======================================================================================================================== EXCO 지하 1F Lobby 일시 : 2월 25일 ( 목 ) 09:00-13:00 세션명 : [TP1] Poster Session Ⅰ ======================================================================================================================== D. Thin Film Technology 분과 TP1-1 TP1-2 TP1-3 TP1-4 TP1-5 TP1-6 TP1-7 Application of Micro Corona-Kelvin Technique to Non-contact Monitoring of Advanced ONO Type Flash Device 저자 : Jae Hyun Kim, Seong Jun Heo, Chang Hwan Lee, Koon Ho Bae, Hyung Won Yoo, and Chul Hong Kim 소속 : Hynix Semiconductor Inc. 잉크젯프린팅을이용한 OTFT 인버터저자 : 김민규, 강찬모, 이창희소속 : 서울대학교전기컴퓨터공학부, 반도체공동연구소 (ISRC) Enhanced Tunneling Efficiency of VARIOT type (ZrO 2 ) x (SiO 2 ) 1 - x /SiO 2 Stacks for Flash Memory Devices 저자 : 강해윤, 허민영, 손현철소속 : 연세대학교신소재공학과 Rapid Atomic Layer Deposition of Various High-k Dielectric Films Using Nitrous Oxide Plasma and Metal-Organic Precursors 저자 : Seok-Jun Won 1,2, Yu Jin Choi 1, Sungin Suh 1, and Hyeong Joon Kim 1 소속 : 1 Department of Materials Science and Engineering and Inter-University, 2 Advanced Process Development Team, System-LSI division, Samsung Electronics Co. Ltd. Electrical and Chemical Properties of Lanthanum Silicate Films Deposited Using La[N(SiMe 3 ) 2 ] 3 and H 2 O in Atomic Layer Deposition with Liquid Delivery System 저자 : Yu Jin Choi, Seok-Jun Won, Hyung-Suk Jung, Sungin Suh, and Hyeong Joon Kim 소속 : Department of Materials Science and Engineering and Inter-University Study on Particle Formation and Decomposition Characteristics of Co Precursors Decomposed by the Thermal and Plasma Treatments 저자 : 서경천 1,2, 나정길 1,3, 윤주영 1, 신재수 2, 김태성 3, 강상우 1 소속 : 1 한국표준과학연구원진공센터, 2 대전대학교신소재공학과, 3 성균관대학교기계공학과 Comparison of Electrical Properties of MIM Capacitors with Multi-layer High-k Dielectrics 저자 : 박상욱, 권혁민, 한인식, 박병석, 복정득, 이희덕소속 : 충남대학교전자전파정보통신
TP1-8 TP1-9 TP1-10 Ferroelectric Properties of Pt/Pb(Zr, Ti)O 3 /Al 2 O 3 /ZnO/Pt Stack Capacitors for Nonvolatile Memory Applications 저자 : Min Hyuk Park, Hyun Ju Lee, and Cheol Seong Hwang 소속 : Department of Material Science and Engineering and Inter-university Thickness Dependency of MAHONOS Structure TBE-CTF Memory 저자 : Se-Man Oh and Won-Ju Cho 소속 : Department of Electronic Materials Engineering, Kwangwoon University Atomic Layer Deposition of (GeTe 2 ) x (Sb 2 Te 3 ) y Films Using Novel Precursors 저자 : Taeyong Eom 1, Seol Choi 1, Byung Joon Choi 1, Sangho Rha 1, Woongkyu Lee 1, Cheol Seong Hwang 1, and Moo Seong Kim 2 소속 : 1 Department of Materials Science and Engineering and Inter-university 2 Air Products and Chemicals Korea inc., TP1-11 TP1-12 TP1-13 TP1-14 Initial ALD on Hydroxylized Si (001) Surface with TMA: A First Principles Study 저자 : Dae-Hee Kim 1, Dae-Hyun Kim 1, Yong-Chan Jeong 1, Hwa-Il Seo 2, and Yeong-Cheol Kim 1 소속 : 1 Department of Materials Engineering, Korea University of Technology and Education, 2 School of Information Technology, Korea University of Technology and Education Structural Study of HfO 2 /TiO 2 Stacked Films