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์ฐจ์„ธ๋Œ€๋ ˆ์ด์ €๋””์Šคํ”Œ๋ ˆ์ด ๋™ํ–ฅ๋ฐ์ ‚๋ง ์ดํ•š์˜์ง‘์ ๊ด‘ํ•™์—ฐ๊ตฌํŒ€ KETI Oct. 14, 2010

2 Contents ๋ ˆ์ด์ €๊ฐœ์š” ๋ ˆ์ด์ €๋””์Šคํ”Œ๋ ˆ์ด ์ฐจ์„ธ๋Œ€๋””์Šคํ”Œ๋ ˆ์ด๋ฅผ์œ„ํ•š๊ฐ€์‹œ๊ด‘๋ ˆ์ด์ €๊ธฐ์ˆ  KETI s Lasers

3 ๋ ˆ์ด์ €๊ฐœ์š”

4 ๋ ˆ์ด์ €์˜์ •์˜ ๋ ˆ์ด์ €? - ๋ ˆ์ด์ €๋Š” Light Amplification by Stimulated Emission of Radiation ์˜ ์•ฝ์ž๋กœ, ๋ณต์‚ฌ์„ ์˜์œ ๋„๋ฐฉ์ถœ์—์˜ํ•š๊ด‘์„ ์˜์ฆํญ์„๋งํ•จ - ๋ ˆ์ด์ €๋ฐœ์ง‚๊ธฐ๋Š”ํฌ๊ฒŒ๋ ˆ์ด์ €๋งค์งˆ, ์—ฌ๊ธฐ์žฅ์น˜, ๋ ˆ์ด์ €๊ณต์ง‚๊ธฐ๋กœ๊ตฌ์„ฑ๋˜๋ฉด, ๋ ˆ์ด์ €๋ฅผ๋ฐœ์ƒ์‹œํ‚ค๋Š”๋งค์งˆ์€๊ธฐ์ฒด, ์•ก์ฒด, ๊ณ ์ฒด์ƒํƒœ๋ชจ๋‘๊ฐ€๋Šฅํ•จ

5 ๋ ˆ์ด์ €์˜ํŠน์ง• ๋ ˆ์ด์ €์—ญ์‚ฌ - 1960 ๋…„๋Œ€๊ฐœ๋ฐœ. ์ดˆ์ฐฝ๊ธฐ๋ฃจ๋น„๋ ˆ์ด์ €๋ฅผ์ด์šฉํ•šํ”ผ๋ถ€๋ฐ˜์ ์ œ๊ฑฐ, ์•”์น˜๋ฃŒ ๊ฐ€๋Šฅ์„ฑ์—๋Œ€ํ•š๊ธฐ์ดˆ์ ์ธ ๋ ˆ์ด์ €ํŠน์ง• - ๋‹จ์ƒ‰์„ฑ์ด๋›ฐ์–ด๋‚จ (monochromatic) - ์œ„์ƒ์ด๊ณ ๋ฅด๊ณ ๊ฐ„์„ญํ˜„์ƒ์ด์ผ์–ด๋‚˜๊ธฐ์‰ฌ์›€ (coherent) - ํผ์ง€์ง€์•Š๊ณ ์ง์ง‚ํ•˜๋ฉฐ์ง‘๊ด‘์„ฑ์ด์ข‹์Œ (collimating) - ํŽธ๊ด‘์„ฑ์ด๋›ฐ์–ด๋‚จ (polarization) - ์—๋„ˆ์ง€๋ฐ€๋„๊ฐ€ํผ (intense) ๋ ˆ์ด์ € LED ๋žจํ”„ ๋ ˆ์ด์ € - ์ƒ‰์ˆœ์ˆ˜์„ฑ๋ ˆ์ด์ € ๋น›์˜์ง์ง„์„ฑ๋ ˆ์ด์ € ํŒŒ์žฅ์˜๊ฐ„์„ญ์„ฑ

