Copyright by InnoWater Ltd 2005 Tel : 031-382-7447
- - 1 Ultra Pure Water Technology 2 Activated Carbon Filter 3 Revese Osmosis(RO) System 4 Electro De-Ionized(EDI) System 5 UV System 6 Membrane De-gasifier(MDG) System 7 Ion Exchange Resin Copyright by InnoWater Ltd 2005 Tel : 031-382-7447
Ultra Pure Water Technology
10 1 Water 0915 0 1 Ice 10452º 4 (H +, OH - ) 10 2 3 4
2 21 (Qualitative) - Turbidity---- Candle Turbidimeter (for high turbid water), Nephelometer (low turbid water) Silt Density Index(SDI) test - ----------- - Color--------- (Samples ) - Odor --------- 22 (Quantitative) - ph------------ ph CO 2, (ph Meter) - TDS---------- Bacteria, Silica, Algae, Silt Contamination Index - Conductivity-- Ionic Contaminations(Conductivity Meter) - Bacteria----- ml (CFU; Colony Forming Units) - TOC--------- ( ) - BOD, COD--- (Organic material contamination in water specified in ppm )
23 Specific Impurities - Common Ions a) ---- Ca +2 Mg +2 (ppm) b) Fe +2 ---- 5%, c) Mn +2 --- Mn +2 d) Chlorides------ ( ) e) ------CO -2 3, HCO -, 3 OH - f) NO 3- ------------,, g) Chlorine(Cl 2 )------- THM(trihalogenated methane compounds), h) Silica(SiO 2 )--------- Ionic Silica(Remove by IER), Colloidal Silica(Remove by UF or Lime) i) Aluminum---------- alum j) Sodium(Na + )-------- Corrode Stainless steel, Naturally introduced due to the dissolution of salts - Dissolved Gases a) Carbon Dioxide(CO 2 )--- forms H 2 CO 3, reducing the ph and corrode in water lines b) Oxygen------------------- Only soluble to 13 ppm in water - Heavy Metal----------- Lead, Arsenic, Cadmium, Selenium, Chromium etc
Reference Raw Water Quality (mg/liter) Niagara ( CA) River Well Water (Ohio) TDS 34 165 434 130 Cations 837 518 1357 278 (Ca +2,Mg +2,Na + ) (4, 1, 2) (36, 81, 65) (92, 34, 82) (185, 42, 2) Anions 223 1541 4456 679 (HCO 3-, Cl - ) (183, 2) (119, 13) (339, 96) (327, 143) ph 7 7 7 7 Hardness 146 123 369 50 Alkalinity - - - 527 SiO 2 95 12 10 93 ImpurityTDS BacteriaImpurity DIW System
Raw Water Impurity TDS, Ca +2,Mg +2, Na +, Cl -, HCO 3 -,CO 2,O 2, Heavy Metal, Bacteria, TOC, Particle, Silica,H +,OH - Ca +2,Mg +2, Na +, Cl -, HCO 3 - CO 2,O 2, Heavy Metal, TOC, Silica,H +,OH -, Fine Particle 1 2 3 H +,OH - 1 2 2 2 3, 4, 5
Methods of Water Purifications 1 ( ) a) Screen Prefiltration b) Clarification( ) SS Floc 25micron, FeColor,, (100% ) c) Disinfection (02~05 ppm) d) ph Adjustment Scale 75 ~ 8 (CO -2 3, HCO 3-, OH - )CO 2 gas Ca 2+ +2HCO 3- CaCO 3 (s) + CO 2 (g) +H 2 O
