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F.R.L. New 50% MPa 0.3 New R20-02- New R20-02- New RoHS R20-02 0.5MPa 0.3MPa 500L/minNR R20-02 500 L/minNR F, W 46% F- F- F mm 75mm 35mm 2 360 C Series CT.KS-56

C Series 360 W0 W0- F FM 90g W FD W 360g F- F 450g F- F L R W R W 50% MPa 0.3 New R20-02- New R20-02- R20-02 q R20-02 w 500 L/minNR 0.5MPa 0.3MPa 500L/minNR F, R, L, W New R-, F-, L-, W- 1

F.R.L. C Series 1/4 3/8 1/2 INDEX ++ F R L C20- C25- C- P.1 C- C-06- + C20- W L C- P.7 C- C-06- + C20- F R C25- C- P.11 C- C-06- ++ F FM R C20C- C25C- CC- CC- CC-06- P.15 + W FM C20D- CD- CD- CD-06- P.19 1

C Series 1/4 3/8 1/2 INDEX FF20- F- P.28 F- F-06- FMFM20- FM- P.28 FM- FM-06- FDFD20- FD- P.28 FD- FD-06- R R20- R25- R- P.44 R-06- R- 2

1/4 3/8 1/2 L F.R.L. C Series INDEX L20- L- L- L-06- P.52 W W20- W- P.58 W- W-06-3

C Series P.22 P.23 C0- C0-06 C0- C0- C0- C0C- C0D-T P.23 3 P.24 T T 3 3 C0- C0- C0C- C0- C0- C0- C0C- C0D- 4 P.24 P.25

F.R.L. C Series P.25 P.26 2 Uni 1/2 2 E310-U02 Y0T- F- 5

C20-C- C q 03 e D r t y w am1 )C-F03DM-KSTV-13NR- q 20 25 Rc NPT N F w 1/4 3/8 1/2 01 02 03 04 06 e r 1) C 2) D 3) a N.C.(Normal Closed) N.O.(Normal Open) M 4) b () () 5) K t c FRKL S 6) d FRSL T 6) T e FTRL V 3 f FRLV 1 7) y g 0.050.7MPa 0.020.2MPa C h L 2 1 1

C20-C- Series C20- C- y 20 25 i 8) 1/4 W j 3 9) k N l R, (ø6ø4 ) m Z 10) 1), M 2) 3) (0.75kW, 100L/min[NR] ) N.C. 4) (0.7MPa )1.0MPa, 0.2MPa 0.4MPa MPa psi, F 5) 06 6) T 7) 8) 9) W 11) 11) q 11) 11) 10) M5, NPT SI MPapsi M 11) NPT / (kg) C20- C25- C- C- C-06- F20- R20- L20- F- R25- L- F- R- L- F- R- L- F-06- R-06- L-06-1/4 1/43/8 1/43/8 1/43/81/2 560 () 1.5MPa 1.0MPa 0.050.7MPa 5μm 1(ISO V32) () () 0.39 0.67 0.82 1.26 1.43 2

C20-C- Series ) 0.7MPa C20- Rc 1/4 C25- Rc 3/8 C- Rc 3/8 0.6 0.5 0.6 0.5 0.6 0.5 MPa 0.4 0.3 0.2 MPa 0.4 0.3 0.2 MPa 0.4 0.3 0.2 0.1 0.1 0.1 0 0 200 0 600 800 0 0 500 1000 1500 0 0 500 1000 1500 L/min(NR) L/min(NR) L/min(NR) C- Rc 1/2 C-06- Rc 0.6 0.5 0.6 0.5 MPa 0.4 0.3 0.2 MPa 0.4 0.3 0.2 0.1 0.1 0 0 1000 2000 00 0 0 1000 2000 00 00 L/min(NR) L/min(NR) ) C20-0.3 C25-0.3 0.7MPa0.2MPa20L/min(NR) C- 0.3 MPa 0.25 0.2 0.15 MPa 0.25 0.2 0.15 MPa 0.25 0.2 0.15 0.1 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 1.1 MPa 0.1 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 1.1 MPa 0.1 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 1.1 MPa C-/C-06-0.3 MPa 0.25 0.2 0.15 0.1 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 1.1 MPa 3

C20-C- Series., F.R.L. SMC.. http://www.smckorea.co.kr q q 5μm q,,, Lock,.. qt (KM w3 e Lock 4

T0604 17 1/4 M50.8 14 /Rc,ø10 /NPTø3/8" N.C. N.O. U S R OUT IN U S R N F C IN OUT P2 ( ) () M V Q2 Q1 Q1 2P1 () N F C P2 ( ) E V Q1 Q1 M () 2P1 () H H C20- C25-C- H ø37.5 ø37.5 ø37.5 ø42.5 ø42.5 58.5 58.5 65 72 72 H ø37.5 ø37.5 ø37.5 ø42.5 ø42.5 59.5 59.5 66 72 72 104.9 156.8 156.8 186.9 188.9 123.6 123.6 155.6 157.6 91.4 121.9 121.9 153.9 155.9 () C20- C25- C- C- C-06- P1 P2 1/4 1/43/8 1/43/8 1/43/81/2 126.4 167.4 167.4 220.4 235.4 87.6 115.1 115.1 147.1 149.1 C 35.9 38.1 38.1 39.8 37.8 E 38.4 38.4 F 77.6 60 80 80 110 110 23.4.5.5 36.1 39.6 M 41 41 50 50 N 80.2 Q1 24 35 35 Q2 33 R 5.5 7 7 9 9 S 12 14 14 18 18 U 3.5 4 4 5 5 V 29 41 41 48 48 C20- C25- C- C- C-06- (N.O./N.C.) N.C.) C20- C25-C- 5 C20-C- Series

6

C20-C- 1 2 L C 03 D q w e r t y al1 )C-F03DM-KSV-13NR- q 20 w e r t y 1) WLVa b c d e f g h 4) 3 7) N F 01 02 03 04 06 C 2) D 3) M K S 6) V 1 C 8) W Rc NPT 1/4 3/8 1/2 N.C.(Normal Closed) N.O.(Normal Open) () () WKL WSL 0.050.7MPa 0.020.2MPa 1/4 (ø6ø4 ) 5) 7