Laser Nanophotonics 6 ๋ ˆ์ด์ €์˜ํŠน์ง• Reflected RF 100 m RADIO (RADAR) ๋ ˆ์ด์ € ์ผ๋ฐ˜๊ด‘์› HEAT Radiation Reflected LIGHT 1 mm 12 µm 8 5 3 µm 1500 nm 750 350 200 100 LWIR MWIR SWIR NIR VIS UV X-Ray ๋‹จ์ƒ‰์„ฑ (monochromaticity) ๊ฐ„์„ญ์„ฑ (coherent) ์ง€ํ–ฅ์„ฑ (directionality, collimation) ๊ณ ๊ด‘ํœ˜๋„ (high brightness, high energy) ํ˜ผํ•ฉ์„ฑ (polychromatic) ๋น„๊ฐ„์„ญ์„ฑ (incoherent) ๋น„์ง€ํ–ฅ์„ฑ (not parallel, not collimate) ๋‚ฎ์€์„ธ๊ธฐ (not intense)

7 ๋ ˆ์ด์ €๋””์Šคํ”Œ๋ ˆ์ด

8 ๋ ˆ์ด์ €๋””์Šคํ”Œ๋ ˆ์ด ๋ ˆ์ด์ €, ์„ธ์ƒ์—์„œ๊ฐ€์žฅ์™„๋ฒฝํ•š๋น› - ์ตœ๊ณ ์˜๋ช…๋„, ์ฑ„๋„, ์ž์—ฐ์ƒ‰์„๊ตฌํ˜„ํ•›์ˆ˜์žˆ๋Š”๊ด‘์› - ์ตœ๊ณ ์˜์‹ ๋ขฐ์„ฑ, ์ˆ˜๋ช…, ์ƒ‰์•ˆ์ •์„ฑ์„๊ฐ–๋Š”๊ด‘์› - ์ตœ๊ณ ์˜ํšจ์œจ์„๋‚ผ์ˆ˜์žˆ๋Š”๊ด‘์› Laser TV ์˜๊ฐ•์  - ๋ ˆ์ด์ €๋””์Šคํ”Œ๋ ˆ์ด๋Š”๋‚ฎ์€๊ฐ€๊ฒฉ์œ ์ง€ - ๋น›์˜ํŽธ๊ด‘ํŠน์„ฑ๋•Œ๋ฌธ์—์—ฌ๋Ÿฌ๊ด‘ํ•™๊ณ„๋ฅผ์ƒ๋žต - ํ†ต์ƒ์ ๋ฐ˜๋„์ฒด๊ฐ€๊ฒฉํ๋ฆ„๊ณผ๋™์ผํ•š์›€์ง์ž„ - Mercury free; ์นœํ™–๊ฒฝ์ œํ’ˆ๊ตฌํ˜„ Laser Color Space NTSC 50 ์ด์ƒ์˜ LCD TV, PDP TV ๋Œ€๋น„ํ•˜์—ฌ ๊ฐ€๊ฒฉ๊ณผ๋ฌด๊ฒŒ๊ฐ€ 1/2 ์˜ˆ์ƒ ์†Œ๋น„์ ‚๋ ฅ์€ 1/4 ์†Œ๋ชจ 100 % ์ด์ƒ NTSC ์นผ๋ผ๊ตฌํ˜„์šฉ์ด NTSC: Display ์—์žˆ์–ด phosphors ์—์˜ํ•ด๊ตฌํ˜„๋˜๋Š”์ƒ‰์ƒ๋ฒ”์œ„ 2 ๋งŒ์‹œ๊ฐ„์ด์ƒ๋ฐ˜์˜๊ตฌ์  ์ƒ์‚ฐ์›๊ฐ€์ €๋ ด ( ๋ถ€ํ’ˆ์˜์กฐ๋ฆฝ์‚ฐ์—…์ž„ ) ๋‘๊ป˜๋Š”์œ ์‚ฌ์ˆ˜์ค€

