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1 Copyright by InnoWater Ltd 2005 Tel :
2 - - 1 Ultra Pure Water Technology 2 Activated Carbon Filter 3 Revese Osmosis(RO) System 4 Electro De-Ionized(EDI) System 5 UV System 6 Membrane De-gasifier(MDG) System 7 Ion Exchange Resin Copyright by InnoWater Ltd 2005 Tel :
3 Ultra Pure Water Technology
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8 10 1 Water Ice 10452º 4 (H +, OH - )
9 2 21 (Qualitative) - Turbidity---- Candle Turbidimeter (for high turbid water), Nephelometer (low turbid water) Silt Density Index(SDI) test Color (Samples ) - Odor (Quantitative) - ph ph CO 2, (ph Meter) - TDS Bacteria, Silica, Algae, Silt Contamination Index - Conductivity-- Ionic Contaminations(Conductivity Meter) - Bacteria----- ml (CFU; Colony Forming Units) - TOC ( ) - BOD, COD--- (Organic material contamination in water specified in ppm )
10 23 Specific Impurities - Common Ions a) ---- Ca +2 Mg +2 (ppm) b) Fe %, c) Mn Mn +2 d) Chlorides ( ) e) CO -2 3, HCO -, 3 OH - f) NO ,, g) Chlorine(Cl 2 ) THM(trihalogenated methane compounds), h) Silica(SiO 2 ) Ionic Silica(Remove by IER), Colloidal Silica(Remove by UF or Lime) i) Aluminum alum j) Sodium(Na + ) Corrode Stainless steel, Naturally introduced due to the dissolution of salts - Dissolved Gases a) Carbon Dioxide(CO 2 )--- forms H 2 CO 3, reducing the ph and corrode in water lines b) Oxygen Only soluble to 13 ppm in water - Heavy Metal Lead, Arsenic, Cadmium, Selenium, Chromium etc
11 Reference Raw Water Quality (mg/liter) Niagara ( CA) River Well Water (Ohio) TDS Cations (Ca +2,Mg +2,Na + ) (4, 1, 2) (36, 81, 65) (92, 34, 82) (185, 42, 2) Anions (HCO 3-, Cl - ) (183, 2) (119, 13) (339, 96) (327, 143) ph Hardness Alkalinity SiO ImpurityTDS BacteriaImpurity DIW System
12 Raw Water Impurity TDS, Ca +2,Mg +2, Na +, Cl -, HCO 3 -,CO 2,O 2, Heavy Metal, Bacteria, TOC, Particle, Silica,H +,OH - Ca +2,Mg +2, Na +, Cl -, HCO 3 - CO 2,O 2, Heavy Metal, TOC, Silica,H +,OH -, Fine Particle H +,OH , 4, 5
13 Methods of Water Purifications 1 ( ) a) Screen Prefiltration b) Clarification( ) SS Floc 25micron, FeColor,, (100% ) c) Disinfection (02~05 ppm) d) ph Adjustment Scale 75 ~ 8 (CO -2 3, HCO 3-, OH - )CO 2 gas Ca 2+ +2HCO 3- CaCO 3 (s) + CO 2 (g) +H 2 O
14 2 2 a) Sand Filter(TRF) or Carbon Filter Service, Backwash and Rinse b) CO 2 gas CO 2 + 2H 2 O H 2 O + HCO 3- + H + (HCl ) c) Micro Filter(01 ~100 ), Ultra Filter(1 ~100 nm ) d) (Deionization System) H +- <Cat(s)> + M + + X - M +- <Cat(s)> + H + + X - OH -+ <An(s)> + H + + X - X -+ <An(s)> + H 2 O e), 90 to 99%, 999% f) Ozone(O 3 ), Ultra Violet light 183nm (TOC ), 254nm ( )
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16 31 DIW (De-Ionized Water) 3 DI Water 32 DI Water
