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1 Journal of the Korean Society of Safety, Vol. 29, No. 6, pp , December 2014 by The Korean Society of Safety (pissn ) All right reserved. 이동훈 최동수 * 김상민 * 박진철 ** 부경대학교안전공학과 * 부경대학교대학원안전공학과 ** ( 주 ) 선재하이테크기술연구소 ( 접수 / 수정 / 채택 ) A Study on Improvement of the Performance of Pulsed AC Ion Bar (2) Dong Hoon Lee Dong Soo Choi * Sang Min Kim * Jin Chul Park ** Department of Safety Engineering, Pukyong National University * Department of Safety Engineering, Graduate School, Pukyong National University ** R&D Center, SunJe Hi-Tek. Co., Ltd. (Received Octobert 8, 2014 / Revised November 10, 2014 / Accepted November 11, 2014) Abstract : In display such as LCD, LED, and AMOLED or semiconductor related industries are required to have static ionizer in order to produce reliable goods. The most general type of ionization is called, corona discharge that has a slight chances to generate unequal and unstable amount of each +/- ion to the target object. Then, the ionization performance will drastically decrease and end up with quality deterioration problem. continually A study on the improvement of the performance of pulsed AC ion bar(1), we have studied consecutive study to improve the current issue via appling partition wall at air nozzle surrounding. The results were that the charge decay time and the ion balance was maintained the satisfied range that was within 5 second and ± 50 V for a 180 days period of time. In additions, the contamination status on the electrode surface was investigated for a 180 days. The little particles was deposited on the electrode surface. Key Words : ion bar, ion balance, charge decay time, particle, partition wall, corona discharge, electrode 1. 서론 FPD(Flat Panel Display) 및반도체공정에서정전기방전현상은회로소자및액정패널의파괴를야기하여생산수율에막대한영향을미치고있다. 또한정전기로인한미세먼지의흡착으로품질저하의문제를야기한다 1-2). 현재주로사용되고있는정전기제거장치로는코로나방전을이용한이온바 (Ion bar) 및이온브로워 (Ion blower) 가있다 3). 이는코로나방전에의해이온을발생시키고압축공기또는팬을사용하여이온화된공기를강제대류시키는방식이다. 이러한과정에서코로나방전에의한스패트링 (spattering) 현상으로방전전극의끝부분에는직경약 0.01 μm이하의미립자가수만개 /m³ 발생하여부착되었다가일부는압축공기또는팬에의한강제대류에의해떨어져나가서피대전체표면에부착되어품질저 하의문제를야기한다 4). 또한방전전극에부착된미세미립자에의해코로나방전이약화되어초기에비해생성 + 이온과 - 이온의수가변하여이온밸런스가틀어지게된다. 이를해결하기위하여주기적으로이온밸런스를조정해주어야하는불편함이있다 5). 