9 Mobile projectors ์–ถ์ œ, ์–ด๋””์„œ๋‚˜์–ด๋–คํœด๋Œ€๋‹จ๋ง๊ธฐ๋ฅผํ†ตํ•ด์„œ๋„๋Œ€ํ™”๋ฉด์˜๋””์Šคํ”Œ๋ ˆ์ด๋ฅผ๊ตฌ์‚ฌํ•› ์ˆ˜์žˆ๋Š”๊ธฐ์ˆ  ์ด๋ฏธ์ง€์—”์ง‚๊ณผ๊ด‘ํ•™๋ชจ๋“ˆ๋กœ๊ตฌ์„ฑ ํ˜„๊ธฐ์ˆ ์™„์„ฑ๋„ : ์—”์ง‚ >> ๊ด‘ํ•™๋ชจ๋“ˆ

10 ๋ชจ๋ฐ”์ผํ”„๋กœ์ ํ„ฐ๊ตฌ์„ฑ Blue Gain chip SHG Green Red Diode Pumped Laser Gain chip Mirror LD chip Laser Fiber bundle holder Fiber Laser Diode Optical bench for Fiber Collimation Lens Full-color laser ๊ด‘์›๋ชจ๋“ˆ๊ฐœ๋žต๋„ ( ํ˜„์žฌ์œ„์™€๊ฐ™์€๊ฐœ๋ณ„๊ด‘์›์„๊ฐœ๋ฐœํ•˜๊ณ , ํ•˜๋‚˜์˜ํŒจํ‚ค์ง•๋‚ด์—์ง‘์ ํ™”์‹œํ‚ด ) 2D MEMS mirror scanner (Wide angle ๋ฐ๊ณ ์†๋™์ž‘์„ํ†ตํ•ด๋Œ€ํ™”๋ฉด๊ตฌํ˜„ )

11 ํ•„์š”์„ฑ ํœด๋Œ€๋‹จ๋ง๊ธฐ์˜๋ณด๊ธ‰ํ™•๋Œ€ DMB๋“ฑ์˜๋ฉ€ํ‹ฐ๋ฏธ๋””์–ด์„œ๋น„์Šค๊ฐœ์‹œ PMP, ๊ฒŒ์ž„, ์Œ์•…๋น„๋””์˜ค, ํœด๋Œ€ํ˜•ํ•™์Šต๊ธฐ๋“ฑ์˜๋‹ค์–‘ํ•š์ปจํ…์ธ ๋ฐœ์ ‚ 2-3 ์ธ์น˜์—๋ถˆ๊ณผํ•šํ™”๋ฉด์„ํ†ตํ•ด์–‘์งˆ์˜์ฝ˜ํ…์ธ ๋ˆ„๋ฆด์ˆ˜์—†์Œ ์†Œํ˜•๋‹จ๋ง๊ธฐ / ๋Œ€ํ™”๋ฉด์„๋™์‹œ์—๋งŒ์กฑ์‹œํ‚ฌ์ˆ˜์žˆ๋Š”์œ ์ผํ•š๊ธฐ์ˆ ์ด LPD Full color LPD ๊ตฌํ˜„๋ฐ์†Œํ˜•ํ™”์œ„ํ•ด RGB ๊ด‘์›๋ฐ MEMS ์Šค์บ๋„ˆ๊ฐœ๋ฐœํ•„์ˆ˜ ์ค‘์š”์„ฑ ํœด๋Œ€๋‹จ๋ง๊ธฐ์šฉ green laser, blue laser์˜์‹œ์žฅ๊ทœ๋ชจ ๋งˆ์ดํฌ๋กœํ”„๋กœ์ ์…˜์šฉ์Šค์บ๋„ˆ์˜์‹œ์žฅ๊ทœ๋ชจ ๊ฐœ์ธ๊ฐ€์ ‚๋ถ„์•ผ์—์žˆ์–ด์„œ์„ธ๊ณ„์‹œ์žฅ์—๋Œ€ํ•š๊ตญ๋‚ด๊ธฐ์ˆ ์šฐ์œ„ Time to market (2010๋…„๋ถ€ํ„ฐ์‹œ์žฅํ˜•์„ฑ์˜ˆ์ƒ ) ๋‹ค์–‘ํ•š๊ธฐ์ˆ ํŒŒ๊ธ‰ํšจ๊ณผ (UV, Near IR, Mid IR )

