Formtracer SJ-201 / SJ-301 392 SJ-400 396 SJ-500 399 400 SV-3100 402 Extreme SV-3000CNC/SV-M3000CNC 404 Formtracer Formtracer SV-C3100 / SV-C4100 406 Formtracer Extreme SV-C3000CNC / SV-C4000CNC 408 Formtracer Extreme CS-H4000CNC 410 Formtracer Extreme CS-5000CNC / CS-H5000CNC 412 414 416 / 417 CV-1000 / CV-2000 418 CV-3100 / CV-4100 420 Contracer Extreme CV-3000CNC / CV-4000CNC 422 424 426 / Formtracer 427 R-10 428 R-120 / 120P 430 R-1400 / R-1500 432 R-2100S / DS / H / DH 434 R-H5100S / H 436 Extreme R-H5100CNC / 2100CNC 438 440 442 SV-3100 SV-M3000CNC CV-3100 R-10 R-H5100CNC SJ-500 391
SJ-201 / SJ-301 178 Ð SJ-201 SJ-301 : SJ-201 IP53,. 500.. 10. LCD... SPC RS- 232C. (),. : SJ-301 LCD. LCD,., 600..,. 5, (). CSV. (SJ-301) X ( ) : 12.5mm : 0.25, 0.5mm/ (0.25mm/ : S-) : : 350µm (-200µm - +150µm) : : 4mN 0.75mN ( ) :, 90ë / 5µmR (60ë / 2µmR: ) : 40mm : 400mN : : C / : 600 ( ) : 15 RS 232C /SPC (WxDxH) : 307 x 165 x 94mm (SJ-301) 156.5 x 62 x 52mm (SJ-201) : 115 x 23 x 26mm : : 0.2kg 1.2kg (SJ-301) 0.3kg (SJ-201) : SJ-301 : JIS' 82, JIS' 94, JIS' 01, DIN, ISO, NSI : P (), R (), DIN4776,, : Ra, Ry, Rz, Rt, Rp, Rq, Rv, Sm, S, Pc, R3z, mr (c), Rpk, Rvk, δc, Rk, Mr1, Mr2, Lo, Ppi, R, R, Rx, 1, 2, Vo, HSC, mr, SK, Ku, Δa, Δq, Wte, Wx, W, W ( ) : (BC1 / 2), (DC) 2CR, PC75, lc: 0.08, 0.25, 0.8, 2.5, 8mm ls: 2.5, 8, 25mm : X1, X3, X5, XL : 0.3-12.5mm(0.1mm ) (L): 0.08, 0.25, 0.8, 2.5, 8mm 48mm ( : 58mm) : 10X - 100,000X, : 1X - 1,000X, :. :,,,,, GO/NG : /: 3 GO/NG :, 16%, : 5 : (),, / (20 ). :. : ON: 5 392
+ + : 0.75mN, 2µm 4mN, 5µm : : : SJ-201 : JIS' 82, JIS' 94, JIS' 01, DIN, ISO, NSI : P (), R (), DIN4776* (* : SJ-201M) : Ra, Ry, Rz, Rq, S, Sm, Pc, R3z, mr (c), Rt, Rp, Rk, Rpk, Rvk, Mr1, Mr2, 1, 2, Vo () (R, R, Rx: M ) 2CR, PC75, lc: 0.25, 0.8, 2.5mm ls: 2.5, 8mm : X1, X3, X5 : 0.3-12.5mm, 0.1mm (L): 0.25, 0.8, 2.5mm :. GO/NG : /: 2 : OFF : 10. : : ON 30. / Ð Ð SJ-201P SJ-201R SJ-201S SJ-201M () 178-920-2* 178-930-2* 178-985* 178-995* 178-889-2* 178-899-2* 178-920-2F* 178-930-2F* () 178-923-2* 178-933-2* 178-986* 178-996* 178-912-2* 