SENSOR BRACKET H 6"/8" SENSOR BRACKET C/S 8E SENSOR BROCKET C/S 6E AIR CYLINDER.

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JTT TECH PTE LTD 1 Yishun Industrial Street 1 #04-24 A POSH BizHub Singapore 768160 Tel: (65) 6262 5887 Fax: (65) 6339 1383 Website: www.jtt.sg Email: jtt@jtt.sg Company Reg. No: 201701120E GST Reg No.: 20-1701120-E TEL Clean Track Mark 7 and Mark 8 CARRIER STATION No. OEM Part No Parts Name 1 1985 444265 11 C/S #4 FRAME ASSY 2 1985 419253 11 CASSETTE STAGE ASS'Y 3 1910 110756 13 CASSETTE STAGE 8" 4 1910 110757 12 CASSETTE STAGE 6",8" 5 1985 413376 11 CASSETTE SWITCH (L) ASSY 6 1910 110604 14 SWITCH PLATE 7 1910 422608 11 SENSOR SHAFT L 8 310 492483 1 SPRING ELV 9 1904 300076 11 LEFT END BLOCK 10 1310 496772 11 BROCKET 2 11 1910 420679 12 SENSOR BLOCK 12 1904 400074 11 SHAFT GUIDE 13 044 000044 1 BOARD SUPPORT..EM 3 14 1985 431491 11 C/S 8' CARRIER GUIDE (PA192 80M) 15 1904 300073 11 CASSETTE CENTER GUIDE 16 1904 400035 11 CASSETTE GUIDE 80M R 17 1910 425028 11 CASSETTE GUIDE HL L 18 1904 400036 11 CASSETTE GUIDE 80M L 19 1910 424142 11 CASSETTE GUIDE 60MB L 20 1910 425029 11 CASSETTE GUIDE HI R 21 1904 400037 11 CASSETTE GUIDE 80M F R 22 1910 424143 11 CASSETTE GUIDE 60M F R 23 1910 424147 11 CARRIER SPACER F,R 24 1910 424106 11 CARRIER SPACER 6",R 25 1985 413379 11 WAF EDGE SENSOR ASSY (2) 26 1910 426312 11 SENSOR BLOCK A SLIT 27 1910 424791 11 SENSOR BLOCK B SLIT 28 1986 401447 11 7,8 C/S ELEC. IPL (STAGE) 29 1386 444163 14 WAF EDGE SENSOR LEFT SOURCE 30 1386 444165 15 WAF EDGE SENSOR RECEIVER 31 1386 444848 13 8" CARRIER SENSOR ASSY 32 1386 000863 12 CARRIER STAGE SW.. AB12C 6029/AEO 33 1987 412407 11 C/S ARM X ASSY 34 310 290647 7 PINCETTE 35 1310 290833 13 PINCETTE 8" C/A 36 310 392002 8 P HOLDER 37 1310 392434 14 P HOLDER 6" C/A 38 1910 321310 13 GUIDE L 39 1910 318288 14 GUIDE 6" C/A 40 1910 321311 13 GUIDE R 41 1910 318289 14 GUIDE R 6" C/A 42 1380 101160 11 PULLEY M 43 1380 101161 11 PU LLEY 1 44 1380 101162 11 PULLEY 2 45 1380 101163011 PULLEY 3 46 1910 425614 12 SENSOR BLOCK RE 47 1910 421664 11 SENSOR BLOCK 6" 6

48 1380 101170 11 SENSOR BRACKET H 6"/8" 49 1910 423412 11 SENSOR BRACKET C/S 8E 50 1910 423413 11 SENSOR BROCKET C/S 6E 51 024 011644 1 AIR CYLINDER..10S 1 SD12N30 XB 52 024 011602 1 AIR CYLINDER..7Z 1 SD6N60P 53 018 002226 1 LM GUIDE RSR7ZM+94LMS 54 018 001050 1 LINEAR WAY..LML7C1R270T1H/A 55 018 000949 1 SLIDE BUSH SMSK6UU 56 023 000585 1 TIMING BELT 550 2GT 6 57 023 000831 1 TIMING BELT 196 2GT 9 58 022 00042 1 BEARING..LF 1260ZZ 59 1987 412408 11 C/S ARM Y ASSY 60 1380 001465 11 PULLEY ASSY(1)..T326012301 61 1380 001463 11 PULLEY ASSY CS 2..T327 10301 62 023 000832 1 TIMMING BELT 290 2GT 9 63 1380 100601 11 DRIVE BELT 73830X5 64 1380 101486 11 Y HOME SENSOR CS/IF 65 1987 412409 11 C/S ARM Z ASSY 66 1380 102358 11 SLIDER..KR CS Z 01 3 67 1380 100546 11 BELT..73060X9 68 1380 101485 11 Z HOME SENSOR CS/F 69 1380 101449 11 CN 20 CABLE 70 1380 001206 11 CN23 FLAT CABLE CS 71 1380 001205 11 CN22 FLAT CABLE CS 72 1380 001204 11 CN21 FLAT CABLE CS 73 1380 001203 11 CN10 FLAT CABLE CS 74 1380 001202 11 CN9 FLAT CABLE CS 75 1380 001201 11 CN8 FLAT CABLE CS 76 1380 001200 11 CN7FLAT CABLE CS 77 1380 101446 11 LIN21 CABLE 78 1380 101443 11 MECHATRO CABEL ASST 79 1986 4013340 11 C/S ARM ELECTRICE ASSY 80 1380 001207 11 NET TUBE..CN Z CS 81 1380 001208 11 NET TUBE..Z X CS 82 1987 412411 11 C/SARM DRIVER ASSY 83 1380 101451 12 Z AXIS DRIVER..MSD5A1A1XX 84 1380 101452 12 Y AXIS DRIVER..MSD5A1A1XX 85 1380 101447 11 LIN22 CABLE 86 1380 101441 11 CN 4 CABLE 87 1380 101448 11 LIN23 CABLE 88 1380 101445 11 LIN18 CABLE 89 1380 101242 11 CN 5 CABLE 90 1380 101442 11 CN 6 CABLE 91 1380 101444 11 LIN4/LIN5 CABLE 92 1386 444896 11 SERVO DRIVER AC CABLE #1 93 1985 429686 11 SMIF FRAME (3IND) 94 1987 412989 11 SMIF ARM IPL X AXIS ASSY 95 1910 111533 14 X BASE 96 1910 432595 11 PIN HOLD BASE 97 1910 432596 11 LEFT PIN HOLDER 98 1910 432597 11 RIGHT PIN HOLDER 99 310 496308 1 SHAFT P 100 1910 432598 11 PIN SHUTTER 101 1910 432599 11 PIN SENSOR BROCKET 102 1910 418355 13 AD PIN S

103 1910 432600 12 CYLINDER JOINT 104 1910 432601 12 PINCETTE BASE 105 1910 432602 11 PINCETTE BASE HOLD 106 1910 432603 12 HOLD BASE 107 1910 432606 11 GUIDE HOLD 108 1910 432605 11 X SHUTTER 109 1310 496527 13 BELT BLOCK A 110 1310 496528 12 BELT BLOCK B 111 1910 426514 11 TENSION SHAFT 112 1910 426515 12 TENSION HOUSING 113 1910 433816 12 X MOTOR BASE 114 310 491379 1 MOTOR SPACER 115 1910 428132 11 M3 SCREW 116 1902 411263 11 MOTOR PULLEY 117 1910 432613 12 SEPARATION COVER 118 1910 327869 11 LEFT SIDE COVER 119 1901 327870 11 RIGHT SIDE COVER 120 1910 432607 11 RIGHT WIRING COVER 121 1910 327865 11 FR UPPER COVER 122 1910 327866 12 FR UNDER COVER 123 19100 327867 12 REAR UPPER COVER 124 1910 327868 11 REAR UNDER COVER 125 022 0000345 1 BEARING..688ZZS 126 044 001075 1 SUBSTRATE..SA6 40 127 044 001058 1 SUBSTRATE..SA6 20 128 044 000131 1 SUBSTRATE..TA305 129 044 000135 1 SUBSTRATE..TB 300 130 018 001081 1 SLIDE BUSH SMK6G SK 1 131 023 001138 1 TIMING BELT..B60S3M804G 132 024 003315 1 SPEED CONTROLLER AS1201F M5 04 133 024 012614 1 AIR CYLINDER CQ2A12 30D XB9 134 026 001300 1 GROMMET..G 110 7210 135 018 001453 1 LM GUIDE HSR10R1UUC1M+345LHM 136 1909 413897 11 ARM SEAL 137 021 100309 1 E RING 138 19850456773 11 SMIF ARM X PULLEY ASSY 139 1910 451737 11 FRONT SENSOR BROCKET 140 1386 458644 11 SMIF ARM X HOME SENSOR ASSY 141 1386 458645 11 SMIF ARM 4PIN UP SENSOR ASSY 142 1386 458646 11 SMIF ARM 4PIN DOWN SENSOR ASSY 143 1386 458642 12 SMIF ARM WAFER SENSOR ASSY 144 1381 658279 11 SMIF ARM CONN C BOARD 145 1386 458641 11 SMIF ARM MOTOR ASSY 146 1985 431594 11 SMIF C/A 8" CONVERSION 147 310 290647 7 PINCETTE 148 310 392002 8 P HOLDER 149 1910 321310 13 GUIDE L 150 1910 321311 13 GUIDE R 151 1910 425614 12 SENSOR BLOCK RE 152 1910 425613 12 SENSOR BLOCK SE 153 1987 412991 11 SMIF ARM IPL Y COMMON ASSY 154 310 496440 1 F.C HOLDER 155 310 496443 6 BLOCK B 156 1310 497013 11 CABLE COVER 157 1310 392469 11 BOARD COVER