12 ํ”„๋กœ์ ์…˜๋””์Šคํ”Œ๋ ˆ์ด์˜๋ฐœ์ ‚๋ฐฉํ–ฅ Micro-projector value

13 ํ”„๋กœ์ ์…˜๋””์Šคํ”Œ๋ ˆ์ด ๋‹จ์ˆ˜๋ช… : 5000~8000Hr ์†Œํ˜•ํ™”ํ•š๊ณ„ ์ƒ‰์žฌํ˜„์„ฑ (NTSC 70%) ์†Œ๋น„์ ‚๋ ฅ /Mobile ํ•š๊ณ„ NTSC 105% ๊ณ ํšจ์œจ๋ฏธ๋ž˜๊ด‘์› ์ดˆ์†Œํ˜• / ์ €์ ‚๋ ฅ / ์ €๊ฐ€๊ฒฉ NTSC 130% ํ˜„์žฌ๊ธฐ์ˆ ์‹ ๊ธฐ์ˆ ๋ฏธ๋ž˜๊ธฐ์ˆ  R G B Lamp/CCFL PTV / Data Pj Sony, SEC, ๋ฏธ์ธ ๋น„์‹œ, ๋„์‹œ๋ฐ”, LG, Panasonic.. LED PTV / Pj ๊ฐœ๋ฐœ์ค‘ Sony, SEC, ๋ฏธ์ธ ๋น„์‹œ. LASER ๋ฏธ๋ž˜๊ด‘์› : PTV / Pj ๋ถ€ํ’ˆ๋ฐ์š”์†Œ๊ธฐ์ˆ ๊ฐœ๋ฐœ์ค‘ Samsung, Sony.. Symbol, Fraunhofer

Projection Display Device Trends Compact/ Structure Simplicity/ Competitive Price Nanophotonics 14 ๋””์Šคํ”Œ๋ ˆ์ด๋ฐœ์ ‚๋ฐฉํ–ฅ Light Source Development Trends Life Span/ Natural Color/ Efficiency/ Low Power Consumption Point Scanning Moving mirror = 1 Future Products 07 Line Panel Moving mirror = 1K Plane Panel Moving mirror ~ 1M Conventional Products 05 06 New Products Display Device Arc Lamp LED Laser Light Source Life = 8,000 hrs NTSC = 70% Life = 20,000 hrs NTSC = 105% Life = 50,000 hrs NTSC = 130% Natural Color

15 ๋ ˆ์ด์ €๋””์Šคํ”Œ๋ ˆ์ด์‘์šฉ 3D ๋ ˆ์ด์ €ํ”„๋กœ์ ํ„ฐ - ๋Œ€ํ™”๋ฉด (150 ์ธ์น˜์ด์ƒํ™•์žฅ ) - ๊ณ ์„ ๋ช… - ์ตœ๊ณ ์˜ํšจ์œจ์„๋‚ผ์ˆ˜์žˆ๋Š”๊ด‘์› ๋ ˆ์ด์ € Real 3D TV - ๋””์ง€ํ„ธํ™€๋กœ๊ทธ๋ž˜ํ”ผ - ๋ ˆ์ด์ €๊ฐ„์„ญ์„ฑ์ด์šฉ

16 LCD laser BLU (back light unit) ํˆฌ๊ณผ๊ด‘, 6% ์นผ๋ผํ•„ํ„ฐ ํŽธ๊ด‘์ž ๊ด‘์› ๋“œ๋ผ์ด๋ฒ„ IC ๊ธ€๋ผ์Šค ๊ธฐํƒ€๋ถ€ํ’ˆ 23% 19% ์ œ๊ฑฐ๊ฐ€๋Šฅ ํŽธ๊ด‘ํŒ Glass Color filter ITO ์ „๊ทน๋ฐฐํ–ฅ๋ง‰ 8% 15% 6% 29% LCD BLU (Back Light Unit, ๋ฐฑ๋ผ์ดํŠธ ) ๊ฐ€๊ฒฉ๊ตฌ์„ฑ๋„ ๋ฐฐํ–ฅ๋ง‰ TFT Glass ํŽธ๊ด‘ํŒ ๊ด‘์› (CCFL ๋˜๋Š” LED), 100%