C20-C- Series C20- C- y psi, Fi j k l 3 9) N R MPa Z 10) 1), M 2) 3) (0.75kW, 100L/min[NR] ) N.C. 4) (0.7MPa )1.0MPa, 0.2MPa 0.4MPa 5) 06 6) 7) 8) 9) W q 20 11) 11) 11) 10) M5, NPT SI MPapsi M 11) NPT / (kg) C20- W20- L20-1/4 () 0.33 C- C- C-06- W- W- W-06- L- L- L-06-1/43/8 1/43/81/2 560 () 1.5MPa 1.0MPa 0.050.7MPa 5μm 1(ISO V32) () 0.66 1.22 1.34 8

U R S U S R OUT IN F P2 ( ) C IN OUT () M 2P1 () V Q2 Q1 Q1 H C F P2 ( ) () M V Q1 Q1 2P1 () E H 17 1/4 M50.8 14 /Rc,ø10 /NPTø3/8" N.C. N.O. T0604 C20- C-, C- )CUnlock (N.O./N.C.) N.C.) C20- C-, C- H ø37.5 ø37.5 ø42.5 ø42.5 58.5 65 72 72 H ø37.5 ø37.5 ø42.5 ø42.5 59.5 66 72 72 104.9 156.8 186.9 188.9 123.6 155.6 157.6 91.4 121.9 153.9 155.9 () C20- C- C- C-06- P1 P2 1/4 1/43/8 1/43/81/2 83.2 110.2 145.2 155.2 87.6 115.1 147.1 149.1 C ) 67.4 83.5 100 101.5 E 38.4 38.4 F 77.6 60 80 110 110 23.4.5 36.1 39.6 M 41 50 50 Q1 24 35 Q2 33 R 5.5 7 9 9 S 12 14 18 18 U 3.5 4 5 5 V 29 41 48 48 C20- C- C- C-06-9 C20-C- Series

10

C20-C- aj1 )C-F03DM-SV-1NR- q Rc NPT N F C 2) D 3) w 1/4 3/8 1/2 01 02 03 04 06 e r 1) a N.C.(Normal Closed) N.O.(Normal Open) M 4) b () () 20 25 S 5) T 5) T t c FSR FTR V V1 6) 3 d FRV VFR 1 7) y e 0.050.7MPa 0.020.2MPa 8) W g 1/4 (ø6ø4 ) C f C q 03 e D r t y w L 2 1 11

C20-C- Series C20- C- y i R 20 25 h N j MPa 10) 10) 10) psi, F Z 9) 1), M 2) 3) (0.75kW, 100L/min[NR] ) N.C. 4) (0.7MPa )1.0MPa, 0.2MPa 0.4MPa 5) T 6 7 8 q 10) 9M5, NPT SI MPapsi M 10) NPT / (kg) C20- F20- R20-1/4 () 0.27 C25- C- C- C-06- F- F- F- F-06- R25- R- R- R-06-1/43/8 1/43/8 1/43/81/2 560 () 1.5MPa 1.0MPa 0.050.7MPa 5μm () 0.42 0.57 0.79 0.90 12

17 1/4 M50.8 14 /Rc,ø10 /NPTø3/8" N.C. N.O. U R S OUT IN H U R S OUT F C P2 ( ) Q2 V Q1 Q1 M () 2P1 () F C P2 ( ) V Q1 Q1 M () 2P1 () E H IN T0604 C20- C25-C- (N.O./N.C.) (N.C.) C20- C25-C- H ø37.5 ø37.5 ø37.5 ø42.5 ø42.5 58.5 58.5 65 72 72 H ø37.5 ø37.5 ø37.5 ø42.5 ø42.5 59.5 59.5 66 72 72 104.9 156.8 156.8 186.9 188.9 123.6 123.6 155.6 157.6 91.4 121.9 121.9 153.9 155.9 () C20- C25- C- C- C-06- P1 P2 1/4 1/43/8 1/43/8 1/43/81/2 83.2 110.2 110.2 145.2 155.2 87.6 115.1 115.1 147.1 149.1 C 23.5 23.5 27 33.5 33.5 E 38.4 38.4 F 77.6 25 35 35 23.4.5.5 36.1 39.6 M 41 41 50 50 Q1 24 35 35 Q2 33 R 5.5 7 7 9 9 S 12 14 14 18 18 U 3.5 4 4 5 5 V 29 41 41 48 48 C20- C25- C- C- C-06-13 C20-C- Series

14

w e r t aj1 )CC-F03DM-SV-1NR- C20C-CC- Rc NPT N F M C 2) D 3) 01 02 03 04 06 S 5) T 5) T 1/4 3/8 1/2 N.C.(Normal Closed) N.O.(Normal Open) () ()1) b a c V V1 6) 3 d 25 20 q FFMSR FFMTR FFMRV VFFMR y C 1 N 7) 8) W 1/4 (ø6ø4 ) f e h 0.050.7MPa 0.020.2MPa g C C q 03 e D r t y w L L 2 1 4) 15

C20C-CC- Series C20C- CC- 20 q 25 y i j R Z 9) 1), M 2) 3)(0.75kW, 100L/min[NR] ) N.C. MPa psi, F 4) (0.7MPa )1.0MPa, 0.2MPa 0.4MPa 5) T 6) 7 8 10) 10) 10) 10) 9) M5, NPT SI MPapsi M 10) NPT L/min(NR) 1) / (kg) C20C- F20- FM20- R20-1/4 200 () 0.38 C25C- F- FM- R25-1/43/8 560 () 1.5MPa 1.0MPa 0.05MPa 0.050.7MPa F5μm, FM0.3μm(99.9) MX1.0mg/m 3 (NR)(0.8ppm) 2)3) 450 0.67 1) 0.7MPa. 2) mg/m 3 (NR) 3) O-ring O-ring CC- F- FM- R- 1/43/8 450 () 0.82 CC- F- FM- R- 1/43/81/2 1100 1.26 CC-06- F-06- FM-06- R-06-1100 1.42 16