이에대한대책으로연 X 선을이용한정전기제거장치로서정전기를중화시키는방법이있으나, 연 X 선의인체유해성문제로주변을적절한차폐제로반드시차폐를하여야하는단점이있다 6) 년 6 월발표된 바형태정전기제거장치의정전기제거성능향상을위한연구 (1) 7) 에이어본연구에서는동일한압력또는동일한유량소모에서토출되는공기에너지를향상시키는소켓구조를설계하였다. 즉, 주변의미립자가방전전극에적게부착되도록하여코로나방전강도를일정하게하여장기간이온밸런스를유지하여정전기제거성능을향상시키는데목적이있다. Corresponding Author : Dong Hoon Lee, Tel: , lhoon@pknu.ac.kr Department of Safety Engineering, Pukyong National University, 45, Yongso-ro, Nam-gu, Busan , Korea 40

2 2. 연구내용 코로나방전을이용한이온바는압축유체 (Clean dry air 또는 N 2) 를사용하는데, 주입된유체가토출되는소켓의구조에따라생성이온을피대전체에전달하는데큰영향을준다. 이온바의공기노즐에는코로나방전을일으키는방전전극과방전전극의주변에노즐을설치하여방전전극에서생성된이온 (+,-) 을피대전체까지전달하도록되어있다. 본연구에서는동일한유량을소모하는경우공기노즐의구조에따른정전기제거성능변화를실험하였다. 이러한이온바는사용시간이경과됨에따라방전전극의표면에는쿨롱력과기류변화에의하여주변의미세먼지가부착되어코로나방전강도 ( 전계강도 ) 를약화시켜 +,- 이온의생성능력이저하하여정전기제거능력이감소하는단점이있다. 방전전극표면에미세먼지가부착하는원인은크게 2 가지가있다. 1) 방전전극에인가된수 kv 고전압과주변미세먼지사이의쿨롱력 (Coulomb's Force) 에의하여먼지가부착한다. 2) 공기노즐을통과하는유체가노즐출구에서분사되면서발생하는압력강하로인해주변의먼지가부착한다. (1) 은이온바를통과는유체가공기노즐에서분사되며발생하는흐름을나타내는식이다. Q=A 1 V 1 =A 2 V 2 (1) 여기서, Q 는이온바를통과하는유량 A 1, A 2 는입 / 출구의단면적 V 1, V 2 는입 / 출구의유체속도이다. 식 (1) 은에너지방정식으로이온바에주입된유량은이온바내부의어떤위치에서도동일함을의미한다. 이온바로유입된유량은공기노즐의미소한출구를통해서분사되는데공기노즐의출구단면적 A 2 는입구단면적 A 1 에비해대단히적어공기노즐에서의유체속도는증가하게된다. 일반적으로동일한유량에서유속이증가할수록압력은낮아지게된다. 이는식 (2) 와같이베르누이 (Bernoulli) 방정식으로표시된다. (a) In case of partition wall installed (b) In case of no partition wall Fig. 1. The distributions of electric line of force in case of installation of partition wall at air nozzle surroundings. 발생하게된다. 이때기류와함께노즐의외부에있던미세먼지도함께공기노즐로이동하여쿨롱력에의하여방전전극에흡착된다. 이상의 2 가지의힘에의하여방전전극방향으로기류가발생하여주변의먼지를흡입하는효과에의해방전전극표면에미세먼지가부착된다. 본연구에서는공기노즐출구에서의압력강하로인한기류유입을막아주는격벽을설치하여미세먼지의흐름을차단함으로서방전전극표면오염을저감시킬수있다고생각한다. Fig. 1 은공기노즐의형상에따른전기력선분포이다. 격벽을설치않은공기노즐의경우방전전극으로부터의전기력선은방사상으로분포되지만, 격벽이설치된공기노즐의경우에는격벽사이로대부분의전기력선이분포될것이라고예상한다. 공기노즐의최적화설계를위한유체해석프로그램 (CFD-ACE, ESI-Group, 2009 년, USA) 와전계해석프로그램 (Maxwell, ANSYS 년, USA) 을통하여검증하였다. Fig. 2 는공기노즐의주변에격벽을설치한경우와설치하지않은경우의전기력선분포를나타낸것으로맥스웰 (Maxwell) 의해석조건으로인가고전압은 10.5 kv 이고, Ground level 은무한대로설정하였다. Fig. 2 에서알수있듯이격벽이설치된경우가설치하지않은경우에비해서방전전극선단주변에서단위면적당전 (2) 여기서 : 압력, : 밀도, V : 속도, =: 비중량이다. 식 (2) 에서알수있듯이공기노즐출구에서의유압은대기압보다낮아지게된다. 압력은높은곳에서낮은곳으로흐르므로낮아진공기노즐방향으로기류가 (a) In case of partition wall installed (b) In case of no partition wall Fig. 2. The distributions of electric line of force at air nozzle surroundings. 한국안전학회지, 제 29 권제 6 호, 2014 년 41