17 LCD TV BLU ๊ด‘์›๋น„๊ต BLU ๊ด‘์›์ข…๋ฅ˜ CCFL LED Laser ๋น„๊ณ  ( ๋‚˜๋…ธ TV, CNT BLU) ๋ถ€ํ’ˆ๊ตฌ์„ฑ ํŽธ๊ด‘ํŒ์œ ๋ฌดํ•„์š”ํ•„์š”๋ถˆํ•„์š”ํ•„์š” ์นผ๋ผํ•„ํ„ฐ์œ ๋ฌดํ•„์š”ํ•„์š”๋ถˆํ•„์š”ํ•„์š” ๋„๊ด‘ํŒ์œ ๋ฌดํ•„์š”ํ•„์š”ํ•„์š”๋ถˆํ•„์š” ์ƒ‰ํ‘œํ˜„, NTSC 100% 130% 200% 110 ์„ฑ๋Šฅ ์†Œ๋ชจ์ „๋ ฅ 100 90 < 50 80 ์ˆ˜๋ช… ( ์‹œ๊ฐ„ ) < 5,000 ~20,000 > 20,000 ๋ฏธ๊ฒ€์ฆ BLU ์ƒ์‚ฐ์›๊ฐ€์ค‘๊ฐ„๋†’์Œ๋‹ค์†Œ๋‚ฎ์Œ์ค‘๊ฐ„

18 ์ฐจ์„ธ๋Œ€๋””์Šคํ”Œ๋ ˆ์ด๋ฅผ์œ„ํ•š ๊ฐ€์‹œ๊ด‘๋ ˆ์ด์ €๊ธฐ์ˆ 

19 Existing visible lasers Red color laser - ๋ฐ˜๋„์ฒด๊ธฐ์ˆ ์—์˜ํ•š๊ณ ์ถœ๋ ฅ์˜ red color ์ƒ์„ฑ๊ฐ€๋Šฅ Diode bar array Fiber bundle Output beam Cylinder lens Green & Blue laser? - Blue color: ๋ฐ˜๋„์ฒด๊ธฐ์ˆ ์—์˜ํ•ด์ˆ˜์‹ญ mw ์ถœ๋ ฅ๊ฐ€๋Šฅ (not real blue) - Green color: no solution from semiconductor technology

20 First target of laser display Laser TV - Real color ๊ตฌํ˜„ - 2000 ๋…„๋Œ€์ค‘์ดˆ๋ฐ˜์„ธ๊ณ„์ ๊ฐ€์ ‚์—…์ฒด์—์„œ์—ฐ๊ตฌ - ์ ํ•ฉํ•š๋ ˆ์ด์ €๊ด‘์›๋ถ€์žฌ๋กœ์‹คํŒจ Real color display by laser

21 ๊ฐ€์‹œ๊ด‘๋ ˆ์ด์ €๊ธฐ์ˆ  ๋น„์„ ํ˜•๊ด‘ํ•™๊ธฐ์ˆ  - SHG, OPO, DFG ๋“ฑ์„ํ†ตํ•š new λ (green, blue, red) ์ƒ์„ฑ - ๋ฐ”์„ ํ˜•ํšจ์œจ์ด๋†’์€๊ด‘๊ฒฐ์ •์š”๊ตฌ - Bulk optics ์—๋”ฐ๋ฅธํฐ๊ณต๊ฐ„๊ณผ๋ถ€ํ”ผ์š”๊ตฌ 14 SHG DFG S ig n a l, id le r w a v e le n g t 12 10 8 6 4 2 60 d eg. 70 d eg. 80 d eg. 90 d eg. 0 1.2 1.25 1.3 1.35 1.4 1.45 1.5 1.55 1.6 1.65 1.7 1.75 1.8 1.85 i =2 - f s Pump wavelength (um) p =2 f s f

22 ๊ฐ€์‹œ๊ด‘ λ ๋น„์„ ํ˜•๊ด‘ํ•™๊ธฐ์ˆ  898 n m 449 n m 1047 n m 523 n m SHG Blue Pump Laser SHG OPO Green SHG Red 1256 n m 628 n m U.S. Patent #5,740,190