178-913-2* (178-230-2) (178-235) (178-233-2) (178-230-2) 4mN 0.75mN 4mN 0.75mN 4mN 0.75mN 4mN 0.75mN (178-390) (178-395) (178-390) (178-395) (178-390) (178-395) (178-390) (178-395) SJ-301 SJ-301R SJ-301S () 178-953-3* 178-952-3* 178-980* 178-990* 178-929-2* 178-939-2* () 178-954-3* 178-955-3* 178-987* 178-997* 178-901-2* 178-902-2* (178-230-2) (178-235) (178-233-2) 4mN 0.75mN 4mN 0.75mN 4mN 0.75mN (178-390) (178-395) (178-390) (178-395) (178-390) (178-395) 23.0 26.0 1m 48 : mm SJ-201 156.5 62 52 94 165 26.0 23.0 26.0 23.0 1 2.0 2 26.7 23.2 26.7 115.0 115.0 3.0 45.0 6.6 46.5 115.0 *C ( : 178-952-3): UL/CS, CEE D, BS E, DC, EK K, JIS/100V 15 307 1m SJ-201/301 (E4286). 393
178-390: 4mN ( 5µm) 178-296: 0.75mN ( 2µm, 60º) 178-395: 0.75mN ( 2µm, 90º) 178-391: 10µm type 178-393: (ø2.8mm) 12.8 60.3 61 16.4 0.8 1.6 0.4 1.8 ø9 3.5 ø6 4.8 1.5 59.5 2.4 178-392: (ø4.5mm) ø9 178-394: : 8mm *. 3.5 16.4 61 61 ø3.8 16.4 9 ø13.6 10 ø9 3.5 1.5 4.8 ø9 2 1.5 4.8 : mm SJ-201 SJ- (),. 2 (C / ) :,,, (BC) 20 DP-1VR Surftest SJ, D-, X R., RS-232C GO/NG. 178-420* *C ( : 178-420). 120V, 220V D, 240V E (20 ): 12C243 264-504* *C ( : 264-504-5). 120V -5, 220V ( ) -5D, 240V ( ) -5E, C -1K, 240V () -5F : 936937 (1m) : 965014 (2m) 394
: SURFPK-SJ : ISO 4287:1997, NSI / SME B46.1-1995, JIS B0601 1994,. : P (), R () WC, WC, WE, WE DIN4776, E ( ),, : Ra, Rq, Rz, Rz (JIS), Ry, Ry (DIN), Rc, Rpi, Rp, Rpmax Rvi, Rv, Rvmax, Rti, Rt, R3zi, R3z, R3y, S, Pc (Ppi), Sm, HSC, mr, δc,, mrd, Rk, Rpk, Rvk, Mr1, Mr2, Δa, Δq, λa, λq, Sk, Ku, Lo, Lr, 1, 2 Rx, R, R, SR, SR, NR, NCRX, CPM Wte, Wx, W, W, SW, SW, NW : DC, BC1, BC2,,,,,,, : 2CR-75%, 2CR-50%, 2CR-75% ( ), 2CR-50% (), -50% ( ) : λc: 0.025, 0.08, 0.25, 0.8, 2.5, 8, 25mm fl: 0.25, 0.8, 2.5, 8mm fh: 0.25, 0.8, 2.5, 8mm (L): 0.025, 0.08, 0.25, 0.8, 2.5, 8, 25mm :, R (),,,, 2,, : 100X - 500,000X, : 1X - 10,000X RS-232C. 12208: SJ-201 RS-232C 12882: SJ-301 RS-232C, 12217 SJ-301. V 12E644 SJ-201S / 301S. 7.7mm (50mm) 12210. ( :.) 12221 (ø8mm) 12220 (ø9.5mm) (1m) 12B303 72mm 50 mm 12218 SJ-301. 12E643 SJ-201S / 301S. 12216 SJ-301.. 12219. 12222 (9mm x 9mm) 12233 (1/4 x 1/2 ) *. No. 178-033 V- No. 178-034 : No. 178-035 : V. : ø 5-150mm.. : ø 75 - ø 95mm : 30-135 mm 395