17 Surface Contamination Device Failure Fine Particle Organic Compound Pattern Failure Junction Leak Bacterium Metallic Impurity Pause Time Failure(Memory) Image Defect
18 Relation of pure water quality and LSI integration Item Unit 256K 1M 4M 16M Remarks Resistivity M cm >175 >175 >18 >18 Particle pcs/ml <20 <50 <10 <30 <1 <10 () (02)(01) (02)(01) (02)(01) (01) Bacteria cfu/100 ml <10 <1 <05 <05 TOC ppm <100 <50 <30 <30 Silica ppm <10 <5 <3 <3 DO ppm <01 <01 <005 <005 Ion ppb <2 <1 <1 <01
19 4 Use Point of DI Water Pure Steam Generator FAB Equipment (Photo, Wet-Station,CMP Etch, T/F, Diff) PCW Make-up System DIW PLANT ADMIN Package(Sawing, Molding ) FAB (Device R m, QC LAB ) CCSS (Chemical ) Smock R m (Hand Washer )
20 51 Water Quality 5 DI Water Quality & Main Process Resistivity( ) / Particle ( ) TOC ( ) DO ( ) Silica( SiO 2 ) FAB DIW / 3/ 005 < 05 ea/ml 05 ppb 1ppb 02 ppb PKG DIW 18 3/ 01< Main Process System Make-Up Polishing Reclaim RCF, WA Pre Treatment Filter, DG, CF, UV, MF, RO, SB-P, KP Membrane De-Ox, TOC-UV, CP, UF
21 6 DI Water System Make-Up System Polishing System Reclaim System WWT FAB & Package Line
22 7 Unit
23 71 Pre Treatment Filter(Turbidity Removal Filter) Turbidity, Coagulant, Jar Test & Occlusion
24 Impurity Filter Media Surface Filtration, 1kg/cm 2 Filter (PAC) ph
25 711 Heat Exchanger Degasifier CO 2, RO 25 Polishing Chiller Heater
26 73 Degasifier( ) Scale CO 2 gas CO 2 gas CO 2 gas (Henry ) CO 2 gas DG Packing Ring CO 2 gas Air Blow HCO B3T System Anion Resin
27 Degasifier Packing Ring
28 72 Activated Carbon Filter( ) Impurity Media Depth Filter Media Layer Electronic Forces Ionic Forces Flow Velocity Media Cl 2, Color TOC
29 Adsorption Mechanism (Adsorption), (Absorption) (Sorption),,
30 74 Micro Filter (SS) Surface(Pleated) Depth Type 2 Nominal (due to Tortuous path) Type Absolute(due to Occlusion) Type
31 75 Ultra Violet Sterilizer UV polishing step bacteria TOC lampuv energy, nm 254 nmuv energy non-chemical 185 nm energy TOC
32 Function of Ultra Violet Ray TOC Removal Sterilization Ozone Removal UV Ray DNA ( )
33 76 Reverse Osmosis Membrane System, ( 1 psi 100 ppmtds )
34 76 Reverse Osmosis Membrane Feed Tube Concentrated Water 20 cm, 150 cm 3 ~ 7 1 Housing CA PA PA CA ph salt passage Free Cl -
35 76 Reverse Osmosis Membrane System
36 76 Reverse Osmosis Membrane System
37 77 Ion Resin Exchanger System Function of Ion Exchange Resin ChainCross Link SAC, SBA, WAC, WBA4 non-ionic HCl, NaOH NaOH Silica 50
38 Selectivity of Ion Exchange Resin Mobile Ion Softening ( ) SAC Na + mobile ion
39 77 Ion Resin Exchanger System
40 78 Membrane Degasifier/Separel DeOxygen Membrane Polypropylene Hollow Fibers Operation Hollow Fibers Gas hollow fibers Fiber MembraneGas Counter flow Hollow Fiber