1/4 M50.8 /Rc,ø10 /NPTø3/8" U R S OUT U S R OUT IN N F IN C V Q2 Q1 Q1 M 2P1 P2 ( ) () N F P2 ( ) M V Q1 Q1 H E 2P1 C () H C20C- C25C-CC-06- C20C- C25C-CC-06- H ø37.5 ø37.5 ø37.5 ø42.5 ø42.5 58.5 58.5 65 72 72 H ø37.5 ø37.5 ø37.5 ø42.5 ø42.5 59.5 59.5 66 72 72 104.9 156.8 156.8 186.9 188.9 123.6 123.6 155.6 157.6 91.4 121.9 121.9 153.9 155.9 () C20C- C25C- CC- CC- CC-06- P1 P2 1/4 1/43/8 1/43/8 1/43/81/2 126.4 167.4 167.4 220.4 235.4 87.6 115.1 115.1 147.1 149.1 C 23.5 23.5 27 33.5 33.5 E 38.4 38.4 F 77.6 50 50 75 75 23.4.5.5 36.1 39.6 M 41 41 50 50 N 80.2 Q1 24 35 35 Q2 33 R 5.5 7 7 9 9 S 12 14 14 18 18 U 3.5 4 4 5 5 V 29 41 41 48 48 C20C- C25C- CC- CC- CC-06- T0604 17 14 N.C. N.O. N.C.) (N.O./N.C.) 17 C20C-CC- Series

18

C20D-CD- 1 2 L L C D 03 D q w e r t y aj1 )CD-F03DM-SV-1NR- 20 q w e r t y 1) 3a b c d e f g h i 4) 7) N F 01 02 03 04 06 C 2) D 3) M S 5) V V1 6) 1 C 8) W N R Rc NPT 1/4 3/8 1/2 N.C.(Normal Closed) N.O.(Normal Open) () () WSFM WFMV VWFM 0.050.7MPa 0.020.2MPa 1/4, (ø6ø4 ) 19

C20D-CD- Series y C20D- CD-j Z 9 1, M 2) 3(0.75kW, 100L/min[NR] ) N.C. MPa psi, F 4(0.7MPa )1.0MPa, 0.2MPa 0.4MPa 5 6 7 8 20 10 q 10 10 9NPT SI MPapsi M 10) NPT L/minNR 1 / (kg) C20D- W20- FM20-1/4 150 () 0.32 CD- W- FM- 1/43/8 1) 0.5MPa. 2) mg/m 3 (NR) 3) O-ring O-ring 560 () 1.5MPa 1.0MPa 0.05MPa 0.050.7MPa W5μm, FM0.3μm99.9 3 MX1.0mg/m 3 NR0.8ppm 23 0.65 CD- W- FM- 1/43/81/2 800 () 1.22 CD-06- W-06- FM-06-800 1.34 20

17 1/4 M50.8 14 /Rc,ø10 /NPTø3/8" N.C. N.O. U S R OUT U S R OUT IN F C IN P2 ( ) () M 2P1 () V Q2 Q1 Q1 H F C M V Q1 Q1 () P2 ( ) H 2P1 () E T0604 C20D- CD-CD-06- )CUnlock (N.O./N.C.) (N.C.) C20D- CD-CD-06- H ø37.5 ø37.5 ø42.5 ø42.5 58.5 65 72 72 H ø37.5 ø37.5 ø42.5 ø42.5 59.5 66 72 72 104.9 156.8 186.9 188.9 123.6 155.6 157.6 91.4 121.9 153.9 155.9 () C20D- CD- CD- CD-06- P1 P2 1/4 1/43/8 1/43/81/2 83.2 110.2 145.2 155.2 87.6 115.1 147.1 149.1 C ) 67.4 83.5 100 101.5 E 38.4 38.4 F 77.6 50 75 75 23.4.5 36.1 39.6 M 41 50 50 Q1 24 35 Q2 33 R 5.5 7 9 9 S 12 14 18 18 U 3.5 4 5 5 V 29 41 48 48 C20D- CD- CD- CD-06-21 C20D-CD- Series

C Series 3) 0.020.2MPa 1) ( ) 0.020.2MPa 2)3) T 2)3) 3 3) C20- C20- C20- C20C- C20D- Y200- Y200T- KM2000-01- (02)- IS10M-20- Y210-01- (02)- VHS20-01 02 01- E200-02- 03-01- IS10E-2002-03- Y24-01- 02- C25- C25- C25C- 36-10-01 36-4-01 36-10-01-L 36-4-01-L Y0- Y0T- KM00-(01)- 02- IS10M-- Y310-(01)- 02- VHS-02 03 1). R, NPT N. NPT psi 2) ( ). 3). 02 E0-03- 04 02- IS10E-03-04- Y34-01- 02- C- C- C- CC- CD- C- C- C- CC- CD- Y0- Y0T- KM00-(02)- 03- IS10M-- Y410-(02)- 03-02 VHS-03 04 02- E0-03- 04-06- 02- IS10E-03-04- 06- Y44-02- 03-46-10-01 46-4-01 46-10-01-L 46-4-01-L C-06- C-06- C-06- CC-06- CD-06- Y500- Y500T- IS10M-50- Y510-(02)- 03- VHS-06 E500-06- Y54-03- 04- (K)1/43/8 KM w e 00 01 q N F 01 02 03 Rc NPT 1/4 3/8 20 (mm 2 ) KM2000-28 KM00-55 KM00-111 L w q e IN D C E OUT C D E KM2000- KM00- KM00-1/4 1/4 1/43/8 53 70 28 34 42 11 14 18 48 54 11 13 15 C20-, C20- C25- C-, C- C-, C- ) )C-06- C. 22

C Series (S) IS10M (OFF) C, DC q w ac1 )IS10M--6LP w ba 6 1) L Z 560 () 1.0MPa 0.7MPa 0.10.4MPa 0.08MPa 1a C2VDC2W 100V CDC12V24V50m CDC48Vm CDC100V20m ) IS10 T(T)1/43/8 0.10.4MPa 0.10.6MPa 0.5m 3m 5m c MPa P 2) MPapsi 1)6P(L,Z)0.20.6MPa(90psi) 2) 20 50 q IS10M-20- IS10M-- IS10M-- IS10M-50-10.6 12.6 14.6 16.6 60 74.2 84.5 93.3 97.3 15 C 64.4 70.5 75.3 77.3 D 28 36 44 C ) 23 D 500 F.R.L. C20- C25-, C- C- C-06- T E T C D F.R.L. KM. ) Y210-01- Y310-01- Y410-02- Y510-02- 1/4 1/4 Y210-02- Y310-02- Y410-03- Y510-03- 1/4 1/4 3/8 3/8 14.6 14.6 18.6 18.6 41.8 52.7 62 66 C20-, C20- C20C- C25-, C25- C25C-, C- C-, CC- C-, C- CC- C-06-, C-06- CC-06- ). Rc, NPT N, F.. C P.22. C 32 38.7 44 46 D 28 36 44 E 19 19 24 24 23

