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1 57 ISSN Online ISSN 자동차전력변환모듈용 Aluminum Wire 의초음파접합특성 박지연 * 오철민 * 원덕희 ** 홍원식 *, * 전자부품연구원융복합전자소재연구센터 ** ( 주 ) 아이에이파워트론 Ultrasonic Bonding Property of Aluminum Wire for Power Conversion Module of Automotive Ji-Yeon Park*, Chulmin Oh*, Deok-Hee Won**, and Won Sik Hong*, *Electronic Convergence Materials & Device Research Center, Korea Electronics Technology Institute, Gyeonggi-do, 1359, Korea **R&D Division, ia PowerTron Inc, Incheon, 21314, Korea Corresponding author : wshong@keti.re.kr (Received May 24, 218 ; Revised May 31, 218 ; Accepted June 4, 218) Abstract This study verified ultrasonic bonding reliability of 15 mil and 6 mil aluminum wires for power conversion module of automotive. s were bonded on aluminum metalized using by ultrasonic bonding process. To confirm their joints reliability, high temperature and high humidity test (TH) and thermal shock test (TS) were conducted. TH was tested at 85±3, 85±3 RH for 1, h. TS condition was -4~ 125, 1 min dwell time at each temperature for 1, cycles. Before and after the tests, wire ball shear strength and wire ball pull strength of each wires were measured and compared to the degradation rate of bonding strength. Based on these results, bonding strength degradation rate of TS was 1 times faster than that of TH, and TS was more effective test method than TH. Ultrasonic bonding layer crack was generated at the interfaces between and Al metalization layer of surface, and propagated along the interfaces. Key Words : Power module,, Ultrasonic bonding, Bonding strength, Interface, failure 1. 서론 자동차는 RoHS, ELV 등의환경규제가강화되고있으며, 친환경제품에대한요구가증가하고, 스마트카방향으로발전되고있다 1-3). 따라서자동차의전자장비화되는속도는매우빠르게변화되고있으며, 이중전기자동차와같은화석연료를사용하지않는친환경차량의전력공급및변환을위한다양한형태의전력변환모듈이적용되고있다. 이러한전력변환모듈의에너지변환효율과장기간사용가능한고내구신뢰성에대한요구가증가하고있다. 또한자동차의안전성은사람의생명과직결되기때문에, 일반전자제품에서요구되는수준에비해매우엄격한수준에서관리되고있다. 전 원공급및변환핵심부품인전력변환모듈의신뢰도는자동차전체의안전성및내구성에많은영향을준다 4). 전력변환모듈은실리콘칩 (), direct bonded copper (DBC), 베이스플레이트 (base plate), 케패시터 (capacitor), 저항기 (resistor), 터미널 (terminal) 등으로구성되었으며, 각부품은솔더 (solder) 또는와이어 (wire) 를이용하여전기적으로연결되어있다. 자동차에사용되는전장제품은일반전자제품과달리열적 기계적으로가혹한사용환경에노출된다 5-1). 실내전장품의경우 -4~85, 엔진룸용전장품의경우 -4~125 온도범위에노출된다. 최근전력변환모듈은고효율 고신뢰성에대한요구증가로 SiC 소자를적용한모듈개발이급격히진행되고있으며, SiC 소자적용에따라모듈의동작온도는더증가될전망이다. 이 Journal of Welding and Joining, Vol.36 No.3(218) pp