41 Mechanism of DeGasifier System Design Conditions Oxygen Nitrogen CO 2 Inlet(ppb) 8,000 14, Outlet(ppb) 1 1,313 0
42 79 Ultra Filter System ~ System Process, 001 (,,,,, ) System
43 UV Filter Mechanism poly sulfone 6,000, 16 m 3 /hr, 9 kg/cm 2, 90, 01
44 Activated Carbon Filter ( )
45 , :,, ,, (Adsorbate), (Adsorbent), (Coverage) 3-2, 3-3 (10Kcal/mol ) ( ) (10 30Kcal/mol) ( ) ( )
46 ,,,,,,, ph,
47 4 2 1 [ 1] Macropore(r>1000 ) Mesopore(r= ) Micropore(r<20 ) /g Micro-, Meso-, Macro-Pore 20 Pore Micro-Pore, PoreMeso- Pore 1000 Macro-Pore 2 Macro-Pore ,,,
48 5-3 6 (Break Through Curve) Pilot-Scale, Full ScalePlant 2 3 Pilot Study Pilot Study, Column Test Simulation Break Through Curve 3 10A B,, ( )
49 [ 3] Co C 1 C/Co A B 0 Time
50 Reverse Osmosis System (RO System)
51 - ( 50) ( 02) - (Osmosis) - (Reverse Osmosis) InnoWater Ltd
52 1) (Purification) - 2) Diafiltration ( : Dialysis + Ultrafiltration) - 2 (: + + SaltSalt ) - UF 3) (Concentration) -, 100% 2, System InnoWater Ltd
53 1) (Water Flux), (Salt Rejection) 2) barrier 3) ph 4) 5) 6) 7), 8) InnoWater Ltd
54 1) 2) 3) (3> 2> 1 ) 4), : Mg +2 > Li + > Na + > K + : F - >Cl - > Br - > NO - 3 5) 6),,,, 7) > > InnoWater Ltd
55 1) a b,, Condensator, Evaporator Compact c scale-up, d Shock Loading 2) a, ph b, c d Fouling Cleaning InnoWater Ltd
56 - PA CA ph 2 ~ 12 4 ~ 6 (Kgf/cm 2 ) (%) TDS SiO Flux Rejection 3 30% 100% 99% 987% 98% 96% OCl - ( ) () - CA( ) ph, PA( ) -PA CA ph, PA InnoWater Ltd
57 - type (1) Spiral wound - Module2 spacer roll cake - Module -Compact channel height1/10 InnoWater Ltd
58 - type (2) Hollow fiber - Closed-end design, pressure vessel - systemfiber Fiber 100ID, 150~200 OD -Fiber epoxy module, - Clean applicationrouf, UF moduleflow channelro module fouling InnoWater Ltd
59 - type (3) Plate and Frame - system type designconventional filter process - gasket seal leak - electrodialysis, pervaporation system small ultrafiltrationro system InnoWater Ltd
60 - type (4) Tubular - Good fluid hydrodynamicsfouling UF - module, scale - InnoWater Ltd
61 (1) (Parallel type) -System M Reject Permeate InnoWater Ltd
62 (2) (Series type) - brine M Reject Permeate InnoWater Ltd
63 (3) Christmas tree type - - booster pump Reject M Permeate InnoWater Ltd
64 (4) 1 - : 995% ,000~36,000ppm 500ppm - 1 M Reject Permeate InnoWater Ltd
65 (5) 2-1 3,000~4,500ppm 2 500ppm ~95% 70~80 M Reject Permeate InnoWater Ltd
66 Electro De-Ionized System (EDI System)
67 EDI EDI,, InnoWater Ltd
68 EDI : : : : : InnoWater Ltd
69 Flow Schematic RO CDI UNIT FEED REVERSE OSMOSIS EDI UNIT PRODUCT EDI Concentrate Recycle