2 2 a) Sand Filter(TRF) or Carbon Filter-------Service, Backwash and Rinse b) CO 2 gas --------- CO 2 + 2H 2 O H 2 O + HCO 3- + H + (HCl ) c) Micro Filter(01 ~100 ), Ultra Filter(1 ~100 nm ) d) (Deionization System) H +- <Cat(s)> + M + + X - M +- <Cat(s)> + H + + X - OH -+ <An(s)> + H + + X - X -+ <An(s)> + H 2 O e), 90 to 99%, 999% f) Ozone(O 3 ), Ultra Violet light 183nm (TOC ), 254nm ( )
31 DIW (De-Ionized Water) 3 DI Water 32 DI Water
Surface Contamination Device Failure Fine Particle Organic Compound Pattern Failure Junction Leak Bacterium Metallic Impurity Pause Time Failure(Memory) Image Defect
Relation of pure water quality and LSI integration Item Unit 256K 1M 4M 16M Remarks Resistivity M cm >175 >175 >18 >18 Particle pcs/ml <20 <50 <10 <30 <1 <10 () (02)(01) (02)(01) (02)(01) (01) Bacteria cfu/100 ml <10 <1 <05 <05 TOC ppm <100 <50 <30 <30 Silica ppm <10 <5 <3 <3 DO ppm <01 <01 <005 <005 Ion ppb <2 <1 <1 <01
4 Use Point of DI Water Pure Steam Generator FAB Equipment (Photo, Wet-Station,CMP Etch, T/F, Diff) PCW Make-up System DIW PLANT ADMIN Package(Sawing, Molding ) FAB (Device R m, QC LAB ) CCSS (Chemical ) Smock R m (Hand Washer )
51 Water Quality 5 DI Water Quality & Main Process Resistivity( ) / Particle ( ) TOC ( ) DO ( ) Silica( SiO 2 ) FAB DIW 182 251/ 3/ 005 < 05 ea/ml 05 ppb 1ppb 02 ppb PKG DIW 18 3/ 01< 1 - - - 52 Main Process System Make-Up Polishing Reclaim RCF, WA Pre Treatment Filter, DG, CF, UV, MF, RO, SB-P, KP Membrane De-Ox, TOC-UV, CP, UF
6 DI Water System Make-Up System Polishing System Reclaim System WWT FAB & Package Line
7 Unit
71 Pre Treatment Filter(Turbidity Removal Filter) Turbidity, Coagulant, Jar Test & Occlusion
Impurity Filter Media Surface Filtration, 1kg/cm 2 Filter (PAC) ph
711 Heat Exchanger Degasifier CO 2, RO 25 Polishing Chiller Heater
73 Degasifier( ) Scale CO 2 gas CO 2 gas CO 2 gas (Henry ) CO 2 gas DG Packing Ring CO 2 gas Air Blow HCO - 3 2 B3T System Anion Resin
Degasifier Packing Ring
72 Activated Carbon Filter( ) Impurity Media Depth Filter Media Layer Electronic Forces Ionic Forces Flow Velocity Media Cl 2, Color TOC
Adsorption Mechanism (Adsorption), (Absorption) (Sorption),,
74 Micro Filter (SS) Surface(Pleated) Depth Type 2 Nominal (due to Tortuous path) Type Absolute(due to Occlusion) Type
75 Ultra Violet Sterilizer UV polishing step bacteria TOC lampuv energy, 254 185 nm 254 nmuv energy non-chemical 185 nm energy TOC
Function of Ultra Violet Ray TOC Removal Sterilization Ozone Removal UV Ray DNA ( )
76 Reverse Osmosis Membrane System, ( 1 psi 100 ppmtds )
76 Reverse Osmosis Membrane Feed Tube Concentrated Water 20 cm, 150 cm 3 ~ 7 1 Housing CA PA PA CA ph salt passage Free Cl -
76 Reverse Osmosis Membrane System
76 Reverse Osmosis Membrane System
77 Ion Resin Exchanger System Function of Ion Exchange Resin ChainCross Link SAC, SBA, WAC, WBA4 non-ionic HCl, NaOH NaOH Silica 50
