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1 한국정밀공학회지제 33 권제 7 호 pp J. Korean Soc. Precis. Eng., Vol. 33, No. 7, pp ISSN (Print), ISSN (Online) July 206 / 60 초소형전자기유도방식에너지하베스터용연성박막다적층평판코일설계및제작 Design and Fabrication of Flexible Thin Multilayered Electromagnetic Induction Energy Harvester Planar Coil for Micro 박현철, Hyunchul Park, STX 엔진주식회사엔진기술연구소 (R&D Institute, STX Engine Co., Ltd.) Corresponding author: phc@onestx.com, Tel: Manuscript received: / Revised: / Accepted: In this paper, an energy harvester is developed that has advantages regarding piezoelectric noise minimization, mass production, and an easily available environmental energy source, electromagnetic induction, as well as low-frequency bandwidth and high amplitude. A process for fabricating a three-dimensional multilayered planar coil using micro-electro-mechanical systems (MEMS) on a flexible printed circuit board FPCB is introduced. Optimal shape and size were calculated via internal resistance and inductance, and a prototype was fabricated through the MEMS procedure while considering the possibility of mass production. Although the internal resistance matched the designed value, the electromotive force generated did not reach the intended amount. The main reason for the decrease in efficiency was the low area of coil outskirt exposed to the magnetic field while there was relative motion between the magnet and the coil. KEYWORDS: Energy harvester ( 에너지하베스터 ), Flexible printed circuit board ( 연성인쇄회로기판 ), Planar coil ( 평판코일 ), Polyimid ( 폴리이미드 ), Inductance ( 인덕턴스 ) 기호설명 L = Induction M = Mutual inductance K c = Coupling factor ρ = Specific resistance R = Inner resistance. 서론 현재시판되고있는 TPMS (Tire Pressure Monitoring System) 는센서회로에온칩 (On-Chip) 형태로배터리가탑재되어있는경우가일반적이다. 이러한이유로, 배터리를대체하는에너지하베스터 (Energy Harvester) 역시코인배터리와유사한체적으로연구됨으로써회로부의불필요한구조변경을배제하고, 높은내구성을위해단순한형태를추구하게되었다. 압전 (Piezoelectric) 소자를이용한에너지하베스터의경우, 박막화가가 Copyright C The Korean Society for Precision Engineering This is an Open-Access article distributed under the terms of the Creative Commons Attribution Non-Commercial License ( which permits unrestricted non-commercial use, distribution, and reproduction in any medium, provided the original work is properly cited.