158 1910 432708 13 Y SENSOR BRACKET 159 310 496439 1 ADJUSTMENT BLOCK A 160 1910 320928 13 MOTOR BRACKET 161 302 490105 1 PULLEY 162 023 000055 1 TIMING BELT..345 3GT 15 163 310 496445 2 STOPPER BLOCK 164 310 392105 6 BLOCK A 165 310 496447 1 BELT BLOCK 166 310 496448 1 BRACKET 167 310 496449 1 ADJUSTMENT BLOCK B 168 310 392099 5 SIDE PLATE C 169 310 392100 5 SIDE PLATE D 170 1910 433220 12 ARM CORNER BLOCK 171 1910 426973 11 TUBE HOLDER 172 026 001329 1 MAGNET CATCH 173 047 000627 1 DUCT PARTS..TKP0180 2B PIA MOVING BRACKET 174 047 000628 1 DUCT PARTS..TKP0180 2B PIA MOVING BRACKET 175 044 000131 1 SUBSTRATE SUPPORT..TA 305 176 044 000135 1 SUBSTRATE SUPPORT..TB 300 177 1985 433853 11 M/A Y IDLER PULLEYASSY 178 1985 433854 11 M/A Y DRIVER PULLEY ASSY 179 1386 458628 12 SMIF ARM Y MOTOR ASSY 180 1386 458670 11 SMIF ARM A SIGNAL EXT.CABLE 181 1386 458671 12 SMIF ARM A DC EXT.CABLE 182 1386 458672 12 SMIF ARM STEP MOTOR EXT.CABLE 183 1386 458673 11 SMIF ARM STEP MOTOR ENC..EXT.CABLE 184 1386 458674 12 SMIF ARM Y MOTOR DRIVE EXT..CABLE 185 1386 458675 11 SMIF ARM Y MOTOR ENC EXT.CABLE 186 1386 458676 12 SMIF ARM Z MOTOR DRIVE EXT..CABLE 187 1386 458677 11 SMIF ARM Z MOTOR ENC.EXT.CABLE 188 1987 412992 11 SMIF ARM IPL Y6 ASSY 189 1310 290795 14 SIDE PLATE A6 190 1310 290796 12 SIDE PLATE B6 191 018 000435 1 LINEAR WAY..LWHS15C1R900B LR 192 018 000434 1 LINEAR WAY..LWHS15C2R1080 LR 193 023 000316 1 TIMING BELT..2050 5GT 15 OPEN 194 1310 392394 13 COVER 6 195 026 001328 1 MAGNET CATCH..TL 272 2 1787 196 1310 392472 12 CHAIN SUPPORT A6 197 1310 392477 13 CHAIN SUPPORT B6 198 047 000457 1 FLEXIBLE DUCT..TKP0180 2BR37 30L 199 1381 658277 11 SMIF ARM CONN A BOARD 200 1386 458629 12 SMIF ARM FLEX CABLE 201 1386 458630 11 SMIF ARM Y HOME SENSOR ASSY 202 1987 412990 11 SMIF ARM IPL ZR AXIS ASSY 203 1310 290804 16 THET A BASE 204 1903 200047 13 Z BASE M (200W PA) 205 1910 216393 11 Z UPPER BASE 206 310 490036 3 BLOCK B 207 310 4900038 1 SHAFT B 208 310 496113 2 COVER BRACKET 209 1910 432469 11 WIRING PIPE 210 1910 432640 11 Z MOUNT BASE 211 1910 452925 11 Z AXIS SHUTTER 212 310 490049 1 BEARING HOLDERC

213 1310 496503 13 COVER A 214 1310 496504 12 COVER B 215 1910 432470 12 FR REAR COVER 216 1910 432471 11 Z SIDE COVER 217 1910 435418 11 Y AXIS SHUTTER 218 1310 496509 12 PIPE HOLDER 219 1310 496510 11 STOPPER 220 1902 411174 11 Z AXIS SHAFT 221 1910 451740 11 BOARD BRACKET 222 1910 432472 11 FAN SIDE COVER 223 1310 496512 11 B FIXING WASHER 224 019 000156 1 BALL SCREW..W1504 267 C7S10 225 018 000199 1 CROSS ROLLER RING..RA18013UUC0 226 022 100133 1 BEARING..R 2280ZZ 227 022 000163 1 BEARING..SSR 1960ZZ 228 018 001086 1 SLIDE BUSH..SMK16WUU SK 229 022 000018 1 BEARING PARTS..FU00SUS FINE U NUT 230 1902 411202 11 Z PULLEY 231 1902 411206 12 MOTOR PULLEY 232 1310 496513 12 HOUSING 233 1310 496514 13 BEARING HOLDER 234 1310 496515 12 COLLAR 235 1310 497089 11 PIPE END 236 022 100408 1 BEARING..7000CTDFC8P5 237 1910 432473 14 X EXH DUCT 238 1310 496603 13 GUIDE PIN 239 1903 300044 12 JOINT BLOCK 240 1310 496520 11 SENSOR BRACKET 241 028 003338 1 TUBE JOINT..M 5HL 4 242 028 003339 1 TUBE JOINT..M 5HL 6 243 1910 432671 11 SOL BRACKET 244 1910 329709 11 WIRING BRACKET 245 1910 422762 11 WIRING COVER 246 1910 432704 11 CHAIN MOUN T 247 1910 429008 14 FC BRACKET (VAC) 248 1310 497011 13 F.C HOLDER 249 1310 392470 15 BOARD BRACKET 250 1910 451742 11 CENTER COVER 251 1310 497090 12 THETA STOPPER 252 1910 432474 11 Z DUCT PACKING 253 028 006348 1 TUBE JOINT..EYB4 4 NI 254 044 000131 1 SDUBSTRATE SUPPORT..TA 305 255 044 000135 1 SDUBSTRATE SUPPORT..TB 300 256 012 004049 1 SOLENOID VALVE..VJ3143Y 6M0ZB M5 257 1910 435419 11 SHUTTER BASE 258 1902 411191 11 PULLEY 259 023 001280 1 TIMING BELT..687 3GT 8 260 023 001290 1 TIMING BELT..B150S3M207G 261 1910 437809 11 R AXIS BRACKET 262 1910 437808 12 R AXIS SHUTTER 263 1910 437810 12 BELT HOLDER 264 1910 437811 12 BELT ROLL BLOCK 265 1910 448465 11 Z WIRING COVER 266 1910 349416 11 Z EXH DUCT 267 1386 458632 11 SMIF ARM THETA MOTOR ASSY

268 1386 458633 11 SMIF ARM THETA HOME SENSOR..ASSY 269 1386 458634 11 SMIF ARM 4PIN UP SOLENOID ASSY 270 1381 658278 11 SMIF ARM CONN B BOARD 271 1386 458636 12 SMIF ARM Z MOTOR EXT.CABLE 272 1386 458637 11 SMIF ARM Z ENC.EXT.CABLE 273 1386 458638 11 SMIF ARM X MOTOR EXT.CABLE 274 1386 458639 11 SMIF ARM X ENC.EXT.CABLE 275 1386 458640 11 SMIF ARM C SIGNAL CABLE 276 1386 458631 11 SMIF ARM Z MOTOR ASSY 277 1386 458647 11 SMIF ARM DC FAN ASSY (1) 278 1386 458648 11 SMIF ARM DC FAN ASSY (2) 279 1386 461392 11 SMIF ARM DC FAN EXT CABLE 280 1386 458643 11 SMIF ARM Z HOME SENSOR ASSY 281 1910 356126 11 Z BOTTOM BASE 282 1910 452956 11 Z SIDE COVER 283 1987 412993 11 SMIF ARM IPL DRIVER BOX ASSY 284 1910 111622 12 DRIVER CASE 285 1910 328748 12 CASE COVER 286 1910 328749 13 CONNECTOR BRACKET 287 1910 433366 11 DRIVER BRACKET 288 044 000131 1 SUBSTRATE SUPPORT..TZ 305 289 044 000135 1 SUBSTRATE SUPPORT..TB 300 290 1910 427900 11 DRIVER SPACER 291 044 001047 1 SUBSTRATE SUPPORT..SA6 10 292 040 570216 1 MOTOR DRIVER..PMM BD 5702 4 293 040 001777 1 MOROR DRIVER..MSD011A1XX 294 1381 658276 11 SMIF ARM DRIVER I/F BOARD 295 1386 458651 11 SMIF ARM Y DRIVER SIGNAL CABLE 296 1386 458652 12 SMIF ARM Y MOTOR DRIVE CABLE 297 1386 458653 11 SMIF ARM Y MOTOR ENC.CABLE 298 1386 458654 11 SMIF ARM Z DRIVER SIGNAL CABLE 299 1386 458655 12 SMIF ARM Z MOTOR DRIVE..HARNESS 300 1386 458656 11 SMIF ARM Z MOTOR ENC.CABLE 301 1386 458658 11 SMIF ARM X DRIVE SIGNAL CABLE 302 1386 458659 11 SMIF ARM THETA DRIVE SIGNAL..CABLE 303 1386 458662 11 SMIF ARM A SIGNAL CABLE 304 1386 458663 11 SMIF ARM A DC CABLE 305 1386 458660 11 SMIF ARM STEP MOTOR DRIVE..HARNESS 306 1386 458661 11 SMIF ARM STEP MOTOR ENC.CABLE 307 1386 458657 11 SMIF ARM DRIVER AC CONN CABLE 308 1987 413302 1* SMIF INDEXER IPL 8200 ASSY 309 1380 101692 11 IND BASE..AM147 2 1 310 1380 101693 12 OUTSIDE PLATE..AM147 2 2 311 1380 101694 12 INSIDE PLATE..AM147 2 3B 312 1380 101695 11 CORNER GUIDE..AM147 2 4 313 1380 101696 11 RIGHT REAR GUIDE..AM147 2 5A 314 1380 101697 11 LEFT FR GUIDE..AM147 2 5B 315 1380 101698 12 PUSH PLATE BASE..AM147 2 6A 316 1380 101699 11 PUSH PLATE..AM147 2 6B 317 1380 101700 11 PUSH ARM..AM147 2 7 318 1380 101701 11 PUSH CYLINDER BRACKET..AM147 2 8 319 1380 101702 12 LEFT SENSOR BRACKER..AM147 2 9 320 1380 101703 12 RIGHT SENSOR BRACKET..AM147 2 10 321 1380 101714 11 IND STOPPER..AM147 2 11 322 1380 101705 12 LOCK BLOCK..AM147 2 12