3 이동훈 최동수 김상민 박진철 (a) A side view Fig. 3. Numerical simulation of wind-induced flow around air nozzle. 기력선수의분포가비교적균등함을알수있다. 즉, 전기력선의밀도인전계강도가평등함을알수있다. 이는방전전극의선단에서의코로나방전이평등전계에가까워져서이온의생성이안정함을보여준다. Fig. 3 은공기노즐의유체흐름의해석을한것으로유체속도를가시화한것이다. Fig. 3 에서보듯이공기노즐의출구영역에서유속이다른곳보다는빠르다는것을확인할수있다. Fig. 4 는공기노즐출구에서유속으로확대가시화한것이다. Fig. 4 에서알수있듯이격벽이설치되지않은경우, 공기노즐의출구방향으로기류가형성되지만, 격벽이있는경우에는공기노즐의출구방향으로기류가형성되지않음을확인할수있다. 이는노즐방향으로기류가거의없음으로외부에서노즐쪽으로이동하는미세먼지의양이아주적아지게됨을알수있다. 3. 실험장치및방법 Fig. 5 는본연구를위한실험장치구성도이다. 사용된정전기제거장치 (SIB3RD, Sunje Hi-tek, Korea) 의인가고전압은직류와교류의특성을모두갖고있는펄스교류 (Pulse AC 10.5 kv p-p, 30 Hz) 이고, 유입되는공기는청정공기 (Clean dry air) 를사용하였다. 본실험은약 6 개월동안실시되었으며, 일주일에평균 3 회, 수직방향으로설치거리 (300, 600 mm) 에서 (b) B side view Fig. 4. Detailed numerical simulation of wind induced flow around air nozzle. Fig. 5. Experimental diagram for measuring static elimination characteristics. 정전기제거성능을나타내는전하완화시간과이온밸런스를측정하였다. 피대전물체로는모의대전체 (Charged Plate Monitor, Trek, Model 156A1, USA) 를사용하였으며, 이때대전전위는최대 ±1 kv 로설정하였다. 본실험은환경변화에따라민감한영향을받기때문에항온 항습실 ( 온도 20 C ± 2 C, 상대습도 40 % ± 2 %) 에서모든실험및측정을하였으며, 재현성을확인하기위해평균 3 회이상측정하였다. 42 Journal of the KOSOS, Vol. 29, No. 6, 2014

4 4. 실험결과및고찰 Fig. 6 는격벽을설치한경우와설치하지않은경우에서정전기제거성능인전하완화시간 (Decay time) 과이온밸런스를나타낸것이다. Fig. 6(a) 에서보듯이설치거리 300 mm 에서는약 100 일이지날때부터 + 이온의전하완화시간은초기값을벗어나서서서히증가하여 180 일이되면 50 s 를넘어섬을알수있다. - 이온의경우에는 + 와거의유사하나, 증가의속도가보다빠르게진행하여 180 일이되면거의 80 s 를넘어선다. Fig. 6(b) 는설치거리 600 mm 인경우로 100 일이지날때부터 + 이온의전하완화시간은초기값을벗어나서서서히증가하여 180 일이되면 100 s 를넘어선다. - 이온의경우에는 + 와거의유사하게진행되어 180 일이되면거의 100 s 를넘어선다. Fig. 6(c)(d) 는설치거리 300 mm 와 600 mm 에서의이온밸런스를측정한것으로설치거리 300 mm 에서는격벽을설치하지않은경우는 대략 50 일이경과한후에는 ± 50 V 를초과한후급격히증가하여 250 V 이상으로증가하였으나, 격벽을설치한경우에는거의 ± 50 V 이내에서유지되었다. 설치거리 600 mm 에서는격벽을설치하지않은경우는대략 52 일이경과한후에는 ± 50 V 를초과한후급격히증가하여 250 V 이상으로증가하였으나, 격벽을설치한경우에는거의 ± 50 V 이내에서유지됨을알수있다. 이는공기노즐주변에격벽을설치함으로서주변의미세먼지가공기노즐에부착되는양이적으므로코로나방전의전계강도를보다장기간유지할수있어정전기제거성능이유지될수있어격벽의효과가있음을알수있다. Fig. 7 은방전전극표면의오염정도를경년변화에따라나타낸사진이다. 사진에서보듯이격벽의효과를가시적으로확인할수있다. 격벽을설치한경우는 180 일이경과되어도방전전극의선단에미세먼지의부착정도가미미한반면, 격벽을설치하지않은경우 (a) Charge decay time as a function of elapsed time 300 mm distance (X: elapsed time, Y: second) (b) Charge decay time as a function of elapsed time 600 mm distance (X: elapsed time, Y: second) 한국안전학회지, 제 29 권제 6 호, 2014 년 43