2 58 박지연 오철민 원덕희 홍원식 에따라전력변환모듈에사용된다양한재료의열팽창계수 (coefficient of thermal expansion, CTE) 차이에의해솔더접합부또는와이어접합부에는응력 (stress) 집중으로인한피로파괴가발생될수있다 11). 와이어는초음파접합조건, 와이어두께, 와이어재질그리고접합부재질에따라와이어접합특성및열화특성이다르게나타난다 12-15). 와이어접합특성을평가하는방법은와이어접합부모양과접합면적을측정하는비파괴시험, 와이어전단강도시험 (wire ball shear test, BST), 와이어인장강도시험 (wire ball pull test, BPT), 단면분석과같은파괴시험이있다 16). 전력변환모듈이집적화, 소형화됨에따라모듈제조에사용되는와이어두께도더욱미세화되고있다. 따라서일반적으로사용되고있는알루미늄 (aluminum, Al) 와이어의초음파접합부에대한정량적평가가요구된다. 본연구에서는전장품의실사용환경과유사한조건하에전력변환모듈을노출시킨후, Al 와이어두께에따른와이어의초음파 (ultrasonic bonding) 접합부에대한접합내구성을비교분석하였다. 2. 실험방법 2.1 무연솔더적용전력변환모듈제작 Fig. 1은무연솔더 (Pb-free solder) 를적용하여개발된전력변환모듈의외관사진이다. 실험에사용된전력변환모듈은 Fig. 2와같이, DBC 및 base plate는 Sn-3.Ag-.5Cu (SAC35) 무연솔더를사용하여진공솔더링 (vacuum soldering) 공정으로접합되었으며, 시그널핀 (signal pin) 과 DBC 는 를초음파본딩으로접합되었다. Al 와이어가접합될 의윗면은알루미늄 (aluminum, Al) 표면처리가되었으며, 뒷면은니켈 (Ni) 표면처리되어있었다. 또한사용된 DBC 는 alumina 재질의세라믹기판 15 mil Signal Pin 6 mil Terminal Fig. 1 Photograph of power conversion module for automotive Si Chip Solder Al SAC35 2 O 3 Solder Solder DBC Si Chip Solder Al 2 O 3 Solder Base plate Al Wire Fig. 2 SEM micrograph and schematic drawing of cross-sectioned power conversion module 양면에 Cu 층이존재하며, 그위해 chip 또는와이어등의접합을위해 DBC 표면은무전해니켈 (electronicless nickel) 표면처리된것을사용하였다. 과 DBC 에초음파접합에사용된 Al 와이어는 (Heraeus 社, Al- R) 각각 381. μm (15 mil) 과 μm (6 mil) 와이어를사용하였다. 15 mil 와이어의초음파접합공정은초음파본딩장비를 (Ultrasonic Engineering Co., REBO-9) 사용하여접합하였다. 15 mil Al 와이어의초음파접합공정조건으로 에는 75~85 gf 하중을인가하며 19~21 ma 출력조건에서 14~ 16 ms 동안초음파를인가하였고, DBC 표면의와이어본딩에는 8~9 gf 하중으로 14~16 ms 조건으로초음파접합을실시하였다. 6 mil Al 와이어의초음파본딩조건은 K&S 社 (ASTERION) 본딩장비를사용하였으며, 접합부에는 17~19 gf, 35~45 ms 조건으로, DBC 접합부에는 17~19 gf, 26-3 ma, 6~8 ms 조건으로초음파접합하였다. 2.2 와이어접합부내구환경시험조건 Al 와이어의초음파접합부에대한내구특성을비교분석하기위해고온고습시험 (temperature-humidity test, TH) 과열충격시험 (thermal shock test, TS) 을진행하였다. 각각의시험을통해시험시간에따른 Al 와이어의접합부에대한열화특성을분석하였다. 고온고습시험은 ESPEC 社 (LH-113) 장비를사용하였으며, 85±3, 85±3% RH 조건에서 1, h 동안진행하였다. 열충격시험은 ESPEC 社 (TSE-11A) 장비를사용하였으며, 시험조건은 Fig. 3과같이 -4~125 온도조건에서각각 1분간유지하였으며, 온도변화시간은 3 min 이내로하여 1, cycles 까지진행하였다. DBC 294 Journal of Welding and Joining, Vol. 36, No. 3, 218

3 자동차전력변환모듈용 Aluminum Wire 의초음파접합특성 59 Temp. ( ) < 3 1 Test distance 167μm /s 167μm /s Tool height 4 μm -4 Time (min) (c) 167 μm /s Fig. 3 Temperature profile for thermal shock test 2.3 와이어접합강도측정조건환경시험전후와이어의접합강도측정을위해 Fig. 4와같이 BST 와 BPT 를진행하였다. 와이어접합강도측정은 Dage사의본딩시험기를 (Dage 4) 사용하였다. 와이어의접합강도와인장강도결과는 5개를시험하여산술평균한값을대푯값으로산출하였다. BST 와 BPT 시험조건은 Fig. 4와같이측정속도 167 μm /s 로시험하였다. BST 시험은 Fig. 4 와같이시험높이는 4 μm이며, 측정거리는와이어두께보다 5 μm를추가하여측정하였다. BPT 의경우 Fig. 4(c) 와같이 45 각도로기울여와이어접합부의인장강도를측정하였다. Fig. 4 Schematic diagram of (a,b) wire ball shear and (c) wire ball pull test 3. 