Nonlinear optic efficienry [a. u.] 0 10 20 30 40 Nanophotonics 23 Quasi phase matching (QPM) ๊ธฐ์ˆ  Periodic poling ๋น„์„ ํ˜•๊ด‘ํ•™๊ธฐ์ˆ  - ๊ฒฐ์ •์˜๋ถ„๊ทน๋ฐฉํ–ฅ์„์ฃผ๊ธฐ์ ์œผ๋กœ๋ฐ˜์ ‚ ( ๋‚˜๋…ธ์Šค์ผ€์ผ๋ถ„๊ทน๋„๋ฉ”์ธ์—”์ง€๋‹ˆ์–ด๋ง ) - ๊ฐ€์žฅ๋†’์€๋น„์„ ํ˜•๊ณ„์ˆ˜์˜๊ฒฐ์ •์ด์šฉ์„๊ฐ€๋Šฅํ•˜๊ฒŒํ•˜๋Š”์œ ์ผํ•š๊ธฐ์ˆ  M QPM M not phase-matched a) Phase Mismatched case 0 2 4 6 8 10 Interaction length [L i ] b) Quasi-Phase Matched case c) Nonlinear effect in QPM structure

24 QPM ์š”์†Œ๊ธฐ์ˆ  ๋ฐ˜๋„์ฒด๊ณต์ •๊ธฐ์ˆ  + ์žฌ๋ฃŒ๊ธฐ์ˆ ์˜์œตํ•ฉ - ๋‚˜๋…ธ์Šค์ผ€์ผ๋ถ„๊ทน์ œ์–ด - ๊ด‘๋„ํŒŒ๋กœ์ง‘์ ํ™”๊ธฐ์ˆ  x propagation ์ž๋ฐœ๋ถ„๊ทน์–ต์ œ๊ธฐ์ˆ  ๊ณ ์ ‚์••์ดˆ๊ณ ์†์ œ์–ด๊ธฐ์ˆ  Mode-overlapping ๊ธฐ์ˆ  x propagation ๋ถ„๊ทน๋ฐ˜์ ‚์ œ์–ด๊ธฐ์ˆ  ์˜จ๋„์•ˆ์ •ํ™”๊ธฐ์ˆ  Pyro-effect ์ œ์–ด๊ธฐ์ˆ  ๊ด‘ํŒจํ‚ค์ง•๊ธฐ์ˆ  Deep-dry etching ๊ธฐ์ˆ  Ridge ๊ด‘๋„ํŒŒ๋กœ๊ธฐ์ˆ  QPM ํ˜•์„ฑ๊ธฐ์ˆ 

25 World 1 st full color laser DPSS + QPM ์œตํ•ฉ๊ธฐ์ˆ  - ๋‹จ์ผ๊ด‘์›์œผ๋กœ๋ถ€ํ„ฐ RGB 3 color ํš๋“ - ๊ฐ€์žฅ๋†’์€๋น„์„ ํ˜•๊ณ„์ˆ˜์˜๊ฒฐ์ •์ด์šฉ์„๊ฐ€๋Šฅํ•˜๊ฒŒํ•˜๋Š”์œ ์ผํ•š๊ธฐ์ˆ 

26 World 1 st full color laser RGB ๋ ˆ์ด์ €ํŠน์ง• - 2006 ๋…„๋ง๋ณด๊ณ  - RGB total power: ~ 1W - Pumping power: ~ 5W - Switching: AO Q switching - Rep. rate: ์ˆ˜ MHz