70 EDI (No chemicals) Stand-By System Maintenance Compact EDI : Continuously Stable Quality MBD : Resin Bed InnoWater Ltd
71 EDI High Resistivity TOC SiO 2 InnoWater Ltd
72 EDI TFT- LCD,, Electric Coating Fine Chemical Boiler Make up () InnoWater Ltd
73 EDI System InnoWater Ltd
74 Pure Water System RAW RAW WATER WATER MULTI MEDIA FILTER CARBON FILTER SOFTENER 5 MICRO FILTER REVERSE OSMOSIS EDI UNIT UPW UPW TANK UF MB POLISHER ANION POLISHER UV- ST InnoWater Ltd
75 USP Purified Water System RAW RAW WATER WATER MMF CARBON FILTER SOFTENER 5 MICRO FILTER REVERSE OSMOSIS EDI UNIT UPW UPW TANK 02 POST FILTER UV- ST InnoWater Ltd
76 UV System
77 InnoWater Ltd 1 1), Hewitt lamp,, lamp 1930, 60, 70, lamp,,,,,,,, 2),, m m 380nm ( 10 1m) 760nm,, micro,, X, Gamma UV-A(, ), UV-B (vitamin, ), UV-C ( )
78 InnoWater Ltd Energy Energy,,,, (DNA), ( 2) DNA( ) lamp lamp 2537nm, 2537nm 90% ( 3)
79 InnoWater Ltd lamp, lamp, Lamp, gas,, Energy, Energy ( 4) 2 CLEAN (, ),,,, pool, SPEEDY SIMPLE simple ALLMIGHTY, ( 5)
80 InnoWater Ltd 3 1), ( (ws/) = (ws/) (s)) (1), ( 4) ` 1 (ws/) < (Gram )> Escherichia coli Shigella dysenteriae Pseudomonas aeruginosa < (Gram )> Bacillus subtilis Bacillus subtilis spores Streptococcus hemolyticus Staphylococcus aureus Staphylococcus albus < > Saccharomyces Sp Saccharomyces cerevisiae <Mold spore> Penicillium roqueforti Penicillium expansam Aspergillus niger Aspergillus flavus Rhizopus nigricans <Viruses> Influenza Polio Type Coxsachie A2 Adeno virus Type ( : 999%) ( ) ( ) () () () ()
81 InnoWater Ltd 2), ( ), ( 5) Lambert -beers, log 10 I 0 / I = c1 c1 : I : : c : I / I 0 : 100%,,, ( ) lamp,, lamp control,
82 InnoWater Ltd 3),, 1pass,, use point 4 1), tube (flonfine type) tube (Trough), lamp (Trough type) ( 8), a) Flonfine type teflon tube, maintenance, lamp tube,,, maintenance Trough type b) lamp energy sterifine type,, level Open channel type flow unit
83 InnoWater Ltd,, ( ) lamp,,,,,, reynolds, Tracer (
84 InnoWater Ltd 7) 2) lamp lamp,,, (254nm) lamp lamp lamp, lamp, lamp, lamp lamp (Amalgam) control lamp ( 8) lamp, lamp ( ),,, lamp, lamp 70% ( 8000~8500 ) ( ) ( 9)
85 InnoWater Ltd 5 1), lamp on, off Lamp,, lamp lamp ( ) Lamp on/off,, lamp lamp, 70%,,, lamp, lamp 2,,, 2) lamp lamp, lamp lamp, 70% ( 8000~8500 )lamp
86 InnoWater Ltd 3) Sampling, check sampling,, 4),, check, check manual,, 5) Cleaning lamp teflon tube,,,,,, check, cleaning Cleaning,,,, 6 1), silicon wafer,, ion, leak,,, 2) line, in line 3),,
87 InnoWater Ltd,, 4),,,,,,,,, 5),,,,,,, ph,,,, 6),,,,, 7),,,,,,,
88 InnoWater Ltd 8) Cooling tower, air washer,, slime level slime 7 energy 1),,,,, 2),, lamp ppb order 3) Ozon ozon ozon 4),,,
89 Membrane De-Gasifier
90 DAINIPPON INK & CHEMICALS Hollow fiber membrane module for degassing from water SEPAREL EF-040P DAINIPPON INK AND CHEMICALS,INCORPORATED NEW BUSINESS PROMOTION DIV DAINIPPON INK & CHEMICALS