SJ-400 178 ISO, DIN, NSI, JIS 36.. < / > 800µm / 0.000125µm (8mm ) < /> SJ-401 : 0.3µm / 25mm SJ-402 : 0.5µm / 50mm SJ-402 SJ-401.,. RS-232C () PC... GO/NG.. X ( ) : 25mm (SJ-401), 50mm (SJ-402) : 0.05, 0.1, 0.5, 1.0mm/ : 0.5, 1.0, 2.0mm/ : : 0.3µm / 25mm (SJ-401), 0.5µm / 50mm (SJ-402) : ±1.5 (), 10mm ( / ) / : 800µm / 0.01µm, 80µm / 0.001µm, 8µm / 0.0001µm ( 2400µm) : / : 4mN 0.75mN ( ) :, 90º / 5µmR (60º / 2µmR: ) : 40mm : : C / : 600 ( ) : 15 RS 232C /SPC (WxDxH) : 307 x 165 x 94mm - : 131 x 63 x 99mm : 128 x 36 x 47mm (SJ-401), 155 x 36 x 47mm (SJ-402) : 1.2kg - : 0.4kg : 0.6kg (SJ-401), 0.7kg (SJ-402) SJ-401 : P (), R () W ( ), DIN4776,, : Ra, Ry, Rz, Rq, Pc, R3z, mr, Rt, Rp, Rv, Sm, S, δc, Rk, Rpk, Rvk, Mr1, Mr2, 1, 2, Lo, Ppi, R, R, Rx, Da, Dq, Ku, HSC, mrd, Sk, W, W, Wte, Wx, Vo : (BC1/2), (DC) 2CR, PC75, 0.08, 0.25, 0.8, 2.5, 8mm : X1, X3, X5, XL (XL): 0.1-25mm (0.1-50mm: SJ-402), 0.1mm (L): 0.08, 0.25, 0.8, 2.5, 8mm 48mm ( : 58mm) :20X - 100,000X, : 1X - 1,000X, : / : R, : D..T. :. :,,, (s),, :. : 5 ( ) 396
: SURFPK-SJ : ISO 4287:1997, NSI / SME B46.1-1995, JIS B0601 1994,. : P (), R () WC, WC, WE, WE DIN4776, E ( ),, : Ra, Rq, Rz, Rz (JIS), Ry, Ry (DIN), Rc, Rpi, Rp, Rpmax Rvi, Rv, Rvmax, Rti, Rt, R3zi, R3z, R3y, S, Pc (Ppi), Sm, HSC, mr, δc,, mrd, Rk, Rpk, Rvk, Mr1, Mr2, Δa, Δq, λa, λq, Sk, Ku, Lo, Lr, 1, 2 Rx, R R, SR, SR, NR, NCRX, CPM Wte, Wx, W, W, SW, SW, NW : DC, BC1, BC2,,,,,,, : 2CR-75%, 2CR-50%, 2CR-75% ( ), 2CR-50% (), -50% ( ) : λc: 0.025, 0.08, 0.25, 0.8, 2.5, 8, 25mm fl: 0.25, 0.8, 2.5, 8mm fh: 0.25, 0.8, 2.5, 8mm (L): 0.025, 0.08, 0.25, 0.8, 2.5, 8, 25mm :, R (),,,, 2,, : 100X - 500,000X, : 1X - 10,000X RS-232C. 12882: RS-232C, (R ), R. SJ-401 SJ-401 SJ-402 SJ-402 () 178-956-3* 178-946-3* 178-958-3* 178-940-3* () 178-957-3* 178-947-3* 178-959-3* 178-945-3* 0.75mN 4mN 0.75mN 4mN 25mm 25mm 50mm 50mm *C ( : 178-956-3): UL/CS, CEE D, BS E, DC, EK K, JIS/100V 131 GO/NG GO/NG. NG. GO NG. (,, /, ). : mm 94 165 90 99 SJ-402: 234 (SJ-401: 207.5) 15 SJ-400 (E4185). 307 397