Selectivity of Ion Exchange Resin Mobile Ion Softening ( ) SAC Na + mobile ion
77 Ion Resin Exchanger System
78 Membrane Degasifier/Separel DeOxygen Membrane Polypropylene Hollow Fibers Operation Hollow Fibers Gas hollow fibers Fiber MembraneGas Counter flow Hollow Fiber
Mechanism of DeGasifier System Design Conditions Oxygen Nitrogen CO 2 Inlet(ppb) 8,000 14,158 505 Outlet(ppb) 1 1,313 0
79 Ultra Filter System ~ System Process, 001 (,,,,, ) System
UV Filter Mechanism poly sulfone 6,000, 16 m 3 /hr, 9 kg/cm 2, 90, 01
Activated Carbon Filter ( )
1 2 2-1, :,, 2-2 2-3,, 3 3-1 (Adsorbate), (Adsorbent), (Coverage) 3-2, 3-3 (10Kcal/mol ) ( ) (10 30Kcal/mol) ( ) ( )
3-4 3-5 3-6 3-7,,,,,,, ph,
4 2 1 [ 1] Macropore(r>1000 ) Mesopore(r=20 1000 ) Micropore(r<20 ) 500 1500/g Micro-, Meso-, Macro-Pore 20 Pore Micro-Pore, 20 1000 PoreMeso- Pore 1000 Macro-Pore 2 Macro-Pore 5 5-1 500,,, 5-2 800 1100
5-3 6 (Break Through Curve) Pilot-Scale, Full ScalePlant 2 3 Pilot Study Pilot Study, Column Test Simulation Break Through Curve 3 10A B,, ( )
[ 3] Co C 1 C/Co A B 0 Time
Reverse Osmosis System (RO System)
- ( 50) ( 02) - (Osmosis) - (Reverse Osmosis) InnoWater Ltd
1) (Purification) - 2) Diafiltration ( : Dialysis + Ultrafiltration) - 2 (: + + SaltSalt ) - UF 3) (Concentration) -, 100% 2, System InnoWater Ltd
1) (Water Flux), (Salt Rejection) 2) barrier 3) ph 4) 5) 6) 7), 8) InnoWater Ltd
1) 2) 3) (3> 2> 1 ) 4), : Mg +2 > Li + > Na + > K + : F - >Cl - > Br - > NO - 3 5) 6),,,, 7) > > InnoWater Ltd
1) a b,, Condensator, Evaporator Compact c scale-up, d Shock Loading 2) a, ph b, c d Fouling Cleaning InnoWater Ltd
- PA CA ph 2 ~ 12 4 ~ 6 (Kgf/cm 2 ) 15 30 (%) TDS 99+ 98 SiO 2 99+ 95 Flux Rejection 3 30% 100% 99% 987% 98% 96% OCl - ( ) () - CA( ) ph, PA( ) -PA CA ph, PA InnoWater Ltd
- type (1) Spiral wound - Module2 spacer roll cake - Module -Compact - 700 channel height1/10 InnoWater Ltd
- type (2) Hollow fiber - Closed-end design, pressure vessel - systemfiber Fiber 100ID, 150~200 OD -Fiber epoxy module, - Clean applicationrouf, UF moduleflow channelro module fouling InnoWater Ltd
- type (3) Plate and Frame - system type designconventional filter process - gasket seal leak - electrodialysis, pervaporation system small ultrafiltrationro system InnoWater Ltd
- type (4) Tubular - Good fluid hydrodynamicsfouling UF - module, scale - InnoWater Ltd
(1) (Parallel type) -System M Reject Permeate InnoWater Ltd
(2) (Series type) - brine M Reject Permeate InnoWater Ltd
(3) Christmas tree type - - booster pump Reject M Permeate InnoWater Ltd