2 C Series (V) 3. VHS 03 q w e r ab1. )VHS-03-RZ INOUT IN, OUT EXH C(dm 3 /sbar) b Cv C(dm 3 /sbar) VHS20 VHS 2.4 0.43 0.65 2.5 1/4 3.3 0. 0.88 3.1 1/4 6.4 0.45 1.7 6.2 1/4 3/8 8.3 0.41 2.3 7.0 VHS VHS-06 1/4 3/8 1/2 3/8 1/2 7.3 10.9 14.2 18.3 0.49 0.45 0.39 0.31 2.0 3.0 3.8 5.0 8.5 11.6 13.3 17.7 20 w Rc N ) NPT F ) 01 e 02 1/4 03 3/8 04 1/2 06 a R r b MPa Z ) psi NPTSI OUTEXH b 0.39 0.51 0.38 0.41 0.35 0. 0.43 0.37 q Cv 0.69 0.84 1.7 1.9 2.3 3.1 3.6 4.8 2 IN 3 1 VHS20 VHS VHS VHS-06 SUP. øi 3 1 E D C SUP 3 EXH. ø10 EXH H F Key OUT 3 2 2P1 () P2 () P1 P2 C D E F H I 1/4 1/43/8 1/43/81/2 1/4 3/8 1/2 66.4 80.3 104.9 110.4 22.25 29.4 38.5 42 53 70 75 37.5 49 63 63 14 19 22 22 46.6 52 58 58 33.6 38 44 44 28 36 44 37.5 49 63 63 1/43/81/2 C F F.R.L. F E E E E4Rc F E D 1. KM C ) Y24-01- Y24-02- Y34-01- Y34-02- Y44-02- Y44-03- Y54-03- Y54-04- 1/4 1/4 1/4 3/8 3/8 1/2 49 60 72 43 48 62 C 22 28 36 D 48 54 62 C20- C25-, C- C- C-06- )RcNPTN, F IN,OUT 2 24

C Series 1/43/81/2. D F.R.L. E200-01- E200-02- E200-03- E0-02- E0-03- E0-04- E0-02- E0-03- E0-04- E0-06- E500-06- 1/4 3/8 1/4 3/8 1/2 1/4 3/8 1/2 29.8 23.5 31.8 31.8 36 31.8 D 28 36 44 C20- F20-, R20-, W20- L20-, FM20-, FD20- C25-, C-, F-, R- W-, L-, FM-, FD- WM-, WD- C- F-, R-, W- L-, FM-, FD- C-06-, F-06-, R-06- W-06-, L-06-, FM-06- FD-06- ). Rc, NPT N, F.. C. IS10E q w 03 e r ad 1.,. IS10E-N03-6PRZ Rc w N NPT F 01 02 1/4 e 03 3/8 04 1/2 06 0.10.4MPa a 6 1 0.10.6MPa 0.5m L 3m Z 5m r MPa c P 2 MPapsi d R 16PL, R, Z0.20.6MPa90psi 2 NPT. SI, b 20 q E C D 23 500 F.R.L. (OFF) C, DC 25 560 1.0MPa 0.7MPa 0.10.4MPa 0.08MPa 1a C2VDC2W 100V CDC12V24V50m CDC48Vm CDC100V20m 1 IS10E-2001- IS10E-2002- IS10E-2003- IS10E-02- IS10E-03- IS10E-04- IS10E-02- IS10E-03- IS10E-04- IS10E-06-1/4 3/8 1/4 3/8 1/2 1/4 3/8 1/2 29.8 31.8 31.8 63.3 72.8 78.8 C 55.3 58.8 60.8 2 C- R-, W- 1. Rc, NPT N, F. 2C-06-. C-06-E500-06--X501Rc IS10-01 D 28 37 E 16 13 12.5 C20- R20-, W20- C25-, C- R25-, R-, W-

HNR Y200- Y220P-050S Y0- Y320P-050S Y0- Y420P-050S Y500- Y520P-050S Y0T- Y200- Y0- Y0- Y500- C20- C25- C- C- C-06-3.2 4.2 5.2 5.2 22.4 34.2 42.2 46.2 C 11.2 17.1 21.1 23.1 D 44.9 57.9 68.5 75.6 C20- C25- C- C- C-06-3.2 4.2 5.2 5.2 67 82 96 96 C 29 41 48 48 D 53.4 71.5 86.1 89.6 E 24 35 EE 33 5.5 7 9 9 Y200T- Y0T- Y0T- Y500T- F 12 14 18 18 3.5 4 5 5 K 41 50 50 H 15.5 19 26 26 HNR Y200T- Y220P-050S Y0T- Y320P-050S Y0T- Y420P-050S Y500T- Y520P-050S Y200T- Y200- Y0- () () X-X X-X C D X X F.R.L. E E EE(Y120T, Y220T) C H F D K X X F.R.L. C Series ) 26