91 DAINIPPON INK & CHEMICALS What is degassing? To remove gases ( O 2, N 2 etc) that are dissolved in water so that the dissolved gases are reduced DEGASSING Regular water Degassed water Nitrogen molecule waterdegassing Oxygen molecule water DAINIPPON INK & CHEMICAL
92 DAINIPPON INK & CHEMICALS How to degas? Concentration of a gas dissolved in water is proportioned by partial pressure of a gas in adhering air ( Henry s law ) Therefore, if partial pressure is lowered, concentration of a gas is lowered ( = degassed ) High pressure air Low pressure air High dissolved gases concentration Low dissolved gases concentration DEGASSED WATER DAINIPPON INK & CHEMICALS
93 DAINIPPON INK & CHEMICALS Method of degassing [ 1 Vacuuming method ] [ 2 Sweeping N 2 method ] by decreasing air pressure by using N 2 gas To decrease pressure of air by using vacuum pump, etc Vacuuming Pump Exhausted air DECREASED PRESSURE Air permeation membrane Water By flowing N2 gas into air, O2 in water will be removed Effective only to remove O in Exhausted gas N 2 Gas Dissolved O2 PO 2 0 [ 3 Combination method ] Combination of 1 & 2 N 2 Gas Dissolved N2 MEMBRANE DEGASSING METHOD Membrane and vacuuming pump should be prepared for this method DAINIPPON INK & CHEMICALS
94 DAINIPPON INK & CHEMICALS Difference from MF membranes (1) A membrane can pass only air through not water DIC s degassing membrane Filtration membrane Direction of gas flow Direction of water Dissolved gas Water to be dealt Water Particle etc Degassing membrane MF Air (Low pressure) Dealt water (2) A vacuuming pump as well as a module should be prepared DAINIPPON INK & CHEMICALS
95 DAINIPPON INK & CHEMICALS Structure of DIC membrane Material : Poly 4- methylpenten- 1 (PMP) Manufacturing method : Melt spinning method Thickness of skin layer 1m 40m 215m DAINIPPON INK & CHEMICALS
96 DAINIPPON INK & CHEMICALS Characteristics of surface skin membrane Surface skin membrane Non porous membrane Porous membrane No liquid leaks Makes it easy for gases to permeate No liquid leaks It takes time for gases to permeate Liquid leaks Can not be used for liquids which contain solvents DAINIPPON INK & CHEMICALS
97 DAINIPPON INK & CHEMICALS Appearance of EF-040P DAINIPPON INK & CHEMICALS
98
99 DAINIPPON INK & CHEMICALS Cross section of SEPAREL EF-040P Water Inlet port Vacuuming port Hollow fiber membranes (or N2 inlet) Water Inlet port Water distribution pipe (A pipe with many holes ) Textile shaped membranes rolled on a water distribution pipe Vacuuming port (or N2 inlet) DAINIPPON INK & CHEMICALS