323 1380 1 1706 11 CYLINDER JOINT..AM147 2 13 324 1380 101707 11 BLOCK JOINT..AM147 2 14 325 1380 101708 11 ARM JOINT..AM147 2 15 326 1380 101709 11 SENSOR HOLDER..AM147 2 17 327 1380 101710 11 POSITION PIN..AM147 2 18 328 1380 102542 11 PIN BASE..AM1472 19B 329 1380 101712 11 INNER HOLDER..AM147 2 20 330 1380 102541 11 ROTARY PIN..AM147 2 21 331 1380 101714 11 CYLINDER OUT STOPPER..AM147 2 23 332 1380 101715 11 OUTER HOLDER..AM147 2 24 333 1380 101716 11 CYLINDER IN STOPPER..AM147 2 25 334 1380 101717 11 SENSOR SHAFT..AM147 2 26 335 1380 101718 11 CONTR BRACKET..AM147 2 27 336 1380 101719 11 SENSOR HOLDER..AM147 2 28 337 1380 101720 11 SHAFT GUIDE..AM147 2 29 338 1380 101721 12 SLIDE BLOCK..AM147 2 30B 339 1380 101722 11 CYLINDER JOINT BLOCK..AM147 2 31 340 1380 101723 12 LEFT REAR SUPPORT..AM147 2 32A 341 1380 101724 12 RIGHT REAR SUPPORT..AM147 2 32A 342 1380 101725 12 RIGHT FR SUPPORT..AM147 2 32B 343 1380 101726 12 LEFT FR SUPPORT..AM147 2 32B 344 1380 101727 11 LEFT OUTSIDE COVER..AM147 2 33A 345 1380 101728 11 RIGHT OUTSIDE COVER..AM147 2 33B 346 1380 101729 12 LEFT TOP COVER..AM147 2 34A 347 1380 101730 11 LEFT UNDER COVER..AM147 2 34B 348 1380 101731 11 RIGHT TOP COVER..AM147 2 35A 349 1380 101732 11 RIGHT UNDER COVER..AM147 2 35B 350 1380 101733 11 RIGHT FOOT..AM147 2 36A 351 1380 101734 11 LEFT FOOT..AM147 2 36B 352 1380 101735 11 MOTORBASE..AM147 2 37 353 1380 101736 11 IND BOTTOM BASE..AM147 2 38A 354 1380 101737 11 TENSION ADJUSTABLE PLATE..AM147 2 38B 355 1380 101738 11 SECONDARY PULLEY..AM147 2 39 356 1380 101739 11 PRIMARY PULLEY..AM147 2 40 357 1380 101740 11 UNDER RIGHT PLATE..AM147 2 41 358 1380 101741 12 UNDER LEFT PLATE..AM147 2 42 359 1380 101742 11 UNDER BACK PLATE..AM147 2 43 360 1380 101743 11 BALL SCREW..AM147 2 44 361 1380 101744 12 NUT BLOCK..AM147 2 45 362 1380 101745 11 SHUTTER..AM147 2 46 363 1380 101746 11 TOP FR PLATE..AM147 2 47 364 1380 101747 11 TOP FR PLATE..AM147 2 48 365 1380 101748 12 TOP BRACKET..AM147 2 49A 366 1380 102072 11 MIDDLE BRACKET..AM147 2 49B 367 1380 102073 11 BOTTOM BRACKET..AM147 2 39C 368 1380 102074 11 NUT PLATE..AM147 2 49D 369 1380 101749 11 TOP DUCT SUPPORT..AM149 2 50 370 1380 101750 11 UNDER DUCT SUPPORT..AM147 2 51 371 1380 101751 12 UNDER FR COVER..AM147 2 52 372 1380 101752 11 LEFT PLATE GUIDE..AM147 2 53A 373 1380 101753 11 RIGHT PLATE SUPPORT..AM147 2 53B 374 1380 101754 12 PLATE SUPPORT BASE..AM147 2 54 375 1380 101755 12 CONTR BRACKET..AM147 2 55 376 1380 102546 11 PIN..AM147 2 18B 377 024 012921 1 OIL PRESSURE CYLINDER..CDJ2B6 60R B XB9

378 024 012022 2 OIL PRESSURE CYLINDER..CDU6 25D XB9 379 024 012923 1 OIL PRESSURE CYLINDER..CDU25 50D XB9 380 018 001080 1 SLIDE PACK..ER616+70L 381 018 001039 1 SLIDE PACK..ER616+95L 382 018 001637 1 LM GUIDE..RSR12VMUU+120LM 383 108 001638 1 LM GUIDE..HSR12RUUC1M+350LM 1 384 024 012924 1 SPEED CONTROLER..SC M5 A 385 024 002507 1 SPEED CONTROLLER..SC M5 S 386 022 000119 1 BEARING..6809ZZ 387 025 100299 1 SPRING..10180 388 019 000183 1 BALL SCREW PARTS..BUK 12A SUPPORT UNIT 389 1380 101762 11 VALVE,SOL..VV5J3 32 03 X624 390 028 002836 1 TUBE JOINT..KJS04 M5 391 028 002837 1 TUBE JOINT..KJU04 00 392 020 001720 1 FIXING SCREW..PT1/8 SUS TAPER PLUG 1KINDS 393 028 004347 1 TUBE JOINT..KJL06 01S 394 028 003337 1 TUBE JOINT..M 5H 4 395 028 003338 1 TUBE JOINT..M 5HL 4 396 028 002956 1 TUBE JOINT..M 5J 397 023 001291 1 TIMING BELT..340 2GT 9 398 021 100262 1 E RING..ETW 4 SUS304 399 026 003155 1 POSITIONING BOLT..SANB6 20 400 026 002437 1 POSITIONING PIN..STEH10 401 047 001273 1 FLEXIBLE DUCT..TKP0130 1BR37 36L 402 047 001274 1 FLEXIBLE DUCT PARTS..TKP0130 1B PKA FIXING BRACKET 403 047 001275 1 FLEXIBLE DUCT PARTS..TKP0130 1B PIA MOVING BRACKET 404 018 001444 1 CAM FOLLOWER..CF3M A 405 044 001046 1 SUBSTRATE SUPPORT..SB6 10 406 044000045 1 SUBSTRATE SUPPORT..EM 5 407 1380 101545 11 SMIF INDEXER CONN.BOARD 408 1380 101772 11 POD SENSOR ASSY 409 1380 101773 11 HOME SENSOR ASSY 410 1380 101774 11 UP LIMIT SENSOR ASSY 411 1380 101776 11 MAP SENSOR ASSY 412 1380 101777 11 WAF SENSOR (HORIZON) ASSY 413 1380 101778 11 WAF SENSOR (VERTICAL) ASSY (TX) 414 1380 101779 11 WAF SENSOR (VERTICAL) ASSY (RX) 415 1380 101781 11 POD LOCK1 SENSOR EXT.CABLE 416 1380 101782 11 POD LOCK1 SENSOR ASSY 417 1380 101783 11 POD LOCK2 SENSOR EXT.CABLE 418 1380 101784 11 POD LOCK2 SENSOR ASSY 419 1380 101785 11 POD UNLOCK1 SENSOR EXT.CABLE 420 1380 101786 11 POD UNLOCK1 SENSOR ASSY 421 1380 101787 11 POD UNLOCK2 SENSOR EXT.CABLE 422 1380 101788 11 POD UNLOCK2 SENSOR ASSY 423 1380 101789 11 POD DOOR OPEN SENSOR EXT.CABLE 424 1380 101790 11 PLD DOOR OPEN SENSOR ASSY 425 1380 101791 11 POD DOOR CLOSE SENSOR..EXT.CABLE 426 1380 101792 11 POD DOOR CLOSE SENSOR ASSY 427 1380 101793 11 WAF PUSH ARM IN SENSOR CABLE 428 1380 101794 11 WAF PUSH ARM IN SENSOR ASSY 429 1380 101795 11 WAF PUSH ARM OUT SENSOR CABLE 430 1380 101796 11 WAF PUSH AR OUT SENSOR ASSY 431 1380 101797 11 FOD LOCK SOLENOID ASSY 432 1380 101798 11 POD UNLOCK SOLENOID ASSY

433 1380 101799 11 POD DOOR OPEN SOLENOID ASSY 434 1380 101800 11 POD DOOR CLOSE SOLENOID ASSY 435 1380 101801 11 WAF PUSH SOLENOID ASSY 436 1380 101802 11 SMIF IND..MOTOR DC CABLE 437 1380 101803 11 SMIF IND..MOTOR SIGNAL CABLE 438 1380 101804 11 SMF INDEXER MOTOR ASSY 439 1380 101805 11 CARRIER UPPER PIN SENSOR ASSY 440 1380 101806 11 CAPPIER LOSER PIN SENSOR ASSY 441 040 000908 1 MOTOR DRIVER..CSD5814N P 442 1380 000863 12 CAPPIER STAGE SWITCH..AB12C 6029/AE0

TEL Clean Track Mark 7 and Mark 8 Main Arm No. OEM Part No Parts Name 1 1987 411639 1* 8 IPL HSX8 ASSY 2 1910 125213 12 BASE 3 1310 496521 14 MOROT BASE 4 1903 300117 13 RIGHT ARM BASE 5 1903 300116 13 LEFT ARM BASE 6 1310 496525 13 BLOCK RV 7 1310 496526 13 BLOCK LV 8 1310 496528 12 BELT BLOCK B 9 1910 426515 12 TENSION HOUSING 10 1310 496534 12 BLOCK U 11 1310 496536 14 ARM BLOCK 12 1903 300118 13 MIDDLE ARM BASE 13 1310 392207 12 COVER C 14 1310 392208 12 COVER E 15 1310 496539 11 COVER G 16 1310 496540 11 COVER H 17 1310 496541 13 BLOCK 18 1310 392209 14 SIDE BLOCK V 19 1910 3212 3 11 HEAT INSULATING COVER (U) 20 1910 321204 11 HEAT INSULATING COVER (D) 21 1310 392212 16 ACRYLIC COVER BRACKET 22 1310 392213 14 DIDODE BRACKET 23 1310 496543 13 DIDODE BLOCK 24 310 491379 1 MOTOR SPACER 25 020 100448 1 SHOULDER BOLT..SH PHI 6*16 M5 26 1910 426514 11 TENSION SHAFT 27 044 001074 1 SUBSTRATE SUPPORT.. SA6 39 28 044 001059 1 SUBSTRATE SUPPORT.. SA6 21 29 018 001483 1 LM GUIDE..RSR12VMUUC1+330LHM G 30 023 000043 1 TIMING BELT..B60S3M789G 31 022 000045 1 BEARING..688ZZS 32 1902 411263 11 MOTOR PULLEY (S3M20F) 33 1910 433658 11 BOARD BRACKET 34 1910 433659 11 BOARD COVER 35 1310 497076 11 COVER F 36 1310 392533 12 COVER A` 37 1310 392534 12 COVER B` 38 1310 497237 11 SHUTTER AL (ST288) 39 1310 497238 11 SHUTTER AR (ST288) 40 1310 497236 14 PINCETTE SUPPORT A (ST288) 41 1310 392573 14 PINCETTE SUPPORT B (ST288) 42 1310 392574 14 PINCETTE SUPPORT C (ST288) 43 1910 426517 11 MYLAR SHEET (14*9) 44 021 100309 1 E RING..ETW 6 SUS304 45 1985 456771 11 M/A 8 X PULLEY ASSY (A) 46 1985 456772 11 M/A 8 X PULLEY ASSY (B) 47 1910 451738 11 SENSOR BRACKET 48 1910 451737 11 FRONT SENSOR BRACKET 49 1910 451741 11 COVER