178-611: (mm) 178-612: (inch) 178-610: (: 1µm, 2µm, 5µm, 10µm) 178-009: ( : 200mm) 178-039: ( ) (: 250mm) 12B358: ( : 15-60mm) 178-016: (: ±1.5, : 15kg) 178-048: D..T () (: ±1.5, : 15kg) 178-058: D..T () (: ±1.5, : 15kg) 178-043-1: XY (25 x 25mm) (: ±1.5, : 15kg, : ±3 ) 178-053-1: XY (1 x 1 ) (: ±1.5, : 15kg, : ±3 ) 178-042-1: XY (25 x 25mm) (: ±1.5, : 15kg, : ±3 ) 178-052-1: XY (1 x 1 ) (: ±1.5, : 15kg, : ±3 ) 178-049: XY (25 x 25mm) (: ±1.5, : 15kg) 178-059: XY (1 x 1 ) (: ±1.5, : 15kg) 178-019: XY ( : 36mm) 181-902: V ( : 25mm) 181-901: V ( : 1 ) 998291: XY V- ( : 1-160mm) 12B781: 12841: (8MB) 12882: PC (RS-232C ) 965014: SPC (2m) 264-012-10: (USB ) 264-504: DP-1VR (15.) :, (400 ) 12896: LCD (10/) 270732: (25m, 5 /) 12876: (25m, 5 /) R 178-391 178-392 178-393 178-394 178-395 DP-1VR 264-005 936937 (1m) 965014 (2m) 12B358 SURFPK-SJ 12882 178-611 SJ-400 12841 178-009 178-049 () 178-054 ( ) 178-042-1 () 178-052-1 ( ) 178-043-1 () 178-053-1 ( ) 178-048 () 178-058 ( ) 178-019 398
SJ-500 178 X ( ) : 50mm : 0.05µm : : 0-20mm/s : 0.02-5mm/s : : 0.15µm / 50mm : ±1.5 (, DT ) 30mm ( / ) / : 800µm / 0.01µm, 80µm / 0.001µm, 8µm / 0.0001µm : / : 4mN 0.75mN ( ) :, 90º / 5µmR (60º / 2µmR: ) : 40mm : : 7.5 TFT : : 7.5- TFT LCD,.... ISO/JIS.. (,,,,, ). 1997 ISO, 2001 JIS 46. SJ-500 399
SJ-400 SJ-500 ø14 11.5 10 3.1 60 ø14 14 (0.75mN): 178-396-2 (4mN): 178-397-2 1.3 3.6 ø7 4 12B355 ø8 (12G202: 50mm, 12G203: 100mm) : mm - 44.7 0.9 12E882 (1µm)* 12E924 (1µm)** 12C731 (2µm)* 12B403 (5µm)** 12B415 (10µm)** 12E883 (250µm) ( ): *: 60 **: 90 2 0.6 3 1.8 94.7 12E898 (2µm)* 12E914 (5µm)** ( ): *: 60 **: 90 2 1.6 0.4 0.6 - (S=5/1) ø0.6 3.4 1.6 44.4 0.6 15 2.4 12C732 (2µm)* 12B404 (5µm)** 12B416 (10µm)** ( ): *: 60 **: 90 0.6 ø0.6-3.4 1.6 0.6 30 2.4 94.4 12E892 (2µm)* 12E908 (5µm)** ( ): *: 60 **: 90 1.2 0.4 - (S=5/1) ø0.3 1.2 8.9 ø0.6 2.5 44.2 12C733 (2µm)* 12B405 (5µm)** 12B417 (10µm)** ( ): *: 60 **: 90 ø1.6 41 93.8 12E884 (0.8mm) ( ): 0.8 0.4 - (S=5/1) ø0.3 0.8 8.9 ø0.6 2.5 44.2 12C734 (2µm)* 12B406 (5µm)** 12B418 (10µm)** ( ): *: 60 **: 90 7 ø0.5 ø0.3-7 43.8 12E885 (0.25mm) ( ): - 0.9 94.7-0.9 144.7 1 1.6 0.4 0.6 0.6 ø0.6 ø0.3-45 94.4 2X 12C740 (2µm)* 12B413 (5µm)** 12B425 (10µm)** ( ): *: 60 **: 90 3X 12C741 (2µm)* 12B414 (5µm)** 12B426 (10µm)** ( ): *: 60 **: 90 12E938 (2µm)* 12E940 (5µm)** ( ): *: 60 **: 90 400
