SENSOR BRACKET H 6"/8" SENSOR BRACKET C/S 8E SENSOR BROCKET C/S 6E AIR CYLINDER.

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1 JTT TECH PTE LTD 1 Yishun Industrial Street 1 #04-24 A POSH BizHub Singapore Tel: (65) Fax: (65) Website: jtt@jtt.sg Company Reg. No: E GST Reg No.: E TEL Clean Track Mark 7 and Mark 8 CARRIER STATION No. OEM Part No Parts Name C/S #4 FRAME ASSY CASSETTE STAGE ASS'Y CASSETTE STAGE 8" CASSETTE STAGE 6",8" CASSETTE SWITCH (L) ASSY SWITCH PLATE SENSOR SHAFT L SPRING ELV LEFT END BLOCK BROCKET SENSOR BLOCK SHAFT GUIDE BOARD SUPPORT..EM C/S 8' CARRIER GUIDE (PA192 80M) CASSETTE CENTER GUIDE CASSETTE GUIDE 80M R CASSETTE GUIDE HL L CASSETTE GUIDE 80M L CASSETTE GUIDE 60MB L CASSETTE GUIDE HI R CASSETTE GUIDE 80M F R CASSETTE GUIDE 60M F R CARRIER SPACER F,R CARRIER SPACER 6",R WAF EDGE SENSOR ASSY (2) SENSOR BLOCK A SLIT SENSOR BLOCK B SLIT ,8 C/S ELEC. IPL (STAGE) WAF EDGE SENSOR LEFT SOURCE WAF EDGE SENSOR RECEIVER " CARRIER SENSOR ASSY CARRIER STAGE SW.. AB12C 6029/AEO C/S ARM X ASSY PINCETTE PINCETTE 8" C/A P HOLDER P HOLDER 6" C/A GUIDE L GUIDE 6" C/A GUIDE R GUIDE R 6" C/A PULLEY M PU LLEY PULLEY PULLEY SENSOR BLOCK RE SENSOR BLOCK 6" 6

2 SENSOR BRACKET H 6"/8" SENSOR BRACKET C/S 8E SENSOR BROCKET C/S 6E AIR CYLINDER..10S 1 SD12N30 XB AIR CYLINDER..7Z 1 SD6N60P LM GUIDE RSR7ZM+94LMS LINEAR WAY..LML7C1R270T1H/A SLIDE BUSH SMSK6UU TIMING BELT 550 2GT TIMING BELT 196 2GT BEARING..LF 1260ZZ C/S ARM Y ASSY PULLEY ASSY(1)..T PULLEY ASSY CS 2..T TIMMING BELT 290 2GT DRIVE BELT 73830X Y HOME SENSOR CS/IF C/S ARM Z ASSY SLIDER..KR CS Z BELT X Z HOME SENSOR CS/F CN 20 CABLE CN23 FLAT CABLE CS CN22 FLAT CABLE CS CN21 FLAT CABLE CS CN10 FLAT CABLE CS CN9 FLAT CABLE CS CN8 FLAT CABLE CS CN7FLAT CABLE CS LIN21 CABLE MECHATRO CABEL ASST C/S ARM ELECTRICE ASSY NET TUBE..CN Z CS NET TUBE..Z X CS C/SARM DRIVER ASSY Z AXIS DRIVER..MSD5A1A1XX Y AXIS DRIVER..MSD5A1A1XX LIN22 CABLE CN 4 CABLE LIN23 CABLE LIN18 CABLE CN 5 CABLE CN 6 CABLE LIN4/LIN5 CABLE SERVO DRIVER AC CABLE # SMIF FRAME (3IND) SMIF ARM IPL X AXIS ASSY X BASE PIN HOLD BASE LEFT PIN HOLDER RIGHT PIN HOLDER SHAFT P PIN SHUTTER PIN SENSOR BROCKET AD PIN S

3 CYLINDER JOINT PINCETTE BASE PINCETTE BASE HOLD HOLD BASE GUIDE HOLD X SHUTTER BELT BLOCK A BELT BLOCK B TENSION SHAFT TENSION HOUSING X MOTOR BASE MOTOR SPACER M3 SCREW MOTOR PULLEY SEPARATION COVER LEFT SIDE COVER RIGHT SIDE COVER RIGHT WIRING COVER FR UPPER COVER FR UNDER COVER REAR UPPER COVER REAR UNDER COVER BEARING..688ZZS SUBSTRATE..SA SUBSTRATE..SA SUBSTRATE..TA SUBSTRATE..TB SLIDE BUSH SMK6G SK TIMING BELT..B60S3M804G SPEED CONTROLLER AS1201F M AIR CYLINDER CQ2A12 30D XB GROMMET..G LM GUIDE HSR10R1UUC1M+345LHM ARM SEAL E RING SMIF ARM X PULLEY ASSY FRONT SENSOR BROCKET SMIF ARM X HOME SENSOR ASSY SMIF ARM 4PIN UP SENSOR ASSY SMIF ARM 4PIN DOWN SENSOR ASSY SMIF ARM WAFER SENSOR ASSY SMIF ARM CONN C BOARD SMIF ARM MOTOR ASSY SMIF C/A 8" CONVERSION PINCETTE P HOLDER GUIDE L GUIDE R SENSOR BLOCK RE SENSOR BLOCK SE SMIF ARM IPL Y COMMON ASSY F.C HOLDER BLOCK B CABLE COVER BOARD COVER