100 DAINIPPON INK & CHEMICALS Characteristic of EF-040P Single pass cross flow & External flow Structure Dealt water Inlet water Removed O2, N2 gas To Vacuuming pump Water runs outside of membranes (EXTERNAL FLOW) Exhausted gases Removed O2, N2 gases DAINIPPON INK & CHEMICALS
101 DAINIPPON INK & CHEMICALS Chart of degassing test at DIC DO meter flow meter flow meter pure water tank ( air bubbling ) differencial pressure meter DO meter pump regulator pre filter flow meter SEPAREL EF-040P drain vacuuming pump DAINIPPON INK & CHEMICALS
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104 DAINIPPON INK & CHEMICALS Combination mode ( vacuuming pump + Sweeping N 2 gas ) Parallel flow Series flow Inlet water Inlet water N 2 gas N 2 gas N 2 gas N 2 gas Vacuuming pump Vacuuming pump Vacuuming pump Vacuuming pump DAINIPPON INK & CHEMICALS
105 Ion Exchange Resin
106 / 42 (Ion exchange Reaction) : (Ion exchanger) : (Zeolite) (Ion exchange Resin) :,, 1935, PhenolFormaldehyde 1940 Styrene 1946 Mitsubishi Chemical 1976 Mitsubishi Chemical 1985
107 (8%) (5%) (2%) 2 / : : 1,100 1,100 (20%) (25%) (40%) 1% 1% 3% 19% 2% 7% 10% 57%
108 31 3 / 42 STM(Styrene Monomer) CH CH 2 DVB(Divinyl Divinyl Benzene) CH CH 2 Polymer (R) CH CH 2 (R-SO SO 3 ) -SO 3 32 (Reversible Reaction) Target Ion -Target Ion (ex) R-SOR 3 HNa R-SO 3 Na H -Target Ion Target Ion (ex) R-SOR 3 Na H R-SO 3 HNa Na 1
109 41 4 / 42 :, Chemical Chemical, STM STM STM STM DVB DVB ( ( ) ) ( ( ) ) ( ( ) ) 42 (DVB%) DVB%) DVB (DVB%) 100 STM DVB Leak
110 5 / 42
111 43 (Specific Gravity) : 6 / (Shipping Density) : 45 (Moisture Retention) ) :, 46 (Exchange Capacity) (ex) meq/ -R, g as CaCO 3 /-R NaOH NaOH NaOH H Na H Na H Na H Na H 2 O H 2 O H 2 ONaOH NaOH NaOH (Breakthrough Point)
112 (Regeneration Level) () (g) 1 (100% (100% ) (ex) 1,000 35% HCl 143 LEVEL 143 HCl 035% 1,000(g/ 1,000(g/) / 1,000 -Resin 50g HCl/ -R 7 / (meq/- R) LEVEL (g-hcl/- Resin) 73g-HCl/ HCl/-Resin(20eq HCl/ -Resin) Resin) 20eq // - Resin 10eq // -Resin ( ) (Regeneration Efficiency), Cost
113 47 (Effective Size) - 90% 8 / (Uniformity Coefficient) - ex) : L-type : : (Particle Size Distribution) - ex) : 03~12mm L-type : 0425~12mm XL-type type : 07(08)~12mm : mm
114 410 (Operating Temperature) , 40~ ph (Operating ph Range) 9 / 42 -, ph ph,, ph 412 (Swelling) H Na Ca Ba (DIAION SK1B )
115 51 Gel, Macroporous Type 10 / 42 Gel Type Macroporous Macroporous Type Type Macro Pore Micro Pore Micropore Micropore MicroporeMacropore Macropore
116 52, (SK PK, WK) 11 / 42 GRADE SK1B, SK104 PK216, PK228 WK40 WK40 ( ) ph R-SO 3 H R-COOH R-COOH SK(Strong Cation), PK(Porous Cation), WK(Weak Cation) -, ph ph 1 -, ph 1 Silica SilicaLeakage
117 53, (SA PA, WA) 12 / 42 GRADE SA10AP, SA20AP PA312, PA412 WA30 WA30 ( ) ph SiO SiO 2 2 R-N OH R-NH R-NH 3 OH 3 OH SA(Strong Anion), PA(Porous Anion), WA(Weak Anion)