(4) 1 - : 995% - 100 35,000~36,000ppm 500ppm - 1 M Reject Permeate InnoWater Ltd
(5) 2-1 3,000~4,500ppm 2 500ppm -1 2 90~95% 70~80 M Reject Permeate InnoWater Ltd
Electro De-Ionized System (EDI System)
EDI EDI,, InnoWater Ltd
EDI : : : : : InnoWater Ltd
Flow Schematic RO CDI UNIT FEED REVERSE OSMOSIS EDI UNIT PRODUCT EDI Concentrate Recycle
EDI (No chemicals) Stand-By System Maintenance Compact EDI : Continuously Stable Quality --------- MBD : Resin Bed InnoWater Ltd
EDI High Resistivity TOC SiO 2 InnoWater Ltd
EDI TFT- LCD,, Electric Coating Fine Chemical Boiler Make up () InnoWater Ltd
EDI System InnoWater Ltd
Pure Water System RAW RAW WATER WATER MULTI MEDIA FILTER CARBON FILTER SOFTENER 5 MICRO FILTER REVERSE OSMOSIS EDI UNIT UPW UPW TANK UF MB POLISHER ANION POLISHER UV- ST InnoWater Ltd
USP Purified Water System RAW RAW WATER WATER MMF CARBON FILTER SOFTENER 5 MICRO FILTER REVERSE OSMOSIS EDI UNIT UPW UPW TANK 02 POST FILTER UV- ST InnoWater Ltd
UV System
InnoWater Ltd 1 1), 19 1901 Hewitt lamp,, lamp 1930, 60, 70, lamp,,,,,,,, 2),, 510 6 m 32 10-14 m 380nm ( 10 1m) 760nm,, micro,, X, Gamma UV-A(, ), UV-B (vitamin, ), UV-C ( )
InnoWater Ltd Energy Energy,,,, (DNA), ( 2) DNA( ) lamp lamp 2537nm, 2537nm 90% ( 3)
InnoWater Ltd lamp, lamp, Lamp, gas,, Energy, Energy ( 4) 2 CLEAN (, ),,,, pool, SPEEDY SIMPLE simple ALLMIGHTY, ( 5)
InnoWater Ltd 3 1), ( (ws/) = (ws/) (s)) (1), ( 4) ` 1 (ws/) < (Gram )> Escherichia coli Shigella dysenteriae Pseudomonas aeruginosa < (Gram )> Bacillus subtilis Bacillus subtilis spores Streptococcus hemolyticus Staphylococcus aureus Staphylococcus albus < > Saccharomyces Sp Saccharomyces cerevisiae <Mold spore> Penicillium roqueforti Penicillium expansam Aspergillus niger Aspergillus flavus Rhizopus nigricans <Viruses> Influenza Polio Type Coxsachie A2 Adeno virus Type ( : 999%) 22000 5500 6600 5700 ( ) 17600 ( ) 13200 () () () () 6600 3400 10500 11000 26400 22000 330000 99000 220000 6600 6000 4800 4500
InnoWater Ltd 2), ( ), ( 5) Lambert -beers, log 10 I 0 / I = c1 c1 : I : : c : I / I 0 : 100%,,, ( ) lamp,, lamp control,
InnoWater Ltd 3),, 1pass,, use point 4 1), tube (flonfine type) tube (Trough), lamp (Trough type) ( 8), a) Flonfine type teflon tube, maintenance, lamp tube,,, maintenance Trough type b) lamp energy sterifine type,, level Open channel type flow unit
InnoWater Ltd,, ( ) lamp,,,,,, reynolds, Tracer (
InnoWater Ltd 7) 2) lamp lamp,,, (254nm) lamp lamp lamp, lamp, lamp, lamp lamp (Amalgam) control lamp ( 8) lamp, lamp ( ),,, lamp, lamp 70% ( 8000~8500 ) ( ) ( 9)
InnoWater Ltd 5 1), lamp on, off Lamp,, lamp lamp ( ) Lamp on/off,, lamp lamp, 70%,,, lamp, lamp 2,,, 2) lamp lamp, lamp lamp, 70% ( 8000~8500 )lamp
