0 T 0 C 0 0 0 0.L/min 6L/min 0L/min T 0~90 N F Rc NPT G (P.) C (e-con) 0 0 06 /8 / / (L/min) 0 6 PFW0T0T PFW0T0T PFW0T (P.) N M m (V) (0mA) PFW00 PFW00/00 PFW00 ) ) ) PFW0T 0.L/min PFW0T, 0% + 0 6L/min PFW0T 0L/min 0MPa.MPa 090 ) ±F.S. ±F.S. ±F.S.(, ), ±F.S.(00, ) N PFW: 0mA, 0V) V±F.S., 00kΩkΩ) 0mA±F.S., 00Ω(DCV), 600Ω(DCV) DCV±0 () 0mA IP6 00, -8 ) AC000V, 0MΩ(DC00V) 000Vp-p μs ns ) (Rc, NPT, G) ) PFW/ ) ) ()0g ) CE /8 660g /8, / /, / /(PFW/PFW0) P.0, 0 Alphabet Index

PFW Series PFW70T,0T PFW70T,0T PFW70T,0T 0.00 0.0 0.07 0.0 0.0 0.06 (MPa) 0.00 0.0 0.00 0.00 (MPa) 0.0 0.0 0.0 (MPa) 0.0 0.0 0.0 0.0 0.0 0 0..0..0. (L/min).0..0 0 6 8 0 6 (L/min) 0 0 0 (L/min) 0 0 q w e w r SUS FKM PPS PPS 6

(.) 77 DOWN U P SET OUT OUT FOR WATER ø. FLOW SWITCH 0 0 0 0 60 60.6 7 PFW70T70T70T PFW7T--7(-M) PFW7T--67(-M) OUT DC ~V OUT OUT OUT DC ~V DC(+) OUT DC( ) OUT zx v 7 PFW Series Alphabet Index

B 7 8 A 6 DCV 0 [V] PFW0T-- PFW0T-- PFW0T-- 0. 6 0 DC0mA 0 0 [ma] PFW0T0T0T-(N) PFW ø. 0 0 0 0 60 60 (6.) A.6 B zx, 6 8 7 (PFW0/) DC~V DC~V DC~V NC (PFW0/) 6 8 7 PFWT- (PFW0/) 6 8 7 0. 6 0 PFW0T-- PFW0T-- PFW0T-- DC(+) NC DC( ) OUT PFWT--) PFWT--) ()DC(+) ()OUT ()NC/ ()DC(-) [L/min] [L/min] [L/min] [L/min] [L/min] [L/min] 8 PFW Series

PFAPFW Series PFA7070777 PFW70(T)70(T)70(T)7 q w U P t PFA0000 PFW0000 q w SMC FLOW SWITCH r e r OUT OUT SET DOWN y u e t RESET SET y UNIT u RESET UPDOWNRESET 0 LED PFA7 PFA nor OUT OUT UP SET DOWN OUTON OUTON PFA70H706H7H q e w t y U P SET MODE DOWN r i u q w e r t y u i LCD OUT UP SET DOWN MODE RESET UPDOWNRESET 0 OUTON SIL/minLm, m 0 PFA000 PFW000 q w e y u OUT SET L/min L CH r t i q w e r t y u i LCD PFA00 0 UP SET DOWN OUT(CH~)ON CH~(nor) L/min, L 9

PFAPFW Series 999999 OFFRESET PFA7H CFM=ft /min GPM=gal (US)/min 0, 0.kPa, 0, 0.kPa, 6%RH(ANR) Key lock L/min CFM 0 -, CFM 0 - L/min CFM L/min GPM L, m, m 0 ft, ft 0, ft 0 6 L gal(us) L ft 0 - SI(L/minL, m, m 0 ) PFA7H OUT OUT OUT P n ) P n ON OFF ON OFF ) YES NO YES NO P- n- ON OFF P- P- H ON OFF ON OFF P- P- n- n- H ON OFF H H n- n- P ON OFF OUT 0 msec ON n OFF )SI(L/min L, m, m 0 ) 0

PFAPFW Series (PF 00 0 ) M (PF 00 0 ) OFFRESET LED (PF 00 0 ) (PF 00 0 ) PFA7 PFA7 LED ) ) ) ) ) ) ) OUT80mA PFA/W00 0 OUT OUT RESET H H Alphabet Index

AWG 0.7mm.mm PVC.00mm PFA7(H) PFW7(T) PFA PFW(T) PFA0 PFW0 ZS-8-CA- e-con 70--000FL -76- XNA-0 VA-D XS PA-I HR CM0-8DPS M ZS-7-A m e-con RoHS ZS--E ZS-6-B ZS-6-C M U P DOWN SET OUT OUT PFA PFW PFA0 PFW0 M M e-con e-con PFAPFW Series

CEU Series CEU P NPN PNP B D AC00~0V DCV RS-C RS-C BCD A COM COM COM B DCV GND F.G. R.S. HOLD BANK BANK MULTI COUNTER:CEU UP PRESET FUNC. COUNT LEFT RIGHT DOWN AC00~0VCOM OUTOUTOUTOUTOUTS.STOP MODE SEL. SET RD SD SG RS-C (PF) A COM B COM DCV GND F.G. R.S. HOLD COM BANK BANK MULTI COUNTER:CEU COUNT PRESET FUNC. LEFT MODE UP DOWN SEL. RIGHT SET BCD AC00~0VCOM OUTOUTOUTOUTOUTS.STOP RD SD SG RS-C OUTOUT RS-C OUTOUT0) 00, 0ft UP Down) Preset Function CEU, <> PHASE UP Down UP Down A-COM, B-COM Best Pneumatics & CE Series. Alphabet Index

PFAPFW Seriesq, SMC(M-0- q w e r t y u A B C i o PFA7H!0 q Rc /8 Rc / Rc /8 Rc / Rc / Rc Rc / Rc q EEPROM 0 6 0 wreset PFA7H Nm 79 80 80 68 80 80 w e r t 90m/s y 9N u i

PFAPFW Seriesw, SMC(M-0- o!08! N m! 8 q w e r t q q w 98m/s 90m/s e r t y 0~0 u 0~0 0~90 Alphabet Index

PFAPFW Seriese, SMC(M-0- q winter Lock Inter lock Inter lock. e q w 0 0%0%. q OFF w e 60 r t L/min 0, 0.kPa(nor) 0, 0.kPa, 6RH(ANR f=k v f v k L/min 0, 0.kPa 0, 0.kPa 6

PFAPFW Seriesr SMC(M-0- PFA PFA0 L/min L/min 0L/min 0L/min 0L/min 00L/min 00L/min 00L/min L/min 0L/min 0.L/min 0.L/min PFA0 L/min.L/min 0L/min.L/min PFA 0L/min L/min 00L/min 0L/min PFA 0L/min 0L/min 00L/min 0L/min PFA L/min 0L/min 00L/min L/min PFW 0.L/min L/min L/min 0L/min 0L/min 0L/min 00L/min PFW0 PFW0T 0.L/min 0.L/min L/min.L/min PFW0 PFW0T L/min.7L/min 6L/min 7L/min PFW0 PFW0T L/min.L/min 0L/min L/min PFW 7L/min 0L/min 00L/min 0L/min Alphabet Index 7

PFAPFW Seriest, SMC(M-0- q 0N N CE IP6 IP6 /~/ 8 ZS-6-B No. A 8 N.C. 7 CH_OUT 6 CH_OUT CH_OUT N.C. CH_OUT DC() DC() 0mm ZS-8-CA- m (DC) (DC) (INV) A A