118 13 / 42 MECHANISM R- SO 3 H + Na + R-SO 3 Na + H + R- SO 3 Na + HCl R-SO 3 H + Na + + Cl 2R- SO 3 H + Ca 2+ (R (R-SO 3 ) 2 Ca + 2H + Cl (R-SO 3 ) 2 Ca + 2HCl 2R 2R- SO 3 H + Ca Cl R-NOH + Cl Cl R-NCl + OH R-NCl + NaOH R-NOH + Na + + Cl Cl 2R-NOH + SO 2 4 (R (R-N) 2 SO 4 + 2OH (R-N) 2 SO 4 + 2NaOH 2R 2R-NOH + 2Na + + SO 2 4 Ca 2+ Mg 2+ Na + H + SO 4 2 Cl HCO 3 SiO 2 OH
119 71 CATION TOWER (Counter-current) Ca 2+ HCO 3 Mg 2+ Na + H 2 O ( ) SiO 2 Cl- SO / 42 Ca 2+ Ca 2+ Mg 2+ Na + Ca 2+ Na + Mg 2+ Ca 2+ Mg 2+ Na + H + H + Mg 2+ H + Na + H + HCl H + H 2 O HCO 3 Cl - SO 4 2- SiO 2
120 72 ANION TOWER (Counter-current) H + H 2 O HCO 3 Cl - SO 4 2- SiO 2 15 / 42 Cl SO 4 2 SO 2 4 Cl HCO 3 SiO 2 SO 4 2 Cl HCO 3 SO 4 2 HCO 3 SiO 2 Cl SiO 2 OH HCO 3 OH OH SiO 2 OH NaOH H 2 O H + OH -
121 81 Scale Carryover, ph Scale (Suspended Solids) H 2 O HCO 3 Ca 2+ Mg 2+ Cl Na + SiO 2, Scale Turbine SO / 42
122 82 Process 17 / 42 (Clarifier) (Cl 2 ) 01 05ppm (Cl 2 ) 01 05ppm (Cl 2 ) 01ppm (Cl 2 ) 01ppm (Cl 2 ) 01ppm COD 25ppm COD 25ppm COD 1ppm COD 1ppm COD 1ppm H H OH - CO 2, HCO 3 - CO 2, HCO 3 - CO 2, HCO 3 - CO 2, HCO 3 - SiO 2 SiO 2 SiO 2 SiO 2 -
123 83 (Clarifier) 18 / 42 (Raw Water) ( ), Flock Al 2 (SO 4 ) 3 + 3Ca(HCO 3 ) 2 3Mg(HCO 3 ) 2 2Al(OH) 3 + 6NaHCO 3 Flock HCO 3- Al(OH) Al(OH) 3 3CaSO 4 3MgSO 4 3Na 2 SO 4 Flock + 6CO 2 1) NaOH : ph ( ph ) 2) : Aluminum Sulfate 3) Kaoline : 4) :,,
124 84 19 / 42 Clarifier Line 1) Anthracite : 2) Sand : 3) Gravel :
125 85 Line 20 / 42 ( 30 ) Clarifier Clarifier 30 Clarifier ) Anthracite : 2) Sand : 3) Gravel :
126 86 (Activated Carbon Filter) 21 / 42 COD (, Cl 2 ) COD COD 25ppm COD 1ppm 01 05ppm 01ppm ppm
127 87 22 / ppm ppm 1 5 (Cl 2 ) 01ppm ppm (Fe) 01ppm ppm COD 20ppm ppm ABS 05ppm ppm 800ppm Clarifier, Sand Filter
128 88 (Ion Exchange Resin Demineralizer) 23 / 42 Tower( ) Bed( Bed( ) 2B2T(2Bed 2Tower) : + 2B3T(2Bed 3Tower) : + + MB(Mixed Bed) : ( + ) 2B2T + MBP : + + Mixed Bed Polisher 2B3T + MBP : Mixed Bed Polisher (Co-current Regeneration System) (Counter-current Regeneration System) - Water Block System - Packed Bed System - Layered Bed System
129 24 / 42 2B2T(2Bed 2Tower) : + M-Alkalinity(HCO 3- ), HCO 3- + CO 2 20ppm
130 25 / 42 2B3T(2Bed 3Tower) : + + M-Alkalinity(HCO 3- ), HCO 3- + CO 2 20ppm NaOH
131 26 / 42 MB(Mixed Bed) : ( + )
132 27 / 42 2B2T + MBP : + + Mixed Bed Polisher 2B3T + MBP : Mixed Bed Polisher 2B2T 2B3T Na + SiO 2 MBP
133 28 / 42 (Co-current Regeneration System)
134 29 / 42 (Counter-current Regeneration System)
135 30 / , 3 4,
136 31 / 42 (Suspended Solids) Clarifier, Sand Filter Activated Carbon Filter H 2 O Ca 2+ Mg 2+ HCO 3 Cl Na + SiO2 SO 4 2 WK40 ( ) ( ) WA30 SK1B ( ) ( ) SA10AP SA20AP SK110 ( ) ( ) PA312 PA412 MC-1 (, Packed Bed) (, Packed Bed) MA-1 MA-2 ( ) ( )