50 1386 453088 12 3P M/A S.S X MOTOR ASSY 51 1386 453046 11 3P M/A S.S X1 SENSOR HARNESS 52 1386 453947 11 3P M/A S.S X2 SENSOR HARNESS 53 1386 453048 11 3P M/A S.S X3 SENSOR HARNESS 54 1386 443508 11 3P MA8 WAF SENSOR ASSY 55 1381 650034 11 MAIN ARM H.S CONN C BOARD 56 381 643241 4 MAIN ARM WF SENSOR BOARD 57 1386 453042 12 3P M/A S.S C SIGNAL CABLE 58 1386 453045 11 3P M/A S.S X MOTOR CABLE 59 1386 457214 11 3P M/A S.S WAF SENSOR HARNESS 60 1985 422318 1* 8 VAC ARM BLOCK 48.5(X1 8) 61 1985 422320 1* 8 VAC ARM BLOCK 48.5(X1 5 6) 62 1910 324203 11 ARM BLOCK 8 (X1 8) 63 1910 324201 12 ARM BLOCK 8 (X1 5 6) 64 1910 428943 11 CAP 8 (X 8) 65 1910 428942 11 CAP 8 (X 5 6) 66 1910 428946 11 BLOCK 8 (X1) 67 1910 422908 12 VAC PACKING (PTFE) 68 027 101936 1 O RING..BUTYL S 4 BLACK 69 028 003338 1 TUBE JOINT..M 5HL 4 70 1985 422319 1* 8 VAC ARM BLOCK 60.5(X2 8) 71 1985 422321 1* 8 VAC ARM BLOCK 60.5(X2 5 6) 72 1910 324204 11 ARM BLOCK 8 (X2 8) 73 1910 324202 12 ARM BLOCK 8 (X2 5 6) 74 1910 428943 11 CAP 8 (X 8) 75 1910 428942 11 CAP 8 (X 5 6) 76 1910 428947 12 BLOCK 8 (X2) 77 1910 422908 12 VAC PACKING (PTFE) 78 027 101936 1 O RING..BUTYL S 4 BLACK 79 028 003338 1 TUBE JOINT..M 5HL 4 80 1985 422322 1* 8 VAC ARM RELAY PIPE 81 1910 423350 11 RELAY PIPE (40) 82 028 008412 1 JOINT PARTS.. IN 233 463 GASKET 83 1910 427798 13 RELAY BLOCK (VZ) 84 028 003338 1 TUBE JOINT.. M 5HL 4 85 1985 422323 1* 8 VAC ARM WAF SENSOR BASE ASSY 86 1910 324205 11 DIDOCE BRACKET (VAC) 87 1910 325612 11 DIODE BRACKET (VAC GL) 88 1910 428949 11 BLOCK U (VAC) 89 1910 428948 11 SIDE BLOCK V (VAC) 90 1985 422324 1* 8 VAC ARM VAC SENSOR JOINT ASSY 91 028 008412 1 JOINT PARTS.. IN 233 463 GASKET 92 1910 428944 11 SENSOR BRACKET (L) 93 1910 428945 11 SENSOR BRACKET 94 028 003337 1 TUBE JOINT.. M 5H 4 95 028 003338 1 TUBE JOINT.. M 5HL 4 96 028 002963 1 TUBE JOINT.. M 5UN 97 024 001538 1 SPEED CONTROLLER.. SPE HS M5 98 1987 411640 1* 8 IPL HS8Y ASSY 99 310 496440 1 F.C RETAINER 100 310 496443 6 BLOCK (B) 101 1310 497013 11 CABLE COVER 102 1310 392469 11 BOARD COVER 103 310 496444 6 SENSOR BRACKET

104 310 496439 1 ADJUSTMENT BLOCK (A) 105 1910 320928 13 MOTOR BRACKET 106 302 490105 1 PULLEY (SMALL) 107 023 000055 1 TIMING BELT.. 345 3GT 15 108 310 496445 2 STOPPER BLOCK 109 310 392105 6 BLOCK (A) 110 310 496447 1 BELT BLOCK 111 310 496448 1 BRACKET 112 310 496449 1 ADJUSTMENT BLOCK (B) 113 310 392099 5 SIDE BOARD 114 310 392100 5 SIDE BOARD (D) 115 310 496441 4 BLOCK (E) 116 310 496442 4 RIB BLOCK 117 026 001329 1 MAGNET CATCH.. TL 273 2 1789 118 047 000627 1 FLEXIBLE DUCT PART.. TKP0180 2B PIA 119 047 000628 1 FLEXIBLE DUCT PART.. TKP0180 2B PKA 120 1985 433853 11 M/A Y IDLER PULLEY ASSY 121 1985 433854 11 M/A Y DRIVE PULLEY ASSY 122 1386 448421 12 M/A H.S Y MOTOR ASSY 123 1386 449224 11 3P MA8 Y BP SENSOR ASSY 124 1381 650032 11 MAIN ARM H.S CONN A BOARD 125 1386 455463 11 3P M/A S.S SIGNAL INNER CABLE 126 1386 455464 11 3P M/A S.S DC INNER CABLE 127 1386 455465 11 3P M/A S.S STEP INNER CABLE 128 1386 455466 12 3P M/A S.S Z MOTOR INNER CABLE 129 1386 455467 11 3P M/A S.S Z ENC. INNER CABLE 130 1386 448915 12 M/A H.S A SIGNAL EXT CABLE 131 1386 448916 12 M/A H.S DC EXT CABLE 132 1386 448917 13 M/A H.S STEP MOTOR EXT CABLE 133 1386 448913 12 M/A H.S Z MOTOR EXT CABLE (1) 134 1386 448914 11 M/A H.S Z MOTOR EXT CABLE (2) 135 1386 448911 12 M/A H.S Y MOTOR EXT CABLE (1) 136 1386 448912 11 M/A H.S Y MOTOR EXT CABLE (2) 137 1987 412353 1* 8 IPL Y4 ASSY 138 1987 412354 1* 8 IPL Y6 ASSY 139 1987 412355 1* 8 IPL Y8 ASSY 140 1987 412356 1* 8 IPL Y10 ASSY 141 1987 412357 1* 8 IPL Y12 ASSY 142 1985 42232 1* 8 VAC ARM SOLENOID ASSY 143 028 008412 1 JOINT PARTS..IN 233 463 GASKET 144 1910 426973 11 TUBE HOLDER 145 012 002861 1 SOLENOID VALVE 146 028 002956 1 TUBE JOINT M 5J 147 028 003338 1 TUBE JOINT M 5HL 4 148 028 003337 1 TUBE JOINT M 5H 4 149 1910 429008 14 FC BRACKET VAC 150 1910 429009 11 SOL BRACKET VAC 151 310 496440 1 F.C HOLDER 152 1310 392516 13 8 PINCETTE 6 153 1910 430174 12 8 WAF BLOCK 5 (2P 45 F) 154 1910 421705 15 8PIQ GUODE5 (POLYIMIDE) 155 020 002044 1 BIND SCREW..M2.6*5 SUS 156 1910 349255 11 8 INCH PINCETTE 157 1910 430175 12 8 WAF BLOCK 5 (2P 45 F)

158 1910 421704 15 8PIQ GUODE5 (POLYIMIDE) 159 020 002044 1 BIND SCREW..M2.6*5 SUS 160 1910 220056 11 8 INCH VAC ARM 161 1910 428939 11 ARM CAP (W225 P1) 162 1910 439132 11 SUPPORT PIN 163 1910 439586 11 SHIM (T0.2) 164 1910 215093 11 VAC ARM (W148 P1) 165 1910 428941 11 ARM CAP (W148 P1) 166 1910 426574 11 V8 BLOCK 167 1910 215092 11 VAC ARM (W173 P1) 168 1910 428940 11 ARM CAP (W173 P1) 169 1910 426574 11 V8 BLOCK 170 1910 215091 11 VAC ARM (W225 P1) 171 1910 428939 11 ARM CAP (W225 P1) 172 1910 426574 11 V8 BLOCK 173 1910 428132 11 M3 SCREW PHI8.3 174 027 101936 1 OPRING BUTYL S 4 BLACK 175 1910 111183 15 DRIVER BOX 200WPA COVER A 176 1910 321205 12 DRIVER BOX COVER B 177 1910 321176 12 CONNECTOR BRACKET 178 1910 425435 11 DRIVER BRACKET 179 044 000131 1 SUBSTRATE SUPPORT..TA 305 180 044 000135 1 SUBSTRATE SUPPORT..TB 300 181 1910 433437 12 DRIVER SPACER 182 044 001047 1 SUBSTRATE SUPPORT..AS6 10 183 1910 433437 12 FUSE BRACKET 184 040 570216 1 MOTOR DRIVER..PMM BD 5702 4 185 1380 002053 11 MOTOR DRIVER MSD011A1XX11 186 1380 002055 11 MOTOR DRIVER MSD021A1XX10 187 1381 650031 13 MAIN ARM H.S DRIVER I/F BOARD 188 1386 448422 11 M/A H.S Y DRIVER SIGNAL CABLE 189 1386 44842 12 M/A H.S Y MOTOR DRIVER CABLE 190 1386 448424 11 M/A H.S Y MOTOR ENC. CABLE 191 1386 448425 11 M/A H.S Z DRIVER SIGNAL CABLE 192 1386 448426 13 M/A H.S Z MOTOR DRIVER CALE 193 1386 448427 11 M/A H.S Z MOTOR ENC CABLE 194 1386 448418 11 M/A H.S THETA DRIVER SIGNAL CABLE 195 1386 448419 11 M/A H.S X1 DRIVER SIGNAL CABLE 196 1386 448420 11 M/A H.S X2 DRIVER SIGNAL CABLE 197 1386 453075 11 3P M/A S.S X3 DRIVER SIGNAL CABLE 198 1386 448919 11 M/A H.S SIGNAL CABLE 199 1386 448920 11 M/A H.S A DC CABLE 200 1386 448921 12 M/A H.S DRIVER AC CONN CABLE 201 1386 453076 11 3P M/A S.S STEP MOTOR DRIVER HARNESS 202 1386 445635 11 IMC CONN CABLE1 203 1386 445635 11 IMC CONN CABLE2 204 1386 448909 12 M/A H.S DRIVER AC CABLE 205 1386 448910 13 M/A H.S DC POWER Cable