Grown by Atomic Layer Deposition 저자 : Minha Seo, Seong Keun Kim, and Cheol Seong Hwang 소속 : Department of Materials Science and Engineering and Inter-university Chemical Mechanical Polishing of GST Film with Different Types of Abrasives 저자 : 신동희 1, 정민군 2, 이충현 2, 박형순 3, 임대순 1,2 소속 : 1 고려대학교나노반도체공학과, 2 고려대학교신소재공학과, 3 하이닉스반도체선행공정팀 Asymmetric Effect of Thermal Annealing on Unipolar and Bipolar Resistance Switching of ALD ZrO 2 Films 저자 : 김종기, 나희도, 유정호, 고대홍, 손현철소속 : 연세대학교신소재공학과 TP1-15 Inductive Coupled Plasma Dry Etching of ZnO Thin Film Using a Diluted CF 4 Gas 저자 : Doyoung Kim 1, Inchan Hwang 2, Jongyeog Son 2, and Hyungjun Kim 1 소속 : 1 School of Electrical and Electronic Engineering, Yonsei University, 2 Materials Science and Engineering, Pohang University of Science and Technology TP1-16 Silicon-rich Silicon Nitride Film Floating-gate Nonvolatile Memory Device with SiO 2 /SiNx Stacked Tunneling Barrier 저자 : Eunkyeom Kim 1, Seungman An 2, Taekyung Yim 2, Won-Ju Cho 3, and Kyoungwan Park 1,2 소속 : 1 Department of Nano Engineering, University of Seoul, 2 Department of
Nano Science and Technology, University of Seoul, 3 Department of Electronic Materials Engineering, Kwangwoon University TP1-17 TP1-18 The Effect of the Plasma Pretreatment on Cu Thin Film Growth using the Cu(dmamb) 2 Precursor 저자 : 최종문 1, 이도한 1, 진성언 1, 변동진 1,2, 정택모 3, 김창균 3, 김백만 4 소속 : 1 고려대학교신소재공학과, 2 고려대학교나노반도체공학과, 3 한국화학연구원, 4 하이닉스반도체 Initial Oxidation of GaAs (001)-β2(2 4) Surface: A First Principles Study 저자 : Dae-Hyun Kim 1, Dae-Hee Kim 1, Yong-Chan Jeong 1, Hwa-Il Seo 2, and Yeong-Cheol Kim 1 소속 : 1 Department of Materials Engineering, Korea University of Technology and Education, 2 School of Information Technology, Korea University of Technology and Education F. CMOS Device & Process Technology 분과 TP1-19 TP1-20 TP1-21 TP1-22 Memory Characteristics of Strained-silicon-on-insulator (ssoi) Capacitorless 1T-DRAM Cells Depending on Thermal Annealing Conditions 저자 : M. S. Kim and W. J. Cho 소속 : Department of Electronic Materials Engineering, Kwangwoon University Impact of Arsenic Deactivation Enhanced Diffusion on Reverse Short-Channel Effect of Deep Submicron PMOS Devices 저자 : 신은종, 김현진, 김태우소속 : 동부하이텍반도체사업부공정개발 2 팀 Cost-Effective 0.18um Analog CMOS Process for Power Management Applications 저자 : Y. K. Choi, I. Y. Park, K. M. Park, H. C. Lim, J. H. Moon, C. J. Yoon, N. J. Kim, and K. D. Yoo 소속 : Dongbu HiTek Electrical Characteristics of NiSi/Si Junction Using Sb Interlayer 저자 : 전명심, 박영삼, 현영훈, 장문규소속 : 한국전자통신연구원차세대 I-MEMS 팀 J. Nano-Science & Technology 분과 TP1-23 Low-frequency Noise Characteristics in Multilayer Graphene Transistors 저자 : 1 Jung-Kyu Lee, 1 In-Tak Cho, 2 Dae-Young Jeon, 2 Sunae Seo, 3 Hyuck-In Kwon, and 4 Jong-Ho Lee 소속 : 1 School of Electrical Engineering and Computer Science, Kyungpook National University, 2 Samsung Advanced Institute of Technology, 3 Department of Electronic Engineering, Daegu University, 4 School of Electrical Engineering and Computer Science and Inter-university