T T S K 1 2 3 4 3 V 1 IN OUT OUT IN 1 2 3 1 77.6 2 80.2 1 77.6 2 61 76 76 99 104 1 77.6 2 80.2 K S T V KS KT KV KST 3 80.2 1 2 3 57 74 74 95 1 2 61 76 76 99 3 1 2 3 4 1 2 61 76 76 99 3 57 74 74 95 C20- C25- C- C- C-06-1 2 3 57 74 74 95 4 1 2 61 76 76 99 3 4 1 KSV KTV KSTV ST SV STV TV 2 61 76 76 99 3 57 74 74 95 4 1 77.6 2 61 76 76 99 104 1 77.6 2 80.2 3 57 74 74 95 102 1 77.6 2 61 76 76 99 104 3 57 74 74 95 102 1 77.6 2 61 76 76 99 104 3 80.2 C20- C25- C- C- C-06-1 77.6 1 77.6 1 77.6 2 80.2 1 77.6 2 57 74 74 95 102 1 77.6 2 61 76 76 99 104 T S TV SV 1 77.6 2 80.2 V1 1 77.6 2 80.2 SV1 1 77.6 2 80.2 TV1 V C20- C25- C- C- C-06-1 2 1 77.6 1 77.6 2 80.2 1 2 57 74 95 1 2 K KS V S KV KSV SV 3 1 2 57 74 95 3 1 77.6 2 57 74 95 102 C20- C- C- C-06-1 77.6 2 80.2 1 77.6 2 80.2 1 77.6 2 80.2 3 80.2 1 77.6 2 80.2 S V T V1 TV SV1 TV1 3 80.2 1 77.6 2 80.2 SV 3 57 74 74 95 102 1 77.6 2 80.2 3 61 76 76 99 104 1 77.6 2 80.2 3 80.2 1 77.6 2 80.2 3 80.2 C20C- C25C- CC- CC- CC-06-1 77.6 1 77.6 2 80.2 1 77.6 2 80.2 S V1 1 77.6 2 57 74 95 102 SV V 1 77.6 2 80.2 SV1 C20D- CD- CD- CD-06-1 1 2 1 2 3 2 3 4 3 4 27 C Series

F FM P.2935 P.3742 P.3742 FD FM20- FM- FM- FM-06- FD20- FD- FD- FD-06-1/4 1/43/8 1/43/81/2 1/4 1/43/8 1/43/81/2 1/4 1/43/8 1/43/81/2 μm 5 0.3 0.01 F20- F- F- F-06-28 F/FM/FD Series

F20-F- 1 2 1 2 L L F20- F- F q w 03 e D r t af 1.,. F-03D-CR- w e rta b c d e f 6 N 1 F 2 01 02 03 04 06 3 C 4 D 5 C 8 W R Z 9 Rc NPT 1/4 3/8 1/2 N.C.(Normal Closed) N.O.(Normal Open) 1/4, (ø6ø4 ) MPa psi, F q 20 1NPTF20-, NPT1/4F-F- ø3/8" F-F- 2F20-, 1/4F-F- 3 4 50.75kW, 100L/min[NR] N.C. 6P.32 7 8 9NPTSI, 10NPT 10 7 10 7 10 29

F20-F- Series (cm 3 ) (kg) F20-1/4 8 0.08 F- 1/43/8 F- 1/43/81/2 F-06-560 1.5MPa 1.0MPa 5μm 25 45 0.18 0.36 0.41 ss'y 1 23 NC NO F20- F- F- F-06- F22P-050S F32P-050S F42P-050S F42P-070S D27- D37- D38- D47- D48- ss y NC 23 NO 3 1) (2) ss y. 2) N.O.0.1MPa, N.C0.1MPaD27-, 0.15MPaD37-D47- psi, F 3NPT F20-F-ss y O-ring F20- C2SF-C- D27-C- C2SF-- C2SF-C- F- C3SF-- C3SF-W- F- C4SF-- C4SF-W- F-06-

F20-F- Series () F20- Rc1/4 F- Rc3/8 0.10 0.10 MPa 0.08 0.06 0.04 P1=0.1MPa P1=0.3MPa P1=0.5MPa P1=0.7MPa MPa 0.08 0.06 0.04 P1=0.1MPa P1=0.3MPa P1=0.5MPa P1=0.7MPa 0.02 0.02 0 0 500 1000 1500 0 0 1000 2000 00 00 L/min(NR) L/min(NR) F- Rc1/2 F-06- Rc 0.10 0.10 MPa 0.08 0.06 0.04 P1=0.1MPa P1=0.3MPa P1=0.5MPa P1=0.7MPa MPa 0.08 0.06 0.04 P1=0.1MPa P1=0.3MPa P1=0.5MPa P1=0.7MPa 0.02 0.02 0 0 2000 00 6000 L/min(NR) 0 0 2000 00 6000 L/min(NR) 31

F20-F- Series., F.R.L. SMC.. http://www.smckorea.co.kr q,,,.,,,,,. IP q 2 0.1MPa.. q Lock,.. Lock 32

F20-F- Series N.O. D38-D48- N.C. D37-D47- D27- q r e w t i y u o!0!1 q r e w t i u y o!0!1 q w e r t y : Seal.. : 0.1MPa, Seal. Seal. : Seal., Seal,., Seal. : Seal,.. : Seal. Seal. : Seal., Seal,., Seal. : Seal.. : Seal. : Seal. Seal. 33

F20-F- Series F20- F-F-06- IN OUT q IN OUT r w q r w e t e t 1 2 3 4 5 O-ring SS'Y ) PT NR F20P-060S F22P-0S C2SFP-260S C2SF- FP-060S F32P-0S C32FP-260S C3SF- O-ring psi F ss'y. F20- F- F- F-06- FP-060S F42P-0S C42FP-260S C4SF- 34

U R S OUT IN U S R T N T N C IN OUT M D V Q () E 2P V M D () Q 2P T0604 17 1/4 M50.8 14 /Rc,ø10 /NPTø3/8" N.C. N.O. C F20- F-F-06- P 1/4 1/43/8 1/43/81/2 53 70 75 87.6 115.1 147.1 149.1 C 9.8 14 18 20 D 20 26.7 35.5 35.5 E 38.4 38.4 20 26.7 35.5 35.5 M 41 50 50 N 27 54 54 Q 22 23 26 25 R 5.4 6.5 8.5 8.5 S 8.4 8 10.5 10.5 T 53 70 70 U 2.3 2.3 2.3 2.3 V 28 35 34 104.9 156.8 186.9 188.9 F20- F- F- F-06-123.6 155.6 157.6 91.4 121.9 153.9 155.9 F20- F- F- F-06-25 35 N.O./N.C. N.C. F20- F-F-06-35 F20-F- Series