2 한국정밀공학회지제 33 권제 7 호 pp July 206 / 602 Fig. Concept of thin planar coil 능하고시스템체적이매우작으며구조가간단하여 MEMS (Micro Electro Mechanical System) 공정을이용한대량생산에가장적합한형태로주목받고있다. 반면전자기유도방식의에너지하베스터는충분한자석의병진운동이보장되어야하고, 독립된코일과의상호작용이있어야하기때문에기본적인체적이압전방식에비해클뿐만아니라대량생산을위한공정설계에도다소한계가존재한다. 하지만환경측정결과에서본바와같이저주파대역에서지배적인에너지원이존재하기때문에이를이용하기에적합한전자기유도방식을사용하는것이바람직하다.,2 이러한요구사항을토대로개발한소자가박막형평판코일 (Planar Coil) 이다. 평판코일은 MEMS 공정을도입하여제작이가능하나, 코일권수에따라유도기전력의크기가비례하므로코일권수를높이는것이기술의핵심이라할수있다. 그렇지만기존의 MEMS 공정으로는다적층을통한코일성능향상을기대하기가어렵다. 2층이상의다적층이될경우, 코일형상을유지하기가어려울뿐만아니라제작단가도기하급수적으로상승하게된다. 이러한문제를극복하기위해도입한방법이 FPCB (Flexible Printed Circuit Board) Process, 즉연성인쇄회로기판공정이다. 따라서본논문에서는 FPCB 공정을응용하여전자기유도방식에너지하베스터용초소형고집적코일을만들기위한설계, 공정개발, 시제품시험결과를소개하고자한다. Fig. 은 FPCB 공정을이용하여완성된다적층평판코일의개략도이다. 2. 설계 Fig. 2 Fabrication procedure of thin planar coil 2. 공정설계 FPCB 공정을통해제작하는평판코일은폴리이미드 (Polyimide) 필름을기판으로하는구리도금층에 Lithography 등의일부 MEMS 공정을응용하여형성이가능하며, 공정절차는 Fig. 2 와같이설계되었다. 2.5 μm 두께의폴리이미드필름의단면또는양면에 2 μm 두께로도금된구리를 MEMS 가공하는데, 양산이가능한구리의최소선폭및 Space ( 선폭과선폭사이의공간 ) 는각각 50 μm 가된다. 이를통해설계된평판코일은 cm x cm 의크기에한장당 30 회의코일을감을수가있다. 양면제작시에는 60 회이되므로, 단위공정을양면코일위아래에각각단면코일을한장씩접합시키는것으로정의했을시, 단위공정당제작된코일샘플은 20 회이되고, 본딩 ( 아크릴및에폭시수지 ) 두께 2.5 μm 를포함한전체두께는약 μm 가된다. 여러본딩조건들을고려하여 8 개의단위공정당샘플들을조합하면최종적으로 960 회의평판코일을제작하게되는데, 이경우두께는 mm 정도가됨을예상할수있다. 적층형평판코일의공정에서가장특징적인것이적층되는 Layer 간의연결이다. 코일의감긴회전방향이동일하도록설계한후, 양면의코일은 Through Hole 을뚫어 Hole 을통해관통한구리도금으로연결되고, 단면코일은 Laser Drill 로 Via Hole 을뚫고동도금된부분을하단 Layer 의전극과접

3 한국정밀공학회지제 33 권제 7 호 pp July 206 / 603 Table Design parameters of planar coil Number of turns (n) 30 turns Spacing between turns (s) 50 μm Turn width (w) 50 μm Outer diameter (d out ) 0,000 μm Calculated inner diameter (d in ) 4,00 μm Fill factor (ρ) 0.48 Fig. 3 Type of planar coil 합시켜도통하게한다. 이때유의할사항이레이저가공한 Hole 내부에균일한도금을위해스미어제거 (De-Smear) 작업이완벽히이루어져야한다. 2.2 코일형상및임피던스설계유도코일을설계할때가장중요한변수는코일의내부저항과인덕턴스이다. 특히평판코일의경우, 재료의박막화로내부저항이크게증가할가능성이크다. 또한코일의감긴형상에따라인덕턴스도다양한값을가질수있는데, 평판코일의대표적인형상은 Fig. 3과같다. 코일의재료는구리이며, 양산가공공정한계로단면이제한되어있어, 한 Layer당감기는코일의권수도제한이되게된다. 구리도금층의두께가 2 μm이고 FPCB 공정으로가공가능한구리선의최소선폭이 50 μm이므로, wire의단면적, Aw 는 m 이된다. 이러한기본정보들을바탕으로평판코일의형상에따른인덕턴스를계산하고결정해야하는데, 설계인자는 Table 과같다. 한편, 코일의인덕턴스를계산하는대표적인방법으로 Modified Wheeler Formula 와 Current Sheet Approximation 그리고 Data Fitted Monomial Expression 이있다. 3 이를바탕으로계산한결과가 Table 2에나타나있다. 이중, Modified Wheeler Formula의경우 2-3% 의계산오차율을보이며, 단일평판코일을분석하는데가장적합하다. 또한사각형태의코일이가장높은인덕턴스를가짐을 Table 2 Calculation results of inductance for single planar coil regarding shapes (unit, nh) Square Hexagonal Octagonal Circular Modified wheeler Current sheet Monomial fit 알수있다. 사각형태는설계가용이하다는장점도가지고있다. Table 2 에의해결정된사각형태의평판코일은 30 회의권수에서 nh 의인덕턴스를가짐을알수있었다. 이는단일평판코일에서의인덕턴스계산이었으며, 960 회의코일을제작하기위해서는다적층 (Multilayer) 이필요하다. 다적층을하게될시, Layer 간의상호유도현상이발생함을고려하여보정절차를거쳐야한다. 단일공정에의한기적층코일샘플을고려하면실제공정에서는 8 장으로구성되어있지만, 계산을위해전체적층개수를총 32 장으로정의한다. Layer 간의간격은 Bonding Layer 를고려하여 25 μm 를적용한다. 이때총인덕턴스는, L = L + L ± M () total 이고, 상호인덕턴스는, 2 c 2 2 M = K L + L (2) 2 가된다. 이때 Coupling Factor 인 K c 를계산하기위해제공된 Inductor Turns 라는상수값을이용하는데각각 A = 0.84; B = ; C =.038; D =.00 이다. 따라서식 (3) 에대입한 Coupling Factor 를식 (2) 에, 이를다시식 () 에대입하면총인덕턴스를계산할수있다.