5 이동훈 최동수 김상민 박진철 (c) Charge decay time as a function of elapsed time 300 mm distance (X: elapsed time, Y: second) (d) Charge decay time as a function of elapsed time 600 mm distance (X: elapsed time, Y: second) Fig. 6. Charge decay time and ion balance as a function of elapsed time. Fig. 7. Contamination status on the electrode surface as a function elapsed time. 44 Journal of the KOSOS, Vol. 29, No. 6, 2014

6 에는 20 일정도경과할시점부터미세먼지가부착되기시작하여시간이경과할수록먼지의양이증가함을알수있다. 이로미루어격벽을설치함으로서방전전극의전계강도를일정하게유지할수있음을알수있다. 5. 결론 디스플레이및반도체등을생산하는공정에서정전기제거장치는제품의신뢰성을위해반드시필요한장치이다. 그러나방전전극의오염으로성능이저하하여정기적으로방전전극의세정하여야만성능을유지할수있다. 본연구에서는공기노즐주변에격벽을설치하여방전전극오염을개선함으로서정전기제거장치의성능유지기간이향상됨을확인하였다. 이에대한결과를요약하면다음과같다. 1) 코로나방전을사용하는정전기제거장치에서소켓형상변화에따른성능을확인하였다. 2) 설치거리에따른전하완화시간은격벽을설치한경우에는 180 일이경과되어도거의일정한값을유지하는반면에격벽을설치하지않은경우는 90 일정도경과할시점부터증가하기시작하여 50 s 에서 100 s 이상을초과했다. 3) 설치거리에따른이온밸런스는 50 일이경과하는시점부터 ± 50 V 를초과하기시작하여 250 V 이상으로증하였다. 4) 코로나방전의전계강도의정도를가늠할수있는경년변화에따른방전전극의오염상태에서도격벽의효과가뚜렷하게나타났다. 격벽을설치한경우에는 180 일이경과하여도미세먼지의부착정도가거의일정하나, 격벽을설치하지않은경우에는 20 일정도경과후부터미세먼지의부착정도가증가하기시작함을알수있다. 감사의글 : 이논문은 2013 학년도부경대학교의자율창의학술연구지원을받아수행된연구임.(CD ) References 1) K. Murray and V. Gross, Ozone and Small Particle Production by Steady State DC Hood Ionization, EOS/ESD Symposium Proceeding, ) J. Xianggang, K. Shigeo and T. Yuao, Neutralization of the Charges Caused by ESD on Film Surfaces with AC Eliminator, T.IEE Japan, Vol.112-A, No.10, pp , ) J. E. Vinson and J. J. Liou, Electrostatic Discharge in Semiconductor Devices, Proc. IEEE, Vol.86, No.2, pp , ) L. A. Avery, A Review of Electrostatic Discharge Mechanisms ad On-chip Protection Techniques to Ensure Device Reliability, J. of Electrostatics, Vol. 24, Issue 2, pp , ) Y. Tabata, Electrostatic Properties of Antistatic Cloth Woven Partly with Electrically Conductive Fibers, Industry Applications, IEEE Transactions on, Vol.24, Issue 2, pp , ) W. D. Greason, Electrostatic Discharge: A Charge Driven Phenomenon, In Proc, EOS/ESD Symp., Vol.EOS-13, pp. 1-9, ) D. H. Lee and D. S. Choi, A Study on Improvement of the Performance of Pulsed AC Ion Bar (1), Journal of the Korean Society of Safety, Vol. 29, No. 3, pp , 한국안전학회지, 제 29 권제 6 호, 2014 년 45

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