137 91, 32 / 42 R R CH 3 CH 3 CH 2 N+ OH- CH 2 N+ OH- CH 3 CH 3 CH 3 C 2 H 4 OH GRADE ( ) SiO 2 Leak SA10AP PA312 01ppm ppm OH OH Type Type Cl Cl Type Type SA20AP SA20AP PA412 PA412 02ppm 02ppm ppm OH OH Type Type Cl Cl Type Type 60 60
138 33 / 42 SiO 2 SK 1B SA SK 1B SA 200 SiO 2 ppb 100 SA10AP SA20AP SA20AP (/-R) SA10AP
139 92 2B3T2 B3T+MBP (1) 34 / 42 TDS 50ppm 50ppm SiO 2 % Organic loading 1g KMnO 4 /-Resin DIAION SA20AP Gel Type2 30% + TRILITE AW90LB 5g KMnO 4 /-Resin + Gel Type1 TRILITE KA18LB DIAION SA10AP or 1g KMnO 4 /-Resin Gel Type1 SA12A 30% 5g KMnO 4 /-Resin DIAION PA316 Porous Type1 1g KMnO 4 /-Resin DIAION SA20AP Gel Type2 30% + TRILITE AW90LB 5g KMnO 4 /-Resin + Gel Type1 TRILITE KA18LB 1g KMnO 4 /-Resin DIAION SA20AP Gel Type2 30% 5g KMnO 4 /-Resin DIAION PA416 Porous Type2
140 93 2B3T2 B3T+MBP (2) 35 / 42 Rate 2B2T 2B3T (Acid) Acid) Type2 DIAION SA20AP DIAION SA10AP or SA12A DIAION PA316 TRILITE AW90LB + TRILITE KA18LB (*) Better Good Good Good 15~40% TDS Good Good Better Better 5~20% TDS Good Excellent Excellent Better 5~20% TDS Excellent Excellent Better Better 5~15% TDS SiO 2 %
141 94 36 / 42 1) 2) Capacity 3) Life Time : mm : : mm : 111
142 101 (BACKWASH) 37 / 42 (UP FLOW) 50-80% 102 (REGENERATION) (UP FLOW),, 103 (EXPULSION)
143 104 (RINSE) 38 / (SERVICE) 106 (MIXING) -, 5
144 111, (Irreversible Swelling) 39 / 42 Styrene CH 2 CH CH 2 CH CH CH 2 Fe, Cl 2 SO 3 H SO 3 H ) : ), PSA Fe, Cl 2
145 / 42 2,, mechanism (Micropore) CaSO 4 MgSO 4 R-SO 3 Ca H 2 SO 4 R-SO 3 HCaSO 4 R-SO Mg H SO 3 2 R-SO 4 3 HMgSO 4
146 / 42 (, ACID Ex HCl,, H SO,) 2 4 (micropore) ( ) (, BASE Ex NaOH,, ) - - ( ) - (Ca 2+, Mg 2+ ) Ca(OH), Mg(OH) 2 2
147 / 42 CYCLE TIME, CH 3 N+ CH 2 Cycle TIME H N+ CH 2 OH- OH- CH 3 CH 3 CH 3 CH 3 SiO2
Electropure EDI OEM Presentation
Electro Deionization: EDI Systems. Electro Pure EDI, Inc.: High technology water tm www.cswaters.co.kr : EDI Electro Deionization 1. EDI Pure Water System? 2. EDI? 3. EDI? 4. EDI? 5. EDI? Slide 2 EDI 1.
제 1 장 정수처리 개요
() 1 2 3 4 5 6 1 1-1,... 1-2 (suspended solids),, (dissolved solids), (source) : (disolved solids) (suspended solid) [10-4 < d < 1] (source) [10-3
Elix 3 Elix 5 Elix 10 RiOs 3 RiOs 5 RiOs 8 RiOs 16!.. MILLIPORE
Elix 3 Elix 5 Elix 10 RiOs 3 RiOs 5 RiOs 8 RiOs 16!.. MILLIPORE ...1...1 1....2 1-1... 2 1-2... 2 1-3... 3 1-4... 3 1-5... 4 1-6... 4 1-7... 5 1-8... 5 1-9... 6 2....7 2-1... 7 2-2... 7 2-3 Cl2 tablet...
특허청구의 범위 청구항 1 도로, 주차장, 고가교량, 빌딩, 하폐수처리장의 배수부를 통해 유입되는 오염수를 수질정화시스템에 공급하는 오염수유입부와; 상기 오염수유입부에 연결되어 공급된 오염수 중에 함유된 비중 큰 토사류 및 고형물류와 입 자가 큰 협잡물, 각종 쓰레기
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