InnoWater Ltd 3) Sampling, check sampling,, 4),, check, check manual,, 5) Cleaning lamp teflon tube,,,,,, check, cleaning Cleaning,,,, 6 1), silicon wafer,, ion, leak,,, 2) line, in line 3),,
InnoWater Ltd,, 4),,,,,,,,, 5),,,,,,, ph,,,, 6),,,,, 7),,,,,,,
InnoWater Ltd 8) Cooling tower, air washer,, slime level slime 7 energy 1),,,,, 2),, lamp ppb order 3) Ozon ozon ozon 4),,,
Membrane De-Gasifier
DAINIPPON INK & CHEMICALS Hollow fiber membrane module for degassing from water SEPAREL EF-040P DAINIPPON INK AND CHEMICALS,INCORPORATED NEW BUSINESS PROMOTION DIV DAINIPPON INK & CHEMICALS
DAINIPPON INK & CHEMICALS What is degassing? To remove gases ( O 2, N 2 etc) that are dissolved in water so that the dissolved gases are reduced DEGASSING Regular water Degassed water Nitrogen molecule waterdegassing Oxygen molecule water DAINIPPON INK & CHEMICAL
DAINIPPON INK & CHEMICALS How to degas? Concentration of a gas dissolved in water is proportioned by partial pressure of a gas in adhering air ( Henry s law ) Therefore, if partial pressure is lowered, concentration of a gas is lowered ( = degassed ) High pressure air Low pressure air High dissolved gases concentration Low dissolved gases concentration DEGASSED WATER DAINIPPON INK & CHEMICALS
DAINIPPON INK & CHEMICALS Method of degassing [ 1 Vacuuming method ] [ 2 Sweeping N 2 method ] by decreasing air pressure by using N 2 gas To decrease pressure of air by using vacuum pump, etc Vacuuming Pump Exhausted air DECREASED PRESSURE Air permeation membrane Water By flowing N2 gas into air, O2 in water will be removed Effective only to remove O in Exhausted gas N 2 Gas Dissolved O2 PO 2 0 [ 3 Combination method ] Combination of 1 & 2 N 2 Gas Dissolved N2 MEMBRANE DEGASSING METHOD Membrane and vacuuming pump should be prepared for this method DAINIPPON INK & CHEMICALS
DAINIPPON INK & CHEMICALS Difference from MF membranes (1) A membrane can pass only air through not water DIC s degassing membrane Filtration membrane Direction of gas flow Direction of water Dissolved gas Water to be dealt Water Particle etc Degassing membrane MF Air (Low pressure) Dealt water (2) A vacuuming pump as well as a module should be prepared DAINIPPON INK & CHEMICALS
DAINIPPON INK & CHEMICALS Structure of DIC membrane Material : Poly 4- methylpenten- 1 (PMP) Manufacturing method : Melt spinning method Thickness of skin layer 1m 40m 215m DAINIPPON INK & CHEMICALS
DAINIPPON INK & CHEMICALS Characteristics of surface skin membrane Surface skin membrane Non porous membrane Porous membrane No liquid leaks Makes it easy for gases to permeate No liquid leaks It takes time for gases to permeate Liquid leaks Can not be used for liquids which contain solvents DAINIPPON INK & CHEMICALS