실험결과 3.1 환경시험전후와이어외관관찰 15 mil 과 6 mil 와이어의고온고습시험및열충격시험전후접합부에대한외관분석결과는다음 Fig. 5와같다. Fig. 5(a-b) 초음파접합후초기와이어의외관분석사진이며, Fig. 5(c) 와같이 TS 및 TH 전후와이어및와이어접합부에서는단선 (open) 및균열 45º Si die top surface Si die top surface (c) Initial After TH 5 After TH 1 After TS 5 After TS 1 15 mil 6 mil Fig. 5 Optical micrographs of as-bonded 6 mil, 15 mil aluminum wire and (c) wire bonding area with thermal shock cycles and temperature-humidity test time 대한용접 접합학회지제 36 권제 3 호, 218 년 6 월 295

4 6 박지연 오철민 원덕희 홍원식 (crack) 은관찰되지않았다. 3.2 환경시험전후 15 mil 와이어의접합강도 15 mil Al 와이어의 TH 및 TS 시험시간에따른 BST 결과는다음 Fig. 6와같다. 15 mil 와이어의초기전단강도값은평균 1,512 gf 이였고, TH 1, h 후와이어볼전단강도는 1,479 gf로초기대비 2.2% 감소되어매우작은열화율을나타내었다. 반면 TS 1, cycles 완료후와이어볼전단강도값은 1,176 gf로초기대비약 22% 가감소된것을알수있었다. 이러한결과로볼때, TS의열화율이 TH에비해 1배더가혹한시험임을알수있었고, 단시간내에와이어의열화율을평가하기위해서는 TS의변별력이보다우수한것을알수있었다. Fig. 7은 15 mil Al 와이어의 TH 및 TS 시험시간에따른 BPT 결과이다. 이경우초기와이어의인장강도는 717 gf로측정되었으며, TH 및 TS 후 BPT는각각 737 gf 및 712 gf로나타나거의열화가나타나지않았다. 열화가나타나지않았던이유로는와이어자체를당김으로써인장강도를측정하는방법은접합부의접합강도보다는와이어자체의인장강도특성이측정되는것으로보인다. 따라서 TH나 TS 시험에따라 Al 와이어자체인장강도값의변화가작고, 와이어의볼접합강도보다는와이어의인장강도가작아서이러한비슷한값을나타내는것으로사료된다. 따라서이러한결과로볼때, 초음파접합된와이어의접합강도를측정하는경우, 와이어의인장강도를측정하는것 Wire ball shear strength (gf) mil wire ball shear test Temperature-humidity test Thermal shock test 5 1 Test time(hours/cycles) Fig. 6 Wire ball shear strength variation of 15 mil diameter with thermal shock cycles and temperature-humidity test time Wire ball pull strength (gf) mil wire ball pull test Temperature-humidity test Thermal shock test Test time(hours/cycles) Fig. 7 Wire pull strength variation of 15 mil diameter Al wire with thermal shock cycles and temperaturehumidity test time 보다와이어볼전단강도를측정하는것이보다정확한열화특성을비교할수있는시험방법으로판단된다. 3.3 환경시험전후 6 mil 와이어의접합강도 TH 및 TS 시험시간에따른 6 mil 와이어의 BST 및 BPT 결과는다음 Fig. 8과 Fig. 9와같다. TH 1, h 후와이어의전단강도초기 328 gf에서 366 gf 로다소증가한것으로나타났으며, 이것은시험샘플의오차범위에따른편차인것으로생각된다 (Fig. 8). 반면 TS 1, cycles 완료후 BST 값은 258 gf로 Wire ball shear strength (gf) mil wire ball shear test Temperature-humidity test Thermal shock test Test time(hours/cycles) Fig. 8 Wire ball shear strength variation of 6 mil diameter with thermal shock cycles and temperature-humidity test time 296 Journal of Welding and Joining, Vol. 36, No. 3, 218