TP1-24 TP1-25 TP1-26 TP1-27 TP1-28 TP1-29 TP1-30 TP1-31 Fabrication of Al Thin Films with Water-mediated Nano Transfer Printing for Thin Film Transistors 저자 : Jeong M. Dang, Eun B. Kwak, and Myung M. Sung 소속 : Department of Chemistry, Hanyang University Selective Gas Sensors Made of a Multiple ZnO Nanorods via a Simple Solution Process 저자 : Junghwan Huh 1, Jonghyurk Park 2, Hyeyoung Kim 1, and Gyu Tae Kim 1 소속 : 1 School of Electrical Engineering, Korea University, 2 Electronics and Telecommunications Research Institute ZnO Nanowire Field-effect Transistors with Pt Nanocrystals Fabricated on Plastic Substrates for a Non-volatile Memory Application 저자 : Myeongwon Lee 1, Sungsu Kim 1, Sang-Hyun Oh 3, Suk-Goo Kim 3 and Sangsig Kim 1,2 소속 : 1 Department of Electrical Engineering, Korea University, 2 Nano Semiconductor Engineering, Korea University, 3 Research and Development Division, Hynix Semiconductor Inc. Effective Reduction of Leakage Currents in Single-walled Carbon Nanotube Network Thin-film Transistors 저자 : Junhyuk Lee 1, Min-Ho Jeong 2, Eun-Suk Choi 2, Kunhak Lee 2, Chaehyun Lim 1, and Seung-Beck Lee 1,2 소속 : 1 Department of Nanoscale Semiconductor Engineering, Hanyang University, 2 Department of Electronic Engineering and Institute of Nano Science and Technology, Hanyang University The Investigation of Electrical Hysteresis in ZnO Devices 저자 : Hyunjin Ji 1, Jaewan Choi 1, Insung Hwang 2, Jongheon Lee 2, Siegmar Roth 1, Gyu-Tae Kim 1 소속 : 1 School of Electrical Engineering, Korea University, 2 Department of Material Science, Korea University Growth Behaviors of Silica Nanowires using Heteroleptic Precursor and Water Vapor 저자 : Sanghyun Park, Jaeyeong Heo, and Hyeong Joon Kim 소속 : Department of Materials Science and Engineering, Seoul National University 불규칙하게분포된 Ag 나노입자를이용한무반사 ITO SWS 나노구조제작저자 : 박경철, 최은실, 송영민, 이용탁소속 : 광주과학기술원정보통신공학과 Microfluidic System 을이용한 Electrochemical Cell Lysis 저자 : 장유철 1, 주기성 1, Kamrul Islam 1, 이현호 2, 김용상 1,3 소속 : 1 명지대학교나노공학과, 2 명지대학교화학공학과, 3 명지대학교전기공학과 M. RF Design 분과 TP1-32 Design of High Security HF-band Passive RFID Tag IC
저자 : Duong Huynh Thai Vo, Hung Quoc Huynh, Quoc Tai Duong, Sang-Hoon Hong, and Jong-Wook Lee 소속 : School of Electronics and Information, Kyung Hee University TP1-33 De-embedding Accuracy for Interconnection Variation 저자 : Jaeho Lee, Jaehong Lee, Byung Gook Park, Jong Duk Lee, and Hyungcheol Shin 소속 : Inter-university Semiconductor Research Center and School of Electrical Engineering, Seoul National University P. Device for Energy (Solar Cell, Power Device 등 ) 분과 TP1-34 TP1-35 Effect of LiF Interlayer and Thickness Variation of the Conjugated Polymer/Fullerene Photoactive Layers on Organic Solar Cell Devices 저자 : Seungju Kim and Sangouk Ryu 소속 : Electronic Engineering, Dankook University Transparent Conductive Indium Zinc Tin Oxide Thin Films for Organic Solar Cell Applications 저자 : Hong Chan Ma 1, Jeong-Joo Kim 2, and Hee Young Lee 1 소속 : 1 School of Materials Science and Engineering, Yeungnam University, 2 School of Materials Science and Engineering, Kyungpook National University