DAINIPPON INK & CHEMICALS Appearance of EF-040P DAINIPPON INK & CHEMICALS
DAINIPPON INK & CHEMICALS Cross section of SEPAREL EF-040P Water Inlet port Vacuuming port Hollow fiber membranes (or N2 inlet) Water Inlet port Water distribution pipe (A pipe with many holes ) Textile shaped membranes rolled on a water distribution pipe Vacuuming port (or N2 inlet) DAINIPPON INK & CHEMICALS
DAINIPPON INK & CHEMICALS Characteristic of EF-040P Single pass cross flow & External flow Structure Dealt water Inlet water Removed O2, N2 gas To Vacuuming pump Water runs outside of membranes (EXTERNAL FLOW) Exhausted gases Removed O2, N2 gases DAINIPPON INK & CHEMICALS
DAINIPPON INK & CHEMICALS Chart of degassing test at DIC DO meter flow meter flow meter pure water tank ( air bubbling ) differencial pressure meter DO meter pump regulator pre filter flow meter SEPAREL EF-040P drain vacuuming pump DAINIPPON INK & CHEMICALS
DAINIPPON INK & CHEMICALS Combination mode ( vacuuming pump + Sweeping N 2 gas ) Parallel flow Series flow Inlet water Inlet water N 2 gas N 2 gas N 2 gas N 2 gas Vacuuming pump Vacuuming pump Vacuuming pump Vacuuming pump DAINIPPON INK & CHEMICALS
Ion Exchange Resin
1 11 1 / 42 (Ion exchange Reaction) : (Ion exchanger) : (Zeolite) (Ion exchange Resin) :,, 1935, PhenolFormaldehyde 1940 Styrene 1946 Mitsubishi Chemical 1976 Mitsubishi Chemical 1985
(8%) (5%) (2%) 2 / 42 2003 : 300 300 : 1,100 1,100 (20%) (25%) (40%) 1% 1% 3% 19% 2% 7% 10% 57%
31 3 / 42 STM(Styrene Monomer) CH CH 2 DVB(Divinyl Divinyl Benzene) CH CH 2 Polymer (R) CH CH 2 (R-SO SO 3 ) -SO 3 32 (Reversible Reaction) Target Ion -Target Ion (ex) R-SOR 3 HNa R-SO 3 Na H -Target Ion Target Ion (ex) R-SOR 3 Na H R-SO 3 HNa Na 1
41 4 / 42 :, Chemical Chemical, STM STM STM STM DVB DVB ( ( ) ) ( ( ) ) ( ( ) ) 42 (DVB%) DVB%) DVB (DVB%) 100 STM DVB Leak
5 / 42
43 (Specific Gravity) : 6 / 42 44 (Shipping Density) : 45 (Moisture Retention) ) :, 46 (Exchange Capacity) (ex) meq/ -R, g as CaCO 3 /-R NaOH NaOH NaOH H Na H Na H Na H Na H 2 O H 2 O H 2 ONaOH NaOH NaOH (Breakthrough Point)
(Regeneration Level) () (g) 1 (100% (100% ) (ex) 1,000 35% HCl 143 LEVEL 143 HCl 035% 1,000(g/ 1,000(g/) / 1,000 -Resin 50g HCl/ -R 7 / 42 12 10 08 (meq/- R) 06 04 02 25 50 75 100 LEVEL (g-hcl/- Resin) 73g-HCl/ HCl/-Resin(20eq HCl/ -Resin) Resin) 20eq // - Resin 10eq // -Resin ( ) (Regeneration Efficiency), Cost
47 (Effective Size) - 90% 8 / 42 48 (Uniformity Coefficient) - ex) : 16 16 L-type : 14 14 : 11 11 49 (Particle Size Distribution) - ex) : 03~12mm L-type : 0425~12mm XL-type type : 07(08)~12mm : 005 005mm