36

FM20-FM- FD20-FD- FM0.3μm FD0.01μm 1 1 L L 2 2 FM20- FD20- FM- FD- FM FD 03 D 03 D af1 FM-03D-CR- q w e r t w e rt psi, Fa b c d e f 6 N 1 F 2 01 02 03 04 06 3 C 4 D 5 C 8 Rc NPT 1/4 3/8 1/2 N.C.(Normal Closed) N.O.(Normal Open) 1/4, (ø6ø4 ) W R MPa Z 9 q 20 1 NPTFM20-FD20-, NPT1/4FM-FM-/FD-FD- ø3/8" FM-FM-/FD-FD- 2FM20-FD20-, 1/4FM-FM-/FD-FD- 32 4 50.75kW, 100L/min[NR] )N.C. 6P. 7 8 9NPTSI 10NPT 10 7 10 7 10 37

FM20-FM- Series FD20-FD- Series L/minNR 1 cm 3 kg 1)0.7MPa. 2)mg/m 3 (NR) 3) O-ring O-ring ss'y 1 23 FM20-FM-06- FD20-FD-06- FM20-FM-06- FD20-FD-06- FM20-FM-06- FD20-FD-06- NC NO FM20- FM- FM- FM-06- FD20- FD- FD- FD-06-1/4 1/43/8 1/43/81/2 560 ) 1.5MPa 1.0MPa 0.05MPa 0.3μm99.9%) 0.01μm99.9%) MX1.0mg/m 3 (NR)(0.8ppm) 23) MX0.1mg/m 3 (NR)0.01mg/m 3 (NR) 0.008ppm) 23) 200 120 8 ) 0.09 FM20- FD20- F22P-050S D27-450 2 25 1100 600 45 ) 0.19 0.38 0.43 FM- FD- F32P-050S D37- D38- FM- FM-06- FD- FD-06- F42P-050S F42P-070S D47- D48- ss y NC 23) NO 3) 1)(2) ss y. 2)NO0.1MPa, NC0.1MPa(D27-), 0.15MPa(D37-D47-) psi, F 3)NPT ) ss y O-ring FM20- FD20- C2SF-C- D27-C- C2SF-- C2SF-C- FM- FD- C3SF-- C3SF-W- FM- FD- C4SF-- C4SF-W- FM-06- FD-06-38

FM20-FM- Series FD20-FD- Series () FM20- FD20- MPa 0.04 0.03 0.02 0.01 P1=0.3MPa P1=0.3MPa P1=0.5MPa P1=0.5MPa P1=0.7MPa P1=0.7MPa MPa 0.04 0.03 0.02 0.01 P1=0.3MPa P1=0.3MPa P1=0.5MPa P1=0.5MPa P1=0.7MPa P1=0.7MPa 0 0 50 100 150 200 0 0 50 100 L/minNR L/minNR FM- FD- MPa 0.04 0.03 0.02 P1=0.3MPa P1=0.5MPa P1=0.7MPa MPa 0.04 0.03 0.02 P1=0.3MPa P1=0.5MPa P1=0.7MPa 0.01 P1=0.3MPa P1=0.5MPa P1=0.7MPa 0.01 P1=0.3MPa P1=0.5MPa P1=0.7MPa 0 0 100 200 0 0 500 600 0 0 50 100 150 200 L/minNR L/minNR FM- FD- 0.04 0.03 P1=0.3MPa P1=0.5MPa P1=0.7MPa 0.04 0.03 P1=0.3MPa P1=0.5MPa P1=0.7MPa MPa 0.02 MPa 0.02 0.01 P1=0.3MPa P1=0.5MPa P1=0.7MPa 0.01 P1=0.3MPa P1=0.5MPa P1=0.7MPa 0 0 200 0 600 800 1000 0 0 100 200 0 0 500 600 L/minNR L/minNR 39

FM20-FM- Series FD20-FD- Series., F.R.L. SMC.. http://www.smckorea.co.kr q,,,.,,,,,. IP q F w FM e q 2 0.1MPa.. q 0.1MPa q Lock,.. Lock q w

FM20-FM- Series FD20-FD- Series FM20- FD20- IN OUT N.C. q e w r M50.8 FM-FM-06- FD-FD-06- IN OUT N.C. N.O. q e w r /Rc,ø10 /NPTø3/8" /Rc,ø10 /NPTø3/8" 1 FM20-FM-06- FD20-FD-06- FM20- FD20- FM- FD- FM- FD- FM-06- FD-06-2 ss'y FM20 FM20P-060S FMP-060S FMP-060S FD20 FD20P-060S FDP-060S FDP-060S 3 4 ss'y ) NR C2SFP-260S C2SF- C32FP-260S C3SF- C42FP-260S C4SF- psi, F. 41

U R S OUT IN U S R T N C T N C IN OUT M D V Q () E 2P V M D () Q 2P T0604 17 1/4 M50.8 14 N.C. N.O. /Rc,ø10 /NPTø3/8" FM20- FD20- FM-FM-06- FD-FD-06- P 1/4 1/43/8 1/43/81/2 53 70 75 87.6 115.1 147.1 149.1 C 9.8 14 18 20 D 20 26.7 35.5 35.5 E 38.4 38.4 20 26.7 35.5 35.5 M N 27 54 54 Q 22 23 26 25 R 5.4 6.5 8.5 8.5 S 8.4 8 10.5 10.5 T 53 70 70 U 2.3 2.3 2.3 2.3 V 28 35 34 104.9 156.8 186.9 188.9 FM20-/FD20- FM-/FD- FM-/FD- FM-06-/FD-06-123.6 155.6 157.6 91.4 121.9 153.9 155.9 FM20-/FD20- FM-/FD- FM-/FD- FM-06-/FD-06-41 50 50 50 75 75 N.O./N.C. N.C. FM20-/FD20- FM-FM-06-/FD-FD-06-42 FM20-FM- Series FD20-FD- Series

43

R Series R R20-1/4 R25-1/43/8 R- R- 1/43/81/2 R-06- P.4550 R Series 44

R- R20- R20-R- R - q 03 e r t w ag1 R-03-1N- 1,, H, M 2 3R20--.7MPa 1.0MPa, 0.2MPa 0.4MPa 5 6NPT SI M 7 NPT 25 Rc NPT N F w q 1/4 3/8 1/2 01 02 03 04 06 e 2 H 4 r 1ta 3 R e M b () () 1 5 c 0.050.7MPa 0.020.2MPa 20 N d Y f 7 7 7 7 Z 6 g MPa psi 2 1 45