TEL Clean Track Mark 7 and Mark 8 Coat Unit No. OEM Part No Parts Name 1 1987 411700 1* UNIT BASE ASSY 2 1910 11 960 11 UNIT BASE 3 1903 100021 16 UNIT BASE (MK 8) 4 1910 217054 12 STRUT 5 1910 217055 12 STRUT 6 1910 217056 12 STRUT 7 1910 217057 12 STRUT 8 1910 438900 11 SWITCH BRACKET 9 1910 438899 11 SWITCH COVER 10 310 492813 2 REINFORCING PLATE (B) 11 310 492818 1 STRUT BASE PLATE (1) 12 310 492819 1 STRUT BASE PLATE (2) 13 1910 438898 11 BRACKET 14 1910 335258 11 COVER 15 1910 438889 11 SOLENOID VALVE BRACKET 16 1910 438888 11 BRACKET 17 1910 438883 11 BRACKET 18 1910 321982 11 CONNECTION BOARD BRACKET 19 310 490482 1 SPEED CONTROLLER FIXING BLOCK 20 1910 438884 11 BRACKET 21 310 490483 2 SPEED CONTROLLER SHAFT 22 1910 438903 11 BRACKET 23 026 100944 1 MAGNET CATCH..TL 148 1514 24 028 001189 1 TUBE JOINT.. PF 25 024 006915 1 FILTER.. ZX1 F 26 012 002468 1 NEEDLE VALVE.. GYX 0006 27 012 001227 1 SOLENOID VALVE.. VV5J3 32P X221 28 024 007025 1 SPEED CONTROLLER.. SC M5 L X1 29 012 000446 1 MECHANICAL VALVE.. VM130 01 08 30 028 002954 1 TUBE JOINT.. M 5H 6 31 028 003339 1 TUBE JOINT.. M 5HL 6 32 028 003337 1 TUBE JOINT.. M 5H 4 33 028 003338 1 TUBE JOINT.. M 5HL 4 34 028 002956 1 TUBE FITTING.. M 5J 35 028 002961 1 TUBE JOINT.. M 5T 36 028 001191 1 TUBE JOINT.. RBF SUS 37 028 001383 1 TUBE JOINT.. EC6 PT1/8 NI 38 028 001384 1 TUBE JOINT.. ELB6 PT1/8 NI 39 044 001126 1 SUBSTRATE SUPPORT.. SF5.5 10 40 044 001129 1 SUBSTRATE SUPPORT.. SB5.5 8 41 028 008410 1 TUBE JOINT.. IN 223 454 42 386 440770 2 8"SPIN CHUCK VAC SOL ASS`Y 43 386 440774 1 8"SCOAT CHUCK UP/VAC OFF SW 44 381 643196 5 SPIN UNIT CONN BOARD2 45 1381 645518 14 H.C LATCH BOARD 46 1986 420723 11 HC EXT CABLE 47 1987 411699 1* MOTOR FLANGE ASSY 48 1903 200042 13 MOTOR FLANGE (SUS) 49 310 290008 8 MOTOR FLANGE BASE 50 310 492362 1 SHAFT SEAL HOLDER

51 310 492363 2 SHAFT SEAL 52 302 490037 2 LM SHAFT ADDITIONAL DRAWING 53 310 492369 1 VACUUM SEAL CASE 54 310 492370 1 VACUUM SEAL HOLDER 55 310 492365 1 TUBE RING 56 1910 430884 12 TUBE CONNECTOR 57 1310 497091 12 STOPPER (8") 58 024 006552 1 FLOATING JOINT.. JA20 8 125 59 018 001083 1 SLIDE BUSH.. SMK10W SK 60 027 000003 1 SEAL.. AR 103499 61 027 101869 1 O RING.. PERFULOLO AS568 013 BLACK 62 028 007304 1 TUBE JOINT.. C1N3/8 PT3/8ST 63 028 005382 1 TUBE JOINT.. C1N1/2 PT3/8ST 64 028 002954 1 TUBE JOINT.. M 5H 6 65 028 000041 1 TUBE JOINT.. M 01H 4 66 024 005671 1 AIR CYLINDER.. CQ2B32 40D XB9 67 028 008294 1 QUICK JOINT.. SVHC06 06F 68 028 008295 1 QUICK JOINT.. SVHN06 06F 69 1386 444579 12 MK 8 CHUCK U/D SENSOR ASS`Y 70 380 090094 5 AC SERVOMOTOR.. USAHEM 03TE25 71 1380 001406 14 AC SERVOMOTOR.. 62BM006DXEAS E 72 1385 391301 1* GUIDE BLOCK ASSY 73 1310 496766 11 PITOT BLOCK 74 1310 496764 13 EXHAUST GUIDE 75 1910 429914 13 EXHAUST PIPE (1) 76 1910 429915 12 EXHAUST PIPE (2) 77 310 495888 1 PITOT NOZZLE 78 1310 496765 12 DRAIN GUIDE 79 028 003339 1 TUBE JOINT.. M 5HL 6 80 027 001026 1 PACKING.. 91H Y00001 1 DRAIN 81 027 001027 1 PACKING.. 91H Y00002 1 EXHAUST 82 1987 411698 1* MK 8 SCAN ASSY 83 310 290143 5 BASE 84 310 390813 2 SIDE PLATE A 85 1910 438886 11 BRACKET 86 310 492045 1 MOTOR BRACKET 87 310 490309 1 HOUSING A 88 310 492040 1 HOUSING B 89 310 490311 1 BLOCK A 90 310 490856 1 BELT HOLDER 91 310 492041 1 SHAFT L 92 310 490018 2 SHAFT S 93 310 492042 1 COVER (A) 94 310 490025 1 SENSOR BRACKET 95 310 490313 3 SHUTTER A 96 310 492043 1 PULLEY LARGE 97 302 490028 2 PULLEY SMALL 98 302 490025 1 PULLEY A 99 310 492044 1 PULLEY B 100 310 490860 2 COLOR 101 310 492498 1 SHUTTER B 102 310 493572 1 END PLATE 103 310 490325 2 MANIFOLD 104 310 492499 4 Z BASE 105 310 490308 1 RIB

106 310 492059 1 Y BASE 107 310 490318 2 SENSOR BRACKET 108 310 490319 3 BRACKET 109 310 492061 1 COVER (B) 110 902 411025 1 SHAFT 111 310 492500 1 RIB (A) 112 310 492504 2 COVER 113 310 290170 3 TOP COVER 114 310 495318 2 HOOK BRACKET 115 910 414871 2 PANEL HOOK 116 910 412671 1 HOSE HOLDER COVER 117 910 412672 1 SPACER PHI8 118 018 000014 1 LINEAR WAY.. LWLF24C 1R400T1H/U 119 022 101376 1 BEARING.. RF 1980ZZ 120 023 100916 1 TIMING BELT.. 300 XL 025U 121 023 100917 1 TIMING BELT.. 80 XL 025U 122 018 001082 1 SLIDE BUSH.. SMK8GWUU SK 123 024 005721 1 SPEED CONTROLLER.. SPR HS M5 124 024 006579 1 AIR CYLINDER.. CU16 25D 125 026 101380 1 RUBBER VIBRATION ISOLATOR.. SPM 47 G2 126 128 001211 1 TUBE JOINT.. TSH4 M5M 127 028 003337 1 TUBE JOINT.. M 5H 4 128 028 003338 1 TUBE JOING.. M 5HL 4 129 017 000269 1 FLAT TUBE.. UML 404 TE 130 386 440776 3 8"SPIN MTR SCAN ARM HOME SENS 131 381 639228 2 SCAN ARM CONNECTION BRD 132 381 639227 3 SCAN ARM SENSOR BRD. 133 386 440777 1 8"SCAN ARM FLEX CABLE 134 386 440778 1 8"SCAN ARM CABLE 135 1985 429192 1* COAT ARM ASSY 136 1910 425611 14 COATER ARM (MHQ2) 137 1910 425609 12 CLINDER MOUNT (MHQ2) 138 1910 426723 11 FRONT COVER 139 1910 425835 12 CLAMP PAWL (MHQ2 16D) 140 310 492060 1 ARM BASE 141 310 491175 1 BLOCK (A) 142 310 439210 2 MANIFOLD A 143 310 493598 1 HOSE BRACKET 144 310 492503 1 BRACKET 145 1910 421158 11 STOPPER 146 1910 421159 11 SLIDE BLOCK 147 1910 421160 11 SPACER 148 024 014184 1 AIR CYLINDER.. MHQ2 16D X1737 149 025 100063 1 SPRING.. 2114 150 028 002968 1 TUBE JOINT.. MS 5J 151 1985 445595 1* RRC ARM 152 1910 338799 11 ARM 153 1910 441433 12 BLOCK 154 1910 451461 12 BRACKET 155 1910 451868 11 NOZZLE HOLDER 156 1910 451463 11 LOCK SCREW 157 1910 432352 11 NOZZLE PIPE (2) 158 1310 498367 11 TUBE HOLDER (1) 159 1310 498368 11 TUBE HOLDER (2) 160 1910 432302 11 TUBE HOLDER (6)