4 Y SENSOR BRACKET ADJUSTMENT BLOCK A MOTOR BRACKET PULLEY TIMING BELT GT STOPPER BLOCK BLOCK A BELT BLOCK BRACKET ADJUSTMENT BLOCK B SIDE PLATE C SIDE PLATE D ARM CORNER BLOCK TUBE HOLDER MAGNET CATCH DUCT PARTS..TKP0180 2B PIA MOVING BRACKET DUCT PARTS..TKP0180 2B PIA MOVING BRACKET SUBSTRATE SUPPORT..TA SUBSTRATE SUPPORT..TB M/A Y IDLER PULLEYASSY M/A Y DRIVER PULLEY ASSY SMIF ARM Y MOTOR ASSY SMIF ARM A SIGNAL EXT.CABLE SMIF ARM A DC EXT.CABLE SMIF ARM STEP MOTOR EXT.CABLE SMIF ARM STEP MOTOR ENC..EXT.CABLE SMIF ARM Y MOTOR DRIVE EXT..CABLE SMIF ARM Y MOTOR ENC EXT.CABLE SMIF ARM Z MOTOR DRIVE EXT..CABLE SMIF ARM Z MOTOR ENC.EXT.CABLE SMIF ARM IPL Y6 ASSY SIDE PLATE A SIDE PLATE B LINEAR WAY..LWHS15C1R900B LR LINEAR WAY..LWHS15C2R1080 LR TIMING BELT GT 15 OPEN COVER MAGNET CATCH..TL CHAIN SUPPORT A CHAIN SUPPORT B FLEXIBLE DUCT..TKP0180 2BR37 30L SMIF ARM CONN A BOARD SMIF ARM FLEX CABLE SMIF ARM Y HOME SENSOR ASSY SMIF ARM IPL ZR AXIS ASSY THET A BASE Z BASE M (200W PA) Z UPPER BASE BLOCK B SHAFT B COVER BRACKET WIRING PIPE Z MOUNT BASE Z AXIS SHUTTER BEARING HOLDERC

5 COVER A COVER B FR REAR COVER Z SIDE COVER Y AXIS SHUTTER PIPE HOLDER STOPPER Z AXIS SHAFT BOARD BRACKET FAN SIDE COVER B FIXING WASHER BALL SCREW..W C7S CROSS ROLLER RING..RA18013UUC BEARING..R 2280ZZ BEARING..SSR 1960ZZ SLIDE BUSH..SMK16WUU SK BEARING PARTS..FU00SUS FINE U NUT Z PULLEY MOTOR PULLEY HOUSING BEARING HOLDER COLLAR PIPE END BEARING..7000CTDFC8P X EXH DUCT GUIDE PIN JOINT BLOCK SENSOR BRACKET TUBE JOINT..M 5HL TUBE JOINT..M 5HL SOL BRACKET WIRING BRACKET WIRING COVER CHAIN MOUN T FC BRACKET (VAC) F.C HOLDER BOARD BRACKET CENTER COVER THETA STOPPER Z DUCT PACKING TUBE JOINT..EYB4 4 NI SDUBSTRATE SUPPORT..TA SDUBSTRATE SUPPORT..TB SOLENOID VALVE..VJ3143Y 6M0ZB M SHUTTER BASE PULLEY TIMING BELT GT TIMING BELT..B150S3M207G R AXIS BRACKET R AXIS SHUTTER BELT HOLDER BELT ROLL BLOCK Z WIRING COVER Z EXH DUCT SMIF ARM THETA MOTOR ASSY

6 SMIF ARM THETA HOME SENSOR..ASSY SMIF ARM 4PIN UP SOLENOID ASSY SMIF ARM CONN B BOARD SMIF ARM Z MOTOR EXT.CABLE SMIF ARM Z ENC.EXT.CABLE SMIF ARM X MOTOR EXT.CABLE SMIF ARM X ENC.EXT.CABLE SMIF ARM C SIGNAL CABLE SMIF ARM Z MOTOR ASSY SMIF ARM DC FAN ASSY (1) SMIF ARM DC FAN ASSY (2) SMIF ARM DC FAN EXT CABLE SMIF ARM Z HOME SENSOR ASSY Z BOTTOM BASE Z SIDE COVER SMIF ARM IPL DRIVER BOX ASSY DRIVER CASE CASE COVER CONNECTOR BRACKET DRIVER BRACKET SUBSTRATE SUPPORT..TZ SUBSTRATE SUPPORT..TB DRIVER SPACER SUBSTRATE SUPPORT..SA MOTOR DRIVER..PMM BD MOROR DRIVER..MSD011A1XX SMIF ARM DRIVER I/F BOARD SMIF ARM Y DRIVER SIGNAL CABLE SMIF ARM Y MOTOR DRIVE CABLE SMIF ARM Y MOTOR ENC.CABLE SMIF ARM Z DRIVER SIGNAL CABLE SMIF ARM Z MOTOR DRIVE..HARNESS SMIF ARM Z MOTOR ENC.CABLE SMIF ARM X DRIVE SIGNAL CABLE SMIF ARM THETA DRIVE SIGNAL..CABLE SMIF ARM A SIGNAL CABLE SMIF ARM A DC CABLE SMIF ARM STEP MOTOR DRIVE..HARNESS SMIF ARM STEP MOTOR ENC.CABLE SMIF ARM DRIVER AC CONN CABLE * SMIF INDEXER IPL 8200 ASSY IND BASE..AM OUTSIDE PLATE..AM INSIDE PLATE..AM B CORNER GUIDE..AM RIGHT REAR GUIDE..AM A LEFT FR GUIDE..AM B PUSH PLATE BASE..AM A PUSH PLATE..AM B PUSH ARM..AM PUSH CYLINDER BRACKET..AM LEFT SENSOR BRACKER..AM RIGHT SENSOR BRACKET..AM IND STOPPER..AM LOCK BLOCK..AM

