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Fig. 1. Frame rate TFT. 10 cm 2 /Vs,.,, 4,000 x 2,000 240 Hz frame rate 70. (Fig. 1). TFT. TFT LCD, LCD. 2004 Fortunato 20cm 2 /Vs ZnO. 2) ZnO, TFT. InSnO InZnO, In DC,. InGaZnO 2004 Nature. s. (disordering) s 1/10 10 cm 2 /Vs (Fig. 2). InGaZnO. In 2O 3, ZnO, Ga 2O 3, 2.1. ZnO, In 2O 3, InZnO, ZnSnO, InGaZnO, ZnGaSnO. ZnO, UV, LED, SAW, TFT Fig. 2. InGaZnO. 16

. 3) InGaZnO In TFT In-O Zn-O, Ga-O., OFF. In : Ga, OFF Trade-off (Fig. 3). 4) LG,, AUO IGZO, TFT LCD (Fig. 4,5). 5-7) In Ga In, Ga. 8,9) ZnO, SnO 2 ZnSnO. 10,11) Sn,, ZnSnO InGaZnO TFT. InZnSnO (IZTO) TFT. Fig. 4. 2010 FPD IGZO TFT 70 UD 3D LCD. Fig. 5. BOE 2013 IGZO TFT UHD 65 LCD. IZTO TFT In 2O 3 component In In IGZO. ETRI In:Zn:Sn = 20:40:40 24.6 cm 2 /Vs, V th -0.4V, I on/off ratio >10 9, SS 0.12 V/decade IGZO Fig. 3. IGZO In TFT. Fig. 6. Zn:In:Sn (40:20:40) IZTO TFT. 17

(Fig. 6). 12), bias. 2.2. LCD TFT TFT (bottom gate), (back channel etch, BCE) (etch stop, ES). BCE. TFT. Fig. 7 BCE. / IGZO, TFT (Transfer Characteristics). In-O, 3nm In segregation Fig. 7. (a) BCE (b) ES. Fig. 8. BCE S/D TFT. (Fig. 8). 13), N 2O. / ES,,. ES /, S/D. 14,15) ES ES PECVD ES,. TFT. TFT OFF... TFT., (Fig. 9). (Shallow Donor)., ZnO 18

Fig. 9. IGZO TFT. (Deep State). NBIS. (Fig. 10). 16) Turn-off.. LCD CCFL, LED Back Light Unit., 5%,. Blue Light TFT 2009. 17) TFT. 1 frame Turn-on FHD1/2000. OFF NMOS (Fig. 11). Duration Negative Gate Bias Stress (NBS)Negative Gate Bias Illumination Stress (NBIS). Fig. 10. IGZO TFT. 3.1. Negative bias illumination stress (NBIS) 19

Fig. 11. (a), (b) (c) timing diagram. TFT NBIS. Positive Bias Illumination Stress (PBIS) TFT (Fig. 12). PBS MIS NBS (Fig. 13). PBIS screening. -., PBIS.. NBIS Fig. 13., /.. Fig. 12. ZnO TFT (b) PBIS (d) NBIS. Fig. 13. PBIS NBIS. NBIS. (Trapping). Fig. 14 SiN x SiO 2 20

Fig. 15. (a) (b) vacancy. Fig. 14. (a) SiNx (b)sio2 IGZO TFT NBISIV. NBIS. 18) SiN x NBIS SiO 2. SiO 2 8.0 ev GI/. SiO 2 IGZO NBIS. SiNx SiNx,. NBIS, Deep State V O 2+ (Fig. 15). 19) 2+ V O relaxation NBIS V O Fig. 16. (a) Unpassivated (b) Passivated. (c) photo-desorption (d).. ZnO Persistent Photo-conductivity (PPC), IGZO. 20), NBIS. 21) Fig. 16 NBIS 21

NBIS (Fig. 16). 3.2. NBIS NBIS SiO 2 Al 2O 3.... IGZO Ga NBIS. ZTO Zr. 22). Percolation Conduction.. 23) NBIS. 24,25) 30 cm 2 /Vs In 50%IZO. 26), 8. 3.3. NBIS TFT NBIS Trade-off.,.. IZO ITO. (10 cm 2 /Vs) IGZO IZO IGZO/IZO (Fig. 17). 50 cm 2 /Vs 0V Bias (Fig. 18). 27) 5nm. NBIS. Fig. 17.. 22

5nm Sn, Sn Sn Sn-free. Snfree NBIS. Fig. 18. TFT (a) PBTS (b) NBTS. Sn (Fig. 19). 28) LCD TFT,. IGZO, C-axis aligned IGZO, IT. IGZO 10~20 cm 2 /Vs. IZTO. TFT TV PMOS 80 cm 2 /Vs. LG. Fig. 19. Sn. 1. K. Nomura, H. Ohta, A. Takagi, T. Kamiya, M. Hirano, and H. Hosono, Room-temperature Fabrication of Transparent Flexible Thin-film Transistors Using Amorphous Oxide Semiconductors, Nature, 432 488 (2004). 23

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