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1 , ) mm-wave power handling,. bulk, (,,, ),. microelectronics device device digital GHz. transformer coil. core loss MnZn, NiZn 10 k m MnZn. GHz Z. MHz~GHz,, LC. Co 2Z GHz (natural resonance frequency), 1 GHz GHz.,,. 38

2 .,, NiZn (MgAl 2O 4) Fig. 1., 4 8, 8.3~8.7, NiZn Ni Zn 8.311~8.418, Zn. M 2+ O Fe 2O 3 MFe 2O 4 unit cell 8 MFe 2O 4. (fcc), unit cell 24 (5 B Fe 3+ M 2+ ) A (tetrahedral site) 16 B (octahedral site). A 4 4, B 6 8 M 2+ A (normal spinel), B (inversed spinel). NiZn Zn Ni (mixed ferrite). 11,12)., (Table 1),,., A-B., J AA, J BB J AB (negative),. AB A B A B., A B net moment. 11),,,. Table 1. Classification of Cations for Spinel Ferrite Solid Solutions Fig. 1. Unit cell structure of spinel ferrites (A : tetrahedral site, B : octahedral site). 39

A 4 4, B 6 8 M 2+ A (normal spinel), B (inversed spinel). NiZn Zn Ni (mixed ferrite). 11,12)., (Table 1),,., A-B.

3 ., peak.,, Snoek., NiZn Ni ( Zn ). Fe 2O 3 NiZn, Fe 2O 3., NiZn (Ni yzn 1 yo) 1 w(fe 2O 3) 1 w y=0.3~0.4, w 0. NiZn. Fe 2O 3., Fe 2O 3. Fe 2 Fe 3 hopping.. Fe 2O 3 Fe Fe 3, Fe Fe 2 Fe 3 Fe 2 Fe 3.,,,.,.,. (Hysteresis Loop), (magnetic core materials). Power transformer magnetic field, magnetic field,,. i. (, I s :, K :, :, : ) i K 0,. (Fig. 2) ( = j ), H( ) B( ), H 90 B, / Fig. 2. Frequency dependence of permeability of soft ferrite materials. 40

Power transformer magnetic field, magnetic field,,. i. (, I s :, K :, :, : ) i K 0,. (Fig.

4 ),,. hysteresis loop( )...,.,,.. (Snoek s limit),. NiZn. 10 MHz LC., 10 MHz.,, EMI ) NiZn CuZn MnZn (50 MHz )., NiZn 20 GHz (Table 2). Digital,. shield, monolith,.., NiCuZn. NiZn Table 2. Properties of NiZn Ferrites for Applications 41

13-17) NiZn CuZn MnZn (50 MHz )., NiZn 20 GHz (Table 2).

5 Cu NiCuZn., Ag 960.5, Ag (Hexagonal ferrite) ( -Fe 2O 3) 2 hexagonal.. a, b c Snoek s limit., GHz. c c Snoek s limit, MHz GHz. Fe, c a-b. Fe Ba( Sr, Pb, Ca), 2 (Ni, Mg, Co, Fe, Zn, Cu) (BaO-MeO-Fe 2O 3), BaFe 12O 19 (M)-Me 2Fe 4O 8(S) BaFe 12O 19(M)- Me 2BaFe 12O 22(Y) join. 14,19), S-block(Me 6O 8, Me Fe 3+ Co 2+ ), R-block(BaMe 6O 11), T-block(Ba 2Me 8O 14) M(BaFe 12O 19), W(MS/BaMe 2Fe 16O 27), X(M 2S /Ba 2Me 2Fe 28O 46), Y(Ba 2Me 2Fe 12O 22), U(M 2Y/ Ba 4 Me 2Fe 36O 60), Z(M 2Y 2/Ba 6Me 4Fe 48O 82) (Fig. 3,4). M BaFe 12O 19(BaM) W BaCo 2 Fe 16O 27 (Co 2W) c, Y Co 2Y(Ba 2Co 2Fe 12O 22) Z Co 2Z(Ba 3 Co 2Fe 24O 41) c (basal plane). Co 2Y Co 2Z.,. 300 MHz Z-type (Co 2Z) (3.7 GHz). Fig. 3. Phase diagram of hexagonal ferrites (M, W, Y, and Z / S : spinel). Fig. 4. Schematic diagram for crystal structure of M-type hexagonal ferrite (BaFe12O19). 42

14,19), S-block(Me 6O 8, Me Fe 3+ Co 2+ ), R-block(BaMe 6O 11), T-block(Ba 2Me 8O 14) M(BaFe 12O 19), W(MS/BaMe 2Fe 16O 27), X(M 2S /Ba 2Me 2Fe 28O 46), Y(Ba 2Me 2Fe 12O 22), U(M 2Y/ Ba 4 Me 2Fe 36O

6 Co 2Z ( 1250~1300 ),, 10 (300~700 MHz), Q-factor,., Ag 950. Co 2Y,,., Snoek s limit Co 2Z, Co 2Y, Ni 2Y mm. 14) 2.3. Garnet Garnet R 3Fe 5O 12 (R : Y, Gd) cubic system, Y 3 12, Fe (Fig. 5). (sublattice point).,,, 0.1~500 GHz (eddy current loss) 10 7 m (ferromagnetic materials). microwave mm-wave. Fig. 5. Schematic diagram for crystal structure of YIG ferrite low noise amplifier, voltage-controlled oscillators, impedance matching networks inductive components., 1980 (Fig. 6).,, (core),,, LC filter, (MHD). (Surface Mount Technology) bulk Chip. 43

Schematic diagram for crystal structure of YIG ferrite. 3.1.