: mm (10mm) - 0.9 14.2 13 44.7 12C735 (2µm)* 12B409 (5µm)** 12B421 (10µm)** ( ): *: 60 **: 90 (20mm) 23 21.8 n1.2 9 12E893 (2µm)* 12E909 (5µm)** ( ): *: 60 **: 90 (20mm) 0.9 (40mm) 4-24.2 23 44.7 12C736 (2µm)* 12B408 (5µm)** 12B420 (10µm)** ( ): *: 60 **: 90 43.8 42.6 Ø1.2 Ø2.4 12E895 (2µm)* 12E911 (5µm)** ( ): *: 60 **: 90 (30mm) 4 (30mm)2 93.8-33 31.8 12C737 (2µm)* 12B407 (5µm)** 12B419 (10µm)** ( ): *: 60 **: 90 36.5 35 Ø3 12E894 (2µm)* 12E910 (5µm)** ( ): *: 60 **: 90-6.4 60 43.8 12B339 (2µm)* 12B410 (5µm)** 12B422 (10µm)** ( ): *: 60 **: 90 2 36.5 35 6.77 60 93.8 ø3 12E896 (2µm)* 12E912 (5µm)** ( ): 44.7 0.9 ø1.588 12B338 (0.8mm) ( ): 2 6.4 94.7 0.9 12E886 (0.25mm) ( ): - 0.9 44.7 12C738 (2µm)* 12B411 (5µm)** 12B423 (10µm)** ( ): *: 60 **: 90 2 5.8 5 ø0.8 93.8 35 45 ø1.6 12E897 (2µm)* 12E913 (5µm)** ( ): *: 60 **: 90 10 0.9 4 12C739 (2µm)* 12B412 (5µm)** 12B424 (10µm)** ( ): *: 60 **: 90 6.2 0.5 5 ø1 44.3 25 12E899 (2µm)* 12E915 (5µm)** ( ): *: 60 **: 90-401
SV-3100 178 X : 100mm 200mm : 0.05µm : : 0-80mm/s : 0.02-5mm/s : : (0.05+1L/1000)µm* (0.5µm/200mm: 200mm ) : ±45º Z2 () : 300mm 500mm, : 1µm : : 0-20mm/s SV-3100. SV-3100 3.. SURFPK-SV.. X. X- ( : 0.05µm) Z2- (, : 1µm). SV-3100 X (S, Sm).. PC SV-3100H4 : X- ; ;...., /,. / X. / : 800µm / 0.01µm, 80µm / 0.001µm, 8µm / 0.0001µm ( 2400µm) : / : 4mN 0.75mN ( ) :, 90º / 5µmR (60º / 2µmR: ) : 40mm : (W x H): 600 x 450mm 1000 x 450mm : (W x D x H): 756 x 482 x 966mm (S4 ) 756 x 482 x 1166mm (H4 ) 1156 x 482 x 1176mm (W4 ) 766 x 482 x 966mm (S8 ) 766 x 482 x 1166mm (H8 ) 1166 x 482 x 1176mm (W8 ) 140kg (S4, S8 ) 150kg (H4 type, H8 ) 220kg (W4 type, W8 ) *L = (mm) : SURFPK-SV P (), R () WC, WC, WE, WE, DIN4776,,, Ra, Rq, Rz, Ry, Rz(JIS), Ry(DIN), Rc, Rp, Rpmax, Rpi, Rv, Rvmax, Rvi, Rt, Rti, R3z, R3zi, R3y, S, Pc (Ppi), Sm, HSC, mr, dc,, mrd, Rk, Rpk, Rvk, Mr1, Mr2, Da, Dq, la, lq, Sk, Ku, Lo, Lr, 1, 2 : Rx, R, R, SR, SR, NR, NCRX, CPM : Wte, Wx, W, W SW, SW, NW DC, BC1, BC2,,,,,,, 2CR-75%, 2CR-50%, 2CR-75% ( ), 2CR-50% (), -50% * lc: 0.025mm, 0.08mm, 0.25mm, 0.8mm, 2.5mm, 8mm, 25mm fl: 0.08mm, 0.25mm, 0.8mm, 2.5mm, 8mm, 25mm fh: 0.08mm, 0.25mm, 0.8mm, 2.5mm, 8mm (L)* 0.025mm, 0.08mm, 0.25mm, 0.8mm, 2.5mm, 8mm, 25mm, R (),,,, 2,, *0.025mm. 402
178-611: (2µm, 10µm) 178-612: (2µm, 10µm, 79µinch, 394µinch) 178-610: 4 (1µm, 2µm, 5µm, 10µm) 178-047: 3 (998291 ) 178-016: 178-042-1: XY (25 x 25mm) 178-052-1: XY (1 x 1 ) 178-043-1: XY (25 x 25mm) 178-053-1: XY (1 x 1 ) 178-019: * 998291: V* 181-902: V ( : 25mm) 181-901: V ( : 1 ) 178-023: 178-024: 218-007: 166-215: () 218-010: 218-008: :, (414 ) *XY CNC CNC. SV-3100S4 SV-3100S4 SV-3100H4 SV-3100H4 SV-3100W4 SV-3100W4 () 178-471-1* 178-471-2* 178-472-1* 178-472-2* 178-473-1* 178-473-2* () 178-481-1* 178-481-2* 178-482-1* 178-482-2* 178-483-1* 178-483-2* () 178-451-1* 178-451-2* 178-452-1* 178-452-2* 178-453-1* 178-453-2* () 178-461-1* 178-461-2* 178-462-1* 178-462-2* 178-463-1* 178-463-2* 0.75mN 4mN 0.75mN 4mN 0.75mN 4mN X 100mm 100mm 100mm 300mm 500mm 500mm (WxD) 600 x 450mm 600 x 450mm 1000 x 450mm (, WxDxH) 756 x 782 x 966mm 756 x 482 x 1166mm 1156 x 482 x 1176mm () 140kg 150kg 220kg SV-3100S8 SV-3100S8 SV-3100H8 SV-3100H8 SV-3100W8 SV-3100W8 () 178-476-1* 178-476-2* 178-477-1* 178-477-2* 178-478-1* 178-478-2* () 178-486-1* 178-486-2* 178-487-1* 178-487-2* 178-488-1* 178-488-2* () 178-456-1* 178-456-2* 178-457-1* 178-457-2* 178-458-1* 178-458-2* () 178-466-1* 178-466-2* 178-467-1* 178-467-2* 178-468-1* 178-468-2* 0.75mN 4mN 0.75mN 4mN 0.75mN 4mN X 200mm 200mm 200mm 300mm 500mm 500mm (WxD) 600 x 450mm 600 x 450mm 1000 x 450mm (, WxDxH) 766 x 482 x 966mm 766 x 482 x 1166mm 1166 x 482 x 1176mm () 140kg 150kg 220kg * C ( : 178-663): UL/CS, CEE D, BS E, DC, EK K, JIS/100V X- Y- q1 SV-3100S4 : 100mm : 300mm (W x D): 600 x 450mm : SV-3100S8 : 200mm : 300mm (W x D): 600 x 450mm : q2 (416.) SV-3100H4 : 100mm : 500mm (W x D): 600 x 450mm : SV-3100H8 : 200mm : 500mm (W x D): 600 x 450mm : SV-3100W4 : 100mm : 500mm (W x D): 1000 x 450mm : SV-3100W8 : 200mm : 500mm (W x D): 1000 x 450mm : Formtracer SV-3100 (E4301). 403
