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1 THE JOURNAL OF KOREAN INSTITUTE OF ELECTROMAGNETIC ENGINEERING AND SCIENCE. 218 Feb.; 29(2), ISSN (Print)ISSN X (Online) Transmission Characteristics of Periodic Au Slits at Terahertz Regimes 류성준 박종언 이준용 추호성 Sungjun YooJong-Eon Park*Jun-yong Lee**Hosung Choo 요약 MIM(Metal - Insulator - Metal),. MIM,.. Abstract Electromagnetic wave transmission through periodic metal-insulator-metal(mim) waveguides as a function of plate thickness has not been extensively studied at various terahertz frequencies. In this paper, we investigate the transmittances through gold MIM slits when a normally incident wave with parallel polarization is considered at several terahertz frequencies. In addition, the results are compared to the case of a perfect electric conductor, and the differences are discussed. Key words: Metal-Insulator-Metal Waveguide, Mode Matching, Periodic Structure, Transmittance, Terahertz, Subwavelength Slit. 서론 [1]... [2],[3]. [4],[5], [2],[3]. This research was partly supported by ICT R&D program of MSIP/IITP , Basic Science Research Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Education (No. 215R1A6A1A331833), and the Korea Institute of Nuclear Safety under the project Development of Proof Test Model and Safety Evaluation Techniques for the Regulation of Digital I&C Systems used in NPPs (No SB13). (School of Electronic and Electrical Engineering, Hongik University) * (Metamaterial Electronic Device Research Center, Hongik University) ** (School of Information and Computer Engineering, Hongik University) Manuscript received November 29, 217 ; Revised February 8, 218 ; Accepted February 2, 218. (ID No S) Corresponding Author: Jun-yong Lee ( jlee@hongik.ac.kr) c Copyright The Korean Institute of Electromagnetic Engineering and Science. All Rights Reserved. 77

2 THE JOURNAL OF KOREAN INSTITUTE OF ELECTROMAGNETIC ENGINEERING AND SCIENCE. vol. 29, no. 2, Feb. 218., [2]., [6]..,,.,,, [7].. [8] ε m 5 THz j367.24, 2 THz j7.567, ε i 1. 2 MIM p.5λ, 2g.5λ, (Au) 5 THz κ m /k (Discretized Continuous Spectrum: DCS) [2],[6],[9]. ( ), (guided mode)., TM TM. MIM 도파관의구조및투과전력 1, MIM(Metal-Insulator-Metal), 3. MIM. 2 p, y-, 2g, 2d, t.,. (1) 1 MIM, (2) [2],[6]. (1), (2) e jωt. 그림 1. MIM Fig. 1. Geometry of the periodic MIM waveguide. tanh tanh (1) (2) ε m ε i, k z,n z n. κ m,n κ i,n n 그림 2. MIM ( ) DCS() 5 THz, p=.5λ, 2g=.5λ ) Fig. 2. Eigenvalues of point spectrum ( ) and DCS() in MIM 5 THz, p=.5λ, 2g=.5λ ). 78

3 ,. TM,,. DCS (O), (dielectric slab waveguide) (radiation mode).,., DCS (2) k z,n., DCS. (completeness). 2 κ m,, (1), (2). 2 [6] τ (3). W i, P t, 2 MIM E t H t., E t H t MIM, *. (3) 그림 3. (2g=.5λ ) Fig. 3. Transmittance versus plate thickness(2g=.5λ ). 3 MIM p.5λ, 2g.5λ (3)., 5 THz, 2 THz, 1 t ( n)λ (n=, 1, 2, ),.,,., 5 THz.397λ.72, 2 THz.294λ k z, /k. k z, /k 2 THz 5 THz [6]. 4 MIM p.5λ, 2g.1λ (3). 3, 5 THz, 2 THz, 1 t ( n)λ (n =, 1, 2, ), 79