5 자동차전력변환모듈용 Aluminum Wire 의초음파접합특성 mil wire ball pull test Wire ball pull strength (gf) Temperature-humidity test Thermal shock test 5 1 Test time(hours/cycles) Fig. 9 Wire pull strength variation of 6 mil diameter Al wire with thermal shock cycles and temperaturehumidity test time 초기와이어볼전단강도값의약 79 % 수준으로 21% 감소된값을나타내었다. 이러한결과는앞서 15 mil 실험결과와도유사한경향을나타내고있다. 와이어볼접합부에대한전단강도를비교할때고온고습한환경보다열충격조건에서발생하는온도편차에의한접합부열화가더많이발생되는것으로사료된다. Fig. 9는 6 mil 와이어에대한 BPT 결과, 초기 227 gf에서 TH 1, h 후 21 gf으로감소되었고, TS 1, cycles 후에도 194 gf로 BPT 값이감소된것을알수있었다. BPT에대한 TH 및 TS 후변화율을비교해보면, 각각 11 % 와 15 % 로나타나, TS 가 TH 보다와이어의접합강도감소가더많이나타난것을알수있었다. BPT의경우, 와이어 6 mil 정도로얇은경우에는와이어자체의인장강도보다와이어접합부의접합강도가작아서접합강도가측정가능한것으로보인다. 그러나 15 mil 정도로두꺼운와이어에서는와이어자체의인장강도가접합강도보다작아서오히려와이어의접합강도측정이어려운것으로판단된다. 3.4 환경시험전후초음파본딩와이어접합계면분석 TH 및 TS 후와이어접합부의전단강도및인장강도감소원인을분석하기위하여와이어의단면분석을진행하였다. Fig. 1은 TS 전 15 mil 와이어접합부에대한단면 SEM 분석결과이다. Chip/DBC 솔더접합부및 Al 와이어접합부모두양호한접합상태를나 Fig. 1 Cross-sectional SEM micrographs of 15 mil aluminum wire before thermal shock test A Al 2 O 3 DBC (d) (e) Magnified A of SAC35 solder SAC35 solder layer Al 2 O 3 DBC Base plate 타내고있으며, 접합부에서균열과같은결함은관찰되지않았다. Fig. 11의, 그리고 (d) 는 TS 5 cycles 후단면 SEM 사진이며, 와이어접합부끝부분에서균열이일부발생된것이관찰되었다. Fig. 11의 (c) 와 (e) 는 TS 1, cycles 후단면 SEM 사진으로, 와이어의초음파접합부전체에서균열이전파된것이관찰되었다. TS 시험시간이경과함에따라초음파접합부의균열발생이와이어의전단강도감소원인에기인한것으로판단된다. Fig. 12는 TS 1, cycles 완료후 15 mil 와이어접합부단면 SEM 사진이며, Fig. 12 의 는 의접합부균열발생부분에대한확대사진이다. Fig. 12 의단면사진을보면, 접합부균열은 Al 와이어와 의 Al metalization 계면사이에서발생한것을확인할수있다. Si Chip 과 Al metalization 의 adhesion 은양호한것으로판단되며, Al metalization 과 Al 와이어의초음파접합부에서균열이발생되고전파된것으로보아, 초음파접합부의열화로인해균열이접합 (c) SAC35 solder Fig. 11 Cross-sectional SEM micrographs of 15 mil aluminum wire after (a,b,d) 5 and (c,e) 1, thermal shock cycles 대한용접 접합학회지제 36 권제 3 호, 218 년 6 월 297

6 박지연 오철민 원덕희 홍원식 62 A 1 A Magnified A of 1 B Crack 1 (c) Aluminum metallization Magnified A of (d) Magnified B of 2 Fig. 12 Cross-sectional SEM micrographs of 15 mil aluminum wire after 1, thermal shock cycles. magnified view of A region in Al2O3 DBC Base plate A SAC35 solder SAC35 solder layer C B Magnified B of 3 (d) Crack tip (e) Magnified C of Crack propagation path Fig. 13 Cross-sectional SEM micrographs of 15 mil aluminum wire after 1, h temperature-humidity test. magnified view of A region in, (c,d) magnified view of B and, (e) magnified view of C 계면을 따라 진전된 것으로 판단된다17,18). Fig. 13은 TH 1, h 후 와이어 접합부 단면사진 이다. Fig. 13는 와이어 전체의 사진이며, Fig. 13 의 (b-e)는 와이어 접합부 확대 사진이다. TH 1, h Fig. 14 Cross-sectional SEM micrographs of 6 mil aluminum wire after 1, h temperature-humidity test. 1, thermal shock cycles. (c) magnified view of A region in and (d) magnified view of B region in (c) 2 완료한 결과 균열은 Al 와이어와 의 Al metalization 계면 사이에서 발생하여 접합계면을 따라 내 부로 전파되었으며, 와이어 접합 길이의 약 3 % 정도 진전된 것으로 나타났다. 