7 CYLINDER JOINT..AM BLOCK JOINT..AM ARM JOINT..AM SENSOR HOLDER..AM POSITION PIN..AM PIN BASE..AM B INNER HOLDER..AM ROTARY PIN..AM CYLINDER OUT STOPPER..AM OUTER HOLDER..AM CYLINDER IN STOPPER..AM SENSOR SHAFT..AM CONTR BRACKET..AM SENSOR HOLDER..AM SHAFT GUIDE..AM SLIDE BLOCK..AM B CYLINDER JOINT BLOCK..AM LEFT REAR SUPPORT..AM A RIGHT REAR SUPPORT..AM A RIGHT FR SUPPORT..AM B LEFT FR SUPPORT..AM B LEFT OUTSIDE COVER..AM A RIGHT OUTSIDE COVER..AM B LEFT TOP COVER..AM A LEFT UNDER COVER..AM B RIGHT TOP COVER..AM A RIGHT UNDER COVER..AM B RIGHT FOOT..AM A LEFT FOOT..AM B MOTORBASE..AM IND BOTTOM BASE..AM A TENSION ADJUSTABLE PLATE..AM B SECONDARY PULLEY..AM PRIMARY PULLEY..AM UNDER RIGHT PLATE..AM UNDER LEFT PLATE..AM UNDER BACK PLATE..AM BALL SCREW..AM NUT BLOCK..AM SHUTTER..AM TOP FR PLATE..AM TOP FR PLATE..AM TOP BRACKET..AM A MIDDLE BRACKET..AM B BOTTOM BRACKET..AM C NUT PLATE..AM D TOP DUCT SUPPORT..AM UNDER DUCT SUPPORT..AM UNDER FR COVER..AM LEFT PLATE GUIDE..AM A RIGHT PLATE SUPPORT..AM B PLATE SUPPORT BASE..AM CONTR BRACKET..AM PIN..AM B OIL PRESSURE CYLINDER..CDJ2B6 60R B XB9

8 OIL PRESSURE CYLINDER..CDU6 25D XB OIL PRESSURE CYLINDER..CDU25 50D XB SLIDE PACK..ER616+70L SLIDE PACK..ER616+95L LM GUIDE..RSR12VMUU+120LM LM GUIDE..HSR12RUUC1M+350LM SPEED CONTROLER..SC M5 A SPEED CONTROLLER..SC M5 S BEARING..6809ZZ SPRING BALL SCREW PARTS..BUK 12A SUPPORT UNIT VALVE,SOL..VV5J X TUBE JOINT..KJS04 M TUBE JOINT..KJU FIXING SCREW..PT1/8 SUS TAPER PLUG 1KINDS TUBE JOINT..KJL06 01S TUBE JOINT..M 5H TUBE JOINT..M 5HL TUBE JOINT..M 5J TIMING BELT GT E RING..ETW 4 SUS POSITIONING BOLT..SANB POSITIONING PIN..STEH FLEXIBLE DUCT..TKP0130 1BR37 36L FLEXIBLE DUCT PARTS..TKP0130 1B PKA FIXING BRACKET FLEXIBLE DUCT PARTS..TKP0130 1B PIA MOVING BRACKET CAM FOLLOWER..CF3M A SUBSTRATE SUPPORT..SB SUBSTRATE SUPPORT..EM SMIF INDEXER CONN.BOARD POD SENSOR ASSY HOME SENSOR ASSY UP LIMIT SENSOR ASSY MAP SENSOR ASSY WAF SENSOR (HORIZON) ASSY WAF SENSOR (VERTICAL) ASSY (TX) WAF SENSOR (VERTICAL) ASSY (RX) POD LOCK1 SENSOR EXT.CABLE POD LOCK1 SENSOR ASSY POD LOCK2 SENSOR EXT.CABLE POD LOCK2 SENSOR ASSY POD UNLOCK1 SENSOR EXT.CABLE POD UNLOCK1 SENSOR ASSY POD UNLOCK2 SENSOR EXT.CABLE POD UNLOCK2 SENSOR ASSY POD DOOR OPEN SENSOR EXT.CABLE PLD DOOR OPEN SENSOR ASSY POD DOOR CLOSE SENSOR..EXT.CABLE POD DOOR CLOSE SENSOR ASSY WAF PUSH ARM IN SENSOR CABLE WAF PUSH ARM IN SENSOR ASSY WAF PUSH ARM OUT SENSOR CABLE WAF PUSH AR OUT SENSOR ASSY FOD LOCK SOLENOID ASSY POD UNLOCK SOLENOID ASSY

9 POD DOOR OPEN SOLENOID ASSY POD DOOR CLOSE SOLENOID ASSY WAF PUSH SOLENOID ASSY SMIF IND..MOTOR DC CABLE SMIF IND..MOTOR SIGNAL CABLE SMF INDEXER MOTOR ASSY CARRIER UPPER PIN SENSOR ASSY CAPPIER LOSER PIN SENSOR ASSY MOTOR DRIVER..CSD5814N P CAPPIER STAGE SWITCH..AB12C 6029/AE0