410 (Operating Temperature) - 400 120, 40~80 411 ph (Operating ph Range) 9 / 42 -, ph ph,, ph 412 (Swelling) H Na Ca Ba (DIAION SK1B )
51 Gel, Macroporous Type 10 / 42 Gel Type Macroporous Macroporous Type Type Macro Pore 10 1000 Micro Pore 0 100 Micropore Micropore MicroporeMacropore Macropore
52, (SK PK, WK) 11 / 42 GRADE SK1B, SK104 PK216, PK228 WK40 WK40 ( ) ph R-SO 3 H 11414 R-COOH R-COOH 5 514 14 14 - SK(Strong Cation), PK(Porous Cation), WK(Weak Cation) -, ph ph 1 -, ph 1 Silica SilicaLeakage
53, (SA PA, WA) 12 / 42 GRADE SA10AP, SA20AP PA312, PA412 WA30 WA30 ( ) ph SiO SiO 2 2 R-N OH 11414 R-NH R-NH 3 OH 3 OH 0 09 9 - SA(Strong Anion), PA(Porous Anion), WA(Weak Anion)
13 / 42 MECHANISM R- SO 3 H + Na + R-SO 3 Na + H + R- SO 3 Na + HCl R-SO 3 H + Na + + Cl 2R- SO 3 H + Ca 2+ (R (R-SO 3 ) 2 Ca + 2H + Cl (R-SO 3 ) 2 Ca + 2HCl 2R 2R- SO 3 H + Ca 2+ + 2Cl R-NOH + Cl Cl R-NCl + OH R-NCl + NaOH R-NOH + Na + + Cl Cl 2R-NOH + SO 2 4 (R (R-N) 2 SO 4 + 2OH (R-N) 2 SO 4 + 2NaOH 2R 2R-NOH + 2Na + + SO 2 4 Ca 2+ Mg 2+ Na + H + SO 4 2 Cl HCO 3 SiO 2 OH
71 CATION TOWER (Counter-current) Ca 2+ HCO 3 Mg 2+ Na + H 2 O ( ) SiO 2 Cl- SO 4 2-14 / 42 Ca 2+ Ca 2+ Mg 2+ Na + Ca 2+ Na + Mg 2+ Ca 2+ Mg 2+ Na + H + H + Mg 2+ H + Na + H + HCl H + H 2 O HCO 3 Cl - SO 4 2- SiO 2
72 ANION TOWER (Counter-current) H + H 2 O HCO 3 Cl - SO 4 2- SiO 2 15 / 42 Cl SO 4 2 SO 2 4 Cl HCO 3 SiO 2 SO 4 2 Cl HCO 3 SO 4 2 HCO 3 SiO 2 Cl SiO 2 OH HCO 3 OH OH SiO 2 OH NaOH H 2 O H + OH -
81 Scale Carryover, ph Scale (Suspended Solids) H 2 O HCO 3 Ca 2+ Mg 2+ Cl Na + SiO 2, Scale Turbine SO 2 4 16 / 42
82 Process 17 / 42 (Clarifier) 20 10 1 1 1 (Cl 2 ) 01 05ppm (Cl 2 ) 01 05ppm (Cl 2 ) 01ppm (Cl 2 ) 01ppm (Cl 2 ) 01ppm COD 25ppm COD 25ppm COD 1ppm COD 1ppm COD 1ppm H H OH - CO 2, HCO 3 - CO 2, HCO 3 - CO 2, HCO 3 - CO 2, HCO 3 - SiO 2 SiO 2 SiO 2 SiO 2 -
83 (Clarifier) 18 / 42 (Raw Water) ( ), Flock 20 100 100 5 10 Al 2 (SO 4 ) 3 + 3Ca(HCO 3 ) 2 3Mg(HCO 3 ) 2 2Al(OH) 3 + 6NaHCO 3 Flock HCO 3- Al(OH) Al(OH) 3 3CaSO 4 3MgSO 4 3Na 2 SO 4 Flock + 6CO 2 1) NaOH : ph ( ph ) 2) : Aluminum Sulfate 3) Kaoline : 4) :,,
84 19 / 42 Clarifier 12 20 12 1 Line 1) Anthracite : 2) Sand : 3) Gravel :
85 Line 20 / 42 ( 30 ) Clarifier Clarifier 30 Clarifier 15 15 30 1 2 1) Anthracite : 2) Sand : 3) Gravel :
86 (Activated Carbon Filter) 21 / 42 COD (, Cl 2 ) COD COD 25ppm COD 1ppm 01 05ppm 01ppm ppm
87 22 / 42 800ppm ppm 1 5 (Cl 2 ) 01ppm ppm (Fe) 01ppm ppm COD 20ppm ppm ABS 05ppm ppm 800ppm Clarifier, Sand Filter