그러나 TH 후 전단강도 값에 크게 변화가 없었던 것으로 보아, 와이어 접합부 전체 길이의 약 3 % 균열은 와이어의 전단강도 값에 크게 영향을 주지 않는 것으로 분석된다. Fig. 14는 6 mil 와이어의 환경시험 완료 후 단면분 석 SEM 사진이다. Fig. 14는 TH 1, h 후 와 이어 초음파 접합부 단면 사진이며, Fig. 14는 TS 1, cycles 후 단면 사진이다. Fig. 14의 (c,d)는 Fig. 14(a,b)의 A와 B 영역을 확대한 사진이다. 6 mil 와이어는 TH 및 TS 후 Al 와이어와 의 Al metalization된 계면에서 균열이 시작되어 와이어 전체 길이의 약 25% 까지 전파된 것을 확인하였다. 6 mil 와이어의 경우에는 TH와 TS 후 접합부에 대한 균 열 전파속도가 비슷한 것으로 나타났다. 15 mil 와이 어에서는 TH 시험 후 BST 값의 변화가 거의 없었으 나, 6 mil 와이어의 경우에는 초기 대비 약 11% 감소 된 BPT 값을 나타내었다. 이러한 결과로 볼 때, 와이 어의 두께가 얇은 6 mil 와이어의 경우 초기 접합된 상태가 와이어의 접합내구성에 미치는 영향도가 더 큰 것으로 판단된다. 4. 결 론 본 연구에서는 자동차 전력변환모듈에 사용되는 Al Journal of Welding and Joining, Vol. 36, No. 3, 218

7 자동차전력변환모듈용 Aluminum Wire 의초음파접합특성 63 와이어에대한초음파접합부의내구환경에따른접합특성을비교분석하였으며다음과같은결론을얻었다. 1) 15 mil 와이어의경우, TH 1, h 후 BST는초기대비 2.2%, TS 1, cycles 완료후에는약 22% 가감소되었다. 이러한결과로볼때, TS의열화율이 TH에비해 1배더가혹한시험임을알수있었고, 단시간내에와이어의열화율을평가하기위해서는 TS의변별력이 TH 보다우수한것을알수있었다. 이러한이유는와이어볼접합부에대한전단강도를비교할때고온고습한환경보다열충격조건에서발생하는온도편차에의한접합부열화가더많은영향을미치는것으로판단된다. 2) 와이어직경이 6 mil 정도로얇은경우, 와이어자체의인장강도보다와이어접합부의접합강도가작아초음파본딩부에대한접합강도측정이가능하였다. 그러나 15 mil 정도로직경이두꺼운경우, 와이어자체의인장강도가접합강도보다작아서오히려와이어의접합강도측정이어려운것으로판단된다. 따라서와이어의직경이큰경우에는 BST 방법이 BPT 보다더정확한시험방법임을알수있었다. 3) Al 와이어의초음파접합부에발생된균열은 Al 와이어와 의 Al metalization 계면에서발생되고접합계면을따라전파된것으로보아, 접합부열화로인해균열이진전된것으로판단된다. 후 기 본연구는산업통상자원부청정생산기반전문기술개발사업 ( 과제번호 : ) 의지원을받아수행된연구결과입니다. ORCID: Ji-Yeon Park: ORCID: Won Sik Hong: References 1. European Union Council, Directive 211/65/EU of the European Parliament and of the Council, Restriction of the use of Certain Hazardous Substances in Electrical and Electronic Equipment (RoHS), (211) 2. European Union Council, Directive 2/53/EC of the European Parliament and of the Council of 18 September 2 on end-of life vehicle (ELV), (216) 3. Sonja Haustein and Anders Fjendbo Jensen, Factors of electric vehicle adoption, A comparison of conventional and electric car users based on a extended theory of planned behavior, International Journal of Sustainable Transportation, (218), Andrew J.G. Strandjord, Scott Popelar and Christine Jauernig, Interconnecting to aluminum- and copperbased semiconductors (electroless-nickel/gold for solder bumping and wire bonding), Microelectronics Reliability, 42(2) (22), Yong-Ho Ko, Sehoon Yoo and Chang-Woo Lee, Evaluation on Reliability of High Temperature Leadfree Solder for Automotive Electronics, Journal of Microelectronics & Packaging Society, 17(4) (21), Tuan-Yu Hung, Li-Ling Liao, C.C. Wang, W.H. Chi, and Kuo-Ning Chiang, Life Prediction of High-Cycle Fatigue in Aluminum Bonding Wires Under Power Cycling Test, IEEE Transactions