10 TEL Clean Track Mark 7 and Mark 8 Main Arm No. OEM Part No Parts Name * 8 IPL HSX8 ASSY BASE MOROT BASE RIGHT ARM BASE LEFT ARM BASE BLOCK RV BLOCK LV BELT BLOCK B TENSION HOUSING BLOCK U ARM BLOCK MIDDLE ARM BASE COVER C COVER E COVER G COVER H BLOCK SIDE BLOCK V HEAT INSULATING COVER (U) HEAT INSULATING COVER (D) ACRYLIC COVER BRACKET DIDODE BRACKET DIDODE BLOCK MOTOR SPACER SHOULDER BOLT..SH PHI 6*16 M TENSION SHAFT SUBSTRATE SUPPORT.. SA SUBSTRATE SUPPORT.. SA LM GUIDE..RSR12VMUUC1+330LHM G TIMING BELT..B60S3M789G BEARING..688ZZS MOTOR PULLEY (S3M20F) BOARD BRACKET BOARD COVER COVER F COVER A` COVER B` SHUTTER AL (ST288) SHUTTER AR (ST288) PINCETTE SUPPORT A (ST288) PINCETTE SUPPORT B (ST288) PINCETTE SUPPORT C (ST288) MYLAR SHEET (14*9) E RING..ETW 6 SUS M/A 8 X PULLEY ASSY (A) M/A 8 X PULLEY ASSY (B) SENSOR BRACKET FRONT SENSOR BRACKET COVER

11 P M/A S.S X MOTOR ASSY P M/A S.S X1 SENSOR HARNESS P M/A S.S X2 SENSOR HARNESS P M/A S.S X3 SENSOR HARNESS P MA8 WAF SENSOR ASSY MAIN ARM H.S CONN C BOARD MAIN ARM WF SENSOR BOARD P M/A S.S C SIGNAL CABLE P M/A S.S X MOTOR CABLE P M/A S.S WAF SENSOR HARNESS * 8 VAC ARM BLOCK 48.5(X1 8) * 8 VAC ARM BLOCK 48.5(X1 5 6) ARM BLOCK 8 (X1 8) ARM BLOCK 8 (X1 5 6) CAP 8 (X 8) CAP 8 (X 5 6) BLOCK 8 (X1) VAC PACKING (PTFE) O RING..BUTYL S 4 BLACK TUBE JOINT..M 5HL * 8 VAC ARM BLOCK 60.5(X2 8) * 8 VAC ARM BLOCK 60.5(X2 5 6) ARM BLOCK 8 (X2 8) ARM BLOCK 8 (X2 5 6) CAP 8 (X 8) CAP 8 (X 5 6) BLOCK 8 (X2) VAC PACKING (PTFE) O RING..BUTYL S 4 BLACK TUBE JOINT..M 5HL * 8 VAC ARM RELAY PIPE RELAY PIPE (40) JOINT PARTS.. IN GASKET RELAY BLOCK (VZ) TUBE JOINT.. M 5HL * 8 VAC ARM WAF SENSOR BASE ASSY DIDOCE BRACKET (VAC) DIODE BRACKET (VAC GL) BLOCK U (VAC) SIDE BLOCK V (VAC) * 8 VAC ARM VAC SENSOR JOINT ASSY JOINT PARTS.. IN GASKET SENSOR BRACKET (L) SENSOR BRACKET TUBE JOINT.. M 5H TUBE JOINT.. M 5HL TUBE JOINT.. M 5UN SPEED CONTROLLER.. SPE HS M * 8 IPL HS8Y ASSY F.C RETAINER BLOCK (B) CABLE COVER BOARD COVER SENSOR BRACKET

12 ADJUSTMENT BLOCK (A) MOTOR BRACKET PULLEY (SMALL) TIMING BELT GT STOPPER BLOCK BLOCK (A) BELT BLOCK BRACKET ADJUSTMENT BLOCK (B) SIDE BOARD SIDE BOARD (D) BLOCK (E) RIB BLOCK MAGNET CATCH.. TL FLEXIBLE DUCT PART.. TKP0180 2B PIA FLEXIBLE DUCT PART.. TKP0180 2B PKA M/A Y IDLER PULLEY ASSY M/A Y DRIVE PULLEY ASSY M/A H.S Y MOTOR ASSY P MA8 Y BP SENSOR ASSY MAIN ARM H.S CONN A BOARD P M/A S.S SIGNAL INNER CABLE P M/A S.S DC INNER CABLE P M/A S.S STEP INNER CABLE P M/A S.S Z MOTOR INNER CABLE P M/A S.S Z ENC. INNER CABLE M/A H.S A SIGNAL EXT CABLE M/A H.S DC EXT CABLE M/A H.S STEP MOTOR EXT CABLE M/A H.S Z MOTOR EXT CABLE (1) M/A H.S Z MOTOR EXT CABLE (2) M/A H.S Y MOTOR EXT CABLE (1) M/A H.S Y MOTOR EXT CABLE (2) * 8 IPL Y4 ASSY * 8 IPL Y6 ASSY * 8 IPL Y8 ASSY * 8 IPL Y10 ASSY * 8 IPL Y12 ASSY * 8 VAC ARM SOLENOID ASSY JOINT PARTS..IN GASKET TUBE HOLDER SOLENOID VALVE TUBE JOINT M 5J TUBE JOINT M 5HL TUBE JOINT M 5H FC BRACKET VAC SOL BRACKET VAC F.C HOLDER PINCETTE WAF BLOCK 5 (2P 45 F) PIQ GUODE5 (POLYIMIDE) BIND SCREW..M2.6*5 SUS INCH PINCETTE WAF BLOCK 5 (2P 45 F)