161 1910 432303 11 TUBE HOLDER (7) 162 1985 445597 1* MK 7/8 RRC DRAIN 163 1910 340255 11 DRAIN PAN 164 1910 436698 11 DRAIN BLOCK 20 165 1910 432314 11 8 BRACKET 166 1910 436580 11 SUPPORT 167 028 002197 1 TUBE JOINT.. F900 H 6.35A 168 1987 411696 1* NEW 8" E.B.R ASSY 169 310 391866 1 SIDE RINSE ARM 170 310 495857 1 SHAFT BLOCK 171 310 495858 1 SHAFT PLATE 172 310 494999 1 NUT PLATE 173 310 495001 1 ROD COLLAR 174 310 495002 2 GUIDE BASE 175 310 495003 2 SHUTTER PLATE 176 310 494971 2 COVER BLOCK1 177 310 495005 1 COVER BLOCK 2 178 310 494956 1 STOPPER 179 310 494957 1 SENSOR BRACKET 180 310 494958 1 ARM COVER 181 018 000979 1 SLIDE PACK.. MR615E+25LE 182 024 003315 1 SPEED CONTROLLER.. AS1201F M5 04 183 024 008819 1 AIR CYLINDER.. CU10 5D XB9 184 310 494972 1 KNOB SCREW 185 310 494973 1 KNOB NUT 186 386 440787 4 8"E.B.R.IN/OUT SENSOR.. ASSY 187 1087 411695 1* 8" ROTARY ARM ASSY 188 310 390703 4 BASE PLATE 189 310 492747 1 Z AXIS BASE PLATE 190 310 492748 2 HOUSING 191 310 492749 2 COLLAR (A) 192 310 492751 1 BEARING CAP 193 310 492752 2 ACTUATOR BASE 194 310 492762 1 STOPPER (B) 195 310 492757 1 SPACE BLOCK 196 310 492758 1 CYLINDER PLATE 197 310 492759 2 CYLINDER BRACKET 198 310 492760 1 WASHER 199 310 492761 2 COLLAR (A) 200 018 001515 1 LM GUIDE.. RSR9WMUU+90LM G=15 201 310 495118 1 ECCENTRIC STOPPER 202 023 000203 1 COUPLING.. 3005M 8*8 203 022 100123 1 BEARING.. 6001ZZ 204 028 003338 1 TUBE JOINT.. M 5HL 4 205 1310 496613 11 SA BRACKET 206 025 000200 1 SHOCK ABSORBER.. KSHA 6*5C A 207 310 492755 1 STOPPER BRACKET 208 1310 497188 11 STOPPER (6") 209 1310 496610 11 COVER BRACKER (1) 210 1310 496011 11 COVER BRACKER (2) 211 1310 497189 11 COVER (1) 212 1310 392543 11 COVER (2) 213 310 493488 2 SHAFT 214 386 440785 1 8"SPIN CYLINDER SCAN U/D SENS 215 386 440786 1 8"SPIN CYLINDER SCAN I/O SENS

216 1985 412564 1* E.B.R NOZZLE PARTS (A) 217 1910 423074 11 NOZZLE CLAMP 218 1910 423588 11 ARM BRACKET 219 1910 423589 12 NOZZLE BEAM (8") 220 910 416948 3 NOZZLE HOLDER (2) 221 310 495023 3 CHIP HOLDER (A) 222 310 495025 2 CHIP TYPE 2 223 1987 412363 1* E.B.R SCAN ASSY (MK 8) 224 1910 323101 12 MSR BASE (2 8") 225 1910 321748 11 DRAIN TANK (MSR) 226 1910 323103 12 SCAN COVER (2 8") 227 1910 434600 12 ENCODER 228 1910 426654 11 SLIT HOLDER 229 1910 437520 11 MOTOR BASE 230 1910 437820 11 MOTOR BRACKET 231 1910 426599 12 COVER BRACKET 232 1910 426209 11 SPRING SHAFT 233 1910 426210 12 SPRING BRACKET 234 1910 437821 11 NEN SENS BRKT 235 1910 426593 11 SENSOR BRACKET (HOME) 236 1910 426213 11 SENSOR SHUTTER 237 1902 411225 11 MOTOR PULLEY 238 024 011624 1 AIR CYLINDER.. CZLS SD25 50 A 239 023 000911 1 TIMING BELT.. 192 3GT 9 240 025 000035 1 SPRING.. 2123 241 028 003338 1 TUBE JOINT.. M 5HL 4 242 028 002152 1 TUBE JOINT.. F900 F 6.35 243 1910 426769 11 COVER BRACKET (2) 244 1902 411132 12 PULLEY (P48) 245 1910 426594 11 ADJUSTING NUT 246 1910 426595 11 LOCKNUT 247 1910 426596 11 STOP COLLAR (PHI 10) 248 1910 426597 11 CUSHION 249 1386 451848 12 MK 7,8 E.B.R. MOTOR ASSY 250 1386 451849 13 MK 7,8 SPIN E.B.R. U/D.. SENSOR ASSY 251 1386 451850 13 MK 7,8 SPIN E.B.R. ENC.. SENSOR ASSY 252 1386 450326 13 SPIN E.B.R. ENC HARNESS 253 1985 420201 1* MSR NOZZLE 2 AASY (MK 8) 254 1910 426651 11 ARM BLOCK 2 (MSR) 255 1910 426652 11 BLOCK CAP (2) 256 1910 427772 11 NOZZLE BEAM 2 (MSR 8") 257 1910 426655 11 NOZZLE HOLDER 258 1910 426244 11 NOZZLE CAP 259 1910 425440 11 REDUCING TUBE (24G) 260 1910 426656 11 OLDER CAP 261 1910 427476 11 REDUCING TUBE (0.23) 262 1910 427477 11 REDUCING TUBE (0.30) 263 1987 411697 1* NOZZLNOZZLE 4 ASSY 264 1310 0392360 14 BASE 265 1910 321936 11 NOZZLE SIDE PLATE 266 1310 496827 12 SIDE PLATE A 267 1310 496828 12 SIDE PLATE B 268 310 492567 4 DIAPHRAGM 269 131 496834 12 HOUSING 270 1310 496831 13 BELT HOLDER

271 310 493580 1 COVER D 272 1910 439986 12 COVER A 273 1310 496830 14 COVER B 274 1310 496836 12 MOTOR BRACKET 275 310 492576 1 HOUSING (A) 276 1910 431144 11 SHAFT S 277 302 490034 1 PULLEY A 278 302 490035 1 PULLEY B 279 3 2 490064 1 SHAFT S 280 310 492581 2 WIRE HOLDER 281 1310 496833 12 FIXING PLATE 282 1310 496835 12 SENSOR BRACKET A 283 910 315161 1 NOZZLE BASE A 284 910 315162 2 THINNER POT A 285 910 315163 1 DRAIN BLOCK A 286 910 315164 3 DRAIN MANIFOLD A 287 310 492488 3 PL 12 NUT 288 310 491625 1 ENCODER SLIT 289 1310 496822 12 ENCODER HOLDER 290 1310 496945 11 SENSOR SHUTTER 291 026 10944 1 MAGNET CATCH.. TL 148 1514 292 022 101376 1 BEARING.. RF 1980ZZ 293 018 000168 1 LINEAR BUSH.. LM10MUU 294 023 100921 1 TIMING BELT.. 200 XL 037U 295 027 102595 1 O RING.. PERFULOLO S 22.4 BLACK 296 028 008407 1 TUBE JOINT.. IN 233 451 297 017 001685 1 TEFLON TUBE.. F 9003 PL 12A L1500 S20 298 1310 496946 11 SENSOR BRACKET 299 386 440791 2 8"NOZZLE HEAD SENSOR ASS`Y 300 1986 420720 11 8"NOZZLE HCHANGER HOME SENSOR 301 1386 444809 11 8"NOZZLE CHANGER (ENC.) MTR ASSY 302 1380 002140 11 SOLVENT BATH 303 1985 457766 1* COAT CUP HOLDER ASSY 1LINE 304 310 492957 2 FIXED ROD 305 310 492417 1 SHAFT STAND 306 1910 430029 11 REDUCING TUBE 21G 307 1310 496950 12 NOZZLE BRACKET 308 310 492955 3 PACKING B 309 028 008412 1 JOINT PART 310 1310 497020 11 PACKING 311 1910 427793 11 TUBE GUIDE 312 310 492954 1 FIXED BLOCK 1 313 1903 200035 11 CUP BASE 314 1903 200109 11 DRAIN PAN 315 1910 334286 12 NOZZLE BRACKET 316 1310 497605 11 NOZZLE CAP 317 028 002197 1 TUBE JOINT 318 1910 423429 11 STOP PLATE 319 1380 000872 12 MK 8 LOWER CUP PPS 320 1380 000989 14 8" UPPER CUP (FR PP)\ 321 1380 000990 12 8" INNER CUP (FR PP) 322 1386 462337 1* COAT CONNECTION(MK 7,8) 323 1393 745520 11 H.C EXT CABLE 324 1393 739483 1 DUMMY DISPENSE CABLE 325 1393 740767 1 8" SPIN SOLENOID FLAT CABLE