R20-R- Series kg R20-1/4 0.17 R25-1/43/8 0.19 R- 1/43/8 560 ) 1.5MPa 1.0MPa 0.050.7MPa R- 1/43/81/2 R-06-0.34 0.58 0.60 ss'y 1 2 2 0.020.2MPa 0.020.2MPa R20- R22P-270S R22P-260S R25- R27P-270S R22P-260S 36-10-01 36-4-01 36-10-01-L 36-4-01-L R- R32P-270S R32P-260S R- R42P-270S R42P-260S 46-10-01 46-4-01 46-10-01-L 46-4-01-L R-06- R42P-270S R42P-260S 1ss y. 2RNPTNNPT psi., F.R.L. SMC.. http://www.smckorea.co.kr q 0.15MPa q q w q Lock, Lock.. Lock.. Lock. Lock.. w,... 46

R20-R- Series () R20- Rc 1/4 0.7 MPa R25- Rc 3/8 0.6 0.6 0.5 0.5 MPa 0.4 0.3 MPa 0.4 0.3 0.2 0.2 0.1 0.1 0 0 200 0 600 800 0 0 500 1000 1500 L/minNR L/minNR R- Rc 3/8 R- Rc 1/2 0.6 0.6 0.5 0.5 MPa 0.4 0.3 MPa 0.4 0.3 0.2 0.2 0.1 0.1 0 0 500 1000 1500 0 0 1000 2000 00 L/minNR L/minNR R-06- Rc 0.6 0.5 MPa 0.4 0.3 0.2 0.1 0 0 1000 2000 00 00 5000 L/minNR 47

R20-R- Series () R20-0.3 R25-0.3 0.7 MPa, 0.2MPa, 20L/minNR 0.25 0.25 MPa MPa 0.2 0.15 0.1 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 1.1 MPa R- 0.3 0.25 0.2 MPa MPa 0.2 0.15 0.1 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 1.1 MPa R-/R-06-0.3 0.25 0.2 0.15 0.15 0.1 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 1.1 MPa 0.1 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 1.1 MPa 48

t q w e r IN OUT R20--06-1 2 ss'y ss'y ss'y SUSHNR NR R20- R22P-060S R22P-150S R22P-050S R25- R- R32P-060S R32P-150S R32P-050S R- R42P-060S R42P-150S R42P-050S R-06-3 4 5 49 R20-R- Series

R20-R25- MX.4 R-R-06-MX.8 U S OUT IN R T N 2P2 ( ) () F H 2P1 C Q V M D Y W IN OUT Z R20-R-06- Unlock. P1 1/4 1/43/8 1/43/8 1/43/81/2 P2 53 53 70 75 67.4 70.4 83.5 100 101.5 C 23.5 23.5 27 33.5 33.5 D 22 22 28.5 34.5 34.5 F M361.5 M361.5 M451.5 M521.5 M521.5 22 22 28.5 34.5 34.5 58.5 58.5 65 72 72 59.5 59.5 66 72 72 H H ø37.5 ø37.5 ø37.5 ø42.5 ø42.5 ø37.5 ø37.5 ø37.5 ø42.5 ø42.5 M 41 50 50 N 34 34 36 38 38 Q 43.9 44.3 46 54 55.5 R 5.4 5.4 6.5 8.5 8.5 S 15.4 15.4 24 26.5 26.5 U 2.3 2.3 2.3 2.3 2.3 V 27.3.3 32.5 38.4 39.9 W 36.5 36.5 45.5 52.5 52.5 Y 17.5 17.5 22.5 26 26 Z 6 6 7 7 7 R20- R25- R- R- R-06- ( T 55 55 65 70 70 50 R20-R- Series

51

L Series L L20-1/4 L- 1/43/8 L- 1/43/81/2 P.5357 L-06-52

L20-L- L20- L- L 03 ad1 q w e r t L-03-R- q 20 w e r t a b c d N F 01 02 03 04 06 1 C 3 3W R Z 3 Rc NPT 1 2 3NPTSI 4 NPT 1/4 3/8 1/2, (ø6ø4 ) MPa psi, F 4 2 4 2 4 53

L20-L- Series L/minNR cm 3 kg L20-1/4 15 25 0.10 L- 1/43/8 1.5MPa 1.0MPa 560 ) 1/4 3/8 L- 1/43/81/2 1/4 3/8 1/250 55 135 1ISO V32 0.20 0.38 0.5MPa, 1ISO V32, 20, 5/ 2 L-06- ss'y F22P-050S F32P-050S F42P-050S F42P-070S L20- L- L- L-06-50 0.43 ss y ss y O-ring psi, F L20- C2SL-3- C2SL-C- C2SL-3C- L- C3SL-3- C3SL-3W- L- C4SL-3- C4SL-3W- L-06-54

L20-L- Series ) L20- Rc1/4 MPa MPa L-06- MPa 0.1 0.08 0.06 0.04 0.02 0 0 L- MPa 0.1 0.08 0.06 0.04 0.02 0 0 L- 0.1 0.08 0.06 0.04 0.02 0 0 0.1 0.08 0.06 0.04 0.02 0 0 P1=0.1MPa 1000 2000 00 00 L/minNR Rc3/8 P1=0.1MPa 2000 00 6000 L/minNR Rc1/2 2000 00 6000 8000 L/minNR Rc P1=0.1MPa P1=0.1MPa P1=0.3MPa P1=0.3MPa P1=0.3MPa P1=0.3MPa P1=0.5MPa P1=0.5MPa P1=0.5MPa P1=0.5MPa P1=0.7MPa P1=0.7MPa P1=0.7MPa P1=0.7MPa 2000 00 6000 8000 L/minNR., F.R.L. SMC.. http://www.smckorea.co.kr q,. w,,,.,,,,,. IP q KM ql20- wl20-- ss'y 3 q11 q Lock,.. Lock 55