13 PIQ GUODE5 (POLYIMIDE) BIND SCREW..M2.6*5 SUS INCH VAC ARM ARM CAP (W225 P1) SUPPORT PIN SHIM (T0.2) VAC ARM (W148 P1) ARM CAP (W148 P1) V8 BLOCK VAC ARM (W173 P1) ARM CAP (W173 P1) V8 BLOCK VAC ARM (W225 P1) ARM CAP (W225 P1) V8 BLOCK M3 SCREW PHI OPRING BUTYL S 4 BLACK DRIVER BOX 200WPA COVER A DRIVER BOX COVER B CONNECTOR BRACKET DRIVER BRACKET SUBSTRATE SUPPORT..TA SUBSTRATE SUPPORT..TB DRIVER SPACER SUBSTRATE SUPPORT..AS FUSE BRACKET MOTOR DRIVER..PMM BD MOTOR DRIVER MSD011A1XX MOTOR DRIVER MSD021A1XX MAIN ARM H.S DRIVER I/F BOARD M/A H.S Y DRIVER SIGNAL CABLE M/A H.S Y MOTOR DRIVER CABLE M/A H.S Y MOTOR ENC. CABLE M/A H.S Z DRIVER SIGNAL CABLE M/A H.S Z MOTOR DRIVER CALE M/A H.S Z MOTOR ENC CABLE M/A H.S THETA DRIVER SIGNAL CABLE M/A H.S X1 DRIVER SIGNAL CABLE M/A H.S X2 DRIVER SIGNAL CABLE P M/A S.S X3 DRIVER SIGNAL CABLE M/A H.S SIGNAL CABLE M/A H.S A DC CABLE M/A H.S DRIVER AC CONN CABLE P M/A S.S STEP MOTOR DRIVER HARNESS IMC CONN CABLE IMC CONN CABLE M/A H.S DRIVER AC CABLE M/A H.S DC POWER Cable

14 TEL Clean Track Mark 7 and Mark 8 Coat Unit No. OEM Part No Parts Name * UNIT BASE ASSY UNIT BASE UNIT BASE (MK 8) STRUT STRUT STRUT STRUT SWITCH BRACKET SWITCH COVER REINFORCING PLATE (B) STRUT BASE PLATE (1) STRUT BASE PLATE (2) BRACKET COVER SOLENOID VALVE BRACKET BRACKET BRACKET CONNECTION BOARD BRACKET SPEED CONTROLLER FIXING BLOCK BRACKET SPEED CONTROLLER SHAFT BRACKET MAGNET CATCH..TL TUBE JOINT.. PF FILTER.. ZX1 F NEEDLE VALVE.. GYX SOLENOID VALVE.. VV5J3 32P X SPEED CONTROLLER.. SC M5 L X MECHANICAL VALVE.. VM TUBE JOINT.. M 5H TUBE JOINT.. M 5HL TUBE JOINT.. M 5H TUBE JOINT.. M 5HL TUBE FITTING.. M 5J TUBE JOINT.. M 5T TUBE JOINT.. RBF SUS TUBE JOINT.. EC6 PT1/8 NI TUBE JOINT.. ELB6 PT1/8 NI SUBSTRATE SUPPORT.. SF SUBSTRATE SUPPORT.. SB TUBE JOINT.. IN "SPIN CHUCK VAC SOL ASS`Y "SCOAT CHUCK UP/VAC OFF SW SPIN UNIT CONN BOARD H.C LATCH BOARD HC EXT CABLE * MOTOR FLANGE ASSY MOTOR FLANGE (SUS) MOTOR FLANGE BASE SHAFT SEAL HOLDER

15 SHAFT SEAL LM SHAFT ADDITIONAL DRAWING VACUUM SEAL CASE VACUUM SEAL HOLDER TUBE RING TUBE CONNECTOR STOPPER (8") FLOATING JOINT.. JA SLIDE BUSH.. SMK10W SK SEAL.. AR O RING.. PERFULOLO AS BLACK TUBE JOINT.. C1N3/8 PT3/8ST TUBE JOINT.. C1N1/2 PT3/8ST TUBE JOINT.. M 5H TUBE JOINT.. M 01H AIR CYLINDER.. CQ2B32 40D XB QUICK JOINT.. SVHC06 06F QUICK JOINT.. SVHN06 06F MK 8 CHUCK U/D SENSOR ASS`Y AC SERVOMOTOR.. USAHEM 03TE AC SERVOMOTOR.. 62BM006DXEAS E * GUIDE BLOCK ASSY PITOT BLOCK EXHAUST GUIDE EXHAUST PIPE (1) EXHAUST PIPE (2) PITOT NOZZLE DRAIN GUIDE TUBE JOINT.. M 5HL PACKING.. 91H Y DRAIN PACKING.. 91H Y EXHAUST * MK 8 SCAN ASSY BASE SIDE PLATE A BRACKET MOTOR BRACKET HOUSING A HOUSING B BLOCK A BELT HOLDER SHAFT L SHAFT S COVER (A) SENSOR BRACKET SHUTTER A PULLEY LARGE PULLEY SMALL PULLEY A PULLEY B COLOR SHUTTER B END PLATE MANIFOLD Z BASE RIB