7 Fig. 6. Schematic diagram for multilayered chip ferrite and basic circuit for application. core magnetic flux., NiZn.., (magnetostriction) PZT 3 2, (magnetoelectric susceptibility).,., (BaTiO 3, Pb(Zr,Ti)O 3, Pb(Mg,Nb)O 3, PbTiO 3, (Sr, Ba) Nb 2O 5 ) (NiFe 2O 4, CoFe 2O 4, Y 3Fe 5O 12, Terfenol-D, metglass ) strain,,..,,.,.,, 3 (composite),.,., NiFe 2O 4/Pb(Zr,Ti)O mv/cm Oe, 400 mv/cm Oe.,. power. power SMPS (switched-mode power supply), power signal, power. power 44

Ba) Nb 2O 5 ) (NiFe 2O 4, CoFe 2O 4, Y 3Fe 5O 12, Terfenol-D, metglass ) strain,,..,,.,.,, 3 (composite),.,., NiFe 2O 4/Pb(Zr,Ti)O 3 115 mv/cm Oe, 400 mv/cm Oe.

8 ,. Power inductor(fig. 7) RF (Matching), Decoupling. 1 10~20 Pager, CLP, LAN. (eddy current), MnZn NiZn. 18,19), power, 80~ , MnZn Fe 2+. MnZn Fe 2+ (140 ). Fig. 7. Samples of chip inductor ; winding type (a, b) and multilayered type (c).[source for (b) : Murata Manufacturing Co. Ltd.].,, power circuit GHz. skin-effect penetration. (domain wall),., defect, anisotropy field, (, Fe 2+ Fe 3+ hopping ). circulator, isolator, phase shifter, antenna circulator, mobile phone. (non-resonant absorption)..,, (Table 3). 0.1~500 GHz (eddy current loss) 10 7 m (ferromagnetic materials). ferrite microwave millimeter. Garnet,,,. (ferromagnetic resonance/fmr linewidth, H) 45

, defect, anisotropy field, (, Fe 2+ Fe 3+ hopping ). circulator, isolator, phase shifter, antenna circulator, mobile phone. (non-resonant absorption)..,, (Table 3). 0.

9 Table 3. Microwave Ferrites for Applications Table 4. Applications of NiZn Ferrite Materials Fig. 8. Schematic diagram for component structure of stripline Y-junction circulator., (spin-wave resonance linewidth, H k). Garnet 0.3~1.9 kg MHz~9 GHz. Fig. 8 circulator (permanent magnet) ferrite-loaded junction bias Electromagnetic Interference (EMI) Suppressor,,, IC (Table 4)., RFID (13.56 MHz) NiZn 100~300 m. NiZn, elastomer, m (100 MHz~1 GHz). film, SiP PCB (Fig. 9) ) (complex permeability) Snoek, ( ). DC-DC convertor power inductor., core loss. PC,, EMI.,. (EMI). EMI suppressor. EMI suppressor 46

8 circulator (permanent magnet) ferrite-loaded junction bias. 3.3. Electromagnetic Interference (EMI) Suppressor,,, IC (Table 4)., RFID (13.

10 .,, EMI suppressor., Co 2Z Zn 2Y (10~30 ) Ni (2~3 ). Fig. 9. Microstructures and complex permeability(imaginary part, ") of composite-type noise suppression sheet and plated ferrite film.,, /, core-shell,. EMI suppressor,,,, clock. NiZn, 20~200 MHz. suppressor resistor,.,, resistor. EMI suppressor, ( )., 3.4. Near-Field Communication (NFC) 19) NiZn MHz RFID. RFID. Fig. 10 RFID NiZn, MHz ( ) ( ). (NFC). NFC. RFID/NFC Reader Transponder(Tag). LF(125 khz) HF(13.56 MHz) RFID (Eddy Current), Reader Transponder(Tag). 47

,, /, core-shell,. EMI suppressor,,,, clock. NiZn, 20~200 MHz. suppressor resistor,.,, resistor. EMI suppressor, ( )., 3.4.