326 1393 740796 1 8" SPIN STEP CONT CABLE 327 1393 740778 1 8" SCAN ARM CABLE 328 1393 739487 1 SPIN USER BRD CABLE 329 1393 740793 1 8" SPIN MTR STOP SW CABLE 330 1393 740795 1 8" EXHAUST ALM CABLE 331 1393 740789 1 8" NOZZLE CHANGER MOTOR CALE 332 1385 411404 1* MK 7,8 T&H ASSY CP 333 1310 381013 12 PACKING 2 CP 334 310 290627 6 DUCT X 335 310 391912 1 PACKING 336 1910 213945 11 T&H SENSOR BRACKET 337 1310 290791 16 T/H HOOD 338 026 100944 1 MAGNET CATCH 339 310 496110 1 BRACKET C 340 310 496111 11 BRACKET D 341 1310 496855 13 T/H BOX BRACKET 342 1310 181011 15 T/H BOX CP 343 1310 497043 11 BRACKET 344 1310 497095 11 MAGNET PLATE 1 345 1310 497096 11 MAGNET PLATE 2 346 1310 497097 11 MAGNET PLATE 3 347 1910 329850 11 T/H BOX COVER 1 CP 348 1910 320851 11 T/H BOX COVER 2 CP 349 1385 391376 1* MK 8 COAT COVER ASSY 350 1310 496948 11 SIDE COVER BRACKET 1 351 1310 496650 12 SIDE COVER BRACKET 2 352 310 492825 1 SIDE COVER BRACKET 3 353 310 492826 1 SIDE COVER BRACKET 4 354 310 496012 2 BRACKET B 355 310 496013 2 BRACKET C 356 1310 496651 11 MAGNET PLATE 357 1310 496988 12 COVER GUIDE 1 358 1310 496989 12 COVER GUIDE 2 359 1310 496953 11 COVER GUIDE L 360 1310 497002 12 COVER GUIDE R 361 1910 443000 11 COVER SUPPORT 362 1310 497018 14 COVER 1 363 1310 497019 14Q COVER 2 364 1310 392502 14 COVER F 365 1310 497004 14 CEBTER COVER C 366 1310 496986 13 SIDE COVER 3 367 1310 496987014 SIDE COVER 4 368 310 490510 1 COLLAR 369 024 008470 1 NOZZLE TIP

TEL Clean Track Mark 7 and Mark 8 Dev Unit No. OEM Part No Parts Name 1 1985 417669 1* UNIT BASE ASSY 2 1910 11 960 11 UNIT BASE 3 1903 100021 16 UNIT BASE (MK 8) 4 1910 217054 12 POLE 5 1910 217055 12 POLE 6 1910 217056 12 POLE 7 1910 217057 12 POLE 8 1910 438900 11 SWITCH BRACKET 9 1910 438899 11 SWITCH COVER 10 310 492813 2 REINFORCING PLATE B 11 310 492818 1 BASE PLATE FOR PILLAR 1 12 310 492819 1 STRUT BASE PLATE (2) 13 1910 438898 11 BRACKET 14 1910 335258 11 COVER 15 1910 438889 11 SOLENOID VALVE BRACKET 16 1910 438888 11 BRACKET 17 1910 438883 11 BRACKET 18 1910 321982 11 CONNECTION BOARD BRACKET 19 310 490482 1 SPEED CONTROLLER FIXING BLOCK 20 1910 438884 11 BRACKET 21 310 490483 2 SPEED CONTROLLER SHAFT 22 1910 438903 11 BRACKET 23 026 100944 1 MAGNET CATCH..TL 148 1514 24 028 001189 1 TUBE JOINT.. PF 25 024 006915 1 FILTER.. ZX1 F 26 012 002468 1 NEEDLE VALVE.. GYX 0006 27 012 001227 1 SOLENOID VALVE.. VV5J3 32P X221 28 024 007025 1 SPEED CONTROLLER.. SC M5 L X1 29 012 000446 1 MECHANICAL VALVE.. VM130 01 08 30 028 002954 1 TUBE JOINT.. M 5H 6 31 028 003339 1 TUBE JOINT.. M 5HL 6 32 028 003337 1 TUBE JOINT.. M 5H 4 33 028 003338 1 TUBE JOINT.. M 5HL 4 34 028 002956 1 TUBE FITTING.. M 5J 35 028 002961 1 TUBE JOINT.. M 5T 36 028 001191 1 TUBE JOINT.. RBF SUS 37 028 001383 1 TUBE JOINT.. EC6 PT1/8 NI 38 028 001384 1 TUBE JOINT.. ELB6 PT1/8 NI 39 044 001126 1 SUBSTRATE SUPPORT.. SF5.5 10 40 044 001129 1 SUBSTRATE SUPPORT.. SB5.5 8 41 028 008410 1 TUBE JOINT.. IN 223 454 42 985 313935 * E2 UNIT PARTS V8 8 43 1910 321247 11 TUBE RETAINER 8" 44 1910 418268 11 TUBE RETAINER B 45 1987 411699 1* MOTOR FLANGE ASSY 46 1903 200042 13 MOTOR FLANGE (SUS) 47 310 290008 8 MOTOR FLANGE BASE 48 310 492362 1 SHAFT SEAL HOLDER 49 310 492363 2 SHAFT SEAL 50 302 490037 2 LM SHAFT ADDITIONAL DRAWING

51 310 492369 1 VACUUM SEAL CASE 52 310 492370 1 VACUUM SEAL RETAINER 53 310 492365 1 TUBE RING 54 1910 430884 12 TUBE CONNECTOR 55 1310 497091 12 STOPPER (8") 56 024 006552 1 FLOATING JOINT.. JA20 8 125 57 018 001083 1 SLIDE BUSH.. SMK10W SK 58 027 000003 1 SEAL.. AR 103499 59 027 101869 1 O RING.. PERFULOLO AS568 013 BLACK 60 028 007304 1 TUBE JOINT.. C1N3/8 PT3/8ST 61 028 005382 1 TUBE JOINT.. C1N1/2 PT3/8ST 62 028 002954 1 TUBE JOINT.. M 5H 6 63 028 000041 1 TUBE JOINT.. M 01H 4 64 024 005671 1 AIR CYLINDER.. CQ2B32 40D XB9 65 028 008294 1 QUICK JOINT.. SVHC06 06F 66 028 008295 1 QUICK JOINT.. SVHN06 06F 67 1386 444579 12 MK 8 CHUCK U/D SENSOR ASS`Y 68 380 090094 5 AC SERVOMOTOR.. USAHEM 03TE25 69 1380 001406 14 AC SERVOMOTOR.. 62BM006DXEAS E 70 1385 391301 1* GUIDE BLOCK ASSY 71 1310 496766 11 PITOT BLOCK 72 1310 496764 13 EXHAUST GUIDE 73 1910 429914 13 EXHAUST PIPE (1) 74 1910 429915 12 EXHAUST PIPE (2) 75 310 495888 1 PITOT NOZZLE 76 1310 496765 12 DRAIN GUIDE 77 028 003339 1 TUBE JOINT.. M 5HL 6 78 027 001026 1 PACKING.. 91H Y00001 1 DRAIN 79 027 001027 1 PACKING.. 91H Y00002 1 EXHAUST 80 1987 411701 1* E2 SCAN ASSY 81 910 211652 4 BASE 82 910 314858 3 RAIL BASE 83 910 314859 1 SIDE PLATE 84 1910 421820 13 RAIL GUIDE 85 910 416759 2 CYLINDER BASE 86 910 416760 2 MANIFOLD A 87 910 416761 1 BELT BLOCK 88 910 416762 2 SHUTTER 89 1910 438902 12 CYLINDER BRACKET 90 910 416764 1 COLLAR 91 910 416765 2 BEARING 1 92 1910 438901 11 BRACKET 93 1910 438885 11 TUBE RETAINER 94 910 416769 1 ADJUSTMENT BOLT 95 910 416770 1 FIXING NUT 96 910 211653 4 TOP COVER 97 910 416771 1 COVER 1 98 910 416772 3 COVER 2 99 1903 400051 12 ARM BASE 8" 100 310 490309 1 HOUSING A 101 310 492040 1 HOUSING B 102 310 494658 1 MOTOR BRACKET 103 1910 43886 11 BRACKET 104 310 491625 1 ENCODER SLIT 105 310 492296 1 SLIT HOLDER

106 302 490025 1 PULLEY A 107 302 490058 1 TIMING PULLEY 10XL 108 302 490028 2 PULLEY SMALL 109 310 492043 1 PULLEY LARGE 110 310 490018 2 SHAFT S 111 310 494657 2 SHAFT L 112 910 416773 3 BRACKET A 113 910 416774 2 BRACKET B 114 018 001471 1 LM GUIDE..2RSR12WMUUC1+390LM 115 902 411023 2 LM GUIDE ADDITIONAL WORK DRAWING 116 022 101376 1 BEARING RF 1980ZZ 117 023 100916 1 TIMING BELT..300 XL 025U 118 023 100917 1 TIMING BELT..80 XL 025U 119 024 003574 1 SPEED CONTROLLER..AS1211F M5 04 120 024 010531 1 AIR CYLINDER..CDU16 30D 90 XB9 121 028 003337 1 TUBE JOINT..M 5 4 122 028 003338 1 TUBE JOINT..M 5HL 4 123 017 000269 1 FLAT TUBE..UML 404 TE 124 026 101380 1 RUBBER CUSHION..SPM 47 G2 125 044 000044 1 SUBSTRATE SUPPORT..EM 3 126 028 002960 1 TUBE JOINT..M 5P 127 028 002956 1 TUBE JOINT..M 5J 128 381 643067 1 E2 SCAN ARM CONN BOARD 129 381 643065 1 E2 SCAN ARM SENSOR BOARD 130 386 440775 1 8" SPIN MTR SCAN ARM MOTOR ASSY 131 386 440776 3 8" SPIN MTR SCAN ARM HOME SENS 132 386 44309 1 E2 SCAN ARM FLEX CABLE 8" 133 1985 411787 1* E2 NOZZLE ARM ASSY (1 SYSTEM) 134 1310 496912 12 NOZZLE BRACKET 2 135 910 414549 2 NOZZLE BRACKET 2 136 910 416733 1 NOZZLE SHAFT 137 910 416734 1 NUT M8 138 1910 427217 12 ARM BLOCK A 139 1910 430971 11 NOZZLE ARM 140 1985 414069 1* E2 NOZZLE ASSY 8" 141 910 314875 5 NOZZLE CAP 8" 142 028 003416 1 RESIN JOINT..S UF W2YATL 143 1910 417680 11 TUBE HOLDER 144 028 009858 1 RESION JOINT..MC P 9 1/4 P 145 017 002017 1 FLEXIBLE TUBE..PENCHEM CT1/4" 146 027 001485 1 O RING BUTYL AS568 162 BLACK 147 027 101874 1 O RING.. PARFLO S 6 BLACK 148 017 000419 1 FLEXIBLE TUBE..PENCHEM CT1/4" 149 028 003513 1 RESION JOINT..UNION CT 1/4 150 027 001465 1 O RING..BUTYL P 6 BLACK 151 1985 411429 1* E2 NOZZLE BATH ASSY 8INCH 152 1910 317686 13 BATH BOX 8" 153 1910 317659 17 NOZZLE BATH 8" 154 1910 317684 15 DRAIN TRAP 155 1380 001024 11 CENTER BAR 8" 156 1910 420715 11 DRAIN PIPE 1 157 1910 420675 13 DRAIN PIPE 2 158 1910 421459 11 LOCK NUT 159 027 001487 1 O RING..BUTYL AS568 257 BLACK 160 027 101832 1 O RING.. BUTYL P 10 BLACK