16 Y BASE SENSOR BRACKET BRACKET COVER (B) SHAFT RIB (A) COVER TOP COVER HOOK BRACKET PANEL HOOK HOSE HOLDER COVER SPACER PHI LINEAR WAY.. LWLF24C 1R400T1H/U BEARING.. RF 1980ZZ TIMING BELT XL 025U TIMING BELT.. 80 XL 025U SLIDE BUSH.. SMK8GWUU SK SPEED CONTROLLER.. SPR HS M AIR CYLINDER.. CU16 25D RUBBER VIBRATION ISOLATOR.. SPM 47 G TUBE JOINT.. TSH4 M5M TUBE JOINT.. M 5H TUBE JOING.. M 5HL FLAT TUBE.. UML 404 TE "SPIN MTR SCAN ARM HOME SENS SCAN ARM CONNECTION BRD SCAN ARM SENSOR BRD "SCAN ARM FLEX CABLE "SCAN ARM CABLE * COAT ARM ASSY COATER ARM (MHQ2) CLINDER MOUNT (MHQ2) FRONT COVER CLAMP PAWL (MHQ2 16D) ARM BASE BLOCK (A) MANIFOLD A HOSE BRACKET BRACKET STOPPER SLIDE BLOCK SPACER AIR CYLINDER.. MHQ2 16D X SPRING TUBE JOINT.. MS 5J * RRC ARM ARM BLOCK BRACKET NOZZLE HOLDER LOCK SCREW NOZZLE PIPE (2) TUBE HOLDER (1) TUBE HOLDER (2) TUBE HOLDER (6)

17 TUBE HOLDER (7) * MK 7/8 RRC DRAIN DRAIN PAN DRAIN BLOCK BRACKET SUPPORT TUBE JOINT.. F900 H 6.35A * NEW 8" E.B.R ASSY SIDE RINSE ARM SHAFT BLOCK SHAFT PLATE NUT PLATE ROD COLLAR GUIDE BASE SHUTTER PLATE COVER BLOCK COVER BLOCK STOPPER SENSOR BRACKET ARM COVER SLIDE PACK.. MR615E+25LE SPEED CONTROLLER.. AS1201F M AIR CYLINDER.. CU10 5D XB KNOB SCREW KNOB NUT "E.B.R.IN/OUT SENSOR.. ASSY * 8" ROTARY ARM ASSY BASE PLATE Z AXIS BASE PLATE HOUSING COLLAR (A) BEARING CAP ACTUATOR BASE STOPPER (B) SPACE BLOCK CYLINDER PLATE CYLINDER BRACKET WASHER COLLAR (A) LM GUIDE.. RSR9WMUU+90LM G= ECCENTRIC STOPPER COUPLING M 8* BEARING ZZ TUBE JOINT.. M 5HL SA BRACKET SHOCK ABSORBER.. KSHA 6*5C A STOPPER BRACKET STOPPER (6") COVER BRACKER (1) COVER BRACKER (2) COVER (1) COVER (2) SHAFT "SPIN CYLINDER SCAN U/D SENS "SPIN CYLINDER SCAN I/O SENS

18 * E.B.R NOZZLE PARTS (A) NOZZLE CLAMP ARM BRACKET NOZZLE BEAM (8") NOZZLE HOLDER (2) CHIP HOLDER (A) CHIP TYPE * E.B.R SCAN ASSY (MK 8) MSR BASE (2 8") DRAIN TANK (MSR) SCAN COVER (2 8") ENCODER SLIT HOLDER MOTOR BASE MOTOR BRACKET COVER BRACKET SPRING SHAFT SPRING BRACKET NEN SENS BRKT SENSOR BRACKET (HOME) SENSOR SHUTTER MOTOR PULLEY AIR CYLINDER.. CZLS SD25 50 A TIMING BELT GT SPRING TUBE JOINT.. M 5HL TUBE JOINT.. F900 F COVER BRACKET (2) PULLEY (P48) ADJUSTING NUT LOCKNUT STOP COLLAR (PHI 10) CUSHION MK 7,8 E.B.R. MOTOR ASSY MK 7,8 SPIN E.B.R. U/D.. SENSOR ASSY MK 7,8 SPIN E.B.R. ENC.. SENSOR ASSY SPIN E.B.R. ENC HARNESS * MSR NOZZLE 2 AASY (MK 8) ARM BLOCK 2 (MSR) BLOCK CAP (2) NOZZLE BEAM 2 (MSR 8") NOZZLE HOLDER NOZZLE CAP REDUCING TUBE (24G) OLDER CAP REDUCING TUBE (0.23) REDUCING TUBE (0.30) * NOZZLNOZZLE 4 ASSY BASE NOZZLE SIDE PLATE SIDE PLATE A SIDE PLATE B DIAPHRAGM HOUSING BELT HOLDER

19 COVER D COVER A COVER B MOTOR BRACKET HOUSING (A) SHAFT S PULLEY A PULLEY B SHAFT S WIRE HOLDER FIXING PLATE SENSOR BRACKET A NOZZLE BASE A THINNER POT A DRAIN BLOCK A DRAIN MANIFOLD A PL 12 NUT ENCODER SLIT ENCODER HOLDER SENSOR SHUTTER MAGNET CATCH.. TL BEARING.. RF 1980ZZ LINEAR BUSH.. LM10MUU TIMING BELT XL 037U O RING.. PERFULOLO S 22.4 BLACK TUBE JOINT.. IN TEFLON TUBE.. F 9003 PL 12A L1500 S SENSOR BRACKET "NOZZLE HEAD SENSOR ASS`Y "NOZZLE HCHANGER HOME SENSOR "NOZZLE CHANGER (ENC.) MTR ASSY SOLVENT BATH * COAT CUP HOLDER ASSY 1LINE FIXED ROD SHAFT STAND REDUCING TUBE 21G NOZZLE BRACKET PACKING B JOINT PART PACKING TUBE GUIDE FIXED BLOCK CUP BASE DRAIN PAN NOZZLE BRACKET NOZZLE CAP TUBE JOINT STOP PLATE MK 8 LOWER CUP PPS " UPPER CUP (FR PP)\ " INNER CUP (FR PP) * COAT CONNECTION(MK 7,8) H.C EXT CABLE DUMMY DISPENSE CABLE " SPIN SOLENOID FLAT CABLE