4 한국정밀공학회지 제 33 권 제 7 호 pp July 206 / 604 Table 3 Inner resistance of planar coil Coil turns (N) Rcalculated (Ω) Rmeasured (Ω) K c (i ) = 30 R~ Values 20 R~94.05 R~ R~ R~ N2 AX (i ) + BX (i ) 2 + CX (i)3 + D 3 (3) (.67 N 5.84 N + 65) 0.64 ) Fig. 4 Fabrication result of single planar coil (30 turns) 2 이상과 같이 설계된 960회의 다적층 사각 평판 코일이 갖는 총 인덕턴스는 계산 원리에 따라 μh가 됨을 알 수 있다.4 한편 이상과 같이 설계된 코일의 내부저항을 계산하면, 구리의 비저 항, ρcopper이 20 에서 Ω m 이고, 30 턴 코 일 한 개의 Layer가 갖는 길이 l 이 960 mm이며, 960회의 코일 전체 길이는 m이다. 또한 구리 도금층의 두께가 2 μm이고 FPCB 공정으로 가공 가능한 구리선의 최소 선폭이 50 μm이므로, wire의 단면적, Aw는 m 2 이 된다. 이를 통해 저항 R 을 계산하면, R = ρ copper l / A 에 의해 Table 3과 같은 결과를 얻을 수 있었다. 표에서의 Rcalculated는 계산에 의한 결과값이고, Rmeasured는 실제 제작이 완 료된 후 측정한 저항값이다. 3. 제작 및 성능평가 3. 제작 Fig. 2의 공정도를 바탕으로 제작한 결과, 한 장 의 동도금 (Copper Plate) 폴리이미드 기판에 Fig. 4 와 같이 240개의 샘플을 제작하였으며, 총 5장의 기판을 통해 평균 수율 90% 수준을 얻을 수 있었 다. 그림의 우측의 코일 중앙 Hole을 비워둔 이유 는 직경 3mm의 자석이 관통하게 될 운동 경로일 뿐만 아니라, 코일을 중앙부터 촘촘하게 감지 않 고 Hole 만큼의 공간을 비워두고 감는 것이 대칭 하고 있는 Wire간의 상호유도에 의한 기전력 상쇄 를 배제할 수 있기 때문이다. 완성된 단일 평판코일은 PSR을 통해 절연처리 를 하게 되는데 이 때 기판이 녹색을 띠게 된다. Fig. 5는 최종 완성된 960회의 다적층 평판코일이 다. 단일 공정으로 제작된 코일들간에 전도성 테 이프를 부착한 후 Hot Press를 하게 되면 그림과 같은 완성된 평판코일을 얻을 수 있다. Fig. 5 Fabrication result of multi planar coil (960 turns) Fig. 6 Electromagnetic induction test apparatus of planar coil for vibratory energy harvester Table 4 Raw data of Multi planar coil test Freq. Accel Velocity Displ. Max. V (Hz) (g) (m/s) (mm) (mv) e Avg. V Resist (mv) (Ω) 성능평가 최종 완성된 다적층 평판코일을 직경 3 mm, 높 이 5 mm의 N35Nd 자석으로 병진운동을 시키며, 이를 통해 발생하는 유도 기전력을 측정하였다.