L20-L- Series L20- w q t e IN OUT y r u L-L- IN w q t OUT e r y u 1 L20-L- L20- L- L- L-06-2 3 4 5 6 7 ss'y ss'y ss'y ss'y ss'y NR L22P-060S L20P-0S L20P-0S C2SFP-260S C2SL- L20P-080S L32P-060S LP-0S LP-0S C32FP-260S C3SL- psi, F L42P-060S LP-0S LP-0S C42FP-260S C4SL- 56

U R S OUT IN U R S OUT IN T N C M D Q 2P T N C M D Q E 2P L- L- L20- P 1/4 1/43/8 1/43/81/2 53 70 75 79.3 104.1 136.1 138.1 C 35.9 38.1 39.8 37.8 D 20 26.7 35.5 35.5 E 38.4 38.4 20 26.7 35.5 35.5 M 41 50 50 60 80 110 110 N 27 54 54 Q 22 23 26 25 R 5.4 6.5 8.5 8.5 S 8.4 8 10.5 10.5 T 53 70 70 U 2.3 2.3 2.3 2.3 L20- L- L- L-06-123.6 155.6 157.6 87.7 115.1 147.1 149.1 L20- L- L- L-06- L20- L-L- T0604 57 L20-L- Series

W Series W W20-1/4 W- 1/43/8 W- 1/43/81/2 P.5965 W-06- W Series 58

W20-W- 1 2 L W 03 q w e r t ai1 W-03-1N- 20 q w e r t3 a b c d e 7 8 9 N 1 F 2 01 02 03 04 06 4 H C 5 D 6 M 1 C Rc NPT 1/4 3/8 1/2 N.C.(Normal Closed) N.O.(Normal Open) () () 0.050.7MPa 0.020.2MPa 10 10 59

W20-W- Series W20- W- q 20 tf g h i 11 W N R Z 12 1NPTW20-, NPT1/4W-W- ø3/8" W-W- 2W20-, 1/4 W-W- 3,,H,M 4 5, 1/4, (ø6ø4 ) MPa psi, F 6(0.75kW, 100L/min[NR] ) N.C. 70.7MPa )1.0MPa, 0.2MPa 0.4MPa 8 9P.62 13 13 13 10 11 12NPT SI M 13NPT cm 3 (kg) W20-1/4 8 () 0.21 W- 1/43/8 25 W- 1/43/81/2 560 ) 1.5MPa 1.0MPa 0.050.7MPa 5μm 45 () W-06-0.41 0.75 0.81 60

W20-W- Series ss'y 1) 2 34 2 ss y NC 34 NO 0.020.2MPa 0.020.2MPa N.C. N.O. 4 W20- W- R22P-270S R32P-270S R22P-260S R32P-260S 36-10-01 36-4-01 36-10-01-L 36-4-01-L D27- W20- C2SF-C- D27-C- C2SF-- C2SF-C- D37- D38- W- C3SF-- C3SF-W- W- W-06- R42P-270S R42P-260S 46-10-01 46-4-01 46-10-01-L 46-4-01-L D47- D48-1 ss y. 2. R, NPT N. NPT PSI. 3N.O.0.1MPa, N.C.0.1MPaD27-, 0.15MPaD37-D47-. psi, F. 4 NPT. ss y O-ring W- C4SF-- C4SF-W- W-06-61

W20-W- Series., F.R.L. SMC.. http://www.smckorea.co.kr q 0.15MPa w,,,.,,,,,. IP q20.1mpa q w q Lock, Lock.. Lock.. Lock. Lock.. w,... elocklock,.. Lock 62

W20-W- Series () W20- Rc 1/4 W- Rc 3/8 0.7MPa W- Rc 1/2 0.6 0.6 0.6 MPa 0.5 0.4 0.3 0.2 0.1 0 0 200 0 600 800 L/minNR W-06- Rc MPa 0.6 0.5 0.4 0.3 0.2 0.1 0 0 1000 2000 00 00 L/minNR () W20- MPa 0.3 0.25 0.2 0.15 MPa 0.5 0.4 0.3 0.2 0.1 0 0 500 1000 1500 L/minNR W- MPa 0.3 0.25 0.2 0.15 MPa MPa 0.5 0.4 0.3 0.2 0.1 0 0 1000 2000 00 L/minNR 0.7MPa0.2MPa 20L/minNR W-/W-06-0.3 0.25 0.2 0.15 0.1 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 1.1 MPa 0.1 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 1.1 MPa 0.1 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 1.1 MPa 63

W20-W- Series W20- W-W-06- IN OUT w t q w t q y e r u IN OUT y e r u 1 2 W20- W- W- W-06-3 4 5 6 7 ss'y ss'y ss'y SUSHNR NR NR W22P-060S F20P-060S R22P-150S C2SFP-260S C2SF- W32P-060S FP-060S R32P-150S C32FP-260S C3SF- W42P-060S FP-060S R42P-150S C42FP-260S C4SF- psi, Fss'y 64

W20-W- Series W20- F T N S M D U W-W-06- T N F S R M D U IN OUT R C H () V Q 2P1 IN OUT C H () V Q 2P2 ( ) E 2P1 Y W 2P2 ( ) Y W IN Z OUT IN Z OUT W20-Max.4 W-W-06-MX.8 W20- W-W- N.C. N.O./N.C. N.O. N.C. O S M50.8 14 /Rc,ø10 /NPTø3/8" 17 1/4 T0604 W20- W- W- W-06-1/4 1/43/8 1/43/81/2 P1 P2 C D E F 87.6 67.4 22 M361.5 25 53 115.1 83.5 28.5 M451.5 35 70 147.1 100 34.5 38.4 M521.5 75 149.1 101.5 34.5 38.4 M521.5 22 28.5 34.5 34.5 H H ø37.5 58.5 ø37.5 59.5 ø37.5 65 ø37.5 66 ø42.5 72 ø42.5 72 ø42.5 72 ø42.5 72 W20- W- W- W-06- M 41 50 50 N 34 36 38 38 C 65 Q R S T U V W Y Z 43.9 5.4 15.4 55 2.3 27.3 36.5 17.5 6 104.9 91.4 46 6.5 24 65 2.3 32.5 45.5 22.5 7 156.8 123.6 121.9 54 8.5 26.5 70 2.3 38.4 52.5 26 7 186.9 155.6 153.9 55.5 8.5 26.5 70 2.3 39.9 52.5 26 7 188.9 157.6 155.9

66