20 " SPIN STEP CONT CABLE " SCAN ARM CABLE SPIN USER BRD CABLE " SPIN MTR STOP SW CABLE " EXHAUST ALM CABLE " NOZZLE CHANGER MOTOR CALE * MK 7,8 T&H ASSY CP PACKING 2 CP DUCT X PACKING T&H SENSOR BRACKET T/H HOOD MAGNET CATCH BRACKET C BRACKET D T/H BOX BRACKET T/H BOX CP BRACKET MAGNET PLATE MAGNET PLATE MAGNET PLATE T/H BOX COVER 1 CP T/H BOX COVER 2 CP * MK 8 COAT COVER ASSY SIDE COVER BRACKET SIDE COVER BRACKET SIDE COVER BRACKET SIDE COVER BRACKET BRACKET B BRACKET C MAGNET PLATE COVER GUIDE COVER GUIDE COVER GUIDE L COVER GUIDE R COVER SUPPORT COVER Q COVER COVER F CEBTER COVER C SIDE COVER SIDE COVER COLLAR NOZZLE TIP

21 TEL Clean Track Mark 7 and Mark 8 Dev Unit No. OEM Part No Parts Name * UNIT BASE ASSY UNIT BASE UNIT BASE (MK 8) POLE POLE POLE POLE SWITCH BRACKET SWITCH COVER REINFORCING PLATE B BASE PLATE FOR PILLAR STRUT BASE PLATE (2) BRACKET COVER SOLENOID VALVE BRACKET BRACKET BRACKET CONNECTION BOARD BRACKET SPEED CONTROLLER FIXING BLOCK BRACKET SPEED CONTROLLER SHAFT BRACKET MAGNET CATCH..TL TUBE JOINT.. PF FILTER.. ZX1 F NEEDLE VALVE.. GYX SOLENOID VALVE.. VV5J3 32P X SPEED CONTROLLER.. SC M5 L X MECHANICAL VALVE.. VM TUBE JOINT.. M 5H TUBE JOINT.. M 5HL TUBE JOINT.. M 5H TUBE JOINT.. M 5HL TUBE FITTING.. M 5J TUBE JOINT.. M 5T TUBE JOINT.. RBF SUS TUBE JOINT.. EC6 PT1/8 NI TUBE JOINT.. ELB6 PT1/8 NI SUBSTRATE SUPPORT.. SF SUBSTRATE SUPPORT.. SB TUBE JOINT.. IN * E2 UNIT PARTS V TUBE RETAINER 8" TUBE RETAINER B * MOTOR FLANGE ASSY MOTOR FLANGE (SUS) MOTOR FLANGE BASE SHAFT SEAL HOLDER SHAFT SEAL LM SHAFT ADDITIONAL DRAWING

22 VACUUM SEAL CASE VACUUM SEAL RETAINER TUBE RING TUBE CONNECTOR STOPPER (8") FLOATING JOINT.. JA SLIDE BUSH.. SMK10W SK SEAL.. AR O RING.. PERFULOLO AS BLACK TUBE JOINT.. C1N3/8 PT3/8ST TUBE JOINT.. C1N1/2 PT3/8ST TUBE JOINT.. M 5H TUBE JOINT.. M 01H AIR CYLINDER.. CQ2B32 40D XB QUICK JOINT.. SVHC06 06F QUICK JOINT.. SVHN06 06F MK 8 CHUCK U/D SENSOR ASS`Y AC SERVOMOTOR.. USAHEM 03TE AC SERVOMOTOR.. 62BM006DXEAS E * GUIDE BLOCK ASSY PITOT BLOCK EXHAUST GUIDE EXHAUST PIPE (1) EXHAUST PIPE (2) PITOT NOZZLE DRAIN GUIDE TUBE JOINT.. M 5HL PACKING.. 91H Y DRAIN PACKING.. 91H Y EXHAUST * E2 SCAN ASSY BASE RAIL BASE SIDE PLATE RAIL GUIDE CYLINDER BASE MANIFOLD A BELT BLOCK SHUTTER CYLINDER BRACKET COLLAR BEARING BRACKET TUBE RETAINER ADJUSTMENT BOLT FIXING NUT TOP COVER COVER COVER ARM BASE 8" HOUSING A HOUSING B MOTOR BRACKET BRACKET ENCODER SLIT SLIT HOLDER

23 PULLEY A TIMING PULLEY 10XL PULLEY SMALL PULLEY LARGE SHAFT S SHAFT L BRACKET A BRACKET B LM GUIDE..2RSR12WMUUC1+390LM LM GUIDE ADDITIONAL WORK DRAWING BEARING RF 1980ZZ TIMING BELT..300 XL 025U TIMING BELT..80 XL 025U SPEED CONTROLLER..AS1211F M AIR CYLINDER..CDU16 30D 90 XB TUBE JOINT..M TUBE JOINT..M 5HL FLAT TUBE..UML 404 TE RUBBER CUSHION..SPM 47 G SUBSTRATE SUPPORT..EM TUBE JOINT..M 5P TUBE JOINT..M 5J E2 SCAN ARM CONN BOARD E2 SCAN ARM SENSOR BOARD " SPIN MTR SCAN ARM MOTOR ASSY " SPIN MTR SCAN ARM HOME SENS E2 SCAN ARM FLEX CABLE 8" * E2 NOZZLE ARM ASSY (1 SYSTEM) NOZZLE BRACKET NOZZLE BRACKET NOZZLE SHAFT NUT M ARM BLOCK A NOZZLE ARM * E2 NOZZLE ASSY 8" NOZZLE CAP 8" RESIN JOINT..S UF W2YATL TUBE HOLDER RESION JOINT..MC P 9 1/4 P FLEXIBLE TUBE..PENCHEM CT1/4" O RING BUTYL AS BLACK O RING.. PARFLO S 6 BLACK FLEXIBLE TUBE..PENCHEM CT1/4" RESION JOINT..UNION CT 1/ O RING..BUTYL P 6 BLACK * E2 NOZZLE BATH ASSY 8INCH BATH BOX 8" NOZZLE BATH 8" DRAIN TRAP CENTER BAR 8" DRAIN PIPE DRAIN PIPE LOCK NUT O RING..BUTYL AS BLACK O RING.. BUTYL P 10 BLACK