5 한국정밀공학회지제 33 권제 7 호 pp July 206 / 605 실험장치는 Fig. 6 과같이구성하였으며, 실험에사용된코일은 20 회, 단일샘플을이용하였고, 결과는 Table 4 와같이얻을수있었다. 본실험에서는 OCV 로실험을하였으므로, 정확한 Power 를비교할수는없으나, 저주파에서는전자기유도에너지하베스터가우위의성능을나타냄을예측할수있었다. 여기서 5 mv 이하의값은외부환경의간섭에의한영향으로신뢰도가낮은값으로간주한다. 4. 결과및고찰 실험치의성능을비교하기위해 Maxwell 4.0을이용하여 3차원시뮬레이션을시도하였다. 모델및결과는 Fig. 7과같으며, 코일의반경방향으로전달되는자기장성분이거리의증분에따라상당부분감소되며자석의경로에근접한코일들만이자기장의영향을받고있는것을확인하였다. 이러한경향을통해자석의운동경로에대한추가적인연구가필요함을알았다. 한편, 권선형코일이적용된스프링-질량-댐핑시스템모델링을바탕으로 60 Hz, g의조건에서실험한평판코일의실험치와비교한결과, Fig. 8과같이 20% 의성능만이나타남을확인할수있었다. 5 이는평판코일의경우, 내부저항이높을뿐만아니라, 자석의병진운동에의한코일로의자기장구배가코일의반경방향전면으로분포되지않는것으로판단된다. 그결과자석의이동경로와근접한코일일부만이자기장구배의영향권에들고외곽코일은기전력발생의환경조건이되지않음으로인해실제적으로코일의턴수를감소시킨결과를보이게된것이다. 따라서, 에너지하베스터에평판코일을적용할시에는코일전면에걸쳐자기장구배를분포시킬수있도록자석운동방식을변경할필요가있겠다 결론 지금까지 Coin battery 대체용에너지하베스터의대량생산을염두에둔 MEMS 방식의박막형평판코일개발을시도하였다. FPCB 방식을이용한다적층기법은내부저항측정결과를비교했을경우, 설계치와잘일치하며이는금번개발한적층공정이신뢰도가높음을말해준다. 기판당샘플개수 (240 개 ) 및비교적낮은수율 (90%) 은공정개선 을통해극복이가능할것으로보이며, 코일내부저항감소를위한최적선폭을찾고자기장구배를극대화시키기위한코일및자석의상대운동에대한보완연구가필요하겠다. 후기 본연구는 STX 엔진주식회사의 EQR008 에의해수행되었음. (No. EQR008) REFERENCES Fig. 7 3-D simulation (Maxwell 4.0) Fig. 8 Electromotive force of 20 turn- planar coil. Shin, Y.-H. and Lee, Y.-P., Measurement on Vibration Mode of Tire Wheel as an Energy Source of Micro Power, Transactions of the Korean Hydrogen and New Energy Society, Vol. 20, No., pp , Park, H. and Kim, J., Electromagnetic Induction Energy Harvester for High-Speed Railroad

6 한국정밀공학회지제 33 권제 7 호 pp July 206 / 606 Applications, Int. J. Precis. Eng. Manuf.-Green Tech., Vol. 3, No., pp. 4-48, Mohan, S. S., del Mar Hershenson, M., Boyd, S. P., and Lee, T. H., Simple Accurate Expressions for Planar Spiral Inductances, IEEE Journal of Solid- State Circuits, Vol. 34, No. 0, pp , Zhao, J., A New Calculation for Designing Multilayer Planar Spiral Inductors, Electrical Design News, Vol. 55, No. 4, pp , Williams, C. B. and Yates, R. B., Analysis of a Micro-Electric Generator for Microsystems, Sensors and Actuators A: Physical, Vol. 52, No., pp. 8-, Park, H., Moon, Y., and Kwon, S., Development of Rotational Type of Wheel-Based Electromagnetic Induction Energy Harvester by Using Orthogonal Array, Transactions of the Korean Society of Mechanical Engineers B, Vol. 37, No. 2, pp , 203.

THE JOURNAL OF KOREAN INSTITUTE OF ELECTROMAGNETIC ENGINEERING AND SCIENCE. vol. 29, no. 10, Oct ,,. 0.5 %.., cm mm FR4 (ε r =4.4)

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