11 Fig. 10. Performance of permeability (a) and schematic diagram (b) of sintered flexible ferrite sheet (manufactured by Toda Kogyo Co. Ltd.) MHz NFC shield case,,. NFC/RFID. ( ). RFID.,. NiCuZn, 50~120 m. NFC/RFID Ferrite Sheet EMC TDK Maruwa MHz RFID Magnet Sheet TDK Maruwa EMI. NFC, NFC, flaky powder. NFC. 1930,., 10.,. NFC RFID,. 48

sheet (manufactured by Toda Kogyo Co. Ltd.).. 13.56 MHz NFC shield case,,. NFC/RFID.

12 , 5 MHz, (, PC, ) LCR., resin.,,. 1. H. Igarashi and K. Okazaki, Effects of Porosity and Grain Size on the Magnetic Properties of NiZn Ferrite, J. Am. Ceram. Soc., 60 [1-2] (1977). 2. G. F. Dionne and R. G. West, Magnetic and Dielectric Properties of the Spinel Ferrite System Ni 0.65Zn 0.35Fe 2- xmn xo 4, J. Appl. Phys., 61 [8] (1987). 3. G. G. Bush, Generalization of Snoek s Limit for Modeling Initial Permeability of Magnetic Materials, J. Appl. Phys., 63 [8] (1988). 4. H. Momoi, A. Nakano, T. Suzuki, and T. Nomura, Nano-Structure Control of NiCuZn Ferrites For Multilayer Chip Components, Ferrites : Proc. 6th Inter. Conf. Ferrites (ICF 6), (1992). 5. T. Nomura, Micro- and Nano-Structure Property Relationships in Soft Ferrites (invited), Ferrites : Proc. 6th Inter. Conf. Ferrites (ICF 6), (1992). 6. J.-Y. Hsu, W.-S. Ko, H.-D. Shen, and C.-J. Chen, Low Temperature Fired NiCuZn Ferrite, IEEE Trans. Mag., 30 [6] (1994). 7. F. G. Brockman and K. E. Matteson, Nickel-Zinc Ferrites : I. Effect of Composition on the Magnetic Properties of a Nickel-Zinc-(Cobalt) Ferrite, J. Am. Ceram. Soc., 53 [9] (1970). 8. F. G. Brockman and K. E. Matteson, Nickel-Zinc Ferrites : II. Preparation and Properties of Stoichiometric 32NiO/68ZnO Ferrite, J. Am. Ceram. Soc., 54 [4] (1971). 9. J. Xu, G. Ji, H. Zou, Y. Zhou, and S. Gan, Structural, Dielectric and Magnetic Properties of Nd-doped Co 2Z-type Hexaferrites, Alloys. Comp., 509 [11] (2011). 10. V. G. Harris, A. Geiler et. al., Recent Advances in Processing and Applications of Microwave Ferrites, J. Mag. Mag. Mater., 321 [14] (2009). 11. S. Chikazumi, Physics of Magnetism (2nd Ed.), Clarendon Press, pp , J. Smit and H. P. J. Wijn, FERRITES, Philips Technical Library, Eindhoven, Netherlands, pp (1959). 13. Alex Goldman, Modern Ferrite Technology, Van Norstrand Reinhold, New York, pp (1990). 14. Raul Valenzuela, Magnetic ceramics, Cambridge University Press, New York, pp (1994). 15. B. D. Cullity, Introduction to Magnetic Materials, Addison-Wesley Pub. Co., pp (1972). 16. D. J. Craik, Magnetic Oxides, John Wiley & Sons, pp (1975). 17. David Jiles, Introduction to Magnetism and Magnetic Materials, Chapman and Hall, pp (1991). 18. S. Yang, J. Yoon, W. Choi, and J. Kim, Magnetic Characteristics of YIG Ferrites with Sintering Temperature, J. Microelectronics & Packaging Soc., 10 [1] (2003). 19. K. Kondo, K. Chatani, H. Ono, and S. Yoshida, Recent Advances in Bulk, Thick-film and Thin-film Ni-Zn Ferrite Materials, Materials Integration, 25 [7] (2012). 20. J. Suh, Introduction to Composite Electromagnetic Noise Absorber Technology, The International J. Electromagnetic Compatibility, Interference Technology (EMC Directory & Design Guide 2007), (2007). 21. S. Yoshida, K. Kondo, and H. Ono, High-Frequency Noise Suppression Using Ferrite-Plated Film, NEC Technical J., 1 [5] (2006). 49

G. Bush, Generalization of Snoek s Limit for Modeling Initial Permeability of Magnetic Materials, J. Appl. Phys., 63 [8] 3765-67 (1988). 4. H. Momoi, A. Nakano, T. Suzuki, and T.

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<4D F736F F F696E74202D20454D49A3AF454D43BAEDB7CEBCC52EBBEABEF7BFEBC6F7C7D428BBEFC8ADC0FCC0DA > Materials Material Grades : PL Series Applicaton : Power transformer and Inductor Grades μi Freq. (MHz) Pcv 1) (Kw/ m3 ) Bs 2) (mt) Materials Characteristics PL-7 2,400 ~ 0.2 410 390 Mn-Zn Low loss PL-9