24 FILTER BRACKET FILTER..WGGB 01K SPRING * E2 UNIT PARTS V NOZZLE BATH BASE 8" BRACKET V MANIFOLD E2 A QUICK JOINT SVHC06 06F QUICK JOINT SVHN06 06F * E2 NOZZLE (8" FORMATION) NUT PLATE (E2 8) CAP SCREW..M3* * MK 8 RINSE SCAN ASSY SCAN BASE U/B BASE BLOCK BLOCK LOCK NUT STOPPER HOUSING L HOUSING U STOPPER RETAINER SA BRACKET CYLINDER BRACKET ROD END COLLAR SHAFT COVER BRACKET SENSOR BRACKET U SENSOR BRACKET L ADJUSTMENT SCREW SHUTTER SHUTTER SHUTTER END LINK RETAINER COVER STOPPER DRAIN BEARING LM GUIDE BEARING 6901ZZ SHOCK ABSORBER E RING LINK COVER PIN PIN CLEVIS E RING E RING GUIDE COVER TUBE JOINT..M 01H AIR CYLINDER..CQ2D20 F SUBSTRATE SUPPORT..EM SUBSTRATE SUPPORT..EM 5

25 MK 8 CYLI SCAN U/D SENSOR ASSY MK 8 CYLI SCAN I/O SENSOR ASSY TUBE JOINT M 5HI * MK 8 RINSE NOZZLE ASSY RINSE ARM RINSE ARM HOLDER HOLDER BRACKET NOZZLE HOLDER NOZZLE HOLDER NUT RINSE JOINT F W2A * OUT CUP BASE ASSY CYLINDER SUPPORT CYLINDER SUPPORT OUTER CUP BASE CLEVIS LM SHAFT ADDITIONAL DRAWING ROD END TUBE JOINT M 01H SLIDE BUSH.. SMK12W SK MK 8 OUT CUP U/D SENSOR ASSY * CUP HOLDER CUP FIXING PLATE FIXING ROD SHAFT STAND * DEVE CONNECTION MK 7, H.C EXT CABLE " SPIN SOLENOID FLAT CABEL " SPIN STEP CONT CABEL E2 SCAN ARM CABLE SPIN USER BRD CABLE " SPIN MTR STOP SW CABLE " EXHAUST ALM CABLE * DEV UNIT COVER ASSY SIDE COVER BRACKET SIDE COVER BRACKET SIDE COVER BRACKET SIDE COVER BRACKET BRACKET B BRACKET C MAGNET PLATE COVER GUIDE COVER GUIDE COVER GUIDE L DEV COVER GUIDE R DEV COVER SUPPORT COVER Q COVER COVER F CENTER COVER D SIDE COVER SIDE COVER SUPPORT BAR SUPPORT BAR BRACKET 270 DEV SPLAY

26 PLIABLE TUBE PL12 NUT HOLDER A /4" NUT O RING NITRYL S TK HOLDER O RING..PARFLO S PAN PFA TUBE 1/8" MINIATURE JOINT T.K PACKING SPLAY CHIP CAP O RING NITRYL S HOLDER BRACKET NOZZLE BRACKET VAC. NOZZLE VAC. NOZZLE RETAINER MINIATURE JOINT NOZZLE BRACKET NOZZLE BRACKET NOZZLE BRACKET PFA TUBE 1/4" 294 DEV NOZZLE PLIABLE TUBE PL 12 NUT HOLDER B O RING.. NITRYL S PFA TUBE 1/4" HOLDER A /4" NUT O RING..NITRYL S DEV NOZZLE 4 ADAPTER O RING PARFLO S DEV NOZZLE 4 W NOZZLE BRACKET NOZZLE BRACKET NOZZLE BRACKET NOZZLE BRACKET * H NOZZLE SEPARATION (8") ASSY UNDER BODY NS OVER PLATE 8" DEV NOZZLE 4 ADAPTER /4" NUT HOLDER C HOLDER A PL 12 NUT TURNING BLOCK 8" NOZZLE BROCKET O RING..BUTYL S 46 BLACK O RING PARFLO S O RING..NITRYL S HOLE (SHAFT) TEFLON TUBE O RING.. NITRYL S 14

27 NOZZLE ARM L= ARM BLOCK A * H NOZZLE SEPARATION (6" 2) UNDER BODY NS (6") NOZZLE OVER BODY DEV NOZZLE 4 ADAPTER A1/4" NUT HOLDER C HODER A PL12 NUT TURNING BLOCK NOZZLE BRACKET NOZZLE BRACKET MIDDLE (SHIFT) NOZZLE ARM (2) ARM BLOCK (B) ARM BLOCK O RING.. PARFLO S 8 BLACK O RING.. NYTRYL S 12 BLACK TEFLON TUBE.. NO PL 12A L= O RING.. NYTRYL S 14 BLACK O RING.. PARFLO S 34 BLACK