on Device and Materials Reliability, 14(1) (214), Won Sik Hong and Chul Min Oh, Degradation Behavior of Solder Joint and Implementation Technology for Lead-free Automotive Electronics, Journal of KWJS, 31(3) (213), Jun-Hwan Bang, Dong-Yurl Yu, Young-Ho Ko, Jeong- Won Yoon, Chang-Woo Lee, Lead-free Solder for Automotive Electronics and Reliability Evaluation of Solder Joint, Journal of Welding and Joining, 34(1) (216), Hua Ye, Minghui Lin, Cemal Basaran, Failure modes and FEM analysis of power electronic packaging, Finite Elements in Analysis and Design, 38 (22), Y.Yamada, Y. Takaku, Y. Yagi, I. Nakagawa, T. Atsumi, M. Shirai, I. Ohnuma and K.Ishida, Reliaibility of wirebonding and solder joint for high temperature operation of power semiconductor device, Microelectronics Reliability, 47(12) (27), Kristian Bonderup Pedersen, Peter Kjaer Kristensen, Vladimir Popok, and Kjeld Pedersen, Micro-sectioning approach for quality and reliability assessment of wire bonding interfaces in IGBT modules, Microelectronics Reliability, 53(9-11) (213), Luke England and Tom Jiang, Reliability of Cu Wire Bonding to Al Metallization, IEEE Electronic Components and Technology Conference, 57 (27), S, Murali, N. Srikanth, Charles J. Vath III, Effect of wire size on the formation of intermetallics and Kirkendall voids on thermal aging of thermosonic wire bonds, Material Letters, 58 (24), Ivy Qin, Hui Xu, Horst Clauberg, Ray Cathcart, Viola L. Acoff, Bob Chylak and Cuong Huynh, Wire Bonding of Cu and Pd Coated Cu Wire, Bondability, Reliabiity, and IMC Formaiton, IEEE Electronic Components and Technology Conference, 61 (211), D.S. Liu. Y.C. Chao and C.H. Wang, Study of wire bond- 대한용접 접합학회지제 36 권제 3 호, 218 년 6 월 299

8 64 박지연 오철민 원덕희 홍원식 ing looping formaiton in the electronic packaging process using the three-dimensional finite element method, Finite Element in Analysis and Design, 4 (24), Daniel T. Rooney, DeePak Nager, David Geiger, Dongkai Shanguan, Evaluation of wire bonding performance, process conditions, and metallurgical integrity of chip on board wire bonds, Microelectronics Reliability, 45(2) (25), S. Ramminger, P. Turkes, and G. Wachutka, Crack Mechanism in Wire Bonding Joints, Microelectronics Reliability, 38(6-8) (1998), S. Ramminger, N. Seliger, G. and Wachutka, Reliability Model for Al Wire Bonds subjected to Heel Crack Failures, Microelectronics Reliability, 4 (8-1) (2), Journal of Welding and Joining, Vol. 36, No. 3, 218

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