27 KETI s Lasers

28 ๊ธฐ์กฒ๊ธฐ์ˆ ์˜ํ•š๊ณ„์  ๋น„์„ ํ˜• bulk optics: ๊ณต๊ฐ„์ •๋ ฌ ๋‚ฎ์€๊ด‘ํšจ์œจ : < 20% ๊ณผ๋Œ€ํ•š๋ถ€ํ”ผ : ( ์ˆ˜์‹ญ cm) 3 ๋†’์€๊ฐ€๊ฒฉ ๋‚ฎ์€์•ˆ์ •์„ฑ๋ฐ์‹ ๋ขฐ์„ฑ KETI s vis laser ๊ด‘๋„ํŒŒ๋กœ์ง‘์ ๋น„์„ ํ˜• : ์†Œํ˜•ํ™” Chip-base ์ œ์ž‘ : ์–‘์‚ฐ์„ฑ ํŒŒ์žฅ๋ณ€ํ™–ํšจ์œจ๊ทน๋Œ€ํ™” : ~ 50% ๋„ํŒŒ๋กœ์ง‘์  QPM PPLN ๋ณด์œ ๊ธฐ๊ด€ : ์„ธ๊ณ„์ ์œผ๋กœ NGK, NEL, KETI, 3 ๊ฐœ๊ธฐ๊ด€

29 ์ง‘์ ๋น„์„ ํ˜• QPM ๊ธฐ์ˆ  ๋ฐ˜๋„์ฒด๊ธฐ์ˆ ์—์˜ํ•ด์„œ๋Š” real green, blue LD ์ œ์ž‘๋ถˆ๊ฐ€ ์ ์™ธ๋Œ€์—ญํŒŒ์žฅ์„๊ฐ€์‹œ๊ด‘๋Œ€์—ญ์œผ๋กœํŒŒ์žฅ๋ณ€ํ™–์—์˜ํ•ด green, blue ํ™•๋ณด๊ฐ€๋Šฅ ํŒŒ์žฅ๋ณ€ํ™–ํšจ์œจ๊ทน๋Œ€ํ™”๋ฅผ์œ„ํ•šํ•„์š”๊ธฐ์ˆ  ๋ณ€ํ™–ํšจ์œจ ~ (optical intensity) 2 : ๋„ํŒŒ์ง‘์ ๋ณ€ํ™–ํšจ์œจ 100 ๋ฐฐ์ด์ƒ์ฆ๋Œ€ ํ‰ํŒํ˜•๋„ํŒŒ๋กœ์ง‘์ ๋น„์„ ํ˜•๊ด‘ํ•™๊ธฐ์ˆ  Wafer thinning: < 10 m ๋„ํŒŒ๋กœ์ง‘์  QPM PPLN ๋ณด์œ ๊ธฐ๊ด€ : ์„ธ๊ณ„์ ์œผ๋กœ NGK, NEL, KETI, 3 ๊ฐœ๊ธฐ๊ด€ 4.5 m V ๊ด‘๋„ํŒŒ๋กœ์˜์—ญ 1064nm (920nm) 532nm (460nm) 6um ๋„ํŒŒ๋กœ์ง‘์ ์ฃผ๊ธฐ์ ๋ถ„๊ทน๋ฐ˜์ ‚ SHG PPLN waveguide ์ดˆ์†Œํ˜•๊ณ ์ถœ๋ ฅ green, blue laser ๊ด‘์›

30 KETI: Why QPM integrated with W/G I 2 2 d c o 2 2 eff 3 2 n n 2 L 2 I 2 ( o) 2 kl sin 2 2 kl 2 7um 10um W/G QPM is the most effective method to generate a new To increase I 2 for a given material (fixed d eff ) and a fixed chip length (fixed L), I 2 (o), input beam intensity, should be increased. Waveguide integrated QPM devices Owing to W/G QPM, bulk nonlinear optic technology can be developed to planar integrated nonlinear optics planar SHG, planar OPO, fiber-pigtailed nonlinear optics, miniaturized and packaged nonlinear optic module

31 Green/blue chip ์ œ์ž‘ C-1) Poling C-2) Chip bonding C-3) Lapping/Polishing C-6) Electro-plating C-5) Ridge WG pattern C-4) ์ „๊ทน์ฆ์ฐฉ C-7) Dry etching C-8) Cross section Polishing C-9) Green Laser Chip ์™„๋ฃŒ

32 KETI s status - I Watt ๊ธ‰ green laser: world best ์ตœ์ข…๋ชฉํ‘œ : total power 5Watt V 6um

33 KETI s status - II RGB full color ๋ชจ๋“ˆํ™” : ์ตœ์ข…๋ชฉํ‘œ 100cc ๊ธ‰

34