88 (Ion Exchange Resin Demineralizer) 23 / 42 Tower( ) Bed( Bed( ) 2B2T(2Bed 2Tower) : + 2B3T(2Bed 3Tower) : + + MB(Mixed Bed) : ( + ) 2B2T + MBP : + + Mixed Bed Polisher 2B3T + MBP : + + + Mixed Bed Polisher (Co-current Regeneration System) (Counter-current Regeneration System) - Water Block System - Packed Bed System - Layered Bed System
24 / 42 2B2T(2Bed 2Tower) : + M-Alkalinity(HCO 3- ), HCO 3- + CO 2 20ppm
25 / 42 2B3T(2Bed 3Tower) : + + M-Alkalinity(HCO 3- ), HCO 3- + CO 2 20ppm NaOH
26 / 42 MB(Mixed Bed) : ( + )
27 / 42 2B2T + MBP : + + Mixed Bed Polisher 2B3T + MBP : + + + Mixed Bed Polisher 2B2T 2B3T Na + SiO 2 MBP
28 / 42 (Co-current Regeneration System)
29 / 42 (Counter-current Regeneration System)
30 / 42 1 2, 3 4,
31 / 42 (Suspended Solids) Clarifier, Sand Filter Activated Carbon Filter H 2 O Ca 2+ Mg 2+ HCO 3 Cl Na + SiO2 SO 4 2 WK40 ( ) ( ) WA30 SK1B ( ) ( ) SA10AP SA20AP SK110 ( ) ( ) PA312 PA412 MC-1 (, Packed Bed) (, Packed Bed) MA-1 MA-2 ( ) ( )
91, 32 / 42 R R CH 3 CH 3 CH 2 N+ OH- CH 2 N+ OH- CH 3 CH 3 CH 3 C 2 H 4 OH GRADE ( ) SiO 2 Leak SA10AP PA312 01ppm ppm OH OH Type Type 60 60 Cl Cl Type Type 80 80 SA20AP SA20AP PA412 PA412 02ppm 02ppm ppm OH OH Type Type 40 40 Cl Cl Type Type 60 60
33 / 42 SiO 2 SK 1B SA SK 1B SA 200 SiO 2 ppb 100 SA10AP SA20AP SA20AP 0 20 40 60 80 (/-R) SA10AP
92 2B3T2 B3T+MBP (1) 34 / 42 TDS 50ppm 50ppm SiO 2 % Organic loading 1g KMnO 4 /-Resin DIAION SA20AP Gel Type2 30% + TRILITE AW90LB 5g KMnO 4 /-Resin + Gel Type1 TRILITE KA18LB DIAION SA10AP or 1g KMnO 4 /-Resin Gel Type1 SA12A 30% 5g KMnO 4 /-Resin DIAION PA316 Porous Type1 1g KMnO 4 /-Resin DIAION SA20AP Gel Type2 30% + TRILITE AW90LB 5g KMnO 4 /-Resin + Gel Type1 TRILITE KA18LB 1g KMnO 4 /-Resin DIAION SA20AP Gel Type2 30% 5g KMnO 4 /-Resin DIAION PA416 Porous Type2
93 2B3T2 B3T+MBP (2) 35 / 42 Rate 2B2T 2B3T (Acid) Acid) Type2 DIAION SA20AP DIAION SA10AP or SA12A DIAION PA316 TRILITE AW90LB + TRILITE KA18LB (*) Better Good Good Good 15~40% TDS Good Good Better Better 5~20% TDS Good Excellent Excellent Better 5~20% TDS Excellent Excellent Better Better 5~15% TDS SiO 2 %
94 36 / 42 1) 2) Capacity 3) Life Time : 05 005mm : 105 1 : 08 12 12mm : 111
101 (BACKWASH) 37 / 42 (UP FLOW) 50-80% 102 (REGENERATION) (UP FLOW),, 103 (EXPULSION)
104 (RINSE) 38 / 42 105 (SERVICE) 106 (MIXING) -, 5
111, (Irreversible Swelling) 39 / 42 Styrene 100 120 CH 2 CH CH 2 CH CH CH 2 Fe, Cl 2 SO 3 H SO 3 H ) : ), PSA Fe, Cl 2
112 40 / 42 2,, 33 22 3 33 mechanism (Micropore) CaSO 4 MgSO 4 R-SO 3 Ca H 2 SO 4 R-SO 3 HCaSO 4 R-SO Mg H SO 3 2 R-SO 4 3 HMgSO 4
113 41 / 42 (, ACID Ex HCl,, H SO,) 2 4 (micropore) ( ) (, BASE Ex NaOH,, ) - - ( ) - (Ca 2+, Mg 2+ ) Ca(OH), Mg(OH) 2 2
114 42 / 42 CYCLE TIME, CH 3 N+ CH 2 Cycle TIME H N+ CH 2 OH- OH- CH 3 CH 3 CH 3 CH 3 SiO2