4 THE JOURNAL OF KOREAN INSTITUTE OF ELECTROMAGNETIC ENGINEERING AND SCIENCE. vol. 29, no. 2, Feb 도파관의 정규화된 전파상수 표 1. MIM (kz,n/k). Table 1. Normalized propagation constants(kz,n/k) in the periodic MIM waveguide. Fig. 3 kz,n/k (n = ) Fig. 4 kz,n/k (n = ) PEC 1 PEC 1 5 THz 2 THz 1.84 j j THz 2 THz 1.41 j j.88 투과 특성 비교 결과 그림 5. (p=.5λ, 2g=.1λ) Fig. 5. Comparison of the transmittance properties(p=.5λ, 2g=.1λ). 금속 두께의 변화에 따른 투과율 그림 4. (2g=.1λ) Fig. 4. Transmittance versus plate thickness(2g=.1λ). 다. 그림 3에 비해 개구의 폭이 더 넓기 때문에 투과율의 값이 전체적으로 큼을 확인할 수 있으며, 그림 3과 마찬 가지로 표 1을 통해 투과 현상을 이해할 수 있다. 그림 5는 모드 정합법을 이용하여 도출된 투과특성에 대한 정확도를 검증하기 위해 상용 소프트웨어인 ANSYS 사의 HFSS와 Altair사의 FEKO 시뮬레이션을 이용하여 비 교한 결과를 보여준다. MIM 도파관의 주기 p가.5λ, 개구의 간격 2g가.1λ 일 때 금속의 두께에 따른 투과율 을 계산하였으며, 도출된 3개의 결과가 매우 유사함을 확 인하였다. 마지막으로 그림 3의 경우 2 THz에서 전체적인 투과 율의 특성이 5 THz에 비해 낮은 값으로 나타나지만, 그 림 4의 경우에는 MIM 도파관의 두께가 얇은 경우 (t < 1 8 및 2 THz에서 포인트 스펙트럼의 첫 째 모드의 H 필드 패턴(2 g=.1λ ) 그림 6. 5 THz y Fig. 6. Hy field profiles in the first mode of point spectrum at 5 THz and 2 THz(2 g=.1λ). 에도 2 THz의 투과율 첨둣값이 5 THz에 비해 높 게 나오기도 한다. 이와 같은 사실은 전자파의 투과 특성 에 가장 큰 영향을 미치는 TM 모드의 필드 패턴을 통해 서 이해할 수 있다. 그림 6은 기본 모드인 TM 모드에 대 한 H 필드의 패턴을 각 주파수별로 나타낸 것이다. 점선 에서와 같이 2 THz에서 필드 패턴은 금속 영역으로 많 λ) y

5 , 5 THz. 2 THz MIM t, 4.. 결론 MIM,..5λ,.5λ, MIM.. References [1] F. J. Garcia-Vidal, L. Martin-Moreno, T. W. Ebbesen, and L. Kuipers, "Light passing through sub- wavelength apertures," Reviews of Modern Physics, vol. 82, pp , Mar. 21. [2] Ş. E. Kocabaş, G. Veronis, D. A. B. Miller, and S. Fan, "Modal analysis and coupling in metal-insulator-metal waveguides," Physical Review B, vol. 79, p. 3512, Jan. 29. [3] B. Sturman, E. Podivilov, and M. Gorkunov, "Eigenmodes for metal-dielectric light-transmitting nanostructures," Physical Review B, vol. 76, p , Sep. 27. [4] J. W. Rim, I. S. Koh, "Derivation of analytic formulas and numerical verification of weakly singular integrals for near-field correction in surface integral equations," Journal of Electromagnetic Engineering and Science, vol. 17, no. 2, pp , Feb [5] C. Kim, Y. B. Park, "Prediction of electromagnetic wave propagation in space environments based on geometrical optics," Journal of Electromagnetic Engineering and Science, vol. 17, no. 3, pp , Jul [6] J. E. Park, F. L. Teixeira, and B. H. V. Borges, "Analysis of deep-subwavelength Au and Ag slit transmittances at terahertz frequencies," Journal of the Optical Society of America B, vol. 33, no. 7, pp , 216. [7] G. Veronis, Z. Yu, S. E. Kocabas, D. A. B. Miller, M. L. Brongersma, and S. Fan, "Metal-dielectric- metal plasmonic waveguide devices for manipulating light at the nanoscale," Chinese Optics Letters, vol. 7, no. 4, pp , 29. [8] A. D. Rakić, A. B. Djurišić, J. M. Elazar, and M. L. Majewski, "Optical properties of metallic films for vertical-cavity optoelectronic devices," Applied Optics, vol. 37, no. 22, pp , [9] B. Friedman, Principles and Techniques of Applied Mathematics, New York, Dover,

6 THE JOURNAL OF KOREAN INSTITUTE OF ELECTROMAGNETIC ENGINEERING AND SCIENCE. vol. 29, no. 2, Feb : () 216 8: () 216 9: [ 주관심분야 ] GPS,, : ( ) : EECS () : EECS () : IBM : [ 주관심분야 ],, 26 2: () 29 2: () 213 2: () : 216 1: [ 주관심분야 ],, EMI & EMC, : ( ) 2 8: University of Texas at Austin () 23 5: University of Texas at Austin () 23 6: [ 주관심분야 ],, RFID 82

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