Extreme SV-3000CNC/SV-M3000CNC 178 CNC CNC. 200mm/s /. α,. Y-, Y-. CNC CNC θ1 θ2. X- Y- 2.... / USB. : SV-C3000CNC X1 : 200mm : 0.05µm : : 200mm/s (., CNC) 0-60mm/s () : 0.02-2mm/s : : 0.5µm/200mm a : -45 - +10 : 0.000225 : 1rpm Z2 () : 300mm (500mm)* : 0.05µm : : 200mm/s (., CNC) 0-60mm/s () (W x H): 750 x 600mm : / : 800µm / 0.01µm, 80µm / 0.001µm, 8µm / 0.0001µm : 4mN 0.75mN ( ) :, 90º / 5µmR (60º / 2µmR: ) (W x D x H): 800 x 620 x 1000mm (800 x 620 x 1200mm)* 240kg (250kg)* * : : 2.5-3.5Hz : : : 0.4MPa : 350kg (W x D x H): 1000 x 895 x 715mm : 280kg Y- : 200mm : 0.05µm : : 200mm/s (., CNC) 0-60mm/s () : 20kg 0.5µm / 200mm (20 C ): ±(2+2L/100)µm, L: (mm) : 200 x 200mm (W x D x H): 320 x 646 x 105mm : 35kg PC SV-3000CNC SV-3000CNC SV-3000CNC SV-3000CNC SV-3000CNC * (100V - 120V) 178-521-1 178-541-1 178-522-1 178-542-1 178-523-1 178-543-1 178-524-1 178-544-1 * (200V - 240V) 178-521-2 178-541-2 178-522-2 178-542-2 178-523-2 178-543-2 178-524-2 178-544-2 X1 200mm 200mm 200mm 200mm 200mm 200mm 200mm 200mm Z2 300mm 500mm 300mm 500mm 300mm 500mm 300mm 500mm Y- a ( ).. 9. CNC (E4284). 404
: SV-MC3000CNC X1 : 200mm : 0.05µm : : 200mm/s (., CNC) 0-50mm/s () : 0.02-2mm/s : 0.5µm / 200mm 0.7µm / 200mm ( ) 0.5µm / 200mm (, / ) 0.7µm / 200mm (, / ) a : -45 - +10 : 0.000225 : 1rpm Z2 () : 500mm : 0.05µm : : 200mm/s (., CNC) 0-50mm/s () Y : 810mm : 0.05µm : : 200mm/s (., CNC) 0-50mm/s () : 0.02-2mm/s : 0.5µm / 50mm, 2µm / 800mm 0.7µm / 50mm, 3µm / 800mm ( ) 0.7µm / 50mm, 3µm / 800mm (, / ) (W x H): 600 x 1500mm : : 300kg / : 800µm / 0.01µm, 80µm / 0.001µm, 8µm / 0.0001µm ( 2400µm) : / : 4mN 0.75mN ( ) :, 90º / 5µmR (60º / 2µmR: ) : 40mm : (W x D x H): 1085 x 1695 x 1922mm 1600Kg ( ) FORMTRCEPK Y-.,,,.,. PC SV- M3000CNC, / CNC S-3000R(),,. 100kg θ2...,. 800 mm Y-..,,,. SV-M3000CNC (100V - 120V) 178-549-1 (200V - 240V) 178-549-2 X1 200mm Z2-500mm Y 800mm a -45º (CCW), ±10º (CW) ( ).. 9. 405