161 910 416848 1 FILTER BRACKET 162 024 002967 1 FILTER..WGGB 01K 163 025 000007 1 SPRING..1070 164 985 313935 1* E2 UNIT PARTS V8 8 165 910 416846 2 NOZZLE BATH BASE 8" 166 910 417093 2 BRACKET V8 167 910 315105 3 MANIFOLD E2 A 168 028 008294 1 QUICK JOINT SVHC06 06F 169 028 008295 1 QUICK JOINT SVHN06 06F 170 1985 417415 1* E2 NOZZLE (8" FORMATION) 171 1910 424388 11 NUT PLATE (E2 8) 172 020 000009 1 CAP SCREW..M3*10 173 1987 411702 1* MK 8 RINSE SCAN ASSY 174 1310 290762 14 SCAN BASE 175 1310 392296 13 U/B BASE 176 1310 496684 12 BLOCK 1 177 1310 496685 12 BLOCK 2 178 1310 496686 11 LOCK NUT 179 1310 496688 11 STOPPER 1 180 1310 496689 12 HOUSING L 181 1310 496690 15 HOUSING U 182 1310 496691 11 STOPPER RETAINER 183 1310 496692 13 SA BRACKET 184 1310 496693 11 CYLINDER BRACKET 185 1310 496694 13 ROD END 186 1310 496695 12 COLLAR 187 1310 496696 15 SHAFT 188 1310 496697 13 COVER BRACKET 189 1310 496698 13 SENSOR BRACKET U 190 1310 496699 12 SENSOR BRACKET L 191 1310 496700 13 ADJUSTMENT SCREW 192 1310 496701 11 SHUTTER 1 193 1310 496702 11 SHUTTER 2 194 1310 496703 13 SHUTTER END 195 1310 496704 12 LINK RETAINER 196 1310 496706 14 COVER 2 197 1310 496709 13 STOPPER 2 198 1310 392483 12 DRAIN BEARING 199 018 000354 1 LM GUIDE 200 022 100762 1 BEARING 6901ZZ 201 025 000200 1 SHOCK ABSORBER 202 021 100254 1 E RING 203 1310 497061 11 LINK 204 1310 392531 12 COVER 1 205 1310 497062 11 PIN 1 206 1310 497063 11 PIN 2 207 1310 497060 11 CLEVIS 208 021 100308 1 E RING 209 021 100466 1 E RING 210 1310 496890 12 GUIDE 1 211 1310 497161 11 COVER 3 212 028 000041 1 TUBE JOINT..M 01H 4 213 024 011140 1 AIR CYLINDER..CQ2D20 F8623 25 214 044 000044 1 SUBSTRATE SUPPORT..EM 3 215 044 000045 1 SUBSTRATE SUPPORT..EM 5

216 1986 420719 11 MK 8 CYLI SCAN U/D SENSOR ASSY 217 1386 444581 11 MK 8 CYLI SCAN I/O SENSOR ASSY 218 028 003381 1 TUBE JOINT M 5HI 4 219 1385 391299 1* MK 8 RINSE NOZZLE ASSY 220 1310 497015 13 RINSE ARM 221 1310 497014 13 RINSE ARM HOLDER 222 310 496407 2 HOLDER BRACKET 223 310 496408 2 NOZZLE HOLDER 224 1910 422874 11 NOZZLE HOLDER 225 910 415659 3 NUT 226 028 00676 1 RINSE JOINT F W2A 227 1987 411703 1* OUT CUP BASE ASSY 228 1910 426113 12 CYLINDER SUPPORT 1 229 1910 422061 13 CYLINDER SUPPORT 2 230 1310 290776 12 OUTER CUP BASE 231 1310 496879 11 CLEVIS 232 302 490067 1 LM SHAFT ADDITIONAL DRAWING 233 1910 423158 11 ROD END 234 028 000041 1 TUBE JOINT M 01H 4 235 018 001085 1 SLIDE BUSH.. SMK12W SK 1 236 1386 444580 12 MK 8 OUT CUP U/D SENSOR ASSY 237 385 390960 * CUP HOLDER 238 310 390771 3 CUP FIXING PLATE 239 310 492973 2 FIXING ROD 240 310 492417 1 SHAFT STAND 241 1386 462336 1* DEVE CONNECTION MK 7,8 242 1986 420723 11 H.C EXT CABLE 243 1393 740767 1 8" SPIN SOLENOID FLAT CABEL 244 1986 420733 11 8" SPIN STEP CONT CABEL 245 1393 743092 1 E2 SCAN ARM CABLE 246 1393 739487 1 SPIN USER BRD CABLE 247 1986 420725 11 8" SPIN MTR STOP SW CABLE 248 1986 420731 11 8" EXHAUST ALM CABLE 249 1385 391377 1* DEV UNIT COVER ASSY 250 1310 496948 11 SIDE COVER BRACKET 1 251 1310 496650 12 SIDE COVER BRACKET 2 252 310 492825 1 SIDE COVER BRACKET 3 253 310 492826 1 SIDE COVER BRACKET 4 254 310 496012 2 BRACKET B 255 310 496013 2 BRACKET C 256 1310 496651 11 MAGNET PLATE 257 1310 496988 12 COVER GUIDE 1 258 1310 496989 12 COVER GUIDE 2 259 1310 497185 12 COVER GUIDE L DEV 260 1310 497186 11 COVER GUIDE R DEV 261 1910 443000 11 COVER SUPPORT 262 1310 497018 14 COVER 1 263 1310 497019 14Q COVER 2 264 1310 392502 14 COVER F 265 1310 497187 13 CENTER COVER D 266 1310 496986 13 SIDE COVER 3 267 1310 496987014 SIDE COVER 4 268 1310 497234 12 SUPPORT BAR 269 1310 497235 11 SUPPORT BAR BRACKET 270 DEV SPLAY

271 017 000374 1 PLIABLE TUBE 272 310 492488 3 PL12 NUT 273 310 390662 3 HOLDER A 274 310 492490 3 1/4" NUT 275 027 101688 1 O RING NITRYL S 12 276 310 390661 3 TK HOLDER 277 027 101895 1 O RING..PARFLO S 3 278 310 391313 2 PAN 279 017 000371 1 PFA TUBE 1/8" 280 028 008408 1 MINIATURE JOINT 281 310 493325 2 T.K PACKING 282 024 004433 1 SPLAY CHIP 283 310 492639 3 CAP 284 027 101581 1 O RING NITRYL S 14 285 310 390663 2 HOLDER BRACKET 286 910 414627 3 NOZZLE BRACKET 4 287 910 415174 2 VAC. NOZZLE 288 910 415264 2 VAC. NOZZLE RETAINER 289 028 008407 1 MINIATURE JOINT 290 910 414548 2 NOZZLE BRACKET 1 291 910 414549 2 NOZZLE BRACKET 2 292 910 413839 2 NOZZLE BRACKET 3 293 017 000371 1 PFA TUBE 1/4" 294 DEV NOZZLE 295 017 000374 1 PLIABLE TUBE 296 310 492488 3 PL 12 NUT 297 310 390663 2 HOLDER B 298 027 101581 1 O RING.. NITRYL S 14 299 017 000371 1 PFA TUBE 1/4" 300 310 390662 3 HOLDER A 301 310 492490 3 1/4" NUT 302 027 101688 1 O RING..NITRYL S 12 303 1910 420354 14 DEV NOZZLE 4 ADAPTER 304 027 101875 1 O RING PARFLO S 8 305 1910 420353 11 DEV NOZZLE 4 W 306 910 415265 2 NOZZLE BRACKET 5 307 910 413839 2 NOZZLE BRACKET 3 308 910 414549 2 NOZZLE BRACKET 2 309 910 414548 2 NOZZLE BRACKET 1 310 1385 490440 1* H NOZZLE SEPARATION (8") ASSY 311 1310 482906 11 UNDER BODY NS 312 1310 498653 12 OVER PLATE 8" 313 1910 420354 14 DEV NOZZLE 4 ADAPTER 314 310 492490 3 1/4" NUT 315 310 391669 3 HOLDER C 316 310 391667 2 HOLDER A 317 310 492488 3 PL 12 NUT 318 1310 498656 12 TURNING BLOCK 8" 319 1310 498642 11 NOZZLE BROCKET 320 027 001658 1 O RING..BUTYL S 46 BLACK 321 027 101875 1 O RING PARFLO S 8 322 027 101688 1 O RING..NITRYL S 12 323 1310 498703 11 HOLE (SHAFT) 324 017 002518 1 TEFLON TUBE 325 027 101581 1 O RING.. NITRYL S 14

326 1910 421391 12 NOZZLE ARM L=270 327 1910 427217 12 ARM BLOCK A 328 1985 437476 1* H NOZZLE SEPARATION (6" 2) 329 1310 482929 11 UNDER BODY NS (6") 330 1310 498666 11 NOZZLE OVER BODY 331 1910 420354 14 DEV NOZZLE 4 ADAPTER 332 310 492490 3 A1/4" NUT 333 310 391669 3 HOLDER C 334 310 391667 2 HODER A 335 310 492488 3 PL12 NUT 336 1910 438061 11 TURNING BLOCK 337 1910 438062 11 NOZZLE BRACKET 338 1910 438063 11 NOZZLE BRACKET 339 1310 498711 11 MIDDLE (SHIFT) 340 1910 419784 12 NOZZLE ARM (2) 341 1910 429214 11 ARM BLOCK (B) 342 1910 429215 11 ARM BLOCK 343 027 101875 1 O RING.. PARFLO S 8 BLACK 344 027 101688 1 O RING.. NYTRYL S 12 BLACK 345 017 002518 1 TEFLON TUBE.. NO.90003 PL 12A L=850 346 027 101581 1 O RING.. NYTRYL S 14 BLACK 347 027 101877 1 O